CN104897680A - Object detection method and device - Google Patents
Object detection method and device Download PDFInfo
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- CN104897680A CN104897680A CN201410304801.7A CN201410304801A CN104897680A CN 104897680 A CN104897680 A CN 104897680A CN 201410304801 A CN201410304801 A CN 201410304801A CN 104897680 A CN104897680 A CN 104897680A
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- 238000001514 detection method Methods 0.000 title claims abstract description 120
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000007547 defect Effects 0.000 abstract description 3
- 238000007689 inspection Methods 0.000 abstract description 3
- 238000005728 strengthening Methods 0.000 abstract 1
- 101001031591 Mus musculus Heart- and neural crest derivatives-expressed protein 2 Proteins 0.000 description 28
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000037361 pathway Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 1
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Abstract
The present invention relates to an object detection method and device, comprising: projecting the surface of the object to be detected by a second light source, so that the surface of the object to be detected is reflected by a first detection device to capture the image of the surface of the object to be detected; projecting the light source to the grating by a first light source, making the grid on the grating refracted to the surface of the object to be detected by a second spectroscope, and then making the grid reflected by the first spectroscope and refracted by a second detection device to capture the image of the grid on the surface of the object to be detected; therefore, not only the first detection device can be used to observe the surface image of the object to be detected, but also the second detection device can be used to perform the dent and crack inspection for strengthening the surface defect characteristics.
Description
Technical field
Present invention is directed to a kind of detection method and device, espespecially a kind of in order to carry out the object detection method that detects and device on the object of tool reflecting surface.
Background technology
General electronic package due to volume small, if there is flaw, check quite difficulty, therefore in high-tech industry, usual CCD camera lens detects, on the one hand flaw position is amplified, certain position at its flaw position is detected on the other hand, to carry out remedying processing procedure or superseded program by digitized image.
A kind of method coordinating CCD camera lens to carry out detecting flaw with grating was once used, its distortion of the mesh mainly utilizing grating to produce, certain position, position of flaw is detected through CCD camera lens, also this kind of detection mode was once adopted in the Defect Detection of wafer die, it is usually under specific light source and angle, carrying out observing grating because affecting produced distortion of the mesh state by flaw position through CCD camera lens through manual type, detecting the flaw position of wafer die.
Summary of the invention
But coordinate CCD camera lens to carry out detecting the method for flaw no doubt by industry is usual with grating, only prior art adopts this kind of mode to detect normal some problems of experience in the Defect Detection of wafer die, because wafer die surface has the gloss of incandescent, add the flatness on wafer die surface, wafer die surface is indulged and has flaw slight crack, under specific light source and angle, the reflection of wafer die surface gloss, by the interference making CCD camera lens be subject to surface gloss reflection source, and not easily detect flaw slight crack.
So, object of the present invention, be to provide a kind of can according to need simultaneously or switch different pick-up unit to detecting the object detection method that thing carries out flaw indenture, slight crack detects.
Another object of the present invention, is to provide one to being subject to the interference of surface gloss reflection source, and can not easily detect that the detection thing of flaw indenture, slight crack carries out the object detection method detected.
Another object of the present invention, be to provide a kind of can mat common optical pathways with different pick-up unit to detecting the object detection method that thing carries out flaw indenture, slight crack detects.
Another object of the present invention, be to provide a kind of can according to need simultaneously switch or different pick-up unit to detecting the object detecting device that thing carries out flaw indenture, slight crack detects.
An object more again of the present invention, is to provide one to being subject to the interference of surface gloss reflection source, and can not easily detect that the detection thing of flaw indenture, slight crack carries out the object detection method detected.
An object more again of the present invention, is to provide one can in order to perform object detection method and device as described in claim 1 to 8.
According to the object detection method of the object of the invention, comprise: one first pick-up unit and a second detection device are provided, make it capture respectively with different focal and detect thing surface image, wherein, second detection device acquisition detects rasterizer grid change person in thing surface image.
According to the object detection method of another object of the present invention, comprise: make the grating of tool grid through one first light source projects in detection thing surface, detect thing surface tool grid image with a second detection device through one first spectroscopical refraction acquisition, change by rasterizer grid in image flaw indenture, the slight crack person that observation detects thing.
According to the object detection method of another object of the present invention, comprising: make a secondary light source projection detect thing surperficial, it reflects to form one first and detects light path, and make the grating of tool grid form one second detection light path through one first light source projects in detection thing surface; This first detection optical routing one first pick-up unit acquisition detects the image on thing surface; The acquisition of this second optical routing one second detection device detects the image of thing surface tool grid.
According to the object detecting device of still a further object of the present invention, comprising: one first pick-up unit, detect thing surface image in order to acquisition; One first spectroscope, it is located at the first pick-up unit and is linked to be axially with detection thing; One second detection device, it is to should the first spectroscope, to capture the detection thing surface image of the first spectroscope refraction; One second spectroscope, be located at the first pick-up unit and be linked to be axially with detection thing, it is provided with the grating of tool grid, and one first light source, to grating loss light source, makes the grid on grating refract to through the second spectroscope and detects thing surface; One secondary light source, is positioned at the second spectroscope and detects between thing surface, and is located at the first pick-up unit and detects on vertical axial that thing is linked to be.
According to the object detecting device of the present invention's object more again, comprising: a grating, has grid, and it is surperficial by one first light source projects, grid to be projeced into a detection thing; One second detection device, its warp from one first spectroscopical refraction, and captures the detection thing surface image of the tool grid of this detection thing surface reflection.
According to the object detecting device of the present invention's object more again, comprising: can in order to perform the device of object detection method as described in claim 1 to 8.
The object detection method of the embodiment of the present invention and device, it is placed in the first light source front end with the shielding of the grating of tool grid, make in its detection faces being projeced into detection thing, again by the focal length that the CCD camera lens framework of second detection device is correct, clear observation detects the change of thing surface mesh, and indicates flaw location and show with screen image; They are in optical facilities needed for the CCD Shot Detection order detecting thing former first pick-up unit, the sensing system of framework second group of tool part same light path again, to obtain not simultaneously, by light source reflection interference, clear performance detects the grid image of the trickle flaw slight crack in thing surface, user not only the first pick-up unit observation can detect thing surface image, also simultaneously or the trickle flaw indenture in surface, the slight crack inspection of making to get rid of light source reflection interference with second detection device can be switched, not only can promote detection speed, also can reach the object accurately detected.
Accompanying drawing explanation
Mechanism's configuration schematic diagram of Fig. 1 system embodiment of the present invention.
The pathway schematic diagram of the first detection light path in Fig. 2 system embodiment of the present invention.
The pathway schematic diagram of the second detection light path in Fig. 3 system embodiment of the present invention.
The grid schematic diagram of grating in Fig. 4 system embodiment of the present invention.
In Fig. 5 system embodiment of the present invention there is the schematic diagram of distortion in the grid of grating.
In Fig. 6 system embodiment of the present invention, the grid of grating is occurred that the schematic diagram that image is shown in screen is sentenced in distortion.
Symbol description
1 first pick-up unit 2 detects thing
3 first spectroscope 31 mirror bodies
4 second detection device 5 second spectroscopes
51 mirror body 52 gratings
53 first light source 6 secondary light sources
L1 first detects light path L2 second and detects light path
Embodiment
Referring to Fig. 1, the object detection method of the embodiment of the present invention and device, can the device shown in figure be that example explains; Wherein, comprising:
One first pick-up unit 1, it can be Charged Coupled Device (CCD) or complementary metal oxide semiconductor (CMOS) that one has the first focal length, and is vertical setting with detection thing 2;
One first spectroscope 3, its mirror body 31 is set to 45 degree of angle excursions of a bottom right, upper left, and corresponding to the first pick-up unit 1, and is located at the first pick-up unit 1 and detects on vertical axial that thing 2 is linked to be, and with the first pick-up unit 1 in vertical adjacent;
One second detection device 4, it can be Charged Coupled Device (CCD) or complementary metal oxide semiconductor (CMOS) that one has the second focal length, and described second focal length is less than the first focal length of the first pick-up unit 1; Second detection device 4 and detection thing 2 surface are in being horizontally disposed with, and arrange in 90 degree of angles with the first pick-up unit 1, this first spectroscope 3 described in its level correspondence, and adjacent in level with this first spectroscope 3, to capture detection thing 2 surface image of the first spectroscope refraction;
One second spectroscope 5, it is set to 45 degree of angle excursions of a bottom right, upper left, and it is vertical adjacent and corresponding with the first spectroscope 3, and be located at the first pick-up unit 1 and detect on vertical axial that thing 2 is linked to be, it is provided with and is positioned at mirror body 51 side and the grating 52 axially parallel with forenamed vertical, this grating 52 and mirror body 51 in 45 degree of angles, and are vertical with second detection device 4; Grating 52 surface has regular latticed striped, it is provided with relative to the opposite side of mirror body 51 the first light source 53 that light emitting diode (IR) launches, this first light source 53, to grating 52 projection source, makes the grid on grating 52 refract to detection thing 2 surface through the mirror body 51 of the second spectroscope 5;
One secondary light source 6 is an annular light source, is positioned at the second spectroscope 5 and detects between thing 2 surface, and is located at the first pick-up unit 1 and detects on vertical axial that thing 2 is linked to be.
