CN105764225A - Compact type high-power hollow cathode discharge device - Google Patents
Compact type high-power hollow cathode discharge device Download PDFInfo
- Publication number
- CN105764225A CN105764225A CN201610333540.0A CN201610333540A CN105764225A CN 105764225 A CN105764225 A CN 105764225A CN 201610333540 A CN201610333540 A CN 201610333540A CN 105764225 A CN105764225 A CN 105764225A
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- hollow
- anode plate
- plate
- tube
- cathode
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32596—Hollow cathodes
Abstract
The invention discloses a compact type high-power hollow cathode discharge device which comprises a sealing tube, a hollow cathode tube, a cathode plate, a first insulation plate, an auxiliary anode plate, an insulation tube, permanent magnets, an annular anode plate, a third water cooling channel and a control power source. The hollow cathode tube is mounted on the cathode plate. The sealing tube is connected with the cathode plate, and the hollow cathode tube is sleeved with the sealing tube. A gas input opening is further formed in the top of the sealing tube. The first insulation plate is used for achieving insulation of the cathode plate and the auxiliary anode plate. The insulation tube is arranged on the first insulation plate. The permanent magnets and the third water cooling channel are both arranged outside the auxiliary anode plate. The distance between the annular anode plate and the bottom of the auxiliary anode plate ranges from 30 cm to 50 cm. The control power source is connected with the cathode plate, the auxiliary anode plate and the annular anode plate. The compact type high-power hollow cathode discharge device is simple in structure, high in power, wide in parameter section of plasma and capable of being applied to wider-range scientific research and industrial application.
Description
Technical field
The present invention relates to lower temperature plasma technology field, particularly relate to a kind of compact type large power hollow cathode discharge device.
Background technology
At present, in industry and research application field, lower temperature plasma technology has played huge effect and good application prospect in material surface process, metallurgy, auxiliary combustion etc..Actual application needs, according to technological parameter and the difference answering recruitment environment, select suitable plasma source.But, in existing plasma application, produce principle, the size processing object and construction features owing to being defined in specific plasma, result in its device general more complicated, and single sample can only be processed.Therefore, to be diffused into other side more difficult for such plasma device.
And publication number is CN102376521A, name is called technical scheme disclosed in " plasma processing apparatus and plasma control method ", it it is then the hollow cathode discharge utilizing multiple concentric ring-shaped, form the plasma of larger area, then pass through the density of the voltage-regulation plasma changed between negative electrode and anode.But it is very big to the demand of power, and apparatus structure is more complicated.
Additionally, for a lot of hollow cathode discharge devices, owing to being subject to the impact of heat effect, plasma discharge generally lies in glow discharge interval, therefore, plasma discharge power improves difficulty.It addition, such as commercial inductively-coupled plasma sources, microwave plasma discharge source etc., due to power burst into mode be indirect, energy utilization efficiency is generally not high, and plasma ionization level is relatively low, thus difficult improves plasma power yet.
Summary of the invention
For above-mentioned the deficiencies in the prior art, the invention provides a kind of compact type large power hollow cathode discharge device, it can produce the plasma line of high ionization level, and improves energy conversion efficiency.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of compact type large power hollow cathode discharge device, including sealing pipe, hollow-cathode tube, minus plate, the first insulation board, impressed current anode plate, insulation tube, permanent magnet, orificed anode plate, the 3rd water-cooling channel and controlling power supply, wherein:
Described hollow-cathode tube is arranged on minus plate and can regulate mobile in front and back；
The described pipe that seals is connected with minus plate, and is inserted in by hollow-cathode tube wherein, to realize the sealing to hollow-cathode tube, and is the pre-made allowance of movement of hollow-cathode tube；This sealing pipe top is additionally provided with for by the gas introduction port in gas input to hollow-cathode tube；
Described impressed current anode plate is used as the arc electrode of plasma, and described first insulation board is for realizing minus plate and the insulation of impressed current anode plate；
Described insulation tube is arranged on the first insulation board, is used for preventing the plasma starting the arc from striking sparks；
Described permanent magnet and the 3rd water-cooling channel are arranged at outside impressed current anode plate；
Described orificed anode plate is used as the working electrode of plasma, and it is with impressed current anode plate bottom interval 30～50 centimetres, and and forms high-density plasma line between hollow-cathode tube；
Described control power supply has included arc power and constant current source, wherein, plays arc power and is connected with minus plate and impressed current anode plate respectively；Constant current source positive pole is logical to be connected with orificed anode plate, and negative pole is connected with minus plate.
Further, it is further opened with in described minus plate for passing into the cooling water the first water-cooling channel so that hollow-cathode tube to be cooled down.
Yet further, it is further opened with in described impressed current anode plate for passing into cooling water to prevent hollow-cathode tube generation ablation and to damage the second water-cooling channel of minus plate.
Further, described impressed current anode plate is additionally provided with the second insulation board.
As preferably, described hollow-cathode tube is tantalum pipe or tantalum alloy pipe, and it is arranged on the central axis of minus plate, and passes through screw lock.
As preferably, described insulation tube is ring-shaped pottery pipe.
As preferably, described first insulation board adopts insulant to make.
As preferably, described minus plate, impressed current anode plate and orificed anode plate are made by red copper material.
Compared with prior art, the method have the advantages that
(1) present invention is reasonable in design, easy to maintenance, low processing cost, it is by sealing the setting of pipe, hollow-cathode tube, minus plate, impressed current anode plate, orificed anode plate, the use of multiple gases can be met, and achieve the generation of high ionization level plasma line, and then it is effectively improved the transformation efficiency of energy.
(2) the hollow cathode front end in the present invention is in the stationary magnetic field that permanent magnet produces, can avoid in the plasma starting the arc and stable discharging process, hollow-cathode tube and the electric discharge of impressed current anode sustained arc, so that it is guaranteed that the temperature of the present invention is less than prescribed limit, so that plasma discharge power bracket increases substantially.
(3) adjustment controlling power supply and orificed anode plate is utilized, the present invention can in very large range regulate power, thus meeting the instructions for use of different occasion, and the plasma beam spot size in the present invention can be regulated by negative electrode internal diameter and magnetic field configuration, and therefore range of application is extremely wide.
(4) present invention can select the putting position of sample according to the actual demand of technique, it is also possible to regulates plasma discharge size of current and changes plasma parameter.Thus the optional interval of parameter of plasma is also broader.And due to the existence of permanent magnet, it need not retrain plasma by extra field coil, and therefore overall structure is simple, is equipped with water-cooling channel rear stability and strengthens, and then can be flexibly applied to widely on equipment.
(5) hollow-cathode tube in the present invention is not only convenient for changing, and by movable adjustment mode, the utilization rate being also effectively increased hollow-cathode tube is high.
(6) in the present invention, distance between orificed anode plate and hollow-cathode tube can select according to practical situation, it is generally tens centimetres, orificed anode plate so can be made to have, and the electron temperature of plasma bundle is carried out in enough spaces, the isoparametric spatial distribution of density diagnoses, thus facilitating scientific research and Process Exploration.
(7) the described minus plate in the present invention, impressed current anode plate and orificed anode plate are made by red copper material, and not only thermal diffusivity is good, excellent electrical properties, and simple shape, it is easy to processing.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Wherein, the name that accompanying drawing labelling is corresponding is called:
1-seals pipe, 2-hollow-cathode tube, 3-minus plate, 4-the first insulation board, 5-impressed current anode plate, 6-the first water-cooling channel, 7-insulation tube, 8-permanent magnet, 9-the second water-cooling channel, 10-orificed anode plate, 11-the 3rd water-cooling channel, 12-the second insulation board, 13-plays arc power, 14-constant current source.
Detailed description of the invention
Illustrating that the invention will be further described with embodiment below in conjunction with accompanying drawing, the mode of the present invention includes but are not limited to following example.
Embodiment
As shown in Figure 1, the invention provides a kind of powerful, compact plasma source based on hollow cathode discharge, it includes sealing pipe 1, hollow-cathode tube 2, minus plate the 3, first insulation board 4, impressed current anode plate 5, insulation tube 7, permanent magnet 8, orificed anode plate the 10, the 3rd water-cooling channel 11 and controlling power supply.Described hollow-cathode tube 2 is arranged on minus plate 3, and it can be selected for tantalum pipe or tantalum alloy pipe, and by screw lock on minus plate 3 central axis.Described sealing pipe 1 is connected with minus plate 3, and hollow-cathode tube 2 is inserted in wherein, to realize sealing to hollow-cathode tube, this sealing pipe top is additionally provided with for by the gas introduction port in the gas input such as (such as Ar, He, N2, H2 multiple gases) to hollow-cathode tube 2.In the present embodiment, in use, hollow-cathode tube 2 starts ablation from front end, therefore, after the ablation of hollow-cathode tube front end, it is possible to slightly deal with adjustment hollow-cathode tube forward and be continuing with, certain spatial margin is reserved in the described movement that pipe 1 is then hollow-cathode tube in length that seals.
Additionally, be further opened with the first water-cooling channel 6 in described minus plate 3, it is used for passing into cooling water, so that hollow-cathode tube to be cooled down, it is prevented that excessive ablation occurs hollow-cathode tube because temperature is too high.
Described impressed current anode plate 5 is used as the arc electrode of plasma, and described first insulation board 4 is for realizing the insulation between minus plate 3 and impressed current anode plate 5.In the present embodiment, the first described insulation board 4 adopts resistant to elevated temperatures insulant to make.And, the second water-cooling channel 9 being further opened with in described impressed current anode plate 5, this second water-cooling channel 9 is near the bottom opening of impressed current anode plate 5, it is equally used for passing into cooling water, to prevent from nozzle, ablation occurring because plasma temperature is too high and damaging minus plate, it is ensured that the plasma discharge of long-time stable.
Described insulation tube 7 is arranged on the first insulation board 4, for minor insulation, it is to avoid the plasma starting the arc is struck sparks, and in the present embodiment, this insulation tube 7 is ring-shaped pottery pipe.And described permanent magnet 8 and the 3rd water-cooling channel 1 to be arranged at impressed current anode plate 5 outside, wherein, permanent magnet 8 can arrange multiple, and can select, according to discharge scenario, the size that magnetizes, be generally hundreds of Gauss, and the position of permanent magnet can regulate, as when the end face of its front end face Yu impressed current anode essentially coincides, after plasma sprays from hollow-cathode tube, under the effect of magnetic field and electric field, form divergent state, make the active area of plasma increase；And the 3rd water-cooling channel 11 is after passing into cooling water, it is possible to avoid causing that due to high temperature permanent magnet loses magnetism.
Additionally, described impressed current anode plate 5 is additionally provided with the second insulation board 12, this second insulation board 12 is between impressed current anode plate 5 and vacuum linear magnetic field device, for the insulation between the present invention and vacuum linear magnetic field device, it is ensured that vacuum linear magnetic field device will not be produced impact when the present invention works.
Described orificed anode plate 10 is used as the working electrode of plasma, its distance (30～50 centimetre) certain with impressed current anode plate 5 bottom interval, and and forms high-density plasma line between hollow-cathode tube.The loop design of orificed anode can make plasma parameter rotationally symmetrical along central shaft.
Described control power supply has included arc power 13 and constant current source 14, and wherein, playing arc power 13 is high-frequency and high-voltage power supply, and it is connected with minus plate 3 and impressed current anode plate 5 respectively, and the both positive and negative polarity connection playing arc power does not limit；Constant current source 14 positive pole is logical to be connected with orificed anode plate 8, and negative pole is connected with minus plate 3.
The main operational principle of the present invention is: utilize gas introduction port to pass into multiple gases via sealing pipe 1 in hollow-cathode tube 2, now, between minus plate 3 and impressed current anode plate 5, certain voltage is loaded by controlling the arc power 13 that rises in power supply, making gas form the form of arc discharge, permanent magnet 8 is internally formed stable magnetic field at hollow-cathode tube 2.
After the arc discharge several seconds, open constant current source 14, and close arc power 13, make to produce in hollow-cathode tube stable plasma, and sprayed by bottom impressed current anode plate 5, due to the effect of electric field and magnetic field, plasma becomes divergent shape (as illustrated by the arrows in fig. 1) to arrive orificed anode plate 10, thus forming the plasma line of high ionization level.At this wherein, due to the constraint in magnetic field, plasma produces to be subsequently formed thermal pressure in hollow-cathode tube, and sprays towards anode, reduces the strong interaction of plasma and surrounding structure part so that the power of plasma can increase substantially.
Present configuration is simple, power is big, the parameter interval width of plasma, it is possible to be applied in broader scientific research and commercial Application.Therefore, compared with prior art, the present invention has prominent substantive distinguishing features and significant progressive.
Above-described embodiment is only one of the preferred embodiment of the present invention; should not be taken to limit protection scope of the present invention; all body design thought in the present invention and the change having no essential meaning made mentally or polishing; it is solved the technical problem that still consistent with the present invention, all should be included within protection scope of the present invention.
Claims (8)
1. a compact type large power hollow cathode discharge device, it is characterized in that, including sealing pipe (1), hollow-cathode tube (2), minus plate (3), the first insulation board (4), impressed current anode plate (5), insulation tube (7), permanent magnet (8), orificed anode plate (10), the 3rd water-cooling channel (11) and controlling power supply, wherein:
Described hollow-cathode tube (3) is arranged on minus plate (4) and above and can regulate mobile in front and back；
The described pipe (1) that seals is connected with minus plate (3), and is inserted in wherein by hollow-cathode tube (2), to realize the sealing to hollow-cathode tube, and is the pre-made allowance of movement of hollow-cathode tube；This sealing pipe top is additionally provided with for by the gas introduction port in gas input to hollow-cathode tube；
Described impressed current anode plate (5) is as the arc electrode of plasma, and described first insulation board (4) is for realizing minus plate and the insulation of impressed current anode plate；
Described insulation tube (7) is arranged on the first insulation board (4), is used for preventing the plasma starting the arc from striking sparks；
It is outside that described permanent magnet (8) and the 3rd water-cooling channel (11) are arranged at impressed current anode plate (5)；
Described orificed anode plate (10) is as the working electrode of plasma, and it is with impressed current anode plate (7) bottom interval 30～50 centimetres, and and forms high-density plasma line between hollow-cathode tube；
Described control power supply has included arc power (13) and constant current source (14), wherein, plays arc power (13) and is connected with minus plate (3) and impressed current anode plate (5) respectively；Constant current source (14) positive pole is logical to be connected with orificed anode plate (8), and negative pole is connected with minus plate (3).
2. a kind of compact type large power hollow cathode discharge device according to claim 1, it is characterised in that be further opened with in described minus plate (3) for passing into the cooling water the first water-cooling channel (6) so that hollow-cathode tube to be cooled down.
3. a kind of compact type large power hollow cathode discharge device according to claim 2, it is characterized in that, be further opened with in described impressed current anode plate (5) for passing into cooling water to prevent hollow-cathode tube generation ablation and to damage second water-cooling channel (9) of minus plate.
4. a kind of compact type large power hollow cathode discharge device according to claim 3, it is characterised in that be additionally provided with the second insulation board (12) on described impressed current anode plate (5).
5. a kind of compact type large power hollow cathode discharge device according to any one of Claims 1 to 4, it is characterized in that, described hollow-cathode tube (2) is tantalum pipe or tantalum alloy pipe, and it is arranged on the central axis of minus plate (3), and passes through screw lock.
6. a kind of compact type large power hollow cathode discharge device according to claim 1, it is characterised in that described insulation tube (7) is ring-shaped pottery pipe.
7. a kind of compact type large power hollow cathode discharge device according to claim 1, it is characterised in that described first insulation board (4) adopts insulant to make.
8. a kind of compact type large power hollow cathode discharge device according to claim 1, it is characterised in that described minus plate (3), impressed current anode plate (5) and orificed anode plate (10) are made by red copper material.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610333540.0A CN105764225B (en) | 2016-05-19 | 2016-05-19 | A kind of compact type large power hollow cathode discharge device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610333540.0A CN105764225B (en) | 2016-05-19 | 2016-05-19 | A kind of compact type large power hollow cathode discharge device |
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| CN105764225A true CN105764225A (en) | 2016-07-13 |
| CN105764225B CN105764225B (en) | 2018-11-27 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106373842A (en) * | 2016-11-03 | 2017-02-01 | 哈尔滨工业大学 | Method for expanding point mode discharge current range of hollow cathode |
| CN108932982A (en) * | 2017-05-22 | 2018-12-04 | 成都达信成科技有限公司 | A kind of high line plasma array source for straight line high-intensity magnetic field device |
| CN109538431A (en) * | 2018-10-12 | 2019-03-29 | 北京交通大学 | A kind of Vacuum Arc propeller based on multianode structure |
| CN109578233A (en) * | 2018-10-12 | 2019-04-05 | 北京交通大学 | A kind of ablative-type protective coating pulsed plasma thruster based on multianode electrode structure |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109578233A (en) * | 2018-10-12 | 2019-04-05 | 北京交通大学 | A kind of ablative-type protective coating pulsed plasma thruster based on multianode electrode structure |
| CN109578233B (en) * | 2018-10-12 | 2020-07-21 | 北京交通大学 | Ablation type pulse plasma propeller based on multi-anode electrode structure |
| CN109538431B (en) * | 2018-10-12 | 2020-09-08 | 北京交通大学 | Vacuum arc propeller based on multi-anode structure |
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| CN105764225B (en) | 2018-11-27 |
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Granted publication date: 20181127 |