CN204007944U - 微机电传感器 - Google Patents
微机电传感器 Download PDFInfo
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- CN204007944U CN204007944U CN201420288723.1U CN201420288723U CN204007944U CN 204007944 U CN204007944 U CN 204007944U CN 201420288723 U CN201420288723 U CN 201420288723U CN 204007944 U CN204007944 U CN 204007944U
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- 239000000084 colloidal system Substances 0.000 abstract 1
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CN201420288723.1U CN204007944U (zh) | 2014-05-31 | 2014-05-31 | 微机电传感器 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104665851A (zh) * | 2015-01-06 | 2015-06-03 | 上海交通大学 | 微型压力传感器及其封装方法 |
CN104900599A (zh) * | 2015-04-16 | 2015-09-09 | 歌尔声学股份有限公司 | 集成传感器的封装结构和封装方法 |
CN106744644A (zh) * | 2016-10-11 | 2017-05-31 | 中国科学院地质与地球物理研究所 | 一种mems传感器低应力封装管壳及封装系统 |
CN110501097A (zh) * | 2019-08-29 | 2019-11-26 | 苏州感芯微系统技术有限公司 | 一种低应力的硅压传感器模块 |
CN110573852A (zh) * | 2017-01-18 | 2019-12-13 | 株式会社鹭宫制作所 | 压力传感器 |
CN110793689A (zh) * | 2019-11-30 | 2020-02-14 | 南通远辰测控设备有限公司 | 一种高效电力测功机 |
-
2014
- 2014-05-31 CN CN201420288723.1U patent/CN204007944U/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104665851A (zh) * | 2015-01-06 | 2015-06-03 | 上海交通大学 | 微型压力传感器及其封装方法 |
CN104900599A (zh) * | 2015-04-16 | 2015-09-09 | 歌尔声学股份有限公司 | 集成传感器的封装结构和封装方法 |
CN106744644A (zh) * | 2016-10-11 | 2017-05-31 | 中国科学院地质与地球物理研究所 | 一种mems传感器低应力封装管壳及封装系统 |
CN110573852A (zh) * | 2017-01-18 | 2019-12-13 | 株式会社鹭宫制作所 | 压力传感器 |
CN110573852B (zh) * | 2017-01-18 | 2021-07-20 | 株式会社鹭宫制作所 | 压力传感器以及压力传感器的制造方法 |
CN110501097A (zh) * | 2019-08-29 | 2019-11-26 | 苏州感芯微系统技术有限公司 | 一种低应力的硅压传感器模块 |
CN110793689A (zh) * | 2019-11-30 | 2020-02-14 | 南通远辰测控设备有限公司 | 一种高效电力测功机 |
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Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Effective date of registration: 20200612 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |