CN204224745U - Crucible insulation apparatus - Google Patents

Crucible insulation apparatus Download PDF

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Publication number
CN204224745U
CN204224745U CN201420561788.9U CN201420561788U CN204224745U CN 204224745 U CN204224745 U CN 204224745U CN 201420561788 U CN201420561788 U CN 201420561788U CN 204224745 U CN204224745 U CN 204224745U
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crucible
insulation
graphite
metal baffle
insulation apparatus
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CN201420561788.9U
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徐永亮
廖永建
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SUZHOU EVERGREAT CRYSTAL MATERIAL Co
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SUZHOU EVERGREAT CRYSTAL MATERIAL Co
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Abstract

The utility model embodiment discloses a kind of crucible insulation apparatus, this crucible insulation apparatus is for covering the crucible matched with this crucible insulation apparatus, described crucible insulation apparatus comprises: metal baffle, and described metal baffle is for covering the opening part of described crucible; And graphite insulation construction, described graphite insulation construction is arranged in described metal baffle, and the central position of described graphite insulation construction is set to hollow frustum cone structure; Wherein, the diameter of the lower surface of described hollow frustum cone structure is less than the diameter of the upper surface of described hollow frustum cone structure.Effectively increased the radial symmetry gradient in the crucible be mated and longitudinal temperature gradient by the graphite insulation construction of the non-homogeneous insulation of this crucible insulation apparatus, thus effectively improve crystal mass.

Description

Crucible insulation apparatus
Technical field
The utility model relates to crystal pro cessing technical field, particularly relates to a kind of crucible insulation apparatus.
Background technology
Heat-exchanging method is high with its level of automation, thermal field is stablized, the life-span is grown and rely on to artificial the very important production method of one that the advantage such as lower becomes the crystal growth such as sapphire.
Usually, when the crystal such as sapphire need to be grown by heat-exchanging method, high purity aluminium oxide raw material is placed in crucible, and crucible is placed in crystal furnace crucible is heated, now, the crucible insulation apparatus be arranged on this crucible has very important effect.Concrete, in application process, this crucible insulation apparatus covers on crucible, crucible is surrounded semitight space to be conducive to forming the thermograde required for crystal growth, and can effectively prevent the foreign matter in crystal furnace in volatile matter from dropping to the crystal raw materials such as crucible internal contamination sapphire, but also the growth of the crystal such as sapphire can be observed by this crucible insulation apparatus.
But, in the related, during the crystal growth such as use heat exchange process promotion sapphire, be generally used for and ensure that the method for temperature in crucible is: directly on crucible, place crucible insulation apparatus, and be generally one block of very thin refractory metal plate for the crucible insulation apparatus be placed on crucible, owing to making the thinner thickness of the refractory metal plate of this crucible insulation apparatus, make the thermal inertia of this crucible insulation apparatus little, thus interference performance that gas flow in crystal furnace and temperature fluctuation cause is poor to make it resist; Further, when only using thinner refractory metal plate as crucible insulation apparatus, this refractory metal plate makes crucible liquid level temperature distribution relatively even, in crucible the radial symmetry gradient of crystal liquid level and longitudinal temperature gradient all smaller; Thus when making crucible inner top crystal growth, because the thermograde of crystal is less, cause the speed of growth of crystal top to be not easy to control, crucible inner top crystal finally may be caused to occur the larger defects such as smog, bubble and crystal boundary, and then greatly reduce the quality of crystal.
Utility model content
The utility model embodiments provides a kind of crucible insulation apparatus, to solve in prior art because thinner crucible insulation apparatus makes liquid level temperature distribution in crucible more even, cause crystalline growth velocity wayward, and the problems such as the crystal mass reduction generated may be caused.
