CN203929258U - A kind of thin film sensor for transient temperature measuring - Google Patents
A kind of thin film sensor for transient temperature measuring Download PDFInfo
- Publication number
- CN203929258U CN203929258U CN201420192906.3U CN201420192906U CN203929258U CN 203929258 U CN203929258 U CN 203929258U CN 201420192906 U CN201420192906 U CN 201420192906U CN 203929258 U CN203929258 U CN 203929258U
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- thermode
- stainless steel
- steel sleeve
- thin film
- temperature measuring
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Abstract
The utility model discloses a kind of thin film sensor for transient temperature measuring, comprise thermode, be sleeved on the stainless steel sleeve outside thermode and be arranged at the insulation course between thermode, stainless steel sleeve, described thermode comprises thermode one and thermode two, wherein, thermode one comprises conductor part and is plated on the membrane structure part on the arbitrary end face of insulation course, thermode two is conductor structure, and the membrane structure part of thermode one contacts with thermode two and forms hot junction---be thermometric end; The length of the conductor part of described thermode one and thermode two is all longer than the length of stainless steel sleeve, and stretches out from stainless steel sleeve, and above-mentioned thermode stretches out the part of stainless steel sleeve directly as compensating wire corresponding to each thermode.The utility model is easy to carry, the response time is short, measuring accuracy is high; Thermode wire and compensating wire integrated design, after having avoided glue bonding compensating wire air-dry, hard, crisp, caducous drawback.
Description
Technical field
The utility model belongs to temperature measurement technology and sensor preparing technical field, relates to specifically a kind of film thermocouple structure for transient temperature measuring.
Background technology
Along with scientific and technical development, in metallurgical building materials, Thermal Equipment, power machine, rocket engine, in the multiple ambits such as pressure vessels for the chemical industry, nuclear energy engineering, the measurement of transient temperature all occupies very important status, especially transient state surface temperature.Film thermocouple has that thermal capacity is little, volume is little, fast response time, UUT is destroyed little and test environment is disturbed to the advantages such as little, therefore in hot radiation measurement and surface temperature measurement, has obtained important application.For film thermocouple, as utilize sputter mode in physical vapour deposition (PVD) to be prepared, need to complete respectively at twice the deposition of different materials film, dual technique can be introduced various interfacial effects unavoidably, as thermal stress between impurity, different materials etc., these all can impact the stability of thermopair and accuracy; And also can impact the flatness of test plane in the stack of film bonding part film thickness.The thermoelectrical potential of simultaneously film thermocouple output is generally in millivolt rank, requires between thermopair and matrix, to have good insulating property, otherwise can produce measuring error because of thermoelectrical potential loss.Due to general insulating material, it has negative temperature coefficient of resistance, and under hot conditions, resistance sharply reduces, and will lose insulating property, and therefore just the material to insulating layer of thin-film and manufacture method are had higher requirement.It is also one of problem of preparing of puzzlement film thermocouple that compensating wire is connected with thermode film always.In the time carrying out scientific experiment, conventionally adopt high temperature resistant conductive silver glue bonding thermopair electrode and wire, but because conductive silver glue easily comes off a little less than being highly brittle under solid state, and insecure, so, a kind of method that solves lead-in wire connectivity problem be badly in need of now.
Summary of the invention
In view of the defect that prior art exists, the purpose of this utility model is to provide that a kind of response time is short, measuring accuracy is high, for measuring the portable thin film sensor of armouring of transient state continuous temperature under rugged surroundings.
To achieve these goals, technical scheme of the present invention:
A kind of thin film sensor for transient temperature measuring, comprise thermode, be sleeved on the stainless steel sleeve outside thermode and be arranged at the insulation course between thermode, stainless steel sleeve, it is characterized in that: described thermode comprises thermode one and thermode two, wherein, thermode one comprises conductor part and is plated on the membrane structure part on the arbitrary end face of insulation course, thermode two is conductor structure, and the membrane structure part of thermode one contacts with thermode two and forms hot junction---be thermometric end; The length of the conductor part of described thermode one and thermode two is all longer than the length of stainless steel sleeve, and from stretching out away from the stainless steel sleeve end of thermometric end, above-mentioned thermode stretches out the part of stainless steel sleeve directly as compensating wire corresponding to each thermode.
Described insulation course is the insulation course that high temperature sintering nano-ceramic powder is prepared from.
Described thermode one membrane structure and conductor structure all adopt nickel silicon alloy material.
Described thermode two adopts nickel-chrome material.
Described stainless steel sleeve drum outer wall arranges helicitic texture.
Plating one deck Si in the membrane structure part of described thermode one
3n
4diaphragm.
Compared with prior art, the beneficial effects of the utility model:
The utility model is easy to carry, the response time is short, measuring accuracy is high; It is good that its insulation course that adopts high temperature sintering nano-ceramic powder to be prepared from has associativity, intensity advantages of higher; And thermode wire and compensating wire integrated design, after having avoided glue bonding compensating wire air-dry, hard, crisp, caducous drawback.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model for the thin film sensor of transient temperature measuring.
Fig. 2 is the utility model measuring junction partial enlarged drawing.
Fig. 3 is the utility model mask clamping fixture used while adopting magnetically controlled sputter method sputtered film part;
Fig. 4 is the wire support structural drawing one that the utility model adopts;
Fig. 5 is the wire support structural drawing two that the utility model adopts.
In figure: 1, thermode one-conductor part, 2, thermode two, 3, insulation course, 4, stainless steel sleeve, 5, thermode one-film portion, A, measuring junction.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the utility model is further elaborated.
As shown in Figure 1, this thin film sensor mainly comprises thermode (1,2), is sleeved on the stainless steel sleeve 4 outside thermode and is arranged at the insulation course 3 between thermode, stainless steel sleeve 4.
Described thermode comprises thermode two prepared by thermode one prepared by nisiloy material and nickel chromium triangle material, wherein, thermode one comprises conductor part 1 and is plated on the membrane structure part 5 on insulation course end face, thermode 22 is for leading linear structure, the membrane structure part 5 of thermode one contacts with thermode 22 and forms hot junction---and be needle-like thermometric end A, as shown in Figure 2; The length that the conductor part 1 of described thermode one and the length of thermode 22 are all longer than stainless steel sleeve 4, and from stainless steel sleeve 4 terminations (as can be seen from Figure 1, this termination refers to the stainless steel sleeve termination away from thermometric end A) side stretches out, above-mentioned thermode stretches out the part of stainless steel sleeve 4 directly as compensating wire corresponding to each thermode, and measuring junction A is converted into electric signal by the temperature signal measuring and is transported in cold junction compensation and signal condition module and computer testing system by wire.
Utilize directly wire by way of compensation of thermode prolongation, avoid follow-up colloid bonding compensating wire strength of joint low, caducous phenomenon.
Thermocouple structure: the nisiloy conductor part 1 of thermode one and thermode two nickel chromium triangle wire 2 top layers are coated to nano-ceramic powder, vertically be placed in stainless steel sleeve, then after filling nano-ceramic powder in it, carry out high temperature sintering insulation course 3, described insulation course 3 plays the transmission of the ultra-weak electronic signal preventing between described compensating wire and the consume of the electric signal that causes avoids causing measuring error; Measuring junction A be adopt magnetically controlled sputter method by the target as sputter identical with thermode one material to exposing the thin film coating that forms micron order thickness on the insulation course end face of wire shape thermode two contacts, form thermojunction-measuring junction.When sputtered film, according to the requirement of corresponding film preparation, to ceramic powder insulation course 3 end face sanding and polishings, it is finally the diamond paste looking-glass finish of 1 μ m by granularity, put into respectively again acetone, alcohol and use Ultrasonic Cleaning, while thermocouple structure being fixed on to Magnetron Sputtering Thin Film after drying up with nitrogen in mask clamping fixture (can adopt fixture as shown in Figure 3) used, then putting into magnetron sputtering apparatus vacuum chamber and carry out film coating sputtering and become section thin layer; Finally, adopt the encapsulation of stainless steel sleeve, armouring thin film sensor has completed.
Its concrete manufacturing process of the thin film sensor of the measurement transient temperature that this patent proposes: first will be longer than the nickel chromium triangle of stainless steel sleeve, nisiloy wire is fixed on wire support as Fig. 4, Fig. 5 according to corresponding dimensional requirement, by nickel chromium triangle, nano-ceramic powder is whitewashed on two wire top layers of nisiloy, then vertically put into outer wall and revolve threaded stainless steel sleeve, by stainless steel sleeve one end mouth back-off in the plane; Then fill stainless steel sleeve from the other end with nano-ceramic powder, so not only fixed the wire while but also avoided it to contact with each other, and play insulation course effect at end face, shield external interference signal, and stainless steel sleeve has played outer encapsulation effect, to being housed, the sleeve of ceramic powder carries out high temperature sintering (sintering 15 minutes under 960 DEG C of hot conditions) subsequently; Require to carry out metallographic grinding according to film preparation by being placed upside down in the ceramic stainless steel sleeve end face of being filled with of plane one end, polishing reaches minute surface, makes surface expose nickel chromium triangle, nisiloy wire contact; The film portion 5 of measuring junction A is prepared into nisiloy material target on the end face of thin film deposition after polishing by magnetron sputtering mode; The hot junction that the junction of nisiloy film and nickel chromium triangle wire has formed thermopair is thermometric end A, and measuring junction diameter maximum can be 0.3 millimeter, and thin film coating is micron level, stretches out the nickel chromium triangle of sleeve part, nisiloy wire wire by way of compensation; Finally prepare Si at film surface by magnetron sputtering technique
3n
4diaphragm.Measuring junction A contacts with dut temperature, tested temperature signal is converted into electric signal and is transported in cold junction compensation and signal condition module and computer testing system by nisiloy wire and nickel chromium triangle wire.
Described stainless steel sleeve is encapsulating structure, it encapsulates above-mentioned thermocouple structure in the inner and maskable external interference signal, this stainless steel sleeve drum outer wall arranges helicitic texture and is convenient to sensor in the time measuring under rugged surroundings temperature, be fixed on the container for the treatment of testing temperature and measure, such as Internal Combustion Engine.
The above; it is only preferably embodiment of the utility model; but protection domain of the present utility model is not limited to this; any be familiar with those skilled in the art the utility model disclose technical scope in; be equal to replacement or changed according to the technical solution of the utility model and utility model design thereof, within all should being encompassed in protection domain of the present utility model.
Claims (6)
1. the thin film sensor for transient temperature measuring, comprise thermode, be sleeved on the stainless steel sleeve outside thermode and be arranged at the insulation course between thermode, stainless steel sleeve, it is characterized in that: described thermode comprises thermode one and thermode two, wherein, thermode one comprises conductor part and is plated on the membrane structure part on the arbitrary end face of insulation course, thermode two is conductor structure, and the membrane structure part of thermode one contacts with thermode two and forms hot junction---be thermometric end; The length of the conductor part of described thermode one and thermode two is all longer than the length of stainless steel sleeve, and from stretching out away from the stainless steel sleeve end of thermometric end, above-mentioned thermode stretches out the part of stainless steel sleeve directly as compensating wire corresponding to each thermode.
2. the thin film sensor for transient temperature measuring according to claim 1, is characterized in that: described insulation course is the insulation course that high temperature sintering nano-ceramic powder is prepared from.
3. the thin film sensor for transient temperature measuring according to claim 1, is characterized in that: described thermode one membrane structure and conductor structure all adopt nickel silicon alloy material.
4. the thin film sensor for transient temperature measuring according to claim 1, is characterized in that: described thermode two adopts nickel-chrome material.
5. the thin film sensor for transient temperature measuring according to claim 1, is characterized in that: described stainless steel sleeve drum outer wall arranges helicitic texture.
6. the thin film sensor for transient temperature measuring according to claim 1, is characterized in that: plating one deck Si in the membrane structure part of described thermode one
3n
4diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420192906.3U CN203929258U (en) | 2014-04-18 | 2014-04-18 | A kind of thin film sensor for transient temperature measuring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420192906.3U CN203929258U (en) | 2014-04-18 | 2014-04-18 | A kind of thin film sensor for transient temperature measuring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203929258U true CN203929258U (en) | 2014-11-05 |
Family
ID=51825059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420192906.3U Withdrawn - After Issue CN203929258U (en) | 2014-04-18 | 2014-04-18 | A kind of thin film sensor for transient temperature measuring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203929258U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900727A (en) * | 2014-04-18 | 2014-07-02 | 大连交通大学 | Thin film sensor for transient temperature measurement and manufacturing method thereof |
| CN109540318A (en) * | 2018-11-12 | 2019-03-29 | 中国飞行试验研究院 | A kind of high overload-resistant thermocouple temperature sensor of response |
| CN113969930A (en) * | 2021-09-26 | 2022-01-25 | 西安交通大学 | Multi-section high-precision temperature measurement bolt for hydraulic system |
-
2014
- 2014-04-18 CN CN201420192906.3U patent/CN203929258U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900727A (en) * | 2014-04-18 | 2014-07-02 | 大连交通大学 | Thin film sensor for transient temperature measurement and manufacturing method thereof |
| CN103900727B (en) * | 2014-04-18 | 2016-11-23 | 大连交通大学 | A kind of thin film sensor for transient temperature measuring and preparation method thereof |
| CN109540318A (en) * | 2018-11-12 | 2019-03-29 | 中国飞行试验研究院 | A kind of high overload-resistant thermocouple temperature sensor of response |
| CN113969930A (en) * | 2021-09-26 | 2022-01-25 | 西安交通大学 | Multi-section high-precision temperature measurement bolt for hydraulic system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141105 Effective date of abandoning: 20161012 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20141105 Effective date of abandoning: 20161012 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |