CN104897680B - Object detection method and device - Google Patents
Object detection method and device Download PDFInfo
- Publication number
- CN104897680B CN104897680B CN201410304801.7A CN201410304801A CN104897680B CN 104897680 B CN104897680 B CN 104897680B CN 201410304801 A CN201410304801 A CN 201410304801A CN 104897680 B CN104897680 B CN 104897680B
- Authority
- CN
- China
- Prior art keywords
- detection
- spectroscope
- detection unit
- detectable substance
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 149
- 238000007689 inspection Methods 0.000 claims abstract description 7
- 239000000126 substance Substances 0.000 claims description 65
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000007547 defect Effects 0.000 abstract description 4
- 238000005728 strengthening Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 101001031591 Mus musculus Heart- and neural crest derivatives-expressed protein 2 Proteins 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000011469 building brick Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Abstract
The present invention relates to an object detection method and device, comprising: projecting the surface of the object to be detected by a first light source, so that the surface of the object to be detected is reflected by a first detection device to capture the image of the surface of the object to be detected; projecting a light source to the grating by a second light source, enabling the grid on the grating to be refracted to the surface of the object to be detected by a second spectroscope, and then enabling the grid to be reflected, refracted by a first spectroscope and be captured by a second detection device to capture the image of the grid on the surface of the object to be detected; therefore, not only the first detection device can be used to observe the surface image of the object to be detected, but also the second detection device can be used to perform the dent and crack inspection for strengthening the surface defect characteristics.
Description
Technical field
It is espespecially a kind of to be used to carry out on the object of tool reflecting surface present invention is directed to a kind of detection method and device
The object detection method and device of detection.
Background technology
General electronic building brick is small due to volume, checks upper extremely difficult if occurring flaw, therefore in high-tech production
Usual CCD camera lenses are detected in industry, are on the one hand amplified flaw position, are on the other hand detected it by digitized image
Certain position at flaw position, to carry out remedying processing procedure or superseded program.
A kind of to coordinate CCD camera lenses to carry out detecting that the method for flaw was once used with grating, it is mainly utilized produced by grating
Distortion of the mesh, the certain position in position of flaw is detected through CCD camera lenses, was also once used in the Defect Detection of wafer die
Such a detection mode, under specific light source and angle, observation grating generally is carried out because by the flaw through manual type through CCD camera lenses for it
Distortion of the mesh state produced by the influence of defect position, to detect the flaw position of wafer die.
The content of the invention
But coordinate CCD camera lenses to carry out detecting that the method for flaw is no doubt usual for industry with grating, only prior art exists
Detected in the Defect Detection of wafer die using such a mode and often meet with some problems, because wafer die surface has incandescent
Gloss, adds the flatness on wafer die surface, makes wafer die surface is vertical to have flaw slight crack, under specific light source and angle,
The reflection of wafer die lustrous surface, will be such that CCD camera lenses are disturbed by lustrous surface reflection source, and be difficult to detect flaw
Slight crack.
Then, the purpose of the present invention, is that offer one kind can be according to need while or switch different detection units to detectable substance
Carry out flaw indenture, the object detection method of slight crack detection.
Can according to need simultaneously or switching or different detection means unit are to inspection it is another object of the present invention to provide one kind
Survey thing and carry out flaw indenture, the object detecting device of slight crack detection.
According to the object detection method of the object of the invention, including：One first detection unit and one second detection unit are provided,
It is set to capture detectable substance surface image respectively via one first spectroscope jointly with different focal；One grating for having grid is provided,
Positioned at one second spectroscope side；It is characterized in that：First detection unit and one second detection unit are each via one first inspection
Light-metering road, one second detection light path capture detectable substance surface image respectively；This first detection optical routing be located at the second spectroscope with
One first light source between detectable substance surface directly projects detectable substance surface and formed, and the second detection optical routing one secondary light source is first
The grating for projecting the tool grid reflects through the second spectroscope formed in detectable substance surface again；The first detection light path and the second detection
Both light paths by the first detection unit can capture mesh free image through switching via the first detection light path, or single by the second detection
Member captures tool grid image via the second detection light path.