In order to solve the problems of the technologies described above, the utility model embodiment discloses following technical scheme:
The utility model embodiment provides a kind of crucible insulation apparatus, and for covering the crucible matched with described crucible insulation apparatus, described crucible insulation apparatus comprises:
Metal baffle, described metal baffle is for covering the opening part of described crucible; And
Graphite insulation construction, described graphite insulation construction is arranged in described metal baffle, and the central position of described graphite insulation construction is set to hollow frustum cone structure; Wherein,
The diameter of the lower surface of described hollow frustum cone structure is less than the diameter of the upper surface of described hollow frustum cone structure.
Optionally, described graphite insulation construction comprises:
Lower graphite cake, is arranged in described metal baffle;
Insulation block, described insulation block is arranged on described lower graphite cake;
Upper graphite cake, is arranged on the top of described insulation block; Wherein,
The side that described insulation block connects with described hollow frustum cone structure is inclined-plane, and described lower graphite cake and described upper graphite cake are parallel to each other, and the area of described upper graphite cake is less than the area of described lower graphite cake.
Optionally, described insulation block comprises graphite felt, and described graphite felt is arranged between described upper graphite cake and described lower graphite cake.
Optionally, the inclined-plane of described insulation block is provided with graphite cake, and described graphite cake covers on described inclined-plane.
Optionally, between described metal baffle and described graphite insulation construction, be provided with cushion block, and be provided with inert metal sheet between described cushion block and described graphite insulation construction, wherein,
Described cushion block is used for arranging certain interval by between described graphite insulation construction and described metal baffle, and arranged in parallel between described graphite insulation construction and described metal baffle.
Optionally, described cushion block comprises tungsten, and described inert metal sheet comprises tantalum piece, and described tantalum piece is arranged on the contact surface between described cushion block and described graphite insulation construction.
Optionally, the position that described metal baffle is positioned at described crucible center is provided with the through hole running through described metal baffle upper surface and lower surface.
Optionally, described metal baffle is provided with protection cylinder, described protection cylinder is the hollow cylindrical configuration that two ends are provided with opening, and described through hole is positioned at the inside of described protection cylinder, and the space in described protection cylinder is communicated with described through hole.
Optionally, described metal baffle is refractory metal plate, and described refractory metal plate is provided with multiple pore or finedraw, and the thickness of described refractory metal plate is 1-6mm.
Optionally, described protection cylinder comprises tungsten, and the height of described protection cylinder is more than or equal to the thickness of described graphite insulation construction.
From above technical scheme, the crucible insulation apparatus that the utility model embodiment provides comprises metal baffle and is arranged on the graphite insulation construction in metal baffle, and the thickness of this graphite insulation construction increases gradually along the axis direction away from metal baffle.Make this crucible have good heat insulation effect by this graphite insulation construction, and there is larger thermal capacity and thermal inertia, effectively can resist the airflow fluctuation in crystal furnace and temperature fluctuation, be conducive to the stable growth of crystal; Simultaneously, this graphite insulation construction central position arranges hollow round table structure, and the lower surface diameter of hollow round table structure is less than upper surface diameter, this graphite insulation construction is made to be the graphite insulation construction of a non-homogeneous insulation, after this crucible insulation apparatus and crucible cover, make liquid level temperature distribution in this crucible different, effectively increase the radial symmetry gradient in crucible and longitudinal temperature gradient, thus effectively improve crystal mass.
In addition, the metal baffle thickness of crucible insulation apparatus that the utility model embodiment proposes is gained in strength corresponding increase, and be provided with multiple finedraw for release expansion stress or pore, and this metal baffle and this graphite insulation construction be combined with each other, thus make this crucible insulation apparatus high temperature impact resistance ability stronger, can reuse, effectively improve the work-ing life of crucible insulation apparatus.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, for those of ordinary skills, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the cross-section structure of a kind of crucible insulation apparatus that Fig. 1 provides for the utility model embodiment;
The structural representation of the cross-section structure of the another kind of crucible insulation apparatus that Fig. 2 provides for the utility model embodiment.
Embodiment
Technical scheme in the utility model is understood better in order to make those skilled in the art person, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all should belong to the scope of the utility model protection.
See Fig. 1, the structural representation of the cross-section structure of a kind of crucible insulation apparatus provided for the utility model embodiment, this crucible insulation apparatus comprises metal baffle 11 and graphite insulation construction 10, this metal baffle 11 is for covering the opening part of the crucible 20 for firing crystal, this graphite insulation construction 10 is arranged in this metal baffle 11, the central position of this graphite insulation construction 10 is set to hollow frustum cone structure, and the diameter of the lower surface of this hollow frustum cone structure is less than the diameter of the upper surface of this hollow frustum cone structure.
Wherein, for the crucible insulation apparatus of circle, with reference to figure 1, this metal baffle 11 is circular metal baffle 11, the metal baffle 11 of this circle is provided with the graphite insulation construction 10 of annular, the central position of the graphite insulation construction 10 of this annular is identical with the central position of the metal baffle 11 of annular, and the graphite insulation construction 10 of this annular has upper ring surface and lower anchor ring, and the area of upper ring surface is less than the area of lower anchor ring; Namely the central position of the graphite insulation construction 10 of this annular is a hollow frustum cone structure, and the diameter of the lower surface of this frustum cone structure is less than the diameter of upper surface; The graphite insulation construction 10 of this annular is inclined-plane from upper ring surface to the inboard portion of little anchor ring.
In addition, in the crucible insulation apparatus that the application implements, this graphite insulation construction 10 is the graphite insulation construction 10 comprising graphite cake and soak material, this metal baffle 11 is resistant to elevated temperatures metal sheet, and this metal baffle 11 is evenly provided with multiple finedraw or pore, by this finedraw or pore release expansion stress, thus after the be combineding with each other of this metal baffle 11 and graphite insulation construction 10, make the high temperature impact resistance ability of this crucible insulation apparatus comparatively strong, thus can reuse.
Adopt the crucible insulation apparatus that the embodiment of the present application proposes, because the central position of the graphite insulation construction 10 on this crucible insulation apparatus is set to hollow frustum cone structure, and the diameter of the lower surface of this hollow frustum cone structure is less than the diameter of upper surface, thus make this crucible insulation apparatus be the cover plate covered at crucible opening part of non-homogeneous insulation, thus the radial symmetry gradient increased in the crucible 20 that coordinates with crucible insulation apparatus and longitudinal temperature gradient, the quality of raising generation crystal; And this metal baffle 11 is provided with multiple finedraw for release expansion stress or pore, after this metal baffle 11 be combined with each other with graphite insulation construction 10, add the high-temperature capability of this crucible insulation apparatus, the work-ing life of effective this crucible insulation apparatus of raising, crucible insulation apparatus can be enable to reuse, thus cost-saving.
See Fig. 2, the structural representation of the cross-section structure of the another kind of crucible insulation apparatus provided for the utility model embodiment, in the structural representation of this concrete cross-section structure, this crucible insulation apparatus crucible 20 arranged that matches with it covers mutually, and in this crucible 20, there is crystal 21, thus the crucible insulation apparatus of this present embodiment is further described; Wherein, this crucible insulation apparatus is arranged on the opening part of this crucible 20.Further describe the crucible insulation apparatus that the present embodiment proposes below.
This crucible insulation apparatus comprises metal baffle 11 and graphite insulation construction 10, and this graphite insulation construction 10 is arranged in this metal baffle 11; As shown in Figure 2, this graphite insulation construction 10 comprises graphite cake 14, lower graphite cake 12 and insulation block 13, and this lower graphite cake 12 is arranged in this metal baffle 11, and this insulation block 13 is arranged on this lower graphite cake 12, and on this, graphite cake 14 is arranged on this insulation block 13; Wherein, the central position of this insulation block 13 is set to hollow frustum cone structure, and the diameter of the lower surface of this hollow frustum cone structure is less than the diameter of the upper surface of this hollow frustum cone structure, and the end face that this insulation block 13 frustum cone structure hollow with this connects is an inclined-plane, on this, graphite cake 14 is connected with lower surface with the upper surface of lower graphite cake 12 respectively at this insulation block 13; And area of graphite cake 14 is less than the area of this lower graphite cake 12 on this; By the diagrammatic cross-section from the crucible insulation apparatus shown in Fig. 2, the section of this graphite insulation construction 10 is the graphite insulation construction 10 of a right-angled trapezium, and as upper base upper graphite cake 14 be parallel to each other as the lower graphite cake 12 of going to the bottom, and insulation block 13 to be clipped on this between graphite cake 14 and lower graphite cake 12.
