CN107761061B - A kind of arc ion plating striking needle regulating device - Google Patents
A kind of arc ion plating striking needle regulating device Download PDFInfo
- Publication number
- CN107761061B CN107761061B CN201711243193.3A CN201711243193A CN107761061B CN 107761061 B CN107761061 B CN 107761061B CN 201711243193 A CN201711243193 A CN 201711243193A CN 107761061 B CN107761061 B CN 107761061B
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- CN
- China
- Prior art keywords
- mobile jib
- striking needle
- outer sleeve
- stud
- striking
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Abstract
The invention discloses a kind of arc ion plating striking needle regulating devices, the device includes mobile jib, outer sleeve, spring, adjusts stud and striking needle, one end of mobile jib is provided with the internal thread hole for installation and adjustment stud, stud is adjusted to be mounted in the internal thread hole, it is provided on mobile jib for pacifying spring-loaded hierarchic structure, the outer sleeve is slidably located on mobile jib, spring is installed in the hierarchic structure of the mobile jib in outer sleeve, is provided for outer sleeve along the axial elastic force to adjusting stud end of mobile jib by spring；One section of through slot is offered on the hole wall of the internal thread hole of mobile jib, the vertical section of striking needle is mounted in through slot, and under the effect of spring force, striking needle, which is accommodated, to be fixed on outer sleeve and adjust between stud.When needing to adjust striking needle at a distance from target surface, turn adjusts stud, adjusts stud and pushes striking needle long to sliding along through slot, striking needle drives outer sleeve to make spring-compressed, to realize the continuous adjustment of striking pin position.
Description
Technical field
The invention belongs to arc ion plating (aip) fields, and in particular to a kind of arc ion plating striking needle regulating device.
Background technique
In arc ion plating film device coating process, target is touched by striking needle and generates electric discharge progress striking.Plated film
In the process, striking pin position and target material surface hypotelorism, striking needle tip temperature constantly increase, and the electric arc for continuing ablation can make
Tip portion fusing, cause arc extinguishing and can not the starting the arc again, interrupt coating process；Striking pin position and target hypertelorism,
It discharges between arc needle and target insufficient, it can not the starting the arc.With the continuous consumption of target, the distance between target and striking needle exist
Constantly change, this just needs constantly to adjust the position of striking needle, makes the sufficiently smoothly starting the arc and not of discharging between arc needle and target
Can fuse arc needle, since each target consumption degree is difficult to measure, increase very big difficulty to the adjustment of striking pin position, this
With regard to needing a kind of striking needle regulating device convenient for adjusting.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of arc ion plating striking needles convenient for adjusting
Regulating device.The position of striking needle can be conveniently adjusted by the device.
The present invention is achieved by the following technical solutions:
A kind of arc ion plating striking needle regulating device, the device include mobile jib, outer sleeve, spring, adjust stud and draw
Arc needle,
One end of the mobile jib is provided with the blind screw hole for connecting cylinder movement end, and the other end of mobile jib is provided with
For the internal thread hole of installation and adjustment stud, the adjusting stud is mounted in the internal thread hole；It is provided with and is used on mobile jib
Pacify spring-loaded hierarchic structure, the outer sleeve is slidably located on mobile jib, and the outer end of outer sleeve is provided with inner edge, and spring is pacified
In the hierarchic structure of mobile jib in outer sleeve, and one end of spring contradicts on the ladder of mobile jib, and the other end of spring supports
Touching provides for outer sleeve along the axial elastic force to adjusting stud end of mobile jib on the inner edge of outer sleeve, through spring；
One section of through slot is axially offered along mobile jib on the hole wall of the internal thread hole of mobile jib, the vertical section of striking needle is mounted on
In through slot, striking needle can be long to (i.e. along mobile jib axial direction) sliding along through slot, offers position pair in the vertical section of striking needle
The first groove and the second groove claimed, the first groove are used to cooperate with outer sleeve outer end, and the second groove is used for whole with adjusting stud
End cooperation, under the effect of spring force, outer sleeve outer end head into the first groove of striking needle, and adjust stud terminal and head into and draw
Second groove of arc needle, to realize the fixation of striking needle.
The application method of the arc ion plating striking needle regulating device:
The present apparatus is fixed on by the blind screw hole of mobile jib right end on the output rod of the actuating cylinder of coating machine, is opened
Coating machine drives the present apparatus of reciprocating vibration by cylinder, so that striking needle touching target is generated electric discharge and carries out striking, in the course of work
In, since spring has enough elastic force, adjusted between stud and outer sleeve it can be ensured that striking needle is fixed on；
When needing to adjust striking needle at a distance from target surface, turn adjusts stud, adjusts stud and pushes striking needle, striking needle
Outer sleeve is driven to make spring-compressed, to realize the continuous adjustment of striking pin position.
In the above-mentioned technical solutions, the striking needle includes vertical section, bending transition and horizontal segment, vertical section, bending
Transition and horizontal segment are an integral structure, material is stainless steel, are embedded in the terminal of horizontal segment for contacting with target
The contact pin of molybdenum materials matter.
In the above-mentioned technical solutions, through slot is 1.5-3cm along the length of mobile jib axial direction.
The advantages and benefits of the present invention are:
The configuration of the present invention is simple, design are reasonable, in use, being fixed on the present apparatus by the blind screw hole of mobile jib one end
It on the output rod of the actuating cylinder of coating machine, drives the present apparatus of reciprocating vibration by cylinder, striking needle touching target is made to generate electric discharge
Striking is carried out, during the work time, using the elastic force of spring, outer sleeve outer end heads into the first groove of striking needle, and adjusts spiral shell
Column terminal heads into the second groove of striking needle, adjusts between stud and outer sleeve to realize that striking needle is fixed on；Work as needs
When adjusting striking needle at a distance from target surface, turn adjusts stud, adjusts stud and pushes striking needle long to (i.e. along mobile jib axis along through slot
To) sliding, striking needle drives outer sleeve to make spring-compressed, so that the continuous adjustment of striking pin position is realized, in striking pin position
In adjustment process, under the elastic force effect of spring, it can guarantee that striking needle is fixed in real time always and adjust stud and outer sleeve
Between, needle danger will not be fallen.
The present invention is easy to use, only need to adjust adjusting stud, and the position that striking needle can be realized is adjusted.
Striking needle of the invention includes vertical section, bending transition and horizontal segment, vertical section, bending transition and horizontal segment
It is an integral structure, material is stainless steel, is embedded with the contact pin of the molybdenum materials matter for contacting with target in the terminal of horizontal segment.
It is that section in order to keep striking needle parallel with target surface by the structure that striking needle is made into this bending far from target surface, avoids temperature mistake
Height causes the softening of striking needle, in addition can also effectively slow down deposition, the buildup of material that target evaporates on arc needle.This
Outside, the contact pin of striking needle uses molybdenum materials matter, this is because the fusing point of molybdenum is higher, the electric arc for continuing ablation can be prevented stainless
The fusing of steel striking needle, if striking needle integrally all makes of molybdenum filament, higher cost, while molybdenum filament brittleness is big, is not easy brake forming,
And stainless steel plasticity is preferable, flexible molding.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of type of the present invention.
Fig. 2 is the structural schematic diagram of adjusting striking pin position after target loss.
Specific embodiment
Technical solution of the present invention is further illustrated combined with specific embodiments below.
The invention discloses a kind of arc ion plating striking needle regulating devices, and referring to attached drawing, which includes mobile jib 1, outer
Sleeve 2, adjusts stud 4 and striking needle 5 at spring 3,
The right end of the mobile jib 1 is provided with the blind screw hole 1-1 for connecting cylinder movement end, and the left end of mobile jib 1 is set
It is equipped with the internal thread hole 1-2 for installation and adjustment stud 4, the adjusting stud 4 is mounted in internal thread hole 1-2；In mobile jib 1
On be provided with hierarchic structure 1-3 for installing spring 3, the outer sleeve 2 is slidably located on mobile jib 1, the outer end of outer sleeve 2
It is provided with inner edge 2-1, spring 3 is installed on the hierarchic structure 1-3 of the mobile jib in outer sleeve 2, and one end of spring 3 contradicts
On the ladder of mobile jib, the other end of spring 3 is contradicted on the inner edge 2-1 of outer sleeve, is that outer sleeve 2 is provided along master by spring 3
Bar is axial to the elastic force for adjusting 4 end of stud；
The striking needle 5 include vertical section 5-1, bending transition 5-2 and horizontal segment 5-3, vertical section, bending transition and
Horizontal segment is an integral structure, and material is stainless steel, is embedded with the molybdenum materials matter for contacting with target 6 in the terminal of horizontal segment
Contact pin 5-4.It is that section in order to keep striking needle parallel with target surface by the structure that striking needle is made into this bending far from target surface,
The excessively high softening for causing striking needle of temperature is avoided, it is heavy on arc needle in addition can also effectively to slow down the material that target evaporates
Product, buildup.In addition, the contact pin of striking needle uses molybdenum materials matter, this is because the fusing point of molybdenum is higher, can prevent from continuing ablation
Electric arc melts stainless steel striking needle, if striking needle integrally all makes of molybdenum filament, higher cost, while molybdenum filament brittleness is big, no
Flexible molding, and stainless steel plasticity is preferable, flexible molding；
One section of through slot 1-4 is axially offered along mobile jib on the hole wall of the internal thread hole 1-2 of mobile jib 1, through slot is along mobile jib axis
To length be 1.5-3cm, the vertical section 5-1 of the striking needle is mounted in through slot 1-4, and the groove width of through slot is slightly larger than striking needle
Vertical section diameter so that striking needle can be along through slot 1-4 long to (i.e. along mobile jib axial direction) sliding, in the vertical section of striking needle
The the first groove 5-11 and the second groove 5-12 of positional symmetry are offered, the first groove is used to cooperate with 2 outer end of outer sleeve, and second
Groove is used for and adjusts the cooperation of stud terminal, and under the effect of spring force, outer sleeve outer end heads into the first groove of striking needle
5-11, and the second groove 5-12 that stud terminal heads into striking needle is adjusted, to realize the fixation of striking needle.
In use, the present apparatus to be fixed on to the output rod of the actuating cylinder of coating machine by the blind screw hole of mobile jib right end
On, coating machine is opened, drives the present apparatus of reciprocating vibration by cylinder, so that striking needle touching target 6 is generated electric discharge and carries out striking, in work
During work, since spring has enough elastic force, it can be ensured that striking needle 5, which is fixed on, adjusts stud 4 and outer sleeve 2
Between.When needing to adjust striking needle at a distance from target surface, referring to attached drawing 2, turn adjusts stud 4, adjusts stud and pushes striking
Needle, striking needle drive outer sleeve 2 to make spring-compressed, so that it may realize the continuous adjustment of striking pin position.
Illustrative description has been done to the present invention above, it should explanation, the case where not departing from core of the invention
Under, any simple deformation, modification or other skilled in the art can not spend the equivalent replacement of creative work equal
Fall into protection scope of the present invention.
Claims (1)
1. a kind of arc ion plating striking needle regulating device, it is characterised in that: including mobile jib, outer sleeve, spring, adjust stud and
Striking needle；One end of the mobile jib is provided with the blind screw hole for connecting cylinder movement end, and the other end of mobile jib is provided with
For the internal thread hole of installation and adjustment stud, the adjusting stud is mounted in the internal thread hole；It is provided with and is used on mobile jib
Pacify spring-loaded hierarchic structure, the outer sleeve is slidably located on mobile jib, and the outer end of outer sleeve is provided with inner edge, and spring is pacified
In the hierarchic structure of mobile jib in outer sleeve, and one end of spring contradicts on the ladder of mobile jib, and the other end of spring supports
Touching provides the elastic force that stud end is adjusted axially along mobile jib by spring on the inner edge of outer sleeve for outer sleeve；
One section of through slot is axially offered along mobile jib on the hole wall of the internal thread hole of mobile jib, the vertical section of striking needle is mounted on through slot
In, striking needle can be long to sliding along through slot, and the first groove and second of positional symmetry is offered in the vertical section of striking needle
Groove, the first groove are used to cooperate with outer sleeve outer end, and the second groove is used for and adjusts the cooperation of stud terminal, in spring force
Under effect, outer sleeve outer end heads into the first groove of striking needle, and adjusts the second groove that stud terminal heads into striking needle, thus
Realize the fixation of striking needle；
The striking needle includes vertical section, bending transition and horizontal segment, and vertical section, bending transition and horizontal segment are integral type
Structure, material are stainless steel, are embedded with the contact pin of the molybdenum materials matter for contacting with target in the terminal of horizontal segment；
It is secured the device to by the blind screw hole of mobile jib right end on the output rod of the actuating cylinder of coating machine, opens plated film
Machine drives the device of reciprocating vibration by cylinder, so that striking needle touching target is generated electric discharge and carries out striking, during the work time, by
There is enough elastic force in spring, adjusted between stud and outer sleeve it can be ensured that striking needle is fixed on；
When needing to adjust striking needle at a distance from target surface, turn adjusts stud, adjusts stud and pushes striking needle, striking needle drives
Outer sleeve makes spring-compressed, to realize the continuous adjustment of striking pin position；
The through slot is 1.5-3cm along the length of mobile jib axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711243193.3A CN107761061B (en) | 2017-11-30 | 2017-11-30 | A kind of arc ion plating striking needle regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711243193.3A CN107761061B (en) | 2017-11-30 | 2017-11-30 | A kind of arc ion plating striking needle regulating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107761061A CN107761061A (en) | 2018-03-06 |
| CN107761061B true CN107761061B (en) | 2019-11-01 |
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ID=61275647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711243193.3A Active CN107761061B (en) | 2017-11-30 | 2017-11-30 | A kind of arc ion plating striking needle regulating device |
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| Country | Link |
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| CN (1) | CN107761061B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
| CN202595251U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Electric arc target structure of multi arc ion film plating machine |
| CN203855786U (en) * | 2014-05-28 | 2014-10-01 | 温州海蓝工业设计有限公司 | Presser foot device for sewing machine |
| CN204185552U (en) * | 2014-11-19 | 2015-03-04 | 深圳市莱恩顿纳米技术有限公司 | A kind of novel multiple arc target electromagnetism arc-striking structure |
| CN106756822A (en) * | 2017-01-16 | 2017-05-31 | 天津职业技术师范大学 | A kind of electric arc target striking needle fixation device of position continuously adjustabe |
| CN207581912U (en) * | 2017-11-30 | 2018-07-06 | 天津职业技术师范大学 | Arc ion plating striking needle regulating device |
-
2017
- 2017-11-30 CN CN201711243193.3A patent/CN107761061B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
| CN202595251U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Electric arc target structure of multi arc ion film plating machine |
| CN203855786U (en) * | 2014-05-28 | 2014-10-01 | 温州海蓝工业设计有限公司 | Presser foot device for sewing machine |
| CN204185552U (en) * | 2014-11-19 | 2015-03-04 | 深圳市莱恩顿纳米技术有限公司 | A kind of novel multiple arc target electromagnetism arc-striking structure |
| CN106756822A (en) * | 2017-01-16 | 2017-05-31 | 天津职业技术师范大学 | A kind of electric arc target striking needle fixation device of position continuously adjustabe |
| CN207581912U (en) * | 2017-11-30 | 2018-07-06 | 天津职业技术师范大学 | Arc ion plating striking needle regulating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107761061A (en) | 2018-03-06 |
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