According to the object detecting device of another object of the present invention, including：One first detection unit, with the first focal length, is used
To capture detectable substance surface image；One first spectroscope, it is in the axial direction that the first detection unit and detectable substance are linked to be；One
Two detection units, with the second focal length, its to should the first spectroscope, to capture the detectable substance surface shadow of the first spectroscope refraction
Picture；One second spectroscope, in the axial direction that the first detection unit and detectable substance are linked to be；The grating of one tool grid, positioned at second
Spectroscope side；It is characterized in that：The grating of the tool grid is parallel with aforementioned axial；One first light source, positioned at the second spectroscope
Between detectable substance surface, and on the vertical axial that the first detection unit and detectable substance are linked to be；First light source is with Vertical Square
To directly towards detectable substance surface projection source, and form first and detect light path and capture mesh free image for the first detection unit；
One secondary light source, is located relative to the grating opposite side of the second spectroscope, is first thrown again towards grating loss light source with horizontal direction
The second spectroscope is penetrated, and is reflected on detectable substance surface, and forms second and detects light path and capture tool grid for the second detection unit
Image；The first detection light path can be made to switch by the first detection unit via the first detection light path acquisition nothing with the second detection light path
Grid image, or by the second detection unit via the second detection light path acquisition tool grid image.
According to another object detecting device of another object of the present invention, including：One first detection unit and one second detection
Unit, respectively captures detectable substance surface image respectively via one first spectroscope jointly with different focal respectively；The light of one tool grid
Grid, positioned at one second spectroscope side；It is characterized in that：One first detection light path, by positioned at the second spectroscope and detectable substance table
One first light source between face directly projects detectable substance surface and formed；One second detection light path, this is first projected by a secondary light source
The grating of tool grid is reflected through one second spectroscope again to be formed in detectable substance surface；The first detection light path and the second detection light path
The two through switching by the first detection unit via first detection light path capture mesh free image, or by the second detection unit via
Second detection light path captures tool grid image.
The object detection method and device of the embodiment of the present invention, it is placed in before the first light source with having the shielding of the grating of grid
End, makes it be projeced into the detection faces of detectable substance, then by the correct focal length of CCD camera lens frameworks of the second detection unit, it is clear
The change of detectable substance surface mesh is observed, and indicates flaw location and is shown with screen with image；It is single in the detection of detectable substance original first
Needed for the CCD Shot Detection mesh of member in optical facilities, then second group of tool part same light path of framework sensing system, with acquirement simultaneously
The grid image of the trickle flaw slight crack in detectable substance surface is not showed clearly by light source reflection interference, user not only can be with the first inspection
Survey unit observation detectable substance surface image, also can be while or switch with the surface of the second detection unit work exclusion light source reflection interference
Trickle flaw indenture, slight crack inspection, can not only lift detection speed, also can reach the purpose accurately detected.
Brief description of the drawings
The mechanism configuration schematic diagram of Fig. 1 systems embodiment of the present invention.
The formation path schematic diagram of first detection light path in Fig. 2 systems embodiment of the present invention.
The formation path schematic diagram of second detection light path in Fig. 3 systems embodiment of the present invention.
The grid schematic diagram of grating in Fig. 4 systems embodiment of the present invention.
There is the schematic diagram deformed in the grid of grating in Fig. 5 systems embodiment of the present invention.
Is there is into deformation in the grid of grating in Fig. 6 systems embodiment of the present invention and sentences the schematic diagram that image is shown in screen.
Symbol description
The detectable substance of 1 first detection unit 2
The mirror body of 3 first spectroscope 31
The spectroscope of 4 second detection unit 5 second
The grating of 51 mirror body 52
The light source of 53 secondary light source 6 first
The detection light paths of L1 first L2 second detects light path
Embodiment
Referring to Fig. 1, the object detection method and device of the embodiment of the present invention, said exemplified by device that can be shown in figure
It is bright；Wherein, including：
One first detection unit 1, it can be a Charged Coupled Device (CCD) with the first focal length or complementary metal oxidation
Semiconductor (CMOS), and be vertical setting with detectable substance 2；
One first spectroscope 3, its mirror body 31 is set to 45 degree of angle excursions of a upper left bottom right, and single for the first detection
Corresponding to member 1, and on the vertical axial that the first detection unit 1 is linked to be with detectable substance 2, and with the first detection unit 1 in vertical
It is straight adjacent；
One second detection unit 4, it can be a Charged Coupled Device (CCD) with the second focal length or complementary metal oxidation
Semiconductor (CMOS), second focal length is less than the first focal length of the first detection unit 1；Second detection unit 4 and the table of detectable substance 2
Face is in horizontally disposed, and is set with the first detection unit 1 in 90 degree of angles, first spectroscope 3 described in its level correspondence, and
With first spectroscope 3 in horizontally adjacent, to capture the surface image of detectable substance 2 of the first spectroscope refraction；
One second spectroscope 5, it is set to 45 degree of angle excursions of a upper left bottom right, and vertical with the first spectroscope 3
It is adjacent and correspondingly, and on the vertical axial that the first detection means 1 is linked to be with detectable substance 2, it, which is provided with, is located at the side of mirror body 51
And the grating 52 axially in parallel with forenamed vertical, the grating 52 and mirror body 51 in 45 degree of angles, and with the second detection unit 4
It is perpendicular；One first light source 6, is an annular light source, between the second spectroscope 5 and the surface of detectable substance 2, and located at the first detection
On the vertical axial that unit 1 is linked to be with detectable substance 2；
The surface of grating 52 has regular latticed striped, and the opposite side of grating 52 relative to mirror body 51 is provided with light-emitting diodes
The secondary light source 53 that pipe (IR) is launched, the secondary light source 53 makes the grid on grating 52 through second to the projection source of grating 52
The mirror body 51 of spectroscope 5 refracts to the surface of detectable substance 2.
Referring to Fig. 2, first light source 6 with ring-type and vertical direction towards the surface projection source of detectable substance 2, make light path in inspection
Survey thing 2 surface to reflect in 180 degree, and the mirror body 31 through the mirror body 51 of the second spectroscope 5 and the first spectroscope 3, and be with
The CCD camera lenses institute pick-up image of first detection unit 1 of the first focal length；This is projected from the first light source 6 to the surface of detectable substance 2, and
It is the first detection light path L1 to make the light path of the pick-up image of the first detection unit 1.
Referring to Fig. 3, the secondary light source 53 that the IR of second spectroscope 5 is launched is projected with horizontal direction towards grating 52
Light source, makes mirror body 51 deviation of the grid on grating 52 through 45 degree of angle excursions, and is projected with 90 degree of angle refractive directions
On the surface of detectable substance 2, the grid of the grating 52 and the surface image of detectable substance 2 are reflected, through the mirror body 51 and first of the second spectroscope 5
The mirror body 31 of spectroscope 3 is reflected, and is the CCD camera lenses institute pick-up image of the second detection unit 4 with the second focal length, and this is by
The IR transmitting secondary light sources 53 of two spectroscopes 5 are projected to grating 52, and make the light path of the pick-up image of the second detection unit 4 be second
Detect light path L2.
The first detection light path L1 is different from the second detection light path L2 light emitting source, but it is reflected by the surface of detectable substance 2
The light path part of the spectroscope 3 of 5 mirror body of → the second spectroscope 51 → the first is identical, and from the first spectroscope 3 formation difference, though it is altogether
The surface image of detectable substance 2 is obtained with via one first spectroscope, the first detection unit 1 is directly to be captured through the first spectroscope, and
Obtain the direct image of grid on the surface no-raster 52 of detectable substance 2；Second detection unit 4 then reflected via the first spectroscope 3 and
The surface image of detectable substance 2 of grid on tool grating 52 is captured, operator is by manipulation by the first detection unit 1 or the second detection unit
4 pick-up images, system can control to be performed by the first detection light path L1 or the second detection light path L2, to obtain different focal CCD
The capture result of camera lens.
