CN203929672U - Object detection device - Google Patents
Object detection device Download PDFInfo
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- CN203929672U CN203929672U CN201420358669.3U CN201420358669U CN203929672U CN 203929672 U CN203929672 U CN 203929672U CN 201420358669 U CN201420358669 U CN 201420358669U CN 203929672 U CN203929672 U CN 203929672U
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- thing surface
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- 238000001514 detection method Methods 0.000 title claims abstract description 92
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000007547 defect Effects 0.000 abstract description 3
- 238000007689 inspection Methods 0.000 abstract description 3
- 238000005728 strengthening Methods 0.000 abstract 1
- 101001031591 Mus musculus Heart- and neural crest derivatives-expressed protein 2 Proteins 0.000 description 27
- 238000010586 diagram Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 3
- 230000037361 pathway Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model relates to an article detection device, include: projecting the surface of the object to be detected by a second light source, so that the surface of the object to be detected is reflected by a first detection device to capture the image of the surface of the object to be detected; projecting the light source to the grating by a first light source, making the grid on the grating refracted to the surface of the object to be detected by a second spectroscope, and then making the grid reflected by the first spectroscope and refracted by a second detection device to capture the image of the grid on the surface of the object to be detected; therefore, not only the first detection device can be used to observe the surface image of the object to be detected, but also the second detection device can be used to perform the dent and crack inspection for strengthening the surface defect characteristics.
Description
Technical field
The utility model system has about a kind of pick-up unit, espespecially a kind of object detecting device in order to detect on the object at tool reflecting surface.
Background technology
General electronic package is because volume is small, check quite difficulty if there is flaw, therefore in high-tech industry, usual CCD camera lens detects, on the one hand flaw position is amplified, detect on the other hand certain position at its flaw position by digitized image, to remedy processing procedure or superseded program.
A kind of device that coordinates CCD camera lens to detect flaw with grating was once used, the distortion of the mesh that it mainly utilizes grating to produce, see through certain position, position that CCD camera lens detects flaw, in the Defect Detection of wafer crystal grain, also once adopted this kind of detection mode, it is conventionally under specific light source and angle, see through CCD camera lens through manual type and observe grating because being subject to flaw position to affect produced distortion of the mesh state, detect the flaw position of wafer crystal grain.
Utility model content
But coordinate CCD camera lens to detect flaw no doubt by industry is usual with grating, only prior art adopts this kind of mode to detect some problems of normal experience in the Defect Detection of wafer crystal grain, because wafer grain surface has the gloss of incandescent, add the flatness of wafer grain surface, wafer grain surface is indulged flaw slight crack, under specific light source and angle, and the reflection of wafer grain surface gloss, to make CCD camera lens be subject to the interference of surface gloss reflection source, and be difficult for detecting flaw slight crack.
So the purpose of this utility model, is to provide a kind of while according to need or switches different pick-up units the object detecting device that carries out flaw indenture, slight crack detection to detecting thing.
Another object of the present utility model, is to provide one to disturb being subject to surface gloss reflection source, and is difficult for detecting the object detecting device that the detection thing of flaw indenture, slight crack detects.
Another object of the present utility model, is to provide a kind of and can mat common optical pathways carries out to detecting thing the object detecting device that flaw indenture, slight crack detect with different pick-up units.
An object more of the present utility model, is to provide a kind of while according to need or switching or different pick-up unit to carry out the object detecting device of flaw indenture, slight crack detection to detecting thing.
An object more again of the present utility model, is to provide one to disturb being subject to surface gloss reflection source, and is difficult for detecting the object detecting device that the detection thing of flaw indenture, slight crack detects.
According to the object detecting device of the utility model object, comprise: one first pick-up unit and a second detection device, the two respectively has different focal and captures respectively detection thing surface image, and wherein, second detection device acquisition detects grating grid variation person in thing surface image.
According to the object detecting device of another object of the utility model, comprising: the grating of a tool grid, through one first light source projects in detect thing surface; One second detection device, detects thing surface tool grid image through one first spectroscopical refraction acquisition, is changed and is observed the flaw indenture, the slight crack person that detect thing by grating grid in image.
According to the object detecting device of the another object of the utility model, comprising: a secondary light source, projection detects thing surface, and it reflects to form one first and detects light path; The grating of one tool grid, forms one second detection light path through one first light source projects in detecting thing surface; This first detection optical routing one first pick-up unit acquisition detects the image on thing surface; This second optical routing one second detection device acquisition detects the image of thing surface tool grid.
According to the utility model object detecting device of an object again, comprising: one first pick-up unit, detects thing surface image in order to acquisition; One first spectroscope, it is located at the first pick-up unit and detects in the axial direction that is linked to be of thing; One second detection device, it is to should the first spectroscope, to capture the detection thing surface image of the first spectroscope refraction; One second spectroscope, is located at the first pick-up unit and detects axially upper that thing is linked to be, and it is provided with the grating of tool grid, and one first light source, to grating projection source, makes the grid on grating refract to and detect thing surface through the second spectroscope; One secondary light source, is positioned at the second spectroscope and detects between thing surface, and is located at the first pick-up unit and detects on the vertical axial that thing is linked to be.
According to the utility model object detecting device of an object more again, comprising: a grating, has grid, and be subject to one first light source projects and grid is projeced into a detection thing surface; One second detection device, it is through from one first spectroscopical refraction, and captures the detection thing surface image of the tool grid of this detection thing surface reflection.
The object detecting device of the utility model embodiment, its shielding of grating with tool grid is placed in the first light source front end, it is projeced in the detection faces that detects thing, again by the correct focal length of CCD camera lens framework of second detection device, clear observation detects thing surface mesh and changes, and indicates flaw location and show with screen image; It is in detecting in the required optical facilities of CCD Shot Detection project of former the first pick-up unit of thing, the sensing system of second group of tool part same light path of framework again, be not subject to light source reflection interference and the grid image of the trickle flaw slight crack in clear performance detection thing surface to obtain simultaneously, user not only can the first pick-up unit observation detect thing surface image, also can or switch the trickle flaw indenture in surface, the slight crack inspection of making to get rid of light source reflection interference with second detection device simultaneously, not only can promote detection speed, also can reach the object of accurate detection.
Brief description of the drawings
Fig. 1 is mechanism's configuration schematic diagram of the utility model embodiment.
Fig. 2 is the pathway schematic diagram of the first detection light path in the utility model embodiment.
Fig. 3 is the pathway schematic diagram of the second detection light path in the utility model embodiment.
Fig. 4 is the grid schematic diagram of grating in the utility model embodiment.
Fig. 5 is the schematic diagram that distortion appears in the grid of grating in the utility model embodiment.
In the utility model embodiment, there is the grid of grating that distortion sentences image and be shown in the schematic diagram of screen in Fig. 6.
Symbol description
1 first pick-up unit 2 detects thing
3 first spectroscope 31 mirror bodies
4 second detection device 5 second spectroscopes
51 mirror body 52 gratings
53 first light source 6 secondary light sources
L1 first detects light path L2 second and detects light path
Embodiment
Refer to Fig. 1, the object detecting device of the utility model embodiment, the device shown in can figure is that example explains; Wherein, comprising:
One first pick-up unit 1, it can be one and has Charged Coupled Device (CCD) or the complementary metal oxide semiconductor (CMOS) of the first focal length, and is vertical setting with detection thing 2;
One first spectroscope 3, its mirror body 31 is made as 45 degree angle excursions of a bottom right, upper left, and is 1 correspondence of the first pick-up unit, and is located at the first pick-up unit 1 and detects on the vertical axial that thing 2 is linked to be, and is vertical adjacent with the first pick-up unit 1;
One second detection device 4, it can be Charged Coupled Device (CCD) or a complementary metal oxide semiconductor (CMOS) with the second focal length, and described the second focal length is less than the first focal length of the first pick-up unit 1; Second detection device 4 is and is horizontally disposed with detection thing 2 surfaces, and be 90 degree angle settings with the first pick-up unit 1, this first spectroscope 3 described in its level correspondence, and to be level adjacent with this first spectroscope 3, to capture detection thing 2 surface images of the first spectroscope refraction;
One second spectroscope 5, it is made as 45 degree angle excursions of a bottom right, upper left, and vertical adjacent and corresponding with the first spectroscope 3, and be located at the first pick-up unit 1 and detect on the vertical axial that thing 2 is linked to be, it is provided with and is positioned at mirror body 51 1 sides and the grating 52 parallel with aforementioned vertical axial, this grating 52 is 45 degree angles with mirror body 51, and is vertical with second detection device 4; Grating 52 surfaces have regular latticed striped, its opposite side with respect to mirror body 51 is provided with the first light source 53 that light emitting diode (IR) is launched, this first light source 53, to grating 52 projection sources, makes the grid on grating 52 refract to and detect thing 2 surfaces through the mirror body 51 of the second spectroscope 5;
One secondary light source 6, is an annular light source, is positioned at the second spectroscope 5 and detects between thing 2 surfaces, and being located at the first pick-up unit 1 and detecting on the vertical axial that thing 2 is linked to be.
Refer to Fig. 2, this secondary light source 6 with ring-type and vertical direction towards detecting the surperficial projection source of thing 2, make light path be 180 degree reflections on detection thing 2 surfaces, and through the mirror body 31 of the second spectroscope 5 mirror bodies 51 and the first spectroscope 3, and for thering is the CCD camera lens institute pick-up image of the first pick-up unit 1 of the first focal length; This to detecting thing 2 surface projections, is first detection light path L1 and make the light path of the first pick-up unit 1 pick-up image by secondary light source 6.
Refer to Fig. 3, the first light source 53 that the IR of this second spectroscope 5 launches with horizontal direction towards grating 52 projection sources, make grid on grating 52 mirror body 51 deviations through 45 degree angle excursions, detect thing 2 surfaces and be incident upon with 90 degree angle refractive directions, by the grid of this grating 52 and the 2 surface images reflections of detection thing, mirror body 31 through the second spectroscope 5 mirror bodies 51 and the first spectroscope 3 reflects, and for thering is the CCD camera lens institute pick-up image of second detection device 4 of the second focal length, this IR by the second spectroscope 5 launches the first light source 53 and projects to grating 52, and the light path that makes second detection device 4 pick-up images is the second detection light path L2.
It is different that described the first detection light path L1 and second detects the light emitting source of light path L2, but it is identical by the light path part that detects thing 2 surface reflection → the second spectroscope 5 mirror body 51 → the first spectroscopes 3, and form difference from the first spectroscope 3, though it is jointly obtained and detects thing 2 surface images via one first spectroscope, the first pick-up unit 1 is directly to capture through the first spectroscope, and obtains the direct image that detects grid on the surperficial no-raster 52 of thing 2; 4 of second detection devices reflect via the first spectroscope 3 and capture detection thing 2 surface images of grid on tool grating 52, operator's mat manipulates by the first pick-up unit 1 or second detection device 4 pick-up images, system can be controlled by the first detection light path L1 or the second detection light path L2 and carry out, to obtain the capture result of different focal CCD camera lens.
In operation, can the two determine to want by the first pick-up unit 1 via the first detection light path L1 pick-up image simultaneously or via switching, or by second detection device 4 via the second detection light path L2 pick-up image, and the image of acquisition can transmit reaction on the screen that can read; Wherein, the first pick-up unit 1 is via the first detection light path L1, and due to vertical this detection thing 2 of CCD camera lens, therefore, its taker of picking is the surface image of obtaining from detecting thing 2 fronts; Second detection device 4 is via the second detection light path L2, due to non-perpendicular parallel these detection thing 2 surfaces accordingly of second detection device 4, therefore, its taker of picking is to detect the surface image of thing 2 through 31 points of anaclasis of mirror body of the first spectroscope 3, therefore can offset light source to detecting the impact of thing 2 surface reflections, make the CCD camera lens of second detection device 4 can not be subject to light source reflection interference to capture to detect thing 2 trickle flaw, the indenture slight cracks in surface.
Refer to Fig. 4, described grating 52 is for having the shielding of regular latticed striped, light source projects and makes regular latticed striped detecting thing surface while running into flaw slight crack to grating 52, as shown in Figure 5, can know the variation that observes flaw slight crack place grid by CCD camera lens, and as shown in Figure 6, the variation of flaw slight crack place grid can be converted into the image of irising wipe demonstration with square box, the portion that presents sign flaw indenture, slight crack is arranged in display screen, for operating personnel's interpretation easily.
The object detecting device of the utility model embodiment, its grating 52 shieldings with tool grid are placed in the first light source 53 front ends, it is projeced in the detection faces that detects thing 2, again by the correct focal length of CCD camera lens framework of second detection device 4, clear observation detects thing 2 surface meshs and changes, and is indicated flaw location and show with screen image; It is in detecting in the required optical facilities of CCD Shot Detection project of former the first pick-up unit 1 of thing 2, the sensing system of second group of tool part same light path of framework again, be not subject to light source reflection interference and the grid image of the surperficial trickle flaw indenture of clear performance detection thing 2, slight crack to obtain simultaneously, user not only can the first pick-up unit 1 observation detect thing 2 surface images, also the changeable trickle flaw slight crack inspection in surface of making to get rid of light source reflection interference with second detection device 4, not only can promote detection speed, also can reach the object of accurate detection.
Only as described above, it is only preferred embodiment of the present utility model, when not limiting the scope that the utility model is implemented with this, the simple equivalence of generally doing according to the utility model claim and utility model description changes and modifies, and all still belongs in the scope that the utility model patent contains.
