CN204039491U - A kind of film thickness feeler mechanism - Google Patents
A kind of film thickness feeler mechanism Download PDFInfo
- Publication number
- CN204039491U CN204039491U CN201420380872.0U CN201420380872U CN204039491U CN 204039491 U CN204039491 U CN 204039491U CN 201420380872 U CN201420380872 U CN 201420380872U CN 204039491 U CN204039491 U CN 204039491U
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- CN
- China
- Prior art keywords
- film
- film thickness
- thickness
- utility
- feeler mechanism
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Physical Vapour Deposition (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model discloses a kind of film thickness feeler mechanism, comprising: film thickness probe (1), and it is arranged on film (2), for responding to the thickness detecting described film (2); Water-cooling protective cover (3), it covers on described film thickness probe (1), for reducing local temperature; Supporting mechanism (4), it is arranged on the below of described film (2), and for bracketing film (2), the below of described supporting mechanism (4) arranges sputter cathode (5).Film thickness feeler mechanism described in the utility model under vacuum conditions, can carry out on-line measurement to the thickness of the film of quantity-produced vacuum splashing and plating.
Description
Technical field
The utility model relates to thickness detection mechanism, is specially a kind of film thickness feeler mechanism.
Background technology
Be correlated with in manufacturing processed at semi-conductor, many processing procedures must carry out under vacuum conditions, and vacuum splashing and plating technology is an application important technology quite widely in vacuum thin film manufacture process, replace the mode that paint and metallide are led in spray gradually in recent years, widely apply in industries such as photoelectricity, communication, semi-conductors, become important process for treating surface.And quantity-produced film under vacuum conditions, the general measurement it being carried out to thickness when continous vacuum sputter coating and the hot environment in the cavity of vacuum sputtering apparatus of being difficult to, be also difficult to realize thickness accurate, measure in real time.
Utility model content
For above-mentioned technical problem, the utility model discloses a kind of film thickness feeler mechanism, comprising: film thickness probe 1, and it is arranged on film 2, for responding to the thickness detecting described film 2; Water-cooling protective cover 3, it covers on described film thickness probe 1, for reducing local temperature; Supporting mechanism 4, it is arranged on the below of described film 2, and for bracketing film 2, the below of described supporting mechanism 4 arranges sputter cathode 5.
The beneficial effects of the utility model are by controlling water-cooling protective cover, achieving under vacuum conditions to the on-line measurement of the film thickness of quantity-produced vacuum splashing and plating.
Accompanying drawing explanation
Fig. 1 is the structure front view of film thickness feeler mechanism described in the utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail, can implements according to this with reference to specification sheets word to make those skilled in the art.
As shown in the figure, the utility model discloses a kind of film thickness feeler mechanism, comprising: film thickness probe 1, and it is arranged on film 2, for responding to the thickness detecting described film 2; Water-cooling protective cover 3, it covers on described film thickness probe 1, for reducing local temperature; Supporting mechanism 4, it is arranged on the below of described film 2, and for bracketing film 2, the below of described supporting mechanism 4 arranges sputter cathode 5.
In the course of the work; the continuous flow procedure of film 2 all completes in vacuum cavity; described film 2 transmits under the support effect of supporting mechanism 4; be arranged on the thickness of the film thickness probe 1 induction testing film 2 on film 2 simultaneously; and the water-cooling protective cover 3 covered on described film thickness probe 1; in time heat is taken away by water cycle, reduce local temperature, ensure the normal work of film thickness probe 1.
Although embodiment of the present utility model is open as above, but it is not restricted to listed in specification sheets and embodiment utilization, it can be applied to various applicable field of the present utility model completely, for those skilled in the art, can easily realize other amendment, therefore do not deviating under the universal that claim and equivalency range limit, the utility model is not limited to specific details and illustrates here and the legend described.
Claims (1)
1. a film thickness feeler mechanism, is characterized in that, comprising:
Film thickness probe (1), it is arranged on film (2), for responding to the thickness detecting described film (2);
Water-cooling protective cover (3), it covers on described film thickness probe (1), for reducing local temperature;
Supporting mechanism (4), it is arranged on the below of described film (2), and for bracketing film (2), the below of described supporting mechanism (4) arranges sputter cathode (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420380872.0U CN204039491U (en) | 2014-07-11 | 2014-07-11 | A kind of film thickness feeler mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420380872.0U CN204039491U (en) | 2014-07-11 | 2014-07-11 | A kind of film thickness feeler mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204039491U true CN204039491U (en) | 2014-12-24 |
Family
ID=52240180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420380872.0U Expired - Fee Related CN204039491U (en) | 2014-07-11 | 2014-07-11 | A kind of film thickness feeler mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204039491U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104152855A (en) * | 2014-07-11 | 2014-11-19 | 苏州诺耀光电科技有限公司 | Film thickness detecting mechanism |
-
2014
- 2014-07-11 CN CN201420380872.0U patent/CN204039491U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104152855A (en) * | 2014-07-11 | 2014-11-19 | 苏州诺耀光电科技有限公司 | Film thickness detecting mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141224 Termination date: 20190711 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |