CN204185552U - A kind of novel multiple arc target electromagnetism arc-striking structure - Google Patents
A kind of novel multiple arc target electromagnetism arc-striking structure Download PDFInfo
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- CN204185552U CN204185552U CN201420695149.1U CN201420695149U CN204185552U CN 204185552 U CN204185552 U CN 204185552U CN 201420695149 U CN201420695149 U CN 201420695149U CN 204185552 U CN204185552 U CN 204185552U
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- striking
- needle guard
- movable axis
- arc
- spring
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Abstract
A kind of novel multiple arc target electromagnetism arc-striking structure, comprises striking needle guard, striking pin, movable axis, spring, solenoid, coil holder, vacuum flange, sealing-ring; Described striking pin is fixed on the top of movable axis, and this movable axis end is arranged in the vacuum chamber of striking needle guard; Described movable axis end is connected with slide block, and this movable axis end is socketed with spring; Described striking needle guard is bolted on vacuum flange, is provided with sealing-ring between this striking needle guard and vacuum flange; Be equipped with coil holder outside described striking needle guard, this coil holder is wound with solenoid.The utility model produces magnetic field force by external circuits, produces pulling force effect to the slide block drawing fox needle guard inside, striking pin is furthered and contacts target surface to produce electric arc.After electric arc produces, disconnecting external electromagnetic coil circuit, then magnetic field force disappears, and now striking pin longitudinally only will be subject to spring force, will away from target surface.Avoid the sintering of striking pin and target, guarantee work and promote work-ing life.
Description
Technical field
The utility model relates to technical field of vacuum plating, especially relates to a kind of novel multiple arc target electromagnetism arc-striking structure.
Background technology
Multi-arc ion coating membrane technique is under vacuum, moving, evaporating target metal, and apply a high bias voltage on substrate by controlling electric arc at target material surface, makes arc evaporation target particle high speed bombardment out on substrate, film forming process.Due to the electric arc on target material surface be a low voltage, the direct supply of big current supplies, so itself can only pilot arc can not spontaneous generation electric arc, need when producing electric arc independent to draw fox structure.When drawing fox, anode electricity is applied by striking pin, target applies cathodic electricity, striking pin of short duration contact target makes the of short duration short circuit of anode and cathode, then striking pin is when leaving target material surface, anode and cathode circuit occurs puncturing electric arc, being provided stable low voltage, a High-current output by arc power, realizes the self―sustaining of electric arc.
Existing striking pin generally adopts and pneumaticly draws fox, namely after striking pin, installs a cylinder additional, by the front and back action of cylinder realize striking pin and target surface contact, be separated.The existence of this structure is touched target and is departed from unstable, and the tactile target time is affected by human factors very large, thus causes the thing such as striking pin and target sintering to occur, and affects production operation.And the sealing means of striking pin and vacuum chamber adopts rubber seal, but striking pin inevitable and rubber friction when moving forward and backward, make rubber be easy to aging or receive damage, cause vacuum chamber to leak gas, have a strong impact on coating quality.
Summary of the invention
The utility model object overcomes the deficiencies in the prior art, provides a kind of novel multiple arc target electromagnetism arc-striking structure.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of novel multiple arc target electromagnetism arc-striking structure, comprises striking needle guard, striking pin, movable axis, spring, solenoid, coil holder, vacuum flange, sealing-ring; Described striking pin is fixed on the top of movable axis, and this movable axis end is arranged in the vacuum chamber of striking needle guard; Described movable axis end is connected with slide block, and this movable axis end is socketed with spring; Described striking needle guard is bolted on vacuum flange, is provided with sealing-ring between this striking needle guard and vacuum flange; Be equipped with coil holder outside described striking needle guard, this coil holder is wound with solenoid.
As preferably, described spring one end is fixed on slide block, and the spring the other end is fixed on the inwall of striking needle guard opening end.
As preferably, described striking needle guard inner vacuum indoor are provided with step.
As preferably, described slide block is "T"-shaped.
It is outside that solenoid is arranged on striking needle guard by the utility model, produces magnetic field force by external circuits, and produce pulling force effect to the slide block drawing fox needle guard inside, this pulling force is greater than spring force, striking pin furthered and contacts target surface to produce electric arc.After electric arc produces, disconnecting external electromagnetic coil circuit, then magnetic field force disappears, and now striking pin longitudinally only will be subject to spring force, will away from target surface.So just achieve striking pin to contact and disengaging with the of short duration of target surface.Avoid the sintering of striking pin and target, guarantee work and promote work-ing life.
A utility model again advantage is that striking pin is connected with movable axis, and be enclosed in internal vacuum chamber by striking needle guard entirety, during work and vacuum chamber is outer only realizes action by magnetic field, therefore any detrimentally affect is not produced to sealing-ring, can not produce the situations such as sealing-ring is aging, wearing and tearing, completely avoid the gas leakage of drawing fox structure may.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is further described in detail.
Fig. 1 is the utility model structural representation.As shown in Figure 1, a kind of novel multiple arc target electromagnetism arc-striking structure, primarily of compositions such as striking needle guard 5, striking pin 11, movable axis 10, spring 6, solenoid 2, coil holder 1, vacuum flange 9, sealing-rings 8.Wherein striking pin 11 is fixed on the top of movable axis 10, and in the vacuum chamber that this movable axis 10 end is arranged on striking needle guard 5 51, be provided with step 3 in striking needle guard 5 inner vacuum vessel 51, vacuum chamber 51 is divided into end spaces little by step 3, the cavity that front end spaces is large.Movable axis 10 end is connected with "T"-shaped slide block 4, and this movable axis 10 end is socketed with spring 6, and spring 6 one end is fixed on slide block 4, and spring 6 the other end is fixed on the inwall of striking needle guard 5 opening end.Striking needle guard 5 is fixed on vacuum flange 9 by bolt 7, is provided with sealing-ring 8 between this striking needle guard 5 and vacuum flange 9, and striking needle guard 5 realizes sealing by sealing-ring 8 and vacuum chamber 51.Be equipped with coil holder 1 outside striking needle guard 5, this coil holder 1 is wound with solenoid 2.
