CN204189776U - 一种用于pvd溅射的载板 - Google Patents
一种用于pvd溅射的载板 Download PDFInfo
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- CN204189776U CN204189776U CN201420563929.0U CN201420563929U CN204189776U CN 204189776 U CN204189776 U CN 204189776U CN 201420563929 U CN201420563929 U CN 201420563929U CN 204189776 U CN204189776 U CN 204189776U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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CN201420563929.0U CN204189776U (zh) | 2014-09-28 | 2014-09-28 | 一种用于pvd溅射的载板 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104726839A (zh) * | 2015-03-27 | 2015-06-24 | 京东方科技集团股份有限公司 | 基板固定装置 |
CN107887679A (zh) * | 2017-11-10 | 2018-04-06 | 中国电子科技集团公司第四十研究所 | 用于波导毫米波与太赫兹衰减器吸收体的成型方法 |
CN111471982A (zh) * | 2020-05-28 | 2020-07-31 | 苏州拓升智能装备有限公司 | 基板载具、基板载具阵列和气相沉积装置及其使用方法 |
CN111471983A (zh) * | 2020-05-28 | 2020-07-31 | 苏州拓升智能装备有限公司 | 基板载具、基板载具阵列和气相沉积装置 |
CN116525723A (zh) * | 2023-06-28 | 2023-08-01 | 广东利元亨智能装备股份有限公司 | 异质结电池的制作方法及其电池 |
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2014
- 2014-09-28 CN CN201420563929.0U patent/CN204189776U/zh active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104726839A (zh) * | 2015-03-27 | 2015-06-24 | 京东方科技集团股份有限公司 | 基板固定装置 |
US9957605B2 (en) | 2015-03-27 | 2018-05-01 | Boe Technology Group Co., Ltd. | Substrate fixing apparatus |
CN107887679A (zh) * | 2017-11-10 | 2018-04-06 | 中国电子科技集团公司第四十研究所 | 用于波导毫米波与太赫兹衰减器吸收体的成型方法 |
CN107887679B (zh) * | 2017-11-10 | 2020-02-07 | 中国电子科技集团公司第四十一研究所 | 用于波导毫米波与太赫兹衰减器吸收体的成型方法 |
CN111471982A (zh) * | 2020-05-28 | 2020-07-31 | 苏州拓升智能装备有限公司 | 基板载具、基板载具阵列和气相沉积装置及其使用方法 |
CN111471983A (zh) * | 2020-05-28 | 2020-07-31 | 苏州拓升智能装备有限公司 | 基板载具、基板载具阵列和气相沉积装置 |
CN116525723A (zh) * | 2023-06-28 | 2023-08-01 | 广东利元亨智能装备股份有限公司 | 异质结电池的制作方法及其电池 |
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Effective date of registration: 20171117 Address after: 362000 Jiangnan hi tech Zone, South Ring Road, Licheng District, Fujian, Quanzhou Patentee after: Fujian Golden Sun Solar Technic Co., Ltd. Address before: 362000, Fujian 2, Quanzhou province Quanzhou city Licheng District hi tech Park Patentee before: Quanzhou City Botai Semiconductor Technology Co., Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20211206 Address after: No.17, Quanyuan Road, Jinjiang Economic Development Zone (wuliyuan), Quanzhou City, Fujian Province, 362000 Patentee after: FUJIAN JINSHI ENERGY Co.,Ltd. Address before: 362000 Jiangnan hi tech Zone, South Ring Road, Licheng District, Fujian, Quanzhou Patentee before: GS-SOLAR (FU JIAN) Co.,Ltd. |
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