CN108151895A - A kind of customized transient response temperature sensor of size and preparation method thereof - Google Patents
A kind of customized transient response temperature sensor of size and preparation method thereof Download PDFInfo
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- CN108151895A CN108151895A CN201711461201.1A CN201711461201A CN108151895A CN 108151895 A CN108151895 A CN 108151895A CN 201711461201 A CN201711461201 A CN 201711461201A CN 108151895 A CN108151895 A CN 108151895A
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- thermode
- thermoprobe
- transient response
- temperature sensor
- compensating wire
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/20—Compensating for effects of temperature changes other than those to be measured, e.g. changes in ambient temperature
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Abstract
The invention discloses customized transient response temperature sensors of a kind of size and preparation method thereof；It is characterised in that it includes：Thermoprobe with coaxial probe structure has the first thermode, is formed with barrel to surround the second thermode and insulating layer that surround first thermode and be made up of hot junction film with first thermode in radial direction；One end of the coaxial probe structure is formed with thin film coating, and first thermode that the other end is stretched out with the second thermode by high temperature inorganic glue is connected respectively with the first thermode compensating wire and is fixed with the second thermode compensating wire respectively to be loaded into forming changeover portion in wire-protecting set simultaneously；The changeover portion partial insertion may customize in screwed pipe and be machined with external screw thread close to thermometric end one end outer wall.The present invention have size is small, simple in structure, easily manufactured, installation dimension may customize, can realize the response time for delicate grade transient temperature measurement.
Description
Technical field
The invention belongs to sensor technical fields, particularly relate to a kind of customized transient response temperature of size and pass
Sensor and preparation method thereof.
Background technology
Sensing technology is one of modern surveying and the important technology of automated system, wherein, temperature sensor can be effective
Carry out temperature detection.With being constantly progressive for science and technology, the requirement of temperature measurement technology is also got in multiple fields
Come higher.Wherein, the measurement of transient temperature occupies extremely important status, and developing direction also tends to high temperature and quick essence
Accurate response.Film thermocouple is a kind of transient state temperature transducer risen in modern age, has typical two-dimensional characteristics, hot junction
Thickness is micro-nano magnitude, has that thermal capacity is small, the rapid advantages such as accurate of small, response, is passed compared to conventional thermocouple
Sensor in terms of volume, material and the response speed on be obviously improved, while transient state thermometric can be carried out, possess important
Practical value and wide application prospect.
At present, common temp measuring method has：Thermocouple temperature measurement, radiation temperature measurement, Thermistor Temperature Measurement, sound wave thermometric etc., still
For the temperature thermometric in brake disc, high speed motor car bearing, shock tube etc., these methods are easily done by several factors
It disturbs, the requirement of the instantaneous measurement of fast accurate can not be met.
Invention content
In view of defects in the prior art, the invention aims to provide a kind of size customized transient response temperature
Sensor is spent, the sensor is with size is small, simple in structure, easily manufactured, installation dimension may customize, being capable of transient temperature sound
Should, the advantages that connection mode of general thin compensation lead of thermocouple and electrode can be improved.
To achieve these goals, technical scheme of the present invention：
A kind of customized transient response temperature sensor of size, which is characterized in that including：
Thermoprobe with coaxial probe structure, the coaxial probe structure have the first thermode, are formed with barrel
To be made up of around encirclement first thermode and film the second of hot junction with first thermode in radial direction
The insulating layer of thermode, filling first thermode and the second thermoelectricity clearance between poles；
One end of the coaxial probe structure is formed with the thin film coating as thermometric end；
First thermode and the second thermode that the other end of the coaxial probe structure is stretched out pass through height respectively
Warm inorganic glue is connected with the second thermode compensating wire with the first thermode compensating wire and fixes to form respectively
Crossing section, the first thermode compensating wire and the second thermode compensating wire are fitted into wire-protecting set simultaneously；
The changeover portion partial insertion may customize in screwed pipe, and the customizable screwed pipe adds close to thermometric end one end outer wall
Work has external screw thread.
Based on said program, it is further preferred that
The extremely Filamentous thermode of first thermoelectricity；The extremely cylindric thermode of second thermoelectricity.
Based on said program, it is further preferred that
First thermode uses the NiSi alloy materials of identical mass percent with the first thermode compensating wire；Institute
State the NiCr alloy materials that the second thermode uses identical mass percent with the second thermode compensating wire.
Based on said program, it is further preferred that
The thin film coating by thermoprobe thermometric end coating surface hot junction film and protective film form.
Based on said program, it is further preferred that
The insulating layer is made of insulating ceramics and high temperature inorganic glue.
Based on said program, it is further preferred that
The material of the insulating ceramics is nano-ceramic powder, and high temperature inorganic glue is double bond DB5012 refractory inorganic adhesives.
Based on said program, it is further preferred that
The customizable screwed pipe side is furnished with fluting flush end holding screw, for thermoprobe position to be fixed,
And the length of thermoprobe can be adjusted according to actual conditions certain amplitude.
It is another object of the present invention to provide a kind of above-mentioned size customized transient response temperature sensor of preparing
Method, including：
S1, the first thermode, second thermode are subjected to surface clean；
S2, ceramic pressing furnace progress high temperature sintering, insulation pottery are put into after the first thermoelectricity pole surface coating nano ceramic is starched
Coating sintering can be repeated several times to required thickness and shape in porcelain preparation process；
S3, first to forming the progress bulk processing of sintered body surface after the processing of above-mentioned high temperature sintering and coating high temperature again
Inorganic glue, while the filled high-temperature inorganic glue in the second thermode；Secondly the first thermode and sintered body are put into the second thermoelectricity
To form coaxial probe structure in extremely；Height is utilized after the second thermode compensating wire finally is close to the second thermode barrel simultaneously
Warm inorganic glue places ventilation etc. after the position of the first thermode compensating wire and the second thermode compensating wire is fixed
It is to be solidified；
S4, sanding and polishing processing is carried out to the surface of the thermometric end of the cured thermoprobe of completion；
S5, the end face of the thermoprobe of completion polishing treatment is cleaned, and in high vacuum coating unit, is splashed with magnetic control
It penetrates mode and deposits NiCr films and SiO in thermoprobe end face successively2Protective film is to form the thin film coating；
S6, customizable screwed pipe is selected according to customized demand and thermoprobe is fitted into customizable screwed pipe so that two
Root compensating wire imported into conducting wire and covers in protective case absolutely, is fixed after adjusting thermoprobe length with flush end fluting holding screw.
Compared with prior art, beneficial effects of the present invention：
The present invention is with the small easily manufactured, installation dimension simple in structure of size may customize, transient temperature responds, compensating wire
With electrode secure and reliable connection.It can be suitable for the measurement of high speed brake disc, diesel engine piston inner surface transient temperature, also may be used
Meets the needs of shock tunnel model transient temperature etc. measurement.
Description of the drawings
Fig. 1 is transient response temperature sensor overall structure schematic illustration of the present invention；
Fig. 2 is the thermoprobe broken section illustration of transient response temperature sensor of the present invention；
Fig. 3 is the technological process illustration of transient response temperature sensor of the present invention；
Fig. 4 is the length adjustment schematic illustration of transient response temperature sensor of the present invention；
Fig. 5 carries out brake disc transient state thermometric schematic illustration for transient response temperature sensor of the present invention.
In figure：1. the first thermode compensating wire, 2. high temperature inorganic glue, 3. insulating ceramicses, 4. second thermodes, 5. heat connect
Point film, 6. protective films, 7. first thermodes, 8. flush ends, which are slotted, marks closely screw, 9. customizable screwed pipes, 10. wire-protecting sets,
11. the second thermode compensating wire.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached in the embodiment of the present invention
Figure, is clearly and completely described technical scheme of the present invention, it is clear that described embodiment is that a part of the invention is real
Example is applied, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creation
Property labour under the premise of all other embodiments obtained, shall fall within the protection scope of the present invention.
As described above, in order to meet above-mentioned present situation and growth requirement, the present invention provides a kind of customized transient states of size
Temperature sensor is responded, the measurement of high speed brake disc, diesel engine piston inner surface transient temperature can be suitable for, can also be met
The demand of shock tunnel model wink temperature survey.
Specifically, a kind of customized transient response temperature sensor of size as Figure 1-Figure 2, which is characterized in that
Including：
Thermoprobe with coaxial probe structure, the coaxial probe structure have the first thermode, are formed with barrel
To be made up of around encirclement first thermode and film the second of hot junction with first thermode in radial direction
The insulating layer of thermode, filling first thermode and the second thermoelectricity clearance between poles；
One end of the coaxial probe structure is formed with the thin film coating as thermometric end；
First thermode and the second thermode that the other end of the coaxial probe structure is stretched out pass through height respectively
Warm inorganic glue is connected with the second thermode compensating wire with the first thermode compensating wire and fixes to form respectively
Crossing section, the first thermode compensating wire and the second thermode compensating wire are fitted into wire-protecting set simultaneously；
The changeover portion partial insertion may customize in screwed pipe, and the customizable screwed pipe adds close to thermometric end one end outer wall
Work has external screw thread；
Wherein, the sensor can adjust thermoprobe processing length and customizable screwed pipe model according to customized demand
And length, it realizes the sensor manufacture of different lengths, makes transducer series, meet the customized demand of a variety of occasion conditions；Its
Remarkable advantage is that small simple in structure, the easily manufactured, installation dimension of size may customize, transient temperature response, compensating wire and electrode
Secure and reliable connection；During use, thermoprobe end face is contacted or close with surface to be measured, measured temperature signal is converted into
Electric signal is transmitted to cold junction compensation and signal amplification circuit by compensating wire, handles and obtains eventually by computer acquisition system
Transient temperature measuring value.
Based on said program, it is further preferred that
The extremely Filamentous thermode of first thermoelectricity；The extremely cylindric thermode of second thermoelectricity.
Based on said program, it is further preferred that
First thermode and the first thermode compensating wire use the NiSi of same amount ratio, that is, mass percent
Alloy material；Second thermode and the second thermode compensating wire use the NiCr of same amount ratio, that is, mass percent
Alloy material.
Based on said program, it is further preferred that
The thin film coating by thermoprobe thermometric end coating surface hot junction film and protective film form, such as surveying
The thermometric end surfaces of warm probe first deposit the film of the second thermode material, hot junction are formed with the first thermode, then at this
The material of plating protective film while the hot junction film is the NiCr alloys with two material identical of thermode again on film, and heat connects
Spot diameter is no more than 0.3mm；The material of the protective film is SiO2Film.
Based on said program, it is further preferred that
The insulating layer is made of insulating ceramics and high temperature inorganic glue.
Based on said program, it is further preferred that
The material of the insulating ceramics is nano-ceramic powder, and high temperature inorganic glue is double bond DB5012 refractory inorganic adhesives.
Based on said program, it is further preferred that
The customizable screwed pipe side is furnished with fluting flush end holding screw, for thermoprobe position to be fixed,
And the length of thermoprobe can be adjusted according to actual conditions certain amplitude, the material of the preferred customizable screwed pipe is 304
Stainless steel.
It is another object of the present invention to provide a kind of above-mentioned size customized transient response temperature sensor of preparing
Method, including：
S1, it is that the i.e. cylindric thermode 4 of Filamentous thermode 1, second thermode carries out surface by the first thermode
Cleaning is cleaned by deionized water ultrasonic cleaning and acetone, ethyl alcohol, ensures the cleaning of work surface；
S2, it is put into vacuum after Filamentous thermode 1 (being processed into thermoprobe part) surface coating nano ceramic is starched
Porcelain furnace carries out high temperature sintering 10min at 940 DEG C, and coating sintering can be repeated several times to required in 3 preparation process of insulating ceramics
Thickness and shape, such as Fig. 3-1. shown；
S3, first to forming the progress bulk processing of sintered body surface after the processing of above-mentioned high temperature sintering and coating high temperature again
Inorganic glue 2, while the filled high-temperature inorganic glue 2 in cylindric thermode 4；Secondly the first thermode 7 and sintered body are put into the
To form coaxial probe structure in two thermodes 4, such as Fig. 3-2. shown；It is last that the second thermode compensating wire is close to the simultaneously
After two thermode barrels using high temperature inorganic glue to the position of the first thermode compensating wire and the second thermode compensating wire into
It is to be solidified that ventilation etc. is placed after row is fixed, such as Fig. 3-3. shown；
S4, thermometric end to completing cured thermoprobe surface carry out sand paper successively from small to large according to model and beat
Mill, is then processed by shot blasting；
S5, the end face of the thermoprobe of completion polishing treatment is cleaned, and in high vacuum coating unit, high vacuum plating
In film machine, target as sputter to thermoprobe end face is formed into NiCr thin film coatings 5 with magnetron sputtering mode, then on this basis
The surface of NiCr films plating SiO2 protective films 6 again, such as Fig. 3-5. shown；
S6, customizable screwed pipe 9 is selected according to customized demand and thermoprobe is fitted into customizable screwed pipe so that two
Root compensation, which leads 1 line 1 and 11 and imported into conducting wire, to be covered absolutely in protective case 10, is adjusted by a small margin after thermoprobe length with flush end fluting tightly
Determine screw and fix 8, as shown in Figure 4.
In summary, it is seen that nickel chromium triangle-nisiloy (NiCr/NiSi) alloy is one group of widely used cheap metal thermocouple material
Material, the oxidation resistance and resistance to corrosion under high temperature are all very strong, have the characteristics that the pyroelecthc properties linearity is good, high sensitivity；
And it is required to have between two thermodes of coaxial film, between compensating wire and between hot junction film and outside
There is good insulating properties, and response speed is related with hot junction film thickness and its structure of coaxial thermocouple sensor requirements is smart
Letter, preparation process is simple, is suitable for a variety of occasions installations and can producing in serial form and customization processing.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (8)
1. a kind of customized transient response temperature sensor of size, which is characterized in that including：
Thermoprobe with coaxial probe structure, the coaxial probe structure have the first thermode, be formed with barrel with
Second thermoelectricity of the radial direction around first thermode is surrounded and with first thermode by film composition hot junction
The insulating layer of pole, filling first thermode and the second thermoelectricity clearance between poles；
One end of the coaxial probe structure is formed with the thin film coating as thermometric end；
First thermode and the second thermode that the other end of the coaxial probe structure is stretched out respectively by high temperature without
Machine glue is connected with the second thermode compensating wire with the first thermode compensating wire and fixes to form changeover portion respectively；
The changeover portion partial insertion may customize in screwed pipe, and the customizable screwed pipe is machined with close to thermometric end one end outer wall
External screw thread.
2. transient response temperature sensor according to claim 1, it is characterised in that：
The extremely Filamentous thermode of first thermoelectricity；The extremely cylindric thermode of second thermoelectricity.
3. transient response temperature sensor according to claim 1, it is characterised in that：
First thermode uses the NiSi alloy materials of identical mass percent with the first thermode compensating wire；Described
Two thermodes use the NiCr alloy materials of identical mass percent with the second thermode compensating wire.
4. transient response temperature sensor according to claim 1, it is characterised in that：
The thin film coating by thermoprobe thermometric end coating surface hot junction film and protective film form.
5. transient response temperature sensor according to claim 1, it is characterised in that：
The insulating layer is made of insulating ceramics and high temperature inorganic glue.
6. transient response temperature sensor according to claim 5, it is characterised in that：
The material of the insulating ceramics is nano-ceramic powder, and high temperature inorganic glue is double bond DB5012 refractory inorganic adhesives.
7. transient response temperature sensor according to claim 1, it is characterised in that：
The customizable screwed pipe side is furnished with fluting flush end holding screw, for thermoprobe position to be fixed, and can
According to the length that thermoprobe is adjusted in actual conditions certain amplitude.
8. a kind of method for preparing the customized transient response temperature sensor of above-mentioned size, including：
S1, the first thermode, the second thermode are subjected to surface clean；
S2, ceramic pressing furnace progress high temperature sintering, insulating ceramics system are put into after the first thermoelectricity pole surface coating nano ceramic is starched
Coating sintering can be repeated several times to required thickness and shape in standby process；
S3, first to forming the progress bulk processing of sintered body surface after the processing of above-mentioned high temperature sintering and coating high temperature inorganic again
Glue, while the filled high-temperature inorganic glue in the second thermode；Secondly the first thermode and sintered body are put into the second thermode
To form coaxial probe structure；It is last simultaneously by the second thermode compensating wire be close to after the second thermode barrel using high temperature without
Machine glue is placed ventilation after the position of the first thermode compensating wire and the second thermode compensating wire is fixed and is waited for admittedly
Change；
S4, sanding and polishing processing is carried out to the surface of the thermometric end of the cured thermoprobe of completion；
S5, the end face of the thermoprobe of completion polishing treatment is cleaned, and in high vacuum coating unit, with magnetron sputtering side
Formula deposits NiCr films and SiO2 protective films to form the thin film coating in thermoprobe end face successively；
S6, customizable screwed pipe is selected according to customized demand and thermoprobe is fitted into customizable screwed pipe so that two benefits
It repays conducting wire and imported into conducting wire and cover in protective case absolutely, fixed after adjusting thermoprobe length with flush end fluting holding screw.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110231100A (en) * | 2019-06-29 | 2019-09-13 | 潍柴动力股份有限公司 | A kind of thermometric piston and its installation of TC method |
| CN111473875A (en) * | 2020-04-15 | 2020-07-31 | 大连交通大学 | Microminiature temperature sensor for transient high temperature measurement and manufacturing method thereof |
| CN115420390A (en) * | 2022-08-30 | 2022-12-02 | 西安交通大学 | Lead wire reinforcement type probe type thin film thermocouple packaging structure |
| CN116295933A (en) * | 2023-05-15 | 2023-06-23 | 上海泽丰半导体科技有限公司 | Probe card temperature measurement system and temperature measurement method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115420390B (en) * | 2022-08-30 | 2024-08-02 | 西安交通大学 | Packaging structure of lead reinforcement type probe type thin film thermocouple |
| CN116295933A (en) * | 2023-05-15 | 2023-06-23 | 上海泽丰半导体科技有限公司 | Probe card temperature measurement system and temperature measurement method |
| CN116295933B (en) * | 2023-05-15 | 2023-08-08 | 上海泽丰半导体科技有限公司 | Probe card temperature measurement system and temperature measurement method |
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Application publication date: 20180612 |