During work, solenoid 2 is energized and produces magnetic field, striking needle guard 5 is made to obtain the "T"-shaped slide block 4 of magnetic force attraction movable axis 10 end, when "T"-shaped slide block 4 slides in vacuum chamber 51, the "T"-shaped otch of slide block 4 coordinates with step 3, movable axis 10 displaced position is determined to reach, striking pin 11 is driven to move to target while realizing movable axis 10 movement, the needle point reaching striking pin 11 contacts with target and produces electric discharge, meet ion film plating job requirement, and in the moment that needle point contacts with target, solenoid 2 power-off, striking needle guard 5 is made to decontrol slide block 4, simultaneously under the effect of spring 6, slide block 4 drives movable axis 10 to reset, the needle point of striking pin 11 and target depart from, avoid the sintering of striking pin 11 and target, guarantee work and promote work-ing life.
Striking pin is connected with movable axis, movable axis is enclosed in internal vacuum chamber by striking needle guard entirety, during work and vacuum chamber is outer only realizes action by magnetic field, therefore any detrimentally affect is not produced to sealing-ring, can not produce the situations such as sealing-ring is aging, wearing and tearing, completely avoid the gas leakage of drawing fox structure may.
The utility model illustrates embodiment of the present utility model and structure by above-described embodiment; but this patent is not limited to above-mentioned embodiment; all employings and the utility model analog structure realize all modes of the utility model object, all within protection domain of the present utility model.
Claims (4)
1. a novel multiple arc target electromagnetism arc-striking structure, comprises striking needle guard, striking pin, movable axis, spring, solenoid, coil holder, vacuum flange, sealing-ring; It is characterized in that, described striking pin is fixed on the top of movable axis, and this movable axis end is arranged in the vacuum chamber of striking needle guard; Described movable axis end is connected with slide block, and this movable axis end is socketed with spring; Described striking needle guard is bolted on vacuum flange, is provided with sealing-ring between this striking needle guard and vacuum flange; Be equipped with coil holder outside described striking needle guard, this coil holder is wound with solenoid.
2. one according to claim 1 novel multiple arc target electromagnetism arc-striking structure, is characterized in that, described spring one end is fixed on slide block, and the spring the other end is fixed on the inwall of striking needle guard opening end.
3. one according to claim 1 novel multiple arc target electromagnetism arc-striking structure, is characterized in that, described striking needle guard inner vacuum indoor are provided with step.
4. one according to claim 1 novel multiple arc target electromagnetism arc-striking structure, is characterized in that, described slide block is "T"-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420695149.1U CN204185552U (en) | 2014-11-19 | 2014-11-19 | A kind of novel multiple arc target electromagnetism arc-striking structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420695149.1U CN204185552U (en) | 2014-11-19 | 2014-11-19 | A kind of novel multiple arc target electromagnetism arc-striking structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204185552U true CN204185552U (en) | 2015-03-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420695149.1U Expired - Fee Related CN204185552U (en) | 2014-11-19 | 2014-11-19 | A kind of novel multiple arc target electromagnetism arc-striking structure |
Country Status (1)
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| CN (1) | CN204185552U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107761061A (en) * | 2017-11-30 | 2018-03-06 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means |
| CN107815651A (en) * | 2017-11-30 | 2018-03-20 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means with pooling feature |
| CN112111747A (en) * | 2020-08-24 | 2020-12-22 | 青岛理工大学 | Hard alloy cutter cleaning and coating production line and method |
| CN112359329A (en) * | 2020-11-05 | 2021-02-12 | 广东鼎泰高科技术股份有限公司 | Arc striking needle and arc striking method thereof |
-
2014
- 2014-11-19 CN CN201420695149.1U patent/CN204185552U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107761061A (en) * | 2017-11-30 | 2018-03-06 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means |
| CN107815651A (en) * | 2017-11-30 | 2018-03-20 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means with pooling feature |
| CN107761061B (en) * | 2017-11-30 | 2019-11-01 | 天津职业技术师范大学 | A kind of arc ion plating striking needle regulating device |
| CN107815651B (en) * | 2017-11-30 | 2023-08-15 | 天津职业技术师范大学 | Arc ion plating arc striking needle adjusting device with buffer function |
| CN112111747A (en) * | 2020-08-24 | 2020-12-22 | 青岛理工大学 | Hard alloy cutter cleaning and coating production line and method |
| CN112111747B (en) * | 2020-08-24 | 2024-03-01 | 青岛理工大学 | Production line and method for cleaning and coating hard alloy cutter |
| CN112359329A (en) * | 2020-11-05 | 2021-02-12 | 广东鼎泰高科技术股份有限公司 | Arc striking needle and arc striking method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180124 Address after: 518000 A, No. 13 C1, No. C1, No. 13, Henggang lower industrial zone, Xinqiao community, Baoan District Sha Jing Street, Xinqiao community Patentee after: Shenzhen Xinke nano coating Co. Ltd. Address before: 518000 Henggang lower industrial zone, Shenzhen, Baoan District, Guangdong Province, No. 13 Patentee before: SHENZHEN LATOM COATING TECHNOLOGY CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150304 Termination date: 20191119 |