TWM556849U - Three-dimensional optical detection device - Google Patents

Abstract

The present invention discloses a three-dimensional optical detecting device comprising at least one optical detecting module and at least one display control module. The optical detecting module comprises an incident light source, a beam splitting component, a first focusing lens, a first actuator, a plane mirror, a second focusing lens, a second actuator and an image sensor. The first actuator and the second actuator respectively move the first focus lens and the second focus lens. The incident light source cooperates with the beam splitting element and the object to be tested to generate a reference beam and a sample beam. When the first focusing lens and the second focusing lens move, the reference beam is coherent with the sample beam and interferes with each other for sensing by the image sensor to generate a tomographic image signal of the object to be tested. The display control module superimposes the tomographic image as a three-dimensional image to more clearly detect the inside of the object to be tested.

Description

Three-dimensional optical detection device

The present invention relates to a detecting device, and more particularly to a three-dimensional optical detecting device.

"Industry 4.0", or the fourth industrial revolution, productivity 4.0, is a high-tech plan proposed by the German government. In the history of mankind, the first industrial revolution refers to the use of the power of water and steam as a source of power, breaking through the limitations of manpower and animal power in the past; the second industrial revolution used electricity to provide power and support for mass production, and also The goal of the machine production machine; the third industrial revolution is the use of electronic devices and information technology to eliminate human influence, to improve the precision and automation of industrial manufacturing. As for Industry 4.0, its core vocabulary is a smart integrated sensory control system, which is highly automated and can actively eliminate production barriers. The concept is also mentioned in China Manufacturing 2025 and the US Manufacturing Revitalization Plan.

Industry 4.0 will, as in the previous online environment, revolutionize the various aspects of human life. Looking at the evolution of industrial history, Industry 1.0 is represented by steam power; Industry 2.0 is represented by electric power; Industry 3.0 is represented by digital control; and Industry 4.0 is represented by Smart Manufacturing. As the market moves toward "more money," many large manufacturers have begun to introduce the "Industry 4.0" concept in their supply chain, making full use of information technology, the Internet, the Internet of Things and mobile smart devices to create smart factories. The focus of the future manufacturers' decisive battle market will be the robot's hand and eyesight, high precision and so on. In addition, if the machine has deep learning technology, it can discriminate the attributes of transaction knowledge and bring more exciting applications. On the whole, with the emergence of labor costs and flexible manufacturing demands, digital production has become a topic of concern for international manufacturing. How to apply the current manufacturing technology of smart phones or personal computers to robots. It is an opportunity to reshape the competitiveness of the industry. It is worthy of Taiwan's in-depth inquiry and inspiration. In addition, the continuous emergence of smart robot business opportunities is also a good opportunity for Taiwanese companies that have already entered the market to open up new business opportunities.

Mobile phone touch panels and solar panels are currently the most important optoelectronic industry. The market is hugely known. The high-speed detection of its products has made a significant contribution to the overall improvement of the yield. Therefore, the line and instant high speed and high speed of mobile phone panels or solar panels Flux testing, its huge market value is self-evident. At present, there are millions of optical inspection machines or optical microscopes on the market. The disadvantages are that they are large, heavy, expensive, require human operation, and can only be one piece at a time. The disadvantage is that the detection error rate is high and artificial. Expensive and detection error rates will rise with time, not only inefficient, but also overall production costs. At present, although the optical coherence tomography system (OCT) with the advantages of deep scanning, high resolution, non-intrusive detection and non-destructive detection is used to detect the products, the detectors used in the market belong to the planar two-dimensional image. It is not possible to quickly and automatically learn the imaging and information of deep wires below the surface of the touch panel or solar panel of the mobile phone.

Therefore, the present invention has proposed a three-dimensional optical detecting device to solve the problems caused by the above-mentioned problems.

The main purpose of this creation is to provide a three-dimensional optical detection device, which uses program assistance to superimpose tomographic images into three-dimensional images, which can more clearly observe and detect the internal structure of the object to be tested, such as mobile phone touch panels and solar panels. Internal structure. In addition, an actuator with a size of only two centimeters is used instead of the interference arm. Since the optical detection module is small enough to be small enough to be cheap, it is possible to obtain a transmissive tomographic image and to reduce the entire module. It is expected to be combined into a miniaturized three-dimensional automatic optical inspection matrix to simultaneously capture multiple depths of multi-layer panels with high-speed, high-throughput efficiency. In the future, Industry 4.0 can be used to replace traditional manual inspection panels for manufacturing. Intrusive online real-time 3D inspection and feedback on production line parameters to establish a fully automated factory environment, this part of the future business opportunities in industrial testing is very large.

