CN204039490U - Water-cooled drum under a kind of vacuum state - Google Patents
Water-cooled drum under a kind of vacuum state Download PDFInfo
- Publication number
- CN204039490U CN204039490U CN201420380496.5U CN201420380496U CN204039490U CN 204039490 U CN204039490 U CN 204039490U CN 201420380496 U CN201420380496 U CN 201420380496U CN 204039490 U CN204039490 U CN 204039490U
- Authority
- CN
- China
- Prior art keywords
- water
- water inlet
- cooled drum
- vacuum state
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses the water-cooled drum under a kind of vacuum state, comprise: housing, it comprises outer steel sleeve (1), interior steel bushing (2) and vertical and described outer steel sleeve (1) and interior steel bushing (2) flow-guiding bar (3), one end of the axis of described housing arranges water inlet plate (4) and the water inlet axis of guide (5), the other end arranges water returning disk (6), water inlet pipe (7) and return water pipe (8), and the part of stretching out housing of described water inlet pipe (7) and return water pipe (8) connects dynamic seal step cover (9), movable sealing sleeve (10) and dynamic seal gland (11), and synchronizing wheel (12) is axially installed successively, flange (13) alive and swivel joint (14).Water-cooled drum structure under vacuum state described in the utility model is simple, and water is only in top layer flowing, only cools top layer, and alleviates the overall weight of water-cooled drum.
Description
Technical field
The utility model relates to a kind of water cooling plant, is specially the water-cooled drum under a kind of vacuum state.
Background technology
Be correlated with in manufacturing processed at semi-conductor, many processing procedures must carry out under vacuum conditions, and vacuum splashing and plating technology is an application important technology quite widely in vacuum thin film manufacture process, replace the mode that paint and metallide are led in spray gradually in recent years, widely apply in industries such as photoelectricity, communication, semi-conductors, become important process for treating surface.And be generally all hot environment in sputter process, and traditional water-cooled drum weight is comparatively large, use inconvenience, cooling-down effect is unsatisfactory.
Utility model content
For above-mentioned technical problem, the utility model discloses the water-cooled drum under a kind of vacuum state, comprise: housing, it comprises outer steel sleeve 1, interior steel bushing 2 and vertical and described outer steel sleeve 1 and interior steel bushing 2 flow-guiding bar 3, one end of the axis of described housing arranges water inlet plate 4 and the water inlet axis of guide 5, the other end arranges water returning disk 6, water inlet pipe 7 and return water pipe 8, and the part of stretching out housing of described water inlet pipe 7 and return water pipe 8 connects dynamic seal step cover 9, movable sealing sleeve 10 and dynamic seal gland 11, and axially synchronizing wheel 12 is installed successively, flange 13 alive and swivel joint 14.
The beneficial effects of the utility model are that the water-cooled drum structure under described vacuum state is simple, and water is only in top layer flowing, only cools top layer, while the cooling-down effect of realizing ideal, can alleviate the overall weight of water-cooled drum.
Accompanying drawing explanation
Fig. 1 is the structure sectional view of the water-cooled drum under vacuum state described in the utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail, can implements according to this with reference to specification sheets word to make those skilled in the art.
As shown in the figure, the utility model discloses the water-cooled drum under a kind of vacuum state, comprise: housing, it comprises outer steel sleeve 1, interior steel bushing 2 and vertical and described outer steel sleeve 1 and interior steel bushing 2 flow-guiding bar 3, one end of the axis of described housing arranges water inlet plate 4 and the water inlet axis of guide 5, the other end arranges water returning disk 6, water inlet pipe 7 and return water pipe 8, and the part of stretching out housing of described water inlet pipe 7 and return water pipe 8 connects dynamic seal step cover 9, movable sealing sleeve 10 and dynamic seal gland 11, and synchronizing wheel 12, live flange 13 and swivel joint 14 are axially installed successively.Described swivel joint 14 is HS-GF type swivel joint, and the structure of the water-cooled drum under described vacuum state is simple, and water is only in top layer flowing, only cools top layer, while the cooling-down effect of realizing ideal, can alleviate the overall weight of water-cooled drum.
Although embodiment of the present utility model is open as above, but it is not restricted to listed in specification sheets and embodiment utilization, it can be applied to various applicable field of the present utility model completely, for those skilled in the art, can easily realize other amendment, therefore do not deviating under the universal that claim and equivalency range limit, the utility model is not limited to specific details and illustrates here and the legend described.
Claims (1)
1. the water-cooled drum under a vacuum state, it is characterized in that, comprise: housing, it comprises outer steel sleeve (1), interior steel bushing (2) and vertical and described outer steel sleeve (1) and interior steel bushing (2) flow-guiding bar (3), one end of the axis of described housing arranges water inlet plate (4) and the water inlet axis of guide (5), the other end arranges water returning disk (6), water inlet pipe (7) and return water pipe (8), and the part of stretching out housing of described water inlet pipe (7) and return water pipe (8) connects dynamic seal step cover (9), movable sealing sleeve (10) and dynamic seal gland (11), and synchronizing wheel (12) is axially installed successively, flange (13) alive and swivel joint (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420380496.5U CN204039490U (en) | 2014-07-11 | 2014-07-11 | Water-cooled drum under a kind of vacuum state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420380496.5U CN204039490U (en) | 2014-07-11 | 2014-07-11 | Water-cooled drum under a kind of vacuum state |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204039490U true CN204039490U (en) | 2014-12-24 |
Family
ID=52240179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420380496.5U Expired - Fee Related CN204039490U (en) | 2014-07-11 | 2014-07-11 | Water-cooled drum under a kind of vacuum state |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204039490U (en) |
-
2014
- 2014-07-11 CN CN201420380496.5U patent/CN204039490U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141224 Termination date: 20190711 |