CN204412667U - A kind of wet-cleaning device - Google Patents
A kind of wet-cleaning device Download PDFInfo
- Publication number
- CN204412667U CN204412667U CN201520026084.6U CN201520026084U CN204412667U CN 204412667 U CN204412667 U CN 204412667U CN 201520026084 U CN201520026084 U CN 201520026084U CN 204412667 U CN204412667 U CN 204412667U
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- Prior art keywords
- wet
- cleaning device
- decoder
- vertical portion
- shower nozzle
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Abstract
The utility model provides a kind of wet-cleaning device, and described device at least comprises: shower nozzle; Described shower nozzle comprises the bend containing nozzle and the vertical portion under being connected to bend; Described vertical portion is arranged with bearing; Described bearing and described vertical portion are by a groove match; Described bearing is provided with decoder; Described decoder is relative with described bearing fixing; Described decoder is connected with a scale strip by read head; The amplifier be connected with described decoder.The utility model by arranging movement locus and the position that shower nozzle monitored by scale strip, the decoder be connected with scale strip and amplifier in existing wet-cleaning device, effectively to overcome in prior art because motor drives shower nozzle work and feed back difficulty not in time when abnormal work, improve the yield of production.
Description
Technical field
The utility model relates to a kind of semi-conductor processing equipment, particularly relates to a kind of wet-cleaning device.
Background technology
Along with constantly reducing of critical size in IC manufacture, silicon chip must be clean at the front surface entering per pass technique, need through repeatedly cleaning step, remove the contamination of the types such as the particle of silicon chip surface, organic matter, metal and natural oxidizing layer, its wash number depends on the number of plies of the complexity that wafer designs and interconnection.At present, wet-chemical cleaning technology is the main wash technology of semiconductor IC industry, and wet clean equipment mainly contains slot type cleaning, spin rinse dries, monolithic corrosion cleaning.
Cleaning device is primarily of a few part composition such as corrosion-resistant frame, cell body, exhaust system, control system, pipe-line system.Wherein cell body and pipe-line system are primarily of a few part composition such as corrosion-resistant frame, cell body, exhaust system, control system, pipe-line system.Wherein cell body and pipe-line system are the cores of cleaning equipment.Cell body is divided into stainless steel tank, NPP etching tank, PVDF groove, PTFE groove, quartz heating tank etc. by material; Be divided into solution corrosion groove, overflow rinse bath by function, clear washing trough (QDR), dry slot etc. soon; According to cleaning requirement, ultrasonic, million sound cleanings, corrosive liquid heating, refrigeration, the circulation of corrosive liquid can be increased, stir and the cleaning function such as DI water on-line heating.Wherein, rotate and dry in cleaning, the drying of wafer and purifying process still add centrifuge dripping based on traditional spin rinse at present and add nitrogen oven dry, are mainly used in some and rinse dry to the silicon chip that cleanliness factor has higher requirements.The major technique of the method should comprise: the sport technique segment such as spin rinse, centrifuge dripping, nitrogen oven dry, antistatic control, technical process control, the purifying process of system of slice, thin piece.
And in existing wafer cleaning equipment, the shower nozzle of equipment can rotate under the driving at motor in the process of rinsing wafer, cleaning fluid is sprinkled upon the zones of different of crystal column surface from the ejection of the shower nozzle rotated, occur to loosen when the screw of motor and shower nozzle junction and cause motor normally to work, but when effectively can not drive sprinkler rotation, wafer cleaning equipment can not and alarm, therefore effectively can not control the normal work of shower nozzle.
Therefore, be necessary that proposing a kind of new wet-cleaning device solves the problems referred to above.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of wet-cleaning device, for solving in prior art because motor drives shower nozzle work and feed back problem not in time when abnormal work.
For achieving the above object and other relevant objects, the utility model provides a kind of wet-cleaning device, and described device at least comprises: shower nozzle; Described shower nozzle comprises the bend containing nozzle and the vertical portion under being connected to bend; Described vertical portion is arranged with bearing; Described bearing and described vertical portion are by a groove match; Described bearing is provided with decoder; Described decoder is relative with described bearing fixing; Described decoder is connected with read head; Described read head and a scale strip phase adhesive; Described scale strip is fixed on a retainer ring; Described decoder is connected with amplifier.
As a kind of preferred version of wet-cleaning device of the present utility model, described groove is set in described vertical portion and relative with described vertical portion fixing.
As a kind of preferred version of wet-cleaning device of the present utility model, described bearing is provided with inner ring and outer ring; Described inner ring mates mutually with described groove.
As a kind of preferred version of wet-cleaning device of the present utility model, described decoder is relative with the inner ring of described bearing fixing.
As a kind of preferred version of wet-cleaning device of the present utility model, described decoder and described read head are interconnected by a spring.
As a kind of preferred version of wet-cleaning device of the present utility model, described scale strip is the circular scale bar around described decoder, described bearing; The bottom of this circular scale bar and the bottom of described bearing flush.
As a kind of preferred version of wet-cleaning device of the present utility model, the upper surface of described circular scale bar is higher than the top of described decoder.
As a kind of preferred version of wet-cleaning device of the present utility model, the upper surface of described circular scale bar and the upper surface of described groove flush.
As a kind of preferred version of wet-cleaning device of the present utility model, the vertical portion of described shower nozzle is connected with motor.
As a kind of preferred version of wet-cleaning device of the present utility model, be provided with status displays, serial line interface, input, defeated network outlet in described amplifier and control power supply.
As mentioned above, wet-cleaning device of the present utility model, there is following beneficial effect: the utility model by arranging movement locus and the position that shower nozzle monitored by scale strip, the decoder be connected with scale strip and amplifier in existing wet-cleaning device, effectively to overcome in prior art because motor drives shower nozzle work and feed back difficulty not in time when abnormal work, improve the yield of production.
Accompanying drawing explanation
Fig. 1 is wet-cleaning device schematic diagram of the present utility model.
Fig. 2 is amplifier module schematic diagram in wet-cleaning device of the present utility model.
Element numbers explanation
101 bends
102 vertical portions
11 bearings
12 grooves
13 decoders
14 read heads
15 scale strips
16 retainer rings
21 main control power supplys
22 points control power supply
Detailed description of the invention
Below by way of specific instantiation, embodiments of the present invention are described, those skilled in the art the content disclosed by this description can understand other advantages of the present invention and effect easily.The present invention can also be implemented or be applied by detailed description of the invention different in addition, and the every details in this description also can based on different viewpoints and application, carries out various modification or change not deviating under spirit of the present invention.
Refer to Fig. 1 to Fig. 2.It should be noted that, the diagram provided in the present embodiment only illustrates basic conception of the present invention in a schematic way, then only the assembly relevant with the present invention is shown in graphic but not component count, shape and size when implementing according to reality is drawn, it is actual when implementing, and the kenel of each assembly, quantity and ratio can be a kind of change arbitrarily, and its assembly layout kenel also may be more complicated.
As shown in Figure 1, the utility model provides a kind of wet-cleaning device, and Fig. 1 is shown as wet-cleaning device schematic diagram of the present utility model.In Fig. 1, described device comprises: shower nozzle; Described shower nozzle comprises the bend 101 containing nozzle and the vertical portion under being connected to bend 102; Described crooked position is in the upper end of described vertical portion, and described bend and described vertical portion are all hollow pipelines, for transport cleaning liquid to the surface of wafer.In the present embodiment, the vertical portion of described shower nozzle is vertically fixed on the operating platform of board, this operating platform is fixed, the vertical portion of described shower nozzle is through described operating platform, the end of the vertical portion of described shower nozzle connects a motor simultaneously, by the driving of motor, described shower nozzle rotates at operating platform, but translation can not occur therebetween.
As shown in Figure 1, the vertical portion of described shower nozzle is arranged with a bearing 11, and in the present embodiment, described bearing is circular ring type bearing, and described bearing is fixed on described operating platform, and preferably, described bearing 11 is provided with inner ring and outer ring; Described inner ring mates mutually with described groove.That is, described bearing is made up of inner ring and outer ring, and described outer ring is relative with described operating platform fixing, is provided with ball between described inner ring and described outer ring, therefore, can relatively rotate each other between outer ring and inner ring.When the outer ring of described bearing 11 is fixed on described operating platform, described inner ring then can rotate.In described wet-cleaning device of the present utility model, described bearing 11 is matched by a groove 12 with described vertical portion; Preferably, described groove 12 is set in described vertical portion 102 and relative with described vertical portion fixing.Vertical portion 102 due to described shower nozzle needs and described bearing 11 mates, therefore, a groove 12 is installed additional between the vertical portion 102 and described bearing 11 of described shower nozzle, described groove 12 is mated with the inner ring of described bearing 11, and described groove 12 is relative fixing with the vertical portion 102 of described shower nozzle, therefore when motor drives the vertical portion 102 of described shower nozzle to rotate, the vertical portion of described shower nozzle drives described groove 12 to rotate, because described groove 12 mates with the inner ring of described bearing, therefore, the inner ring of described bearing also rotates together with the vertical portion of described shower nozzle.
On described bearing, be provided with decoder 13 in described wet-cleaning device of the present utility model, described decoder 13 is relative fixing with described bearing 11; In the present embodiment preferably, described decoder 13 is relative fixing with the inner ring of described bearing 11.Therefore, when described motor drives the vertical portion 102 of described shower nozzle to rotate, the inner ring of described bearing 11 also rotates, because described decoder 13 is relative fixing with the inner ring of described bearing 11, therefore, also there is synchronous rotary with the vertical portion 102 of described shower nozzle in described decoder 13.As shown in Figure 1, in wet-cleaning device of the present utility model, described decoder 13 is connected with read head 14; Described read head 14 and a scale strip 15 phase adhesive, described scale strip is fixed on a retainer ring 16.That is, due to described read head 14 and the adhesive of described scale strip 15 phase, when described shower nozzle rotates, described decoder 13 and described shower nozzle generation synchronous rotary, described decoder 13 is interconnected by a spring with described read head 14 in the present embodiment preferably.Therefore, can drag described read head 14 when described decoder 13 rotates and be moved, due to described read head 14 and the adhesive of described scale strip 15, therefore, described read head 14 can be moved thus read the concrete numerical value of displacement on described scale strip 15.
In the present embodiment preferably, described scale strip 15 is the circular scale bar around described decoder 13, described bearing 11.As shown in Figure 1, because described decoder 13 is interconnected by spring with described read head 14, therefore Existential Space between described bearing 11 and described read head 14 and scale strip 15, and described scale strip 15 of the present utility model is a circulus, the vertical portion 102 of described decoder 13, described bearing 11 and described shower nozzle is all overlapped wherein by this circulus, therefore, when described decoder 13 rotates with the vertical portion 102 of described shower nozzle, described read head 14 can only be moved along the circumference of described circular scale bar, thus reads the numerical value of displacement.In the present embodiment preferably, the bottom of described circular scale bar and the bottom of described bearing 11 flush.That is, because described bearing 11 is positioned on described operating platform, therefore, described circular scale bar is also positioned on described operating platform as shown in Figure 1, and the bottom of the two flushes.
In wet-cleaning device of the present utility model preferably, as shown in Figure 1, the upper surface of described circular scale bar is higher than described decoder 13 top.In order to make described read head along described circular scale bar occur circumference mobile time, make described decoder pull the power of described read head in the horizontal direction, therefore, the upper surface of described circular scale bar is higher than the top of described decoder 13 simultaneously.
In the utility model further preferably, as shown in Figure 1, the upper surface of described circular scale bar and the upper surface of described groove 12 flush.The amplifier be connected with described decoder 13 is also provided with in described wet-cleaning device of the present utility model.The distance of the described shower nozzle movement that described read head 14 reads is sent in described decoder 13, described decoder 13 is logic circuits that one has " translation " function, and this circuit output signal corresponding to the various states of input binary code can convert to according to its original meaning.Therefore, the signal from read head 14 that described decoder 13 is received is converted into analog signal.This signal is transferred in connected amplifier, and the signal of described sprinkler rotation distance sends amplifier to after decoder 13 is changed, and this signal amplifies by amplifier.
In the present embodiment, preferably, be provided with status displays, serial line interface, input and output net end in described amplifier and control power supply.As shown in Figure 2, the module diagram of described amplifier of the present utility model is shown as.Wherein, preferably, main control power supply 21 is the AC power of 230 volts, and the effect of this main control power supply 21 controls the main power source that this amplifier carries out amplification work, and described main control power supply 21 is by an automatic switch control, this amplifier is also provided with one point and controls power supply 22 simultaneously, this control power supply can control the various displays in described amplifier, and described amplifier is also provided with networking input and output, and serial line interface, for connection control device, realize the control operation to described amplifier.Described amplifier is also provided with status displays simultaneously, shows the duty of the certain module in described amplifier.
In sum, described wet-cleaning device of the present utility model by arranging movement locus and the position that shower nozzle monitored by scale strip, the decoder be connected with scale strip and amplifier in existing wet-cleaning device, effectively to overcome in prior art because motor drives shower nozzle work and feed back difficulty not in time when abnormal work, improve the yield of production.So the utility model effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.
Claims (10)
1. a wet-cleaning device, is characterized in that, described device at least comprises:
Shower nozzle; Described shower nozzle comprises the bend containing nozzle and the vertical portion under being connected to bend;
Described vertical portion is arranged with bearing; Described bearing and described vertical portion are by a groove match;
Described bearing is provided with decoder; Described decoder is relative with described bearing fixing;
Described decoder is connected with read head; Described read head and a scale strip phase adhesive;
Described scale strip is fixed on a retainer ring; Described decoder is connected with amplifier.
2. wet-cleaning device according to claim 1, is characterized in that: described groove is set in described vertical portion and relative with described vertical portion fixing.
3. wet-cleaning device according to claim 2, is characterized in that: described bearing is provided with inner ring and outer ring; Described inner ring mates mutually with described groove.
4. wet-cleaning device according to claim 3, is characterized in that: described decoder is relative with the inner ring of described bearing fixing.
5. wet-cleaning device according to claim 4, is characterized in that: described decoder and described read head are interconnected by a spring.
6. wet-cleaning device according to claim 5, is characterized in that: described scale strip is the circular scale bar around described decoder, described bearing; The bottom of this circular scale bar and the bottom of described bearing flush.
7. wet-cleaning device according to claim 6, is characterized in that: the upper surface of described circular scale bar is higher than the top of described decoder.
8. wet-cleaning device according to claim 7, is characterized in that: the upper surface of described circular scale bar and the upper surface of described groove flush.
9. wet-cleaning device according to claim 1, is characterized in that: the vertical portion of described shower nozzle is connected with motor.
10. wet-cleaning device according to claim 1, is characterized in that: be provided with status displays, serial line interface, input, defeated network outlet in described amplifier and control power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520026084.6U CN204412667U (en) | 2015-01-14 | 2015-01-14 | A kind of wet-cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520026084.6U CN204412667U (en) | 2015-01-14 | 2015-01-14 | A kind of wet-cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204412667U true CN204412667U (en) | 2015-06-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520026084.6U Expired - Fee Related CN204412667U (en) | 2015-01-14 | 2015-01-14 | A kind of wet-cleaning device |
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| Country | Link |
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| CN (1) | CN204412667U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113819751A (en) * | 2021-08-27 | 2021-12-21 | 艾华久禹(无锡)智能科技有限公司 | Drying device for photovoltaic cell wet method |
-
2015
- 2015-01-14 CN CN201520026084.6U patent/CN204412667U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113819751A (en) * | 2021-08-27 | 2021-12-21 | 艾华久禹(无锡)智能科技有限公司 | Drying device for photovoltaic cell wet method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150624 Termination date: 20190114 |