To achieve the above object, the present invention provides a three-dimensional optical detecting device comprising at least one optical detecting module and at least one display control module. The optical detecting module comprises an incident light source, a beam splitting component, a first focusing lens, a first actuator, a plane mirror, a second focusing lens, a second actuator and an image sensor. The incident light source generates an incident beam, and the spectroscopic element receives the incident beam and divides it into a reference beam and a detection beam. The first focusing lens is disposed between the beam splitting element and the at least one object to be tested, and the beam splitting element, the first focusing lens and the object to be tested are located on a first linear axis, and the first focusing lens focuses the detecting beam on the object to be tested, The sample beam is retroreflected and scattered, and the reflected and scattered sample beam is transmitted through the first focusing lens to the beam splitting element. The first actuator carries the first focus lens and controls the first focus lens to move on the first linear axis. The second focusing lens is disposed between the beam splitting element and the plane mirror, and the beam splitting element, the second focusing lens and the plane mirror are located on a second linear axis. The second focus lens focuses the reference beam on the plane mirror, and the plane mirror reflects the reference beam back to the beam splitting element through the second focus lens. The second actuator carries the second focus lens and controls the second focus lens to move on the second linear axis. When the first focusing lens and the second focusing lens move, the sample beam and the reference beam cooperate with the first focusing lens and the second focusing lens to have coherence, and after the beam splitting elements overlap, interfere with each other to generate a plurality of planar optics. Interference signal. The image sensor senses a plurality of planar optical interference signals to generate complex tomographic signals at different depths of the object to be tested. The display control module is connected to the image sensor and receives the tomographic image signal, and superimposes it into a three-dimensional image.

In one embodiment of the present invention, the incident light source is a light emitting diode or a high intensity laser diode.

In one embodiment of the present invention, the incident beam is white, red or infrared.

In one embodiment of the present invention, the image sensor is a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS).

In an embodiment of the present invention, the object to be tested is a mobile phone touch panel or a solar panel.

In one embodiment of the present invention, the number of optical detection modules is plural.

In one embodiment of the present invention, the number of display control modules is plural.

The embodiments of the present application will be further explained below in conjunction with the related drawings. Wherever possible, the same reference numerals in the drawings In the drawings, shapes and thicknesses may be exaggerated based on simplification and convenient labeling. It is to be understood that the elements not specifically shown in the drawings or described in the specification are those of ordinary skill in the art. A variety of changes and modifications can be made by those of ordinary skill in the art in light of the present disclosure.

This creation uses Full-Field Optical Coherence Tomography (FF-OCT) to capture multi-layer images of different depths, which are applied to industrial inspection systems, constructing a set of executable automatic scanning, and can quickly penetrate objects deep. A system for performing tomography and three-dimensional imaging can be used in the future application of Industry 4.0 to replace the traditional manual detection mode. Due to the non-invasive nature, automated industrial testers for commercialization are just around the corner. This creation can be applied to related fields such as mobile phone touch panel detection and has great market potential.

Referring to Figure 1 below, a first embodiment of the present invention will be described. The three-dimensional optical detecting device of the present invention comprises at least one optical detecting module 10 and at least one display control module 12, and the display control module 12 is, for example, a combination of a computer host and a screen. The optical detecting module 10 includes an incident light source 14, a beam splitting component 16, a first focusing lens 18, a first actuator 20, a plane mirror 22, a second focusing lens 24, and a second actuator 26. An image sensor 28, wherein the incident light source 14 is a light emitting diode or a high intensity laser diode, and the image sensor 28 is, for example, a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS).

The incident source 14 produces an incident beam LI. The beam splitting element 16 receives the incident light beam LI and divides it into a reference beam LR and a detecting beam LD. The first focusing lens 18 is disposed between the beam splitting element 16 and the at least one object to be tested 30. The object to be tested 30 is, for example, a mobile phone touch panel or a solar panel. In the first embodiment, the number of the optical detection module 10, the display control module 12, and the object to be tested 30 is taken as an example. The beam splitting element 16, the first focusing lens 18 and the object to be tested 30 are located on a first linear axis, and the first focusing lens 18 focuses the detecting beam LD on the object to be tested 30 to generate reflection and scattering to generate a sample beam LS, and This sample beam is transmitted through the first focusing lens 18 to the beam splitting element 16. The first actuator 20 carries the first focus lens 18 and controls the first focus lens 18 to move on the first linear axis. The second focusing lens 24 is disposed between the beam splitting element 16 and the plane mirror 22, and the beam splitting element 16, the second focusing lens 24 and the plane mirror 22 are located on a second linear axis. The second focusing lens 24 focuses the reference beam LR on the plane mirror 22, and the plane mirror 22 reflects the reference beam LR back to the beam splitting element 16 through the second focusing lens 24. The second actuator 26 carries the second focus lens 24 and controls the second focus lens 24 to move on the second linear axis. When the first focusing lens 18 and the second focusing lens 24 move, the sample beam LS and the reference beam LR cooperate with the first focusing lens 18 and the second focusing lens 24 to have coherence, and interfere with each other via the beam splitting element 16 to generate a plurality of Planar optical interference signal SP. The image sensor 28 senses the planar optical interference signal SP to generate a plurality of tomographic image signals SI of different depths of the object 30 to be tested. The display control module 12 is connected to the image sensor 28, and receives the tomographic image signal SI, and superimposes it with a program to superimpose it into a three-dimensional image. The incident light beam LI is, for example, white light, red light or infrared light, preferably red light or infrared light. Because of the long wavelength and deep penetration depth, it is possible to capture deeper tomographic image signals SI and three-dimensional images.

The operation of the first embodiment of the three-dimensional optical detecting device of the present invention will be described below. First, the first actuator 20 controls the first focus lens 18 to move on the first linear axis while the second actuator 26 controls the second focus lens 24 to move on the second linear axis. Next, the incident light source 14 generates an incident light beam LI, and the light splitting element 16 receives the incident light beam LI and divides it into a reference light beam LR and a detection light beam LD. The first focusing lens 18 focuses the detection beam LD on the object to be tested 30 to generate a sample beam LS by retroreflection and scattering, and transmits the sample beam to the beam splitting element 16 through the first focusing lens 18. At the same time, the second focusing lens 24 focuses the reference beam LR on the plane mirror 22, and the plane mirror 22 reflects the reference beam LR back to the beam splitting element 16 through the second focusing lens 24. When the first focusing lens 18 and the second focusing lens 24 move, the reference beam LR and the sample beam LS cooperate with the movement of the first focusing lens 18 and the second focusing lens 24 to have coherence, and interfere with each other via the beam splitting element 16 to A complex planar optical interference signal SP is generated. The image sensor 28 senses the planar optical interference signal SP to generate a plurality of tomographic image signals SI of different depths of the object 30 to be tested. The display control module 12 is connected to the image sensor 28, and receives the tomographic image signal SI, and superimposes it with a program to superimpose it into a three-dimensional image. The creation can observe the object to be tested 30 from any angle and any aspect. Using the image recognition technology, the flaw of the object to be tested 30 can be detected on the line in real time, and the defect of the object to be tested 30 can be determined in the most efficient manner. For example, when the object to be tested 30 is the peripheral cable area of the mobile phone panel, the creation can immediately detect whether the cable area has abnormal short circuit, cross or open circuit. When the object to be tested 30 is a deposition wire region of the solar panel, the creation line can immediately detect whether the wire region has a bad three-dimensional deposition profile, such as a common partial depression, an intermediate fracture or a wear at both ends, thereby causing photocurrent. The phenomenon of instability.

Please refer to FIG. 1 and FIG. 2 below, and a second embodiment of the three-dimensional optical detecting device of the present invention is introduced. The difference between the second embodiment and the first embodiment lies in the number of the optical detecting module 10 and the object to be tested 30. In the second embodiment, the number of the optical detection module 10 and the object to be tested 30 are plural, and the second embodiment operates in the same manner as the first embodiment, and details are not described herein. This creation uses program-assisted, superimposed tomographic images into 3D images, which enables clearer observation and detection of the internal structure of mobile touch panels and solar panels. In addition, in the conventional technology, the beam between the beam splitter and the plane mirror is called the reference arm, and the beam between the beam splitter and the object to be tested is called the sample arm, and the reference arm is usually the same length as the sample arm, and is called an interference arm. This creation uses an actuator of only two centimeters in size to replace the interference arm. Since the optical detection module 10 is made small enough to be small, the entire module can be reduced, and it is expected to be combined into a miniaturized three-dimensional automatic optical detection matrix, such as As shown in the second embodiment, high-speed, high-throughput efficiencies are simultaneously captured for different depths of multiple sets of panels. In the future, Industry 4.0 can be used to replace traditional manual detection of objects for non-intrusive online instant manufacturing. Three-dimensional inspection, and feedback on the production line parameters to establish a fully automated factory environment, this part of the future business opportunities in industrial testing is very large. Due to the booming industry 4.0, automated high-speed inspection is more valuable. After the mobile phone panel or solar panel detects defects through the created three-dimensional optical inspection device, it can directly discard the subsequent processing costs, and can directly feed back the defects in the production line parameters, and the online inspection personnel evolve into quality control personnel or software programming. The division can save a lot of cost, a lot of manpower and a lot of time when the defect is detected.