Wherein, this insulation block 13 is soak material, if this insulation block 13 is graphite felt, be arranged on this by this graphite felt and form this graphite insulation construction 10 between graphite cake 14 and lower graphite cake 12, thus make this graphite insulation construction 10 have larger thermal capacity and thermal inertia, the airflow fluctuation in crystal furnace and temperature fluctuation can be resisted, be conducive to the stable growth of crystal.In addition, this graphite insulation construction 10 also comprises graphite cake, and this graphite cake covers on the inclined-plane of this insulation block 13, or all arranges this graphite cake on the inclined-plane or side of this insulation block 13, thus increases the heat insulation effect of this graphite insulation construction 10 further.
In the crucible insulation apparatus that the application implements, this crucible insulation apparatus also comprises a cushion block 17, this cushion block 17 is arranged between this metal baffle 11 and graphite insulation construction 10 and (is namely arranged between this metal baffle 11 and lower graphite cake 12), this metal baffle 11 is separated with lower graphite cake 12 by this cushion block 17 has certain interval, and ensure between this lower graphite cake 12 and metal baffle 11 arranged in parallel, and this cushion block 17 is the high temperature materials such as tungsten; Owing to generally easily reacting between this cushion block 17 and lower graphite cake 12, therefore, prevent this cushion block 17 from reacting with lower graphite cake 12 by arranging inert metal between this cushion block 17 and lower graphite cake 12; In actual applications, can by arranging the inert metal sheets such as tantalum piece, thus preventing the cushion block 17 of this high temperature material from reacting with lower graphite cake 12 between this cushion block 17 and lower graphite cake 12 contact surface, reducing the heat-insulating property of this crucible insulation apparatus.
In the crucible insulation apparatus that the application implements, the metal baffle 11 of this crucible insulation apparatus is provided with through hole 16, this through hole 16 runs through upper surface and the lower surface of metal baffle 11, and this through hole 16 is arranged on the position that this metal baffle 11 is positioned at crucible 20 center, thus the growing state of crystal 21 in crucible 20 is observed by this through hole 16, thus the temperature that can adjust in crystal furnace, ensure the stable growth of crystal.Due in the process generating crystal, the foreign matter that volatile matter in this crucible 20 or graphite insulation construction 10 produce can to fall into the quality of crucible 20 internal contamination raw material and crystal by this by 16, therefore, in the crucible insulation apparatus that the application implements, this metal baffle 11 is also provided with protection cylinder 15, this protection cylinder 15 is provided with the hollow cylindrical configuration of opening for both sides, this through hole 16 is positioned at the inside of this protection cylinder 15, and the space in this protection cylinder 15 is communicated with this through hole 16, thus stop the foreign matter that the volatile matter in this graphite insulation construction 10 and crucible 20 produces, improve the quality of crystal, and the space in this protection cylinder 15 is communicated with this through hole 16, the inside of this crucible 20 directly can be observed by protection cylinder 15.Meanwhile, at the inclined-plane of this graphite insulation construction 10 and arranged outside graphite cake, namely by graphite cake, this insulation block 13 is wrapped up, effectively prevent high-temperature material to come off pollution crystal, improve the quality of crystal.Because this crucible insulation apparatus needs to work under the high temperature conditions, therefore, this protection cylinder 15 is tungsten high temperature material.
In addition, in the crucible insulation apparatus that the embodiment of the present application proposes, this metal baffle 11 is refractory metal plate, and the thickness of this metal baffle 11 is 1-6mm, and this metal baffle 11 is evenly provided with finedraw or the pore of release expansion stress, thus cover on crucible 20 at this crucible insulation apparatus, and when carrying out high-temperature operation in crystal furnace, this metal baffle 11 can by this finedraw or pore release because metal baffle 11 bears the expansion stress of high temperature, thus make this metal baffle 11 high temperature impact resistance ability comparatively strong, can repeatedly use; And this graphite insulation construction 10 is high temperature material, can repeatedly use, thus effectively improve the work-ing life of this crucible insulation apparatus.
In specific implementation process, this crucible insulation apparatus is a circular crucible insulation apparatus, shown in figure 2, the metal baffle 11 that this crucible insulation apparatus comprises a circle and the circular graphitic insulation construction 10 be arranged in this metal baffle 11, the central position of this metal baffle 11 is provided with through hole 16, this through hole 16 is communicated with the protection cylinder 15 that two ends all arrange the hollow cylindrical configuration of opening, and this through hole 16 is communicated with the space in this protection cylinder 15, the height of this protection cylinder 15 is at least equal with this graphite insulation construction 10; Wherein, the insulation block 13 that this graphite insulation construction 10 comprises graphite cake 14, lower graphite cake 12 and is arranged between graphite cake 14 and lower graphite cake 12, this insulation block 13 is soak material, and the central position of this insulation block 13 is a hollow frustum cone structure, the diameter of the lower surface of this frustum cone structure is less than the diameter of upper surface; This lower graphite cake 12, insulation block 13 and upper graphite cake 14 are interconnected to form the graphite insulation construction 10 of an annular, and the area of the upper ring surface of the graphite insulation construction 10 of this annular is less than the area of lower anchor ring, and this upper ring surface is identical with the radius of lower anchor ring; Namely on this, graphite cake 14 is identical with the radius of lower graphite cake 12, and on this, graphite cake 14 and lower graphite cake 12 be arranged in parallel, and on this, area of graphite cake 14 is less than the area of lower graphite cake 12.And be provided with cushion block 17 between this lower graphite cake 12 and this metal baffle 11.And in this embodiment, this cushion block 17 directly can be set to an annular cushion block 17, and this cushion block 17 keeps this metal baffle 11 arranged in parallel with lower graphite cake 12; Thus the crucible insulation apparatus that formation the present embodiment provides.In application process, this crucible insulation apparatus is arranged on the opening part of this crucible 20, is observed the growing state of the crystal 21 in this crucible 20 by this protection cylinder 15 and through hole 16.
The crucible insulation apparatus provided by the present embodiment is known, the crucible insulation apparatus that the application implements is set to the effect that graphite insulation construction 10 must have non-homogeneous insulation, therefore, in the middle of this graphite insulation construction 10, hollow frustum cone structure is set, and in order to ensure that normal heat radiation makes the diameter of the lower surface of this frustum cone structure be less than the diameter of upper surface; But the shape of this crucible insulation apparatus for the circular cover that the present embodiment proposes, also can not arrange rectangle as square cover plate, from but this graphite insulation construction 10 is square graphite insulation construction 10.The embodiment of the graphite insulation construction 10 that concrete use is square referring to as above other embodiments, can not be further explained at this.
Adopt the crucible insulation apparatus that the present embodiment provides, this crucible insulation apparatus covers the opening of crucible, and this crucible and crucible insulation apparatus are placed in crystal furnace heat, by this graphite insulation construction, the radial symmetry gradient in this crucible and longitudinal temperature gradient are increased gradually, and the thermal capacity larger due to this graphite insulation construction and thermal inertia, be conducive to the stable growth of crystal and improve crystal mass; Make this crucible insulation apparatus high temperature impact resistance power strong by this metal baffle with finedraw or pore, the work-ing life of crucible insulation apparatus is increased.And, directly can be checked the growing state of the crystal in this crucible by the protection cylinder of this crucible insulation apparatus and through hole, be convenient to understand crystal growth condition in real time and carry out temperature control in time, effectively improve the quality of crystal.