Claims (11)
1. an object detecting device, is characterized in that, comprising:
The first pick-up unit and second detection device, the two respectively has different focal and captures respectively detection thing surface image, and wherein, second detection device acquisition detects grating grid variation person in thing surface image.
2. object detecting device as claimed in claim 1, is characterized in that, this first pick-up unit and second detection device are jointly obtained and detected thing surface image via the first spectroscope.
3. an object detecting device, is characterized in that, comprising:
The grating of tool grid, through the first light source projects in detect thing surface;
Second detection device, detects thing surface tool grid image through first spectroscopical refraction acquisition, is changed and is observed the flaw indenture, the slight crack person that detect thing by grating grid in image.
4. an object detecting device, is characterized in that, comprising:
Secondary light source, projection detects thing surface, and it reflects to form the first detection light path;
The grating of tool grid, forms the second detection light path through the first light source projects in detecting thing surface;
This first detection optical routing the first pick-up unit acquisition detects the image on thing surface; This second optical routing second detection device acquisition detects the image of thing surface tool grid.
5. object detecting device as claimed in claim 4, it is characterized in that, this first detection light path and second detects light path and forms difference at the first spectroscope, make the first pick-up unit directly capture and detect thing surface image through the first spectroscope, via the first spectroscope refraction, acquisition detects the image of thing surface tool grid to second detection device.
6. the object detecting device as described in claim 1,3,4 any one, is characterized in that, this grating grid is first after the second spectroscope refraction, then is projected to detection thing surface.
7. the object detecting device as described in claim 1,3,4 any one, is characterized in that, the detection thing surface image of this acquisition is indicated flaw location and uses image shower with screen.
8. the object detecting device as described in claim 1,3,4 any one, is characterized in that, this second detection device and the non-perpendicular corresponding person in detection thing surface.
9. an object detecting device, is characterized in that, comprising:
The first pick-up unit, detects thing surface image in order to acquisition;
The first spectroscope, it is located at the first pick-up unit and detects in the axial direction that is linked to be of thing;
Second detection device, it is to should the first spectroscope, to capture the detection thing surface image of the first spectroscope refraction;
The second spectroscope, is located at the first pick-up unit and detects axially upper that thing is linked to be, and it is provided with the grating of tool grid, and the first light source, to grating projection source, makes the grid on grating refract to and detect thing surface through the second spectroscope;
Secondary light source, is positioned at the second spectroscope and detects between thing surface, and is located at the first pick-up unit and detects on the vertical axial that thing is linked to be.
10. an object detecting device, is characterized in that, comprising:
Grating, has grid, and be subject to the first light source projects and by grid be projeced into detect thing surface;
Second detection device, it is through from first spectroscopical refraction, and captures the detection thing surface image of the tool grid of this detection thing surface reflection.
11. object detecting devices as claimed in claim 10, is characterized in that, the grid of this grating is first after the second spectroscope refraction, then is projected to detection thing surface.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103203617U TWM487433U (en) | 2014-03-04 | 2014-03-04 | Object inspection device |
| TW103203617 | 2014-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203929672U true CN203929672U (en) | 2014-11-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420358669.3U Expired - Fee Related CN203929672U (en) | 2014-03-04 | 2014-06-30 | Object detection device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN203929672U (en) |
| TW (1) | TWM487433U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897680A (en) * | 2014-03-04 | 2015-09-09 | 万润科技股份有限公司 | Object detection method and device |
| CN115165920A (en) * | 2022-09-06 | 2022-10-11 | 南昌昂坤半导体设备有限公司 | Three-dimensional defect detection method and detection equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI798586B (en) * | 2020-09-10 | 2023-04-11 | 萬潤科技股份有限公司 | Object defect inspection method and device |
-
2014
- 2014-03-04 TW TW103203617U patent/TWM487433U/en not_active IP Right Cessation
- 2014-06-30 CN CN201420358669.3U patent/CN203929672U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897680A (en) * | 2014-03-04 | 2015-09-09 | 万润科技股份有限公司 | Object detection method and device |
| CN104897680B (en) * | 2014-03-04 | 2017-09-05 | 万润科技股份有限公司 | Object detection method and device |
| CN115165920A (en) * | 2022-09-06 | 2022-10-11 | 南昌昂坤半导体设备有限公司 | Three-dimensional defect detection method and detection equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM487433U (en) | 2014-10-01 |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20190630 |
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| CF01 | Termination of patent right due to non-payment of annual fee |