Refer to Fig. 2, this secondary light source 6 with ring-type and vertical direction towards detection thing 2 surperficial projection source, make light path on detection thing 2 surface in 180 degree of reflections, and through the mirror body 31 of the second spectroscope 5 mirror body 51 and the first spectroscope 3, and be the CCD camera lens institute pick-up image of first pick-up unit 1 with the first focal length; This is projected to detection thing 2 surface by secondary light source 6, and makes the light path of the first pick-up unit 1 pick-up image be the first detection light path L1.
Refer to Fig. 3, the first light source 53 that the IR of this second spectroscope 5 launches with horizontal direction towards grating 52 projection source, make the grid on grating 52 through mirror body 51 deviation of 45 degree of angle excursions, and be incident upon detection thing 2 surface with 90 degree of angle refractive directions, the grid of this grating 52 and detection thing 2 surface image are reflected, mirror body 31 through the second spectroscope 5 mirror body 51 and the first spectroscope 3 reflects, and be the CCD camera lens institute pick-up image of the second detection device 4 with the second focal length, this launches the first light source 53 by the IR of the second spectroscope 5 and projects to grating 52, and make the light path of second detection device 4 pick-up image be the second detection light path L2.
The light emitting source that described first detection light path L1 and second detects light path L2 is different, but it is identical by the light path part detecting thing 2 surface reflection → the second spectroscope 5 mirror body 51 → the first spectroscope 3, and form difference from the first spectroscope 3, though it jointly obtains via one first spectroscope and detects thing 2 surface image, first pick-up unit 1 is directly capture through the first spectroscope, and obtains the direct image detecting grid on the surperficial no-raster of thing 2 52; Second detection device 4 reflects via the first spectroscope 3 and captures detection thing 2 surface image of grid on tool grating 52, the manipulation of operator's mat is by the first pick-up unit 1 or second detection device 4 pick-up image, system can control to detect light path L1 or second by first and detect light path L2 execution, to obtain the capture result of different focal CCD camera lens.
Operationally can the two simultaneously or determine for detecting light path L1 pick-up image by the first pick-up unit 1 via first via switching, or detect light path L2 pick-up image by second detection device 4 via second, and the image of acquisition can transmit reaction on the screen that can read; Wherein, the first pick-up unit 1 detects light path L1 via first, due to CCD camera lens this detection thing 2 vertical, therefore, its to pick taker be the surface image that Autonomous test thing 2 front obtains; Second detection device 4 detects light path L2 via second, due to non-perpendicular this detection thing 2 surface parallel accordingly of second detection device 4, therefore, its to pick taker be detect thing 2 through the surface image of mirror body 31 points of anaclasis of the first spectroscope 3, therefore light source can be offset on the impact detecting thing 2 surface reflection, make the CCD camera lens of second detection device 4 can not capture detection thing 2 surface trickle flaw, indenture slight crack by light source reflection interference.
Refer to Fig. 4, described grating 52 is for having the shielding of regular latticed striped, light source projects to grating 52 and makes regular latticed striped when detecting thing surface and running into flaw slight crack, as shown in Figure 5, the change observing flaw slight crack place grid can be known by CCD camera lens, and as shown in Figure 6, the change of flaw slight crack place grid can be converted into the image irising wipe display with square box, present indicate flaw indenture, the portion of slight crack is arranged in display screen, for operating personnel's interpretation easily.
The object detection method of the embodiment of the present invention and device, it is placed in the first light source 53 front end with the shielding of the grating 52 of tool grid, make in its detection faces being projeced into detection thing 2, again by the focal length that the CCD camera lens framework of second detection device 4 is correct, clear observation detects the change of thing 2 surface mesh, and is indicated flaw location and show with screen image; They are in optical facilities needed for the CCD Shot Detection order detecting thing 2 former first pick-up unit 1, the sensing system of framework second group of tool part same light path again, to obtain not simultaneously, by light source reflection interference, clear performance detects the grid image of the surperficial trickle flaw indenture of thing 2, slight crack, user not only can observe detection thing 2 surface image by the first pick-up unit 1, also the changeable trickle flaw slight crack inspection in surface making to get rid of light source reflection interference with second detection device 4, not only can promote detection speed, also can reach the object accurately detected.
Only as described above, be only preferred embodiment of the present invention, when not limiting scope of the invention process with this, the simple equivalence namely generally done according to the present patent application the scope of the claims and invention description content changes and modifies, and all still remains within the scope of the patent.
Claims (12)
1. an object detection method, comprising:
There is provided the first pick-up unit and second detection device, make it capture respectively with different focal and detect thing surface image, wherein, second detection device acquisition detects rasterizer grid change person in thing surface image.
2. object detection method as claimed in claim 1, is characterized in that, this first pick-up unit and second detection device jointly obtain via the first spectroscope and detect thing surface image.
3. an object detection method, comprising:
Make the grating of tool grid through the first light source projects in detection thing surface, detect thing surface tool grid image with second detection device through first spectroscopical refraction acquisition, change by rasterizer grid in image flaw indenture, the slight crack person that observation detects thing.
4. an object detection method, comprising:
Make secondary light source project detection thing surface, it reflects to form the first detection light path, and makes the grating of tool grid form the second detection light path through the first light source projects in detection thing surface; This first detection optical routing first pick-up unit acquisition detects the image on thing surface; The acquisition of this second optical routing second detection device detects the image of thing surface tool grid.
5. object detection method as claimed in claim 4, it is characterized in that, this the first detection light path and second detects light path and forms difference at the first spectroscope, first pick-up unit is directly captured through the first spectroscope and detects thing surface image, then via the first spectroscope refraction, acquisition detects the image of thing surface tool grid to second detection device
6. the object detection method as described in any one of claim 1,3,4, is characterized in that, this rasterizer grid first after the second spectroscope refraction, then is projected to detection thing surface.
7. the object detection method as described in any one of claim 1,3,4, is characterized in that, the detection thing surface image of this acquisition is indicated flaw location with screen and uses image shower.
8. the object detection method as described in any one of claim 1,3,4, is characterized in that, this second detection device and the non-perpendicular corresponding person in detection thing surface.
9. an object detecting device, comprising:
First pick-up unit, detects thing surface image in order to acquisition;
First spectroscope, it is located at the first pick-up unit and is linked to be axially with detection thing;
Second detection device, it is to should the first spectroscope, to capture the detection thing surface image of the first spectroscope refraction;
Second spectroscope, be located at the first pick-up unit and be linked to be axially with detection thing, it is provided with the grating of tool grid, and the first light source, to grating loss light source, makes the grid on grating refract to through the second spectroscope and detects thing surface;
Secondary light source, is positioned at the second spectroscope and detects between thing surface, and is located at the first pick-up unit and detects on vertical axial that thing is linked to be.
10. an object detecting device, comprising:
Grating, has grid, and by the first light source projects, grid is projeced into detection thing surface;
Second detection device, its warp from first spectroscopical refraction, and captures the detection thing surface image of the tool grid of this detection thing surface reflection.
11. object detecting devices as claimed in claim 10, is characterized in that, the grid of this grating first after the second spectroscope refraction, then is projected to detection thing surface.
12. 1 kinds of object detecting devices, comprising: can in order to perform the device of object detection method as described in claim 1 to 8.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103107114 | 2014-03-04 | ||
| TW103107114A TWI544213B (en) | 2014-03-04 | 2014-03-04 | Object detection method and device |
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| Publication Number | Publication Date |
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| CN104897680A true CN104897680A (en) | 2015-09-09 |
| CN104897680B CN104897680B (en) | 2017-09-05 |
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| CN201410304801.7A Active CN104897680B (en) | 2014-03-04 | 2014-06-30 | Object detection method and device |
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| CN (1) | CN104897680B (en) |
| TW (1) | TWI544213B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110186925A (en) * | 2018-02-22 | 2019-08-30 | 致茂电子(苏州)有限公司 | Detection device |
| CN111024712A (en) * | 2019-12-26 | 2020-04-17 | 苏州伟信奥图智能科技有限公司 | Method suitable for detecting surface defects |
| TWI696820B (en) * | 2018-02-22 | 2020-06-21 | 致茂電子股份有限公司 | Detection device |
| CN114002225A (en) * | 2021-10-19 | 2022-02-01 | 业成科技（成都）有限公司 | Optical detection system and method |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI544213B (en) | 2016-08-01 |
| CN104897680B (en) | 2017-09-05 |
| TW201534903A (en) | 2015-09-16 |
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