The most critical concept of "Industry 4.0" is the use of information and communication technology to form the Internet of Things (IoT) and Service Networking (IoS), linking all the machines, people, processes and materials in the production process. They are more able to communicate with each other and have the ability to independently monitor, analyze and judge. They can find problems and solve problems at any time, make the production process more flexible and flexible, and respond quickly to changes in market demand. This is the concept of "smart factory". This creation uses a comprehensive scanning technology for panoramic optical coherence photography to develop a high-resolution automated optical system. In addition to stereoscopic three-dimensional deep images that can be measured, the scanning speed can be greatly improved.

Referring to FIG. 1 , FIG. 2 and FIG. 3 , a third embodiment of the three-dimensional optical detecting device of the present invention will be described. The difference between the second embodiment and the third embodiment lies in the number of optical detecting modules 10 . In the third embodiment, the number of the display control modules 12 is plural, and all the display control modules 12 are respectively connected to the image sensors 28 of all the optical detecting modules 10, and respectively receive the tomographic image signals SI generated by them. The collocation program is superimposed into a three-dimensional image, and the rest of the operation mode is the same as that of the second embodiment, and details are not described herein again.

In summary, the present invention utilizes an actuator to align the sample beam with the reference beam to generate complex tomographic signals at different depths of the object to be tested, thereby achieving the purpose of quickly and clearly detecting the internal structure.

10‧‧‧Optical Inspection Module

12‧‧‧Display Control Module

14‧‧‧ incident light source

16‧‧‧Splitting components

18‧‧‧First focusing lens

20‧‧‧First actuator

22‧‧‧Flat mirror

24‧‧‧second focusing lens

26‧‧‧Second actuator

28‧‧‧Image sensor

30‧‧‧Test object

Fig. 1 is a schematic view showing a three-dimensional optical detecting device of a first embodiment of the present invention.

Fig. 2 is a schematic view showing the three-dimensional optical detecting device of the second embodiment of the present invention.

Fig. 3 is a schematic view showing the three-dimensional optical detecting device of the third embodiment of the present invention.

Claims (6)

A three-dimensional optical detecting device comprising: at least one optical detecting module, comprising: an incident light source to generate an incident light beam; a light splitting component, receiving the incident light beam, and dividing the light beam into a reference beam and a detecting beam; a lens disposed between the beam splitting element and the at least one object to be tested, wherein the beam splitting element, the first focusing lens and the object to be tested are located on a first linear axis, and the first focusing lens focuses the detecting beam on the a sample beam is generated by back reflection or scattering, and the sample beam is transmitted to the beam splitting element through the first focus lens; a first actuator carries the first focus lens and controls the first a focusing lens is moved on the first linear axis; a plane mirror and a second focusing lens, the second focusing lens is disposed between the beam splitting element and the plane mirror, and the beam splitting element, the second focusing lens is located with the plane mirror On a second linear axis, the second focusing lens focuses the reference beam on the plane mirror, and the plane mirror reflects the reference beam back to the beam splitting through the second focusing lens a second actuator that carries the second focus lens and controls the second focus lens to move on the second linear axis. When the first focus lens and the second focus lens move, the sample beam Cooperating with the reference beam, the first focusing lens and the second focusing lens are coherent, and interfere with each other through the beam splitting element to generate a plurality of planar optical interference signals; and an image sensor for sensing the planes Optical interferometric signal to generate the at least one a plurality of tomographic image signals of different depths of the object to be tested; and at least one display control module connected to the image sensor and receiving the tomographic image signals to be superimposed into a three-dimensional image. The three-dimensional optical detecting device of claim 1, wherein the incident light source is a light emitting diode or a high intensity laser diode. The three-dimensional optical detecting device of claim 1, wherein the incident light beam is white light, red light or infrared light. The three-dimensional optical detecting device of claim 1, wherein the image sensor is a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS). The three-dimensional optical detecting device of claim 1, wherein the number of the optical detecting modules is plural. The three-dimensional optical detecting device of claim 1, wherein the number of the display control modules is plural.