CN112359329A

CN112359329A - Arc striking needle and arc striking method thereof

Info

Publication number: CN112359329A
Application number: CN202011224684.5A
Authority: CN
Inventors: 曹时义; 燕伟钊; 王俊锋
Original assignee: Guangdong Dingtai Hi Tech Co Ltd
Current assignee: Guangdong Dingtai Hi Tech Co Ltd
Priority date: 2020-11-05
Filing date: 2020-11-05
Publication date: 2021-02-12
Anticipated expiration: 2040-11-05
Also published as: CN112359329B

Abstract

The invention belongs to the technical field of vacuum coating production equipment, and discloses an arc striking needle which comprises a first needle body and a second needle body, wherein one end of the first needle body is provided with an adjusting part, the other end of the first needle body is connected with one end of the second needle body, the other end of the second needle body is provided with an arc striking part, the first needle body and the second needle body are in angular connection, the corner connection part of the first needle body and the second needle body is used as a steering part, the first needle body is clamped on a clamp through the adjusting part, and when the clamping positions of the adjusting part on the clamp are different, the distances between the arc striking part and a target are different. The arc striking needle is convenient to install and use, low in manufacturing cost, capable of effectively reducing production quality abnormity, improving the utilization rate of the target material, solving the problem that the overall shape of the arc striking needle changes greatly and frequently due to new and old target materials, and capable of slowing down driving impact in the arc striking process and reducing the probability of liquid drops.

Description

Arc striking needle and arc striking method thereof

Technical Field

The invention relates to the technical field of vacuum coating production equipment, in particular to an arc striking needle and an arc striking method thereof.

Background

In the vacuum ion plating process, a mechanical arc striking mode is generally adopted, namely after an arc striking needle touches a target material to form an instant short circuit, discharge is generated to realize arc striking. However, in the existing mechanical arc striking technology, because the mounting position of the target material is fixed with the arc striking position, and the maximum depth of arc striking is limited, when the distance between the arc striking needle and the target material is too short, the arc striking needle can be melted and sintered due to long-time contact, and the arc striking can be failed due to too long distance. And with the increase of the ablation depth of the target material, the problems of unstable target contact, arc striking failure and the like often occur, the production progress is seriously influenced, and sometimes even shutdown treatment is required. Although researchers design some new arc sources or arc ignition needle structures at present, the subsequent problems of high design cost, troublesome maintenance and the like still exist.

Disclosure of Invention

The invention aims to provide an arc striking needle and an arc striking method thereof, wherein an adjusting part, a steering part and an arc striking part are sequentially set according to different ablation characteristics of different cathode magnetic fields, the integral installation and use are convenient, the manufacturing cost is low, the abnormal production quality can be effectively reduced, the utilization rate of a target material is improved, the problem that the overall shape of the arc striking needle is greatly and frequently changed due to new and old target materials is solved, the driving impact in the arc striking process can be relieved, and the probability of liquid drop generation is reduced.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides an arc striking needle, includes first needle body and second needle body, the one end of first needle body is provided with regulating part, the other end with the one end of second needle body is connected, the other end of second needle body is provided with and draws arc portion, first needle body with be the angle between the second needle body and connect, first needle body with the turning junction of second needle body is as turning to the portion, first needle body passes through regulating part presss from both sides and installs on anchor clamps, regulating part is in it is different to press from both sides the position of dress on the anchor clamps, draw the distance between arc portion and target different.

Further, a first clamping position, a second clamping position and a third clamping position are arranged on the adjusting portion, when the clamp is clamped at the first clamping position, the distance between the arc striking portion and the target material is S1, when the clamp is clamped at the second clamping position, the distance between the arc striking portion and the target material is S2, when the clamp is clamped at the third clamping position, the distance between the arc striking portion and the target material is S3, and S1, S2 and S3 are different.

Further, the adjusting part is arc-shaped or step-shaped.

Further, the included angle of the turning part ranges from 89.5 degrees to 120.5 degrees.

Further, the arc ignition part is provided in a dotted or arc shape.

An arc striking method using the arc striking needle comprises the following steps:

s1: determining the type of the cathode magnetic field;

s2: setting the shape of the arc ignition part according to the type of the cathode magnetic field;

s3: setting an included angle of the steering part according to the type of the cathode magnetic field;

s4: adjusting the clamping position of the adjusting part on the clamp according to the old and new degree of the target;

s5: setting the arc striking position of the arc striking part on the target according to the type of the cathode magnetic field;

s6: the arc striking part strikes an arc on the target material.

Further, the cathode magnetic field type is a permanent magnetic field, an electromagnetic field or an electromagnetic composite permanent magnetic field.

Further, when the cathode magnetic field is a permanent magnetic field, the arc ignition portion is in a point or arc shape, the included angle of the turning portion is 90 degrees, the clamp clamps the first clamping position, and the arc ignition portion is a flat area of the top surface of one outer side of the ablation groove at the arc ignition position of the target.

Further, when the cathode magnetic field is an electromagnetic field, the arc ignition part is arc-shaped, the included angle of the turning part is 120 degrees, and the arc ignition part is the side wall area of the second ablation groove at the arc ignition position of the target material.

Further, when the cathode magnetic field is an electromagnetic composite permanent magnetic field, the arc ignition portion is arc-shaped, the included angle of the turning portion is 120 degrees, and the arc ignition portion is a protruding area of the ablation groove III at the arc ignition position of the target material.

The invention has the beneficial effects that: the arc striking needle comprises a first needle body and a second needle body, wherein an adjusting part is arranged on the first needle body, an arc striking part is arranged on the second needle body, the first needle body and the second needle body are connected in an angle mode to form a turning part, the adjusting part can adjust the distance between the arc striking part and a target material, the turning part can slow down driving impact in an arc striking process, the probability of liquid drops is reduced, and the adjusting part, the turning part and the arc striking part are sequentially set according to different ablation characteristics of different cathode magnetic fields. The arc striking needle is convenient to install and use and low in manufacturing cost, improves the operation rate and operability of a film coating machine, can effectively reduce abnormal production quality, improves the utilization rate of a target material, and solves the problems that the overall shape of the arc striking needle changes greatly and is frequently replaced due to new and old target materials.

Drawings

FIG. 1 is a schematic view of an arc ignition needle according to an embodiment of the present invention operating in a permanent magnetic field;

FIG. 2 is a schematic view of an arc ignition needle according to an embodiment of the present invention operating under an electromagnetic field;

fig. 3 and 4 are schematic diagrams illustrating the operation of the arc ignition needle in the electromagnetic composite permanent magnetic field according to the embodiment of the present invention.

In the figure:

1. a first needle body; 11. an adjustment section; 111. a first clamping position; 112. a second clamping position; 113. a third clamping position; 12. a steering section;

2. a second needle body; 21. an arc striking part;

100. a clamp; 200. a target material; 300. ablating the first groove; 400. ablating the second groove; 500. trench three is ablated.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar parts throughout or parts having the same or similar functions. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediary, a connection between two elements, or an interaction between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description of the present invention, unless otherwise expressly specified or limited, the first feature "on" or "under" the second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature being in contact not directly but with another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.

As shown in fig. 1-4, the invention provides an arc ignition needle and an arc ignition method thereof, the arc ignition needle comprises a first needle body 1 and a second needle body 2, one end of the first needle body 1 is provided with an adjusting part 11, the other end is connected with one end of the second needle body 2, the other end of the second needle body 2 is provided with an arc ignition part 21, the first needle body 1 and the second needle body 2 are connected in an angle, the corner connection part of the first needle body 1 and the second needle body 2 is used as a turning part 12, the first needle body 1 is clamped on a clamp 100 through the adjusting part 11, and when the clamping positions of the adjusting part 11 on the clamp 100 are different, the distances between the arc ignition part 21 and a target 200 are different.

In this embodiment, a turning portion 12 is disposed between the first needle body 1 and the second needle body 2, the fixture 100 is clamped in the adjusting portion 11 of the first needle body 1, and the clamping position of the fixture 100 on the adjusting portion 11 is changed to further adjust the horizontal distance and the vertical distance between the arc ignition portion 21 and the target 200, so that the arc ignition portion 21 and the target 200 are at the optimal distance to complete the arc ignition task.

Specifically, the adjusting portion 11 is provided with a first clamping position 111, a second clamping position 112, and a third clamping position 113, when the fixture 100 is clamped at the first clamping position 111, the distance between the arc striking portion 21 and the target 200 is S1, when the fixture 100 is clamped at the second clamping position 112, the distance between the arc striking portion 21 and the target 200 is S2, and when the fixture 100 is clamped at the third clamping position 113, the distance between the arc striking portion 21 and the target 200 is S3, and S1, S2, and S3 are different from each other. In the present embodiment, the first clamping position 111, the second clamping position 112, and the third clamping position 113 are provided at intervals on the adjustment portion 11, and the clamping position of the adjustment jig 100 is switched among the first clamping position 111, the second clamping position 112, and the third clamping position 113, thereby adjusting the distance between the arc striking portion 21 and the target 200. Besides the solution described in this embodiment, the adjusting portion 11 may be provided with a plurality of clamping positions at intervals according to the arc striking condition.

More specifically, the regulating portion 11 is arc-shaped or stepped. In this embodiment, as shown in fig. 1 to 4, the whole adjusting portion 11 is arc-shaped, the tail end of the adjusting portion is tilted upward, when the adjusting portion 11 is clamped in the fixture 100, the adjusting portion 11 can also form an elevation angle with the horizontal direction to a certain extent, which is more convenient for adjusting the distance between the arc-guiding portion 21 and the target 200, and in addition, the arc-shaped design also improves the use hand feeling, so that an operator can adjust or clamp the adjusting portion 11 better, and the comfort and safety are improved. Besides the solution described in the present embodiment, the overall shape of the adjustment portion 11 may also be stepped, and the stepped design enables the adjustment portion 11 to be more securely clamped on the fixture 100.

More specifically, the included angle range of the turning part 12 is set to 89.5-120.5 °, in the embodiment, the included angle range of the turning part 12 is preferably 90-120 °, and the larger the included angle of the turning part 12 is, the smaller the driving impact during the arc striking operation is, so that the probability of liquid drop occurrence can be effectively reduced.

More specifically, the arc striking portion 21 is provided in a dot shape or an arc shape. The arc striking part 21 is more convenient to contact with the target 200, so that the arc striking position can be closer to the edge of the target 200 in an operation safety area during arc striking operation, the utilization rate of the target 200 is increased, and waste is reduced.

An arc striking method of an arc striking needle comprises the following steps:

s1: determining the type of the cathode magnetic field;

specifically, in this step, the type of the cathode magnetic field is a permanent magnetic field, an electromagnetic field, or an electromagnetic composite permanent magnetic field, and under the action of different cathode magnetic fields, the ablation characteristics of the arc striking portion 21 on the target 200 are different, and when the cathode magnetic field is a permanent magnetic field, the ablation characteristics are V-shaped grooves; when the cathode magnetic field is a pure electric magnetic field, the ablation characteristic is a basin-shaped U-shaped groove; when the cathode magnetic field is an electromagnetic composite permanent magnetic field, the ablation characteristic is a wave-shaped groove.

S2: the shape of the arc striking part 21 is set according to the type of the cathode magnetic field;

in this step, the shape of the arc portion 21 is selected according to the type of the cathode magnetic field in the previous step, and the arc portion 21 is in a point shape or an arc shape.

S3: setting the included angle of the turning part 12 according to the type of the cathode magnetic field;

in this step, the angle of the turning part 12 is selected according to the type of the cathode magnetic field in the previous step, and the angle of the turning part 12 is preferably in the range of 90-120 °.

S4: the clamping position of the adjusting part 11 on the jig 100 is adjusted according to the degree of freshness of the target 200.

In this step, the fixture 100 clamps the adjusting portion 11, the adjusting portion 11 is provided with a first clamping position 111, a second clamping position 112 and a third clamping position 113, the old and new degree of the target 200 can be roughly divided into a new target, a middle target and a limit target, the arc striking effect of the arc striking portion 21 is greatly influenced by the old and new degree of the target 200 under the action of different cathode magnetic fields, and the clamping position of the adjusting portion 11 is selected according to the type of the cathode magnetic field and the old and new degree of the target 200.

S5: setting the arc striking position of the arc striking part 21 on the target 200 according to the type of the cathode magnetic field;

in this step, the types of the cathode magnetic fields are different, and the ablation characteristics of the arc striking portion 21 on the target 200 are different, so that the arc striking position is selected according to the types of the cathode magnetic fields in order to improve the utilization rate of the target 200 and reduce the waste of the target 200.

S6: the arc striking section 21 strikes an arc on the target 200.

In this step, the arc striking portion 21 performs an arc striking operation on the target 200 by pneumatically or electromagnetically driving the arc striking needle.

Specifically, in this embodiment, as shown in fig. 1, when the cathode magnetic field is a permanent magnetic field, the ablation characteristic is a V-shaped groove, and at this time, the arc striking pin is not greatly affected by the degree of freshness of the target 200 during arc striking, the arc striking portion 21 may be in a dot shape (dot shape shown in fig. 1) or an arc shape, the included angle of the turning portion 12 is 90 °, the first clamping portion 111 is clamped by the fixture 100, and the arc striking position of the arc striking portion 21 on the target 200 is a flat area from the outer top surface of the ablation groove one 300, that is, a flat area from the edge of the target 200 to the edge of the ablation groove one 300, so as to improve the ablation utilization rate of the target 200 as much as possible.

Specifically, in the present embodiment, as shown in fig. 2, when the cathode magnetic field is an electromagnetic field, the ablation feature is a basin-shaped U-shaped groove, at this time, the degree of old and new of the target 200 to the ignition needle during the arc striking process is large, the arc striking portion 21 is arc-shaped (inward arc-shaped as shown in fig. 2), the included angle of the turning portion 12 is set to 120 °, the arc striking impact is reduced, the sintering between the arc striking portion 21 and the target 200 is avoided, and the service life is prolonged. When the target 200 is a new target, the fixture 100 clamps the third clamping position 113, when the target reaches a middle target after use, the clamping position of the fixture 100 is changed to the second clamping position 112, and when the target 200 approaches the limit target, the clamping position of the fixture 100 is adjusted to the first clamping position 111. The arc striking part 21 is the side wall area of the second ablation groove 400 at the arc striking position of the target 200.

In particular, in the present embodiment, as shown in fig. 3 and 4, when the cathode magnetic field is an electromagnetic composite permanent magnetic field, the ablation is characterized by a wave-shaped groove, a trapezoidal L-shaped slope is formed at the edge of the target 200, a bulge is formed at the middle part, at the moment, the arc ignition needle is greatly influenced by the old and new degree of the target material 200 in the arc ignition process, the arc ignition part 21 is arranged in an arc shape, as shown in fig. 3 (shown in fig. 3 as a pie) and fig. 4 (shown in fig. 4 as an outward arc), the included angle of the turning part 12 is set to 120, when the target material 200 is a new target, the third clamping position 113 is clamped by the clamp 100, when the target material reaches a middle target after use, the clamping position of the clamp 100 is changed to the second clamping position 112, when the target 200 approaches the limit target, the clamping position of the fixture 100 is adjusted to the first clamping position 111, and the arc striking position of the arc striking part 21 on the target 200 is the central convex area of the ablation groove III 500 or the trapezoidal L-slope convex area of the edge of the target 200.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The utility model provides an arc ignition needle, its characterized in that includes first needle body (1) and second needle body (2), the one end of first needle body (1) is provided with regulating part (11), the other end with the one end of second needle body (2) is connected, the other end of second needle body (2) is provided with arc ignition portion (21), first needle body (1) with be angle connection between second needle body (2), first needle body (1) with the turning junction of second needle body (2) is as turning to portion (12), first needle body (1) passes through regulating part (11) are pressed from both sides on anchor clamps (100), regulating part (11) are in press from both sides the dress position on anchor clamps (100) and are different, the distance between arc ignition portion (21) and target (200) is different.

2. The arc ignition needle according to claim 1, wherein the adjusting portion (11) is provided with a first clamping position (111), a second clamping position (112) and a third clamping position (113), when the clamp (100) is clamped at the first clamping position (111), the distance between the arc ignition portion (21) and the target (200) is S1, when the clamp (100) is clamped at the second clamping position (112), the distance between the arc ignition portion (21) and the target (200) is S2, and when the clamp (100) is clamped at the third clamping position (113), the distances between the arc ignition portion (21) and the target (200) are S3, S1, S2 and S3, which are different from each other.

3. The ignition needle according to claim 2, characterized in that the adjustment portion (11) is arc-shaped or stepped.

4. An ignition needle according to claim 3, characterized in that the included angle of the turning part (12) is set in the range of 89.5 ° -120.5 °.

5. An ignition needle according to claim 4, characterized in that the shape of the ignition portion (21) is provided in a point shape or an arc shape.

6. An arc ignition method using the arc ignition needle according to any one of claims 1 to 5, comprising the steps of:

s1: determining the type of the cathode magnetic field;

s2: setting the shape of the arc ignition part (21) according to the type of the cathode magnetic field;

s3: setting the included angle of the steering part (12) according to the type of the cathode magnetic field;

s4: adjusting the clamping position of the adjusting part (11) on the clamp (100) according to the new and old degree of the target (200);

s5: setting the arc striking position of the arc striking part (21) on the target (200) according to the type of the cathode magnetic field;

s6: the arc striking part (21) strikes an arc on the target (200).

7. The arc ignition method of claim 6, wherein the cathodic magnetic field type is a permanent magnetic field, an electromagnetic field, or an electromagnetic composite permanent magnetic field.

8. The arc striking method according to claim 7, wherein when the cathode magnetic field is a permanent magnetic field, the arc striking portion (21) is shaped like a dot or an arc, the included angle of the turning portion (12) is 90 °, the fixture (100) clamps the first clamping position (111), and the arc striking portion (21) is a flat area on the top surface of the outer side of the ablation groove I (300) at the arc striking position of the target (200).

9. The arc ignition method according to claim 7, wherein when the cathode magnetic field is an electromagnetic field, the arc ignition portion (21) is shaped as an arc, the included angle of the turning portion (12) is 120 °, and the arc ignition portion (21) is the side wall area of the second ablation groove (400) at the arc ignition position of the target (200).

10. The arc striking method according to claim 7, wherein when the cathode magnetic field is an electromagnetic composite permanent magnetic field, the arc striking portion (21) is shaped as an arc, the included angle of the turning portion (12) is 120 °, and the arc striking portion (21) is a convex area of the ablation groove three (500) at the arc striking position of the target (200).