TWI798586B - Object defect inspection method and device - Google Patents

Abstract

The present invention is an inspection method and device for object defects, including: providing an object to be inspected; providing a light guide module, which is provided with a light source, a grating and a refraction lens; providing a defect inspection unit; The defect inspection unit judges whether there is a defect on the surface of the object according to the light source of the light source irradiating the grating and refracting the grating image on the surface of the object through the refraction lens; the light guide module is directly adjacent to the object while maintaining a distance Object, there is no light source under the light guide module to irradiate the object, so that the defect inspection unit directly captures and captures the grating image that only a single light source is refracted to the object and reflected; thereby avoiding the light source Directly illuminate the surface of the object to cause interference.

Description

Object defect inspection method and device

The present invention relates to a defect inspection method and device, in particular to an inspection method and device for inspecting the surface of an object and inspecting the defect of the object by reflecting the surface image of the object.

By the way, the volume of general electronic components is quite small, and it is difficult to inspect with the naked eye if a defect occurs. Therefore, in the high-tech industry, a CCD lens is often used for inspection. On the one hand, the defect is enlarged, and on the other hand, the defect is inspected through digital images. The exact position and defect status of the part, so as to perform remedial or elimination procedures; a prior art patent application with publication number I544213 "object detection method and device" proposed by the applicant, the patent application uses a first light source to project the detection object The surface is reflected by a first detection unit to capture the surface image of the detection object; and a second light source is used to project the light source to the grating, so that the grid on the grating is refracted to the surface of the detection object through a second beam splitter, and then made Reflected by a first beam splitter and refracted by a second detection unit to capture the image of the grid on the surface of the test object, thereby using the first detection unit to observe the image of the surface of the test object, and using the second detection unit to enhance the characteristics of surface defects Dent, crack inspection.

The previous technology of the patent application No. I544213 "Object Detection Method and Device" is that due to the flatness and super bright gloss of the surface of the electronic component, there are defects or cracks on the surface of the electronic component, and the surface of the detection object is projected on the first light source. When the reflection is captured by a first detection unit to capture the surface image of the detection object, under the direct irradiation of the first light source, the reflection of the surface gloss of the electronic component will cause the second light source to project to the grating so that the grid on the grating passes through a first The grating image refracted by the two beam splitters to the surface of the detection object is affected by the first light source to reduce its reflected energy, so that the second detection unit captures the image of the grid on the surface of the detection object and is interfered by the light source, making it difficult to detect electrons. Defects or cracks in the surface of a component.

Therefore, the object of the present invention is to provide a method for inspecting object defects that can overcome light source interference.

Another object of the present invention is to provide an inspection device capable of overcoming object defects caused by light source interference.

The object defect inspection method according to the object of the present invention includes: providing an object to be inspected; providing a light guide module, which is provided with a light source, a grating and a refraction through lens, and the grating has a plurality of lines; providing A defect inspection unit is equipped with a CCD lens; the defect inspection unit judges whether there is a defect on the surface of the object according to the light of the light source irradiating the grating and refracting the grating image on the surface of the object through the refraction lens; wherein, the light The guiding module is directly adjacent to the object while maintaining a distance, and there is no light source under the light guiding module to irradiate the object, so that the defect inspection unit directly captures and captures only a single light source refracted to The raster image that the object reflects.

An object defect inspection device according to another object of the present invention is a device for performing the object defect inspection method described above.

In the object inspection method and device according to the embodiment of the present invention, since the light guide module is directly adjacent to the object on the tray while maintaining a distance, there is no light source below the light guide module to detect the object. Irradiation, so that the defect inspection unit directly captures and captures only a single light source refracted to the object and reflects the grating image, effectively avoiding the dual light source method of the first and second light sources in the prior art, and because one of the first light sources directly Irradiating the surface of the object interferes with the inspection function of the defect inspection unit, so as to achieve the purpose of overcoming the interference of the light source.

Please refer to FIG. 1 , any embodiment of the present invention can be described by using a tray 5 carrying a plurality of objects 51 arranged in a matrix as shown in the figure as an example. There are a plurality of reference points 52, and each of the objects 51 has a width D1.

Referring to Fig. 2, 3, the first embodiment of the present invention can be described as an example with the device shown in the figure; This device is provided with: A loading platform T for placing the loading tray 5 carrying a plurality of objects 51 to be inspected; A light guide module 1 is installed above the stage T. The light guide module 1 is provided with a light source 11, a grating 12 with a plurality of regular lines 121 and a forty-five-degree deflection from top to bottom, left to right. Angle of a refraction lens 13, the grating 12 is vertically erected and forms an angle of forty-five degrees with the refraction lens 13; wherein, each of the lines 121 of the grating 12 is parallel to each other and does not overlap with each other and The intersecting straight lines keep a distance D2 between every two lines 121, and the grating 12 is located on the projection path of the light source 11 between the light source 11 and the refracting lens 13; A defect inspection unit 2 can be a charge-coupled device (CCD) or a complementary metal-oxide-semiconductor (CMOS) area scan camera (area scan camera) with a first resolution, which is arranged on the stage T and the light guide On the vertical Z-axis formed by the refraction lens 13 of the guide module 1 , the light guide module 1 is directly adjacent to and located between the defect inspection unit 2 and the carrier plate 5 while maintaining a distance.

Referring to Fig. 4 and 5, the light from the light source 11 is irradiated on the grating 12, and is deflected downward through the refraction lens 13 at an angle of forty-five degrees, and downwards at an angle of ninety degrees. The illumination light path L1 is vertically irradiated on the surface of the object 51, and projects the plurality of lines 121 of the grating 12 onto the surface of the object 51 to form a grating image as shown in FIG. surface, and reflect upwards and pass through the refraction lens 13 to the CCD lens of the defect inspection unit 2 to form an inspection optical path L2 and transmit the grating image to the defect inspection unit 2; The captured grating image is used to determine whether there is a defect on the surface of the object 51; that is, the inspection optical path L2 for the defect inspection unit 2 to capture the grating image is to pass the light of the light source 11 that irradiates the grating 12 through the The illuminating light path L1 irradiated on the surface of the object 51 by refracting through the lens 13 is formed by reflecting through the refracting through lens 13 upwards to the defect inspection unit 2 .

Please refer to Figures 5 and 6, the grating image is simultaneously projected onto the surface of a plurality of objects 51 covering the carrier 5, and the plurality of lines 121 of the grating image are set to have a distance D2 between each two lines 121 that is smaller than the distance D2 between each object 51. The width D1, and the same line 121 is simultaneously projected onto the surface of a plurality of objects 51 arranged vertically on the carrier plate 5; the defect inspection unit 2 checks the raster images on a single object 51 one by one, Since the surface of the object 51 will reflect the light irradiated by the light source 11, there is no area covered by a plurality of lines 121 on the surface of the object 51. The white image shown in FIG. 6 and the area covered by a plurality of lines 121 are The black image shown in Figure 6 produces a black and white raster image.

Please refer to FIGS. 7 and 8. When there is a defect A that may be a dent, a crack, etc. on the object 51, the raster image will show a plurality of lines 121 surrounding the defect A on the object 51. A region showing deformation, the deformation of the line 121 is based on the position of the defect A, the closer to the position of the defect A, the larger the deformation range of the line 121 originally in a parallel state, and the larger the deformation range of the line 121 area, it can be judged whether there is a defect.

The object defect inspection method and device of the first embodiment of the present invention, since the light guide module 1 is directly adjacent to the object 51 of the carrier plate 5 while maintaining a distance, there is no object under the light guide module 1 There is no light source to irradiate the object 51, so that the defect inspection unit 2 directly captures and captures only a single light source 11 refracted to the object 51 and reflects the grating image, effectively avoiding the prior art using the first and second light sources. In the way of light source, because one of the first light sources directly irradiates the surface 51 of the object and causes interference with the inspection function of the defect inspection unit 2, the purpose of overcoming light source interference is achieved.

Please refer to FIG. 9, the second embodiment of the present invention, the defect inspection unit 2 performs the defect inspection of the object 51 as disclosed in the above-mentioned first embodiment, so it will not be described again, and its difference from the above-mentioned first embodiment is: more Install a beam splitter 3A above the vertical Z axis formed by the stage T and the light guide module 1, and then set the defect inspection unit 2 on one side of the beam splitter 3A, so that the defect The inspection unit 2 and the beam splitter 3A form a forty-five-degree angle; the light source 11 reflects from the surface of the object 51 and passes through the refraction lens 13, and then is refracted by the beam splitter 3A to the inspection optical path L2 of the defect inspection unit 2 The grating image is transmitted to the defect inspection unit 2; wherein, the beam splitter 3A is in a left-upper-right-down direction and is parallel to the deflection angle of the refraction lens 13, and the beam splitter 3A can also be arranged in a An orientation of lower left, upper right, and an included angle of 45 degrees with the defect inspection unit 2A, but not limited thereto.

In the second embodiment of the present invention, the defect inspection unit 2 is arranged on one side of the vertical Z axis formed by the beam splitter 3A, the stage T and the light guide module 1, so that this embodiment not only retains the above-mentioned The effect mentioned in the first embodiment further has the function of greatly reducing the overall height of the machine and observing the grating image from the side to accurately inspect the fine defects on the surface of the object.

Please refer to Figs. 10 and 11, the optical path transmission modes of the illumination optical path L1 and the inspection optical path L2 in the third embodiment of the present invention are the same as those in the second embodiment above, so no further description is given; The difference between the third embodiment and the above-mentioned second embodiment is that a displacement inspection unit 4B is arranged above the vertical Z axis formed by the stage T and the beam splitter 3A, and the displacement inspection unit 4B can be a unit with a first displacement. A charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS) line scan camera with one resolution transmits the grating image through the beam splitter 3A to the defect inspection unit 2 through the inspection optical path L2 respectively and transmitted to the displacement inspection unit 4B through a capture optical path L3B; the capture optical path L3B is an illumination optical path that irradiates the surface of the object 51 through the refracted lens 13 through the light of the light source 11 illuminating the grating, Reflected upward through the refraction lens 13 and the beam splitter 3A to the displacement inspection unit 4B; Because the displacement inspection unit 4B is a line-scan camera, and in this embodiment, it is set to only capture and capture a line type of the line 121 in the raster image of the object 51 covering the object 51 on the tray 5 through the capturing optical path L3B. The image of the interval, the image captured in the linear interval includes the side 511 corresponding to each object 51 in the same row on the tray 5 and the reference point 52 on the tray 5 corresponding to each object 51 ; The user can use a distance D3 from the side 511 of the object 51 to the reference point 52 as a reference for whether the object 51 is offset; for example: the original system setting value of the distance D3 is 5mm, if the displacement inspection unit 4B In the image captured in the linear interval, if the distance D3 between the side 511 of the object 51 and the reference point 52 is not equal to 5 mm, it is determined that the object 51 is placed on the tray 5 The position is offset, so as to quickly judge whether there is a defect of offset in the object 51; in this embodiment, the linear distance from the side 511 of the object 51 to the reference point 52 is used as the basis for the distance D3, but it can also be The linear distance from the center point of the object 51 to the reference point 52 is used as the basis for the distance D3, but not limited thereto.

In the third embodiment of the present invention, not only can the defect inspection unit 2 quickly judge whether the object 51 has a defect according to the raster image, but also the displacement inspection unit 4B can quickly judge whether the object 51 exists according to the image of the line interval. Displacement, thereby achieving the functions of overcoming the interference of the light source, accurately inspecting the fine defects on the surface of the object 51, and judging whether the object 51 is displaced in the carrier plate 5.

But what is described above is only a preferred embodiment of the present invention, and should not limit the scope of implementation of the present invention with this, that is, all simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the description of the invention, All still belong to the scope covered by the patent of the present invention.

1: Light guide module 11: Light source 12: Grating 121: line 13: Refraction through the lens 2: Defect inspection unit 3: beam splitter 4B: Displacement inspection unit 5: Carrier 51: object 511: side 52: Reference point D1: width D2: Spacing D3: Distance L1: Irradiation light path L2: Check the optical path L3B: capture light path T: stage

FIG. 1 is a schematic diagram of a carrier plate in the first embodiment of the present invention. Fig. 2 is a schematic diagram of the mechanism configuration of the first embodiment of the present invention. Fig. 3 is a schematic diagram of multiple lines of the grating in the first embodiment of the present invention. Fig. 4 is a schematic diagram of the forming paths of the illumination light path and the inspection light path in the first embodiment of the present invention. FIG. 5 is a schematic diagram of projecting a raster image onto each object on the carrier disc in the first embodiment of the present invention. FIG. 6 is a schematic diagram of a defect inspection unit inspecting a single object in the first embodiment of the present invention. Fig. 7 is a schematic diagram of defects in the object in the first embodiment of the present invention. Fig. 8 is a schematic diagram of deformation of lines on an object in the first embodiment of the present invention. Fig. 9 is a schematic diagram of the mechanism configuration of the second embodiment of the present invention. Fig. 10 is a schematic diagram of mechanism configuration in the third embodiment of the present invention. FIG. 11 is a schematic diagram of the formation path of the extraction optical path in the third embodiment of the present invention. FIG. 12 is a schematic diagram of the wireless line image captured by the displacement inspection unit in the third embodiment of the present invention. Fig. 13 is a schematic diagram of the displacement checking unit in the third embodiment of the present invention judging whether there is a displacement.

1: Light guide module

11: Light source

12: Grating

13: Refraction through the lens

2: Defect inspection unit

5: Carrier

51: object

T: stage

Claims (10)

A method for inspecting object defects, including: providing an object to be inspected; providing a light guide module, which is provided with a light source, a grating and a refraction through lens, the grating has a plurality of lines; providing a defect inspection unit , equipped with a CCD lens; the defect inspection unit judges whether there is a defect on the surface of the object according to the light of the light source irradiating the grating and refracting the grating image on the surface of the object through the refracted lens; The object is directly adjacent to the object at a distance, and there is no light source under the light guide module to irradiate the object, so that the defect inspection unit directly captures and captures only a single light source refracted to the object and reflected. A grating image; a beam splitter is set between the light guide module and the defect inspection unit, through which the grating image is transmitted to the defect inspection unit through an inspection optical path and transmitted to a A displacement inspection unit; the extraction optical path is formed by the light of the light source irradiating the grating, passing through the refracted lens and irradiating the illumination optical path on the surface of the object, reflecting upwardly through the beam splitter to the displacement inspection unit; the The displacement inspection unit captures and captures the image of the linear interval. The inspection method for object defects as claimed in Claim 1, wherein each of the lines of the grating is a straight line that is parallel to each other and does not overlap or intersect each other. The method for inspecting object defects according to Claim 2, wherein the distance between each two lines in the raster image is smaller than the width of the object. The method for inspecting object defects as described in claim 2, wherein the same line in the raster image is simultaneously projected onto a plurality of object lists arranged vertically on the tray surface; the defect inspection unit inspects the raster images on a single object one by one. A method for inspecting object defects, including: providing an object to be inspected; providing a light guide module, which is provided with a light source, a grating and a refraction through lens, the grating has a plurality of lines; providing a defect inspection unit , is equipped with a CCD lens; the defect inspection unit judges whether there is a defect on the surface of the object according to the light of the light source irradiating the grating and refracting the grating image on the surface of the object through the refracted lens; wherein, the light guide module Directly adjacent to the object while maintaining a distance, there is no light source under the light guide module to illuminate the object, so that the defect inspection unit directly captures and captures only a single light source refracted to the object and reflected the raster image; when executing the defect inspection unit to determine whether there is a defect on the surface of the object, a displacement inspection unit is used to judge whether the object has displacement in the carrier; image. A method for inspecting object defects, comprising: providing an object to be inspected; providing a light guide module, which is provided with a light source, a grating and a refraction through lens, and the grating has a plurality of lines; wherein, the light guide The guide module is directly adjacent to the object while maintaining a distance, and there is no light source under the light guide module to illuminate the object; the light from the light source illuminates the grating and is refracted on the forming a raster image on the surface of the object; The raster image is transmitted to a displacement inspection unit through a capture optical path; the displacement detection unit captures and captures the image of the linear interval. The inspection method for object defects as described in Claim 6, wherein the extraction optical path is reflected upwards to the displacement by the light of the light source that irradiates the grating, through the refracted lens and irradiated on the surface of the object by the illumination optical path Check the cell formed. The method for inspecting object defects as described in Claim 6, wherein a beam splitter is arranged between the light guide module and a defect inspection unit, and the grating image is transmitted to a defect through an inspection optical path through the beam splitter The inspection unit is transmitted to the displacement inspection unit through the capturing optical path; the defect inspection unit is provided with a CCD lens; and the defect inspection unit judges whether there is a defect on the surface of the object according to the grating image. The method for inspecting object defects as described in any one of claims 1, 5, or 6, wherein the image captured in the linear section includes: a side of the object and a reference point on the carrier. An object defect inspection device, comprising: a device for performing the object defect inspection method described in any one of Claims 1 to 9; including: the light source, the grating, and the light refracted through the lens A guidance module, and the displacement inspection unit that captures and captures images of a line interval.

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