Operationally can the two be intended to simultaneously or via switching decision by the first detection unit 1 via the first detection light path L1
Pick-up image, or by the second detection unit 4 via the second detection light path L2 pick-up images, and the image captured can transmit reaction extremely
On the screen that can be read；Wherein, the first detection unit 1 is via the first detection light path L1, due to the vertical detectable substance 2 of CCD camera lenses,
Therefore, it picks the surface image that taker obtains for the front of Autonomous test thing 2；Second detection unit 4 detects light path L2 via second,
Due to the non-perpendicular accordingly parallel surface of detectable substance 2 of the second detection unit 4, therefore, it is detectable substance 2 through first that it, which picks taker,
The surface image of the light splitting of mirror body 31 refraction of spectroscope 3, therefore the influence that light source is reflected the surface of detectable substance 2 can be offset, make second
The CCD camera lenses of detection unit 4 can not be captured the trickle flaw in the surface of detectable substance 2, indenture slight crack by light source reflection interference.
Referring to Fig. 4, the grating 52 is the shielding with regular latticed striped, light source is projected and made to grating 52
When regular latticed striped runs into flaw slight crack on detectable substance surface, observed as shown in figure 5, can understand by CCD camera lenses
The change of grid to flaw slight crack, and irised wipe as shown in fig. 6, the change of grid at flaw slight crack can be converted into square box
The image of display, is presented sign flaw indenture, the portion of slight crack is located in display screen, for operating personnel's easily interpretation.
The object detection method and device of the embodiment of the present invention, it is placed in secondary light source 53 to have the shielding of the grating 52 of grid
Front end, makes it be projeced into the detection faces of detectable substance 2, then by the correct focal length of CCD camera lens frameworks of the second detection unit 4,
The change of the surface mesh of detectable substance 2 is clearly observed, and is indicated flaw location and is shown with screen with image；It is former in detectable substance 2
Needed for the CCD Shot Detection mesh of first detection unit 1 in optical facilities, then second group of tool part same light path of framework sensing system
System, to obtain the grid shadow for not showed the trickle flaw indenture in the surface of detectable substance 2, slight crack clearly by light source reflection interference simultaneously
Picture, user can not only observe the surface image of detectable substance 2 with the first detection unit 1, also changeable to be excluded with the second detection unit 4
The trickle flaw slight crack in surface of light source reflection interference is checked, can not only be lifted detection speed, also be can reach the purpose accurately detected.
Only as described above, only presently preferred embodiments of the present invention, when the model that the present invention is implemented can not be limited with this
Enclose, i.e., the simple equivalent changes and modifications made generally according to scope of the present invention patent and invention description content all still belongs to
In the range of patent of the present invention covers.
Claims (3)
1. a kind of object detection method, including：
One first detection unit and one second detection unit are provided, it is distinguished so that different focal is common via one first spectroscope
Capture detectable substance surface image；
A grating for having grid is provided, positioned at one second spectroscope side；
It is characterized in that：
First detection unit and one second detection unit are respectively captured respectively via one first detection light path, one second detection light path
Detectable substance surface image；
One first light source that the first detection optical routing is located between the second spectroscope and detectable substance surface directly projects detectable substance table
Face and formed, the second detection secondary light source of optical routing one first projects the grating of the tool grid and reflected again through the second spectroscope in inspection
Thing surface is surveyed to be formed；
This first detection light path with second detection both light paths can through switching by the first detection unit via first detection light path
Mesh free image is captured, or by the second detection unit via the second detection light path acquisition tool grid image.
2. a kind of object detecting device, including：
One first detection unit, with the first focal length, to capture detectable substance surface image；
One first spectroscope, it is in the axial direction that the first detection unit and detectable substance are linked to be；
One second detection unit, with the second focal length, its to should the first spectroscope, to capture the detection of the first spectroscope refraction
Thing surface image；
One second spectroscope, in the axial direction that the first detection unit and detectable substance are linked to be；
The grating of one tool grid, positioned at the second spectroscope side；
It is characterized in that：
The grating of the tool grid is parallel with aforementioned axial；
One first light source, is linked to be it between the second spectroscope and detectable substance surface, and located at the first detection unit and detectable substance
On vertical axial；First light source is direct towards detectable substance surface projection source with vertical direction, and forms first and detect light path simultaneously
Mesh free image is captured for the first detection unit；
One secondary light source, is located relative to the grating opposite side of the second spectroscope, with horizontal direction first towards grating loss light source
The second spectroscope is projected again, and is reflected on detectable substance surface, and is formed second and detected light path and capture tool for the second detection unit
Grid image；
The first detection light path can be made to switch by the first detection unit via the first detection light path acquisition nothing with the second detection light path
Grid image, or by the second detection unit via the second detection light path acquisition tool grid image.
3. a kind of object detecting device, including：
One first detection unit and one second detection unit, are respectively picked respectively via one first spectroscope jointly with different focal respectively
Take detectable substance surface image；
The grating of one tool grid, positioned at one second spectroscope side；
It is characterized in that：
One first detection light path, detectable substance table is directly projected by one first light source between the second spectroscope and detectable substance surface
Face and formed；
One second detection light path, the grating for first projecting the tool grid by a secondary light source is reflected in detection through one second spectroscope again
Thing surface is formed；
The first detection light path is picked through switching with second detection both light paths by the first detection unit via the first detection light path
Mesh free image is taken, or by the second detection unit via the second detection light path acquisition tool grid image.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103107114A TWI544213B (en) | 2014-03-04 | 2014-03-04 | Object detection method and device |
| TW103107114 | 2014-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104897680A CN104897680A (en) | 2015-09-09 |
| CN104897680B true CN104897680B (en) | 2017-09-05 |
Family
ID=54030481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410304801.7A Active CN104897680B (en) | 2014-03-04 | 2014-06-30 | Object detection method and device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104897680B (en) |
| TW (1) | TWI544213B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI696820B (en) * | 2018-02-22 | 2020-06-21 | 致茂電子股份有限公司 | Detection device |
| CN110186925A (en) * | 2018-02-22 | 2019-08-30 | 致茂电子(苏州)有限公司 | Detection device |
| CN111024712A (en) * | 2019-12-26 | 2020-04-17 | 苏州伟信奥图智能科技有限公司 | Method suitable for detecting surface defects |
| CN114002225B (en) * | 2021-10-19 | 2023-05-12 | 业成科技（成都）有限公司 | Optical detection system and method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0943912A1 (en) * | 1998-03-05 | 1999-09-22 | Valco Cincinnati GmbH | Device for detecting water and water containing substances, in particular of water containing adhesives, on surfaces of arbitrary materials |
| CN1479944A (en) * | 2000-10-06 | 2004-03-03 | Aotiӫ������˾ | Method to detect surface metal contamination |
| TWM293425U (en) * | 2006-01-12 | 2006-07-01 | Contrel Technology Co Ltd | Image-retrieving module for detecting LCD panels |