It should be noted that, in this article, the relational terms of such as "up" and "down" etc. and so on is only used for an entity or operation to make a distinction with another entity, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
The above is only embodiment of the present utility model, those skilled in the art is understood or realizes the utility model.To be apparent to one skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (10)

1. a crucible insulation apparatus, for covering the crucible (20) matched with described crucible insulation apparatus, it is characterized in that, described crucible insulation apparatus comprises:
Metal baffle (11), described metal baffle (11) is for covering the opening part of described crucible (20); And
Graphite insulation construction (10), described graphite insulation construction (10) is arranged in described metal baffle (11), and the central position of described graphite insulation construction is set to hollow frustum cone structure; Wherein,
The diameter of the lower surface of described hollow frustum cone structure is less than the diameter of the upper surface of described hollow frustum cone structure.
2. crucible insulation apparatus according to claim 1, is characterized in that, described graphite insulation construction (10) comprising:
Lower graphite cake (12), is arranged in described metal baffle (11);
Insulation block (13), described insulation block (13) is arranged on described lower graphite cake (12);
Upper graphite cake (14), is arranged on the top of described insulation block (13); Wherein,
The side that described insulation block (13) connects with described hollow frustum cone structure is inclined-plane, described lower graphite cake (12) and described upper graphite cake (14) are parallel to each other, and the area of described upper graphite cake (14) is less than the area of described lower graphite cake (12).
3. crucible insulation apparatus according to claim 2, is characterized in that, described insulation block (13) comprises graphite felt, and described graphite felt is arranged between described upper graphite cake (14) and described lower graphite cake (12).
4. crucible insulation apparatus according to claim 2, is characterized in that, the inclined-plane of described insulation block (13) is provided with graphite cake, and described graphite cake covers on described inclined-plane.
5. crucible insulation apparatus according to claim 1, it is characterized in that, cushion block (17) is provided with between described metal baffle (11) and described graphite insulation construction (10), and be provided with inert metal sheet between described cushion block (17) and described graphite insulation construction (10), wherein
Described cushion block (17) is for arranging certain interval by between described graphite insulation construction (10) and described metal baffle (11), and arranged in parallel between described graphite insulation construction (10) and described metal baffle (11).
6. crucible insulation apparatus according to claim 5, it is characterized in that, described cushion block (17) comprises tungsten, and described inert metal sheet comprises tantalum piece, and described tantalum piece is arranged on the contact surface between described cushion block (17) and described graphite insulation construction (10).
7. crucible insulation apparatus according to claim 1, it is characterized in that, the position that described metal baffle (11) is positioned at described crucible (20) center is provided with the through hole (16) running through described metal baffle (11) upper surface and lower surface.
8. crucible insulation apparatus according to claim 7; it is characterized in that; described metal baffle (11) is provided with protection cylinder (15); described protection cylinder (15) is provided with the hollow cylindrical configuration of opening for two ends; described through hole (16) is positioned at the inside of described protection cylinder (15), and the space in described protection cylinder (15) is communicated with described through hole (16).
9. crucible insulation apparatus according to claim 1, is characterized in that, described metal baffle (11) is refractory metal plate, and described refractory metal plate is provided with multiple pore or finedraw, and the thickness of described refractory metal plate is 1-6mm.
10. crucible insulation apparatus according to claim 8, is characterized in that, described protection cylinder (15) comprises tungsten, and the height of described protection cylinder (15) is more than or equal to the thickness of described graphite insulation construction (10).
CN201420561788.9U 2014-09-26 2014-09-26 Crucible insulation apparatus Active CN204224745U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105040101A (en) * 2015-07-16 2015-11-11 中山兆龙光电科技有限公司 Crucible lid and support ring mechanism for variable gradient sapphire single crystal growth

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105040101A (en) * 2015-07-16 2015-11-11 中山兆龙光电科技有限公司 Crucible lid and support ring mechanism for variable gradient sapphire single crystal growth

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