| TWM313240U (en) * | 2006-11-07 | 2007-06-01 | Gainner Technological Co Ltd | Inspection device for optical film |
| CN101660968A (en) * | 2009-09-25 | 2010-03-03 | 中国科学院上海光学精密机械研究所 | Device and method for detecting optical performance of transparent piece |
| CN102313524A (en) * | 2010-07-05 | 2012-01-11 | 致茂电子(苏州)有限公司 | Image acquiring device and method |
| CN102914543A (en) * | 2011-08-03 | 2013-02-06 | 浙江中茂科技有限公司 | Article detection device of three-dimensional stereo image |
| CN103454287A (en) * | 2013-09-05 | 2013-12-18 | 深圳市维图视技术有限公司 | Glass tube defect visual detection method and device |
| CN203929672U (en) * | 2014-03-04 | 2014-11-05 | 万润科技股份有限公司 | Object detection device |
-
2014
- 2014-03-04 TW TW103107114A patent/TWI544213B/en active
- 2014-06-30 CN CN201410304801.7A patent/CN104897680B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0943912A1 (en) * | 1998-03-05 | 1999-09-22 | Valco Cincinnati GmbH | Device for detecting water and water containing substances, in particular of water containing adhesives, on surfaces of arbitrary materials |
| CN1479944A (en) * | 2000-10-06 | 2004-03-03 | Aotiӫ������˾ | Method to detect surface metal contamination |
| TWM293425U (en) * | 2006-01-12 | 2006-07-01 | Contrel Technology Co Ltd | Image-retrieving module for detecting LCD panels |
| TWM313240U (en) * | 2006-11-07 | 2007-06-01 | Gainner Technological Co Ltd | Inspection device for optical film |
| CN101660968A (en) * | 2009-09-25 | 2010-03-03 | 中国科学院上海光学精密机械研究所 | Device and method for detecting optical performance of transparent piece |
| CN102313524A (en) * | 2010-07-05 | 2012-01-11 | 致茂电子(苏州)有限公司 | Image acquiring device and method |
| CN102914543A (en) * | 2011-08-03 | 2013-02-06 | 浙江中茂科技有限公司 | Article detection device of three-dimensional stereo image |
| CN103454287A (en) * | 2013-09-05 | 2013-12-18 | 深圳市维图视技术有限公司 | Glass tube defect visual detection method and device |
| CN203929672U (en) * | 2014-03-04 | 2014-11-05 | 万润科技股份有限公司 | Object detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI544213B (en) | 2016-08-01 |
| TW201534903A (en) | 2015-09-16 |
| CN104897680A (en) | 2015-09-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104897680B (en) | Object detection method and device | |
| CN104111524B (en) | The method of workflow in digit microscope and optimization digit microscope | |
| CN106323989B (en) | A kind of Online color-difference measurement system and method for ceramic tile | |
| JPWO2007141857A1 (en) | Appearance inspection device | |
| CN103901040A (en) | Three-dimensional online network defect detection system based on machine vision | |
| CN104713527A (en) | Single-time multi-angle shooting mechanism | |
| WO2012091344A3 (en) | Visual inspection apparatus | |
| KR20180015139A (en) | Optical device for detecting internal defects of transparent substrate and method therefor | |
| CN106524955A (en) | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness | |
| CN203929672U (en) | Object detection device | |
| CN111504459B (en) | Detection device for ceramic tile grading and color separation | |
| CN104197850A (en) | Component pin detection method and device based on machine vision | |
| TWI622764B (en) | An automatic optical inspecting system for particle inspection from the surface | |
| CN107228864A (en) | The detecting system of panel surface defect | |
| CN104655646A (en) | Glass substrate internal defect checking system and checking method for height position of internal defect | |
| CN102081218A (en) | Focus device of image gauge | |
| WO2017018184A1 (en) | Gap measuring device and gap measuring system | |
| CN104180772A (en) | Visual inspection device | |
| CN110082361A (en) | A kind of object appearance and crack detection device and detection method | |
| CN104406986A (en) | Medicine bottle machine vision detecting system | |
| JP6508763B2 (en) | Surface inspection device | |
| TWM477571U (en) | Image inspection device | |
| TWM556849U (en) | Three-dimensional optical detection device | |
| CN116997927A (en) | Curved substrate bubble detection method and detection system | |
| CN206459815U (en) | A kind of special equipment based on reflected image method detection object surface normal error |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |