Background technology
Electronic-stage hydrofluoric acid is mainly used in production integrated circuit in electronics, photovoltaic industry, requires content Cl≤5000ppb, the NO of nonmetalloid
3 -≤ 3000ppb, PO
4 3-≤ 1000ppb, SO
4 2-≤ 5000ppb, the content requirement of metallic element is lower than 10ppb.Be mainly that industrial hydrofluoric acid is further oxidized and rectifying removal of impurities for the Acid of Hydrofluoric Acid Production of electron level at present, then carry out filling.For enhancing productivity, mostly adopt at present continuous filling, that is by tape transport bucket to be filled, the top of load-transfer device is fixedly installed the filling rifle of hydrofluoric acid, in the time that the filling bucket of carrying arrives filling rifle below, carry out filling to it.But aborning, for meeting different clients' demand, filling is diversified in specifications, that is differ for the height of filling filling bucket, in the time carrying out compared with small dimension filling, spacing between filling bucket bung and filling wall rifle will be excessive, and filling hydrofluoric acid is effumability product, can cause hydrofluoric acid volatilization aggravation.
Summary of the invention
The purpose of this utility model is to provide a kind of hydrofluoric acid filling apparatus, and its hydrofluoric acid that can adapt to different size is filling.
For achieving the above object, the utility model has adopted following technical scheme: a kind of hydrofluoric acid filling apparatus, it is characterized in that: comprise the filling rifle of hydrofluoric acid arranging for delivery of directly over the load-transfer device of filling bucket and load-transfer device, filling rifle is fixed on support, the object placing platform that is provided for placing when filling filling bucket between filling rifle and load-transfer device, is provided for regulating the adjusting part of spacing between the two between object placing platform and filling rifle.
In such scheme, by the adjusting part of spacing between an adjusting object placing platform and filling rifle is set, to adapt to the canned of the filling bucket of differing heights, meet the canned demand of different clients.
Detailed description of the invention
The scheme that the utility model is taked as shown in Figure 1, a kind of hydrofluoric acid filling apparatus, comprise the filling rifle 11 of hydrofluoric acid arranging for delivery of directly over the load-transfer device 14 of filling bucket 12 and load-transfer device 14, filling rifle 11 is fixed on support, the object placing platform 13 that is provided for placing when filling filling bucket 12 between filling rifle 11 and load-transfer device 14, is provided for regulating the adjusting part of spacing between the two between object placing platform 13 and filling rifle 11.Here object placing platform 13 can be made up of jacking system, and now adjusting part is exactly the lifting mechanism that forms jacking system, as the adjusting part of cylinder, spring, feed screw nut's regulating mechanism formation.Certainly also can adopt the adjusting part that regulates filling rifle 11 to move in vertical, but when practical operation, preferably regulate object placing platform 13 to carry out lifting, thereby realize the adjusting of spacing between the two, adapt to the canned of different size.
Because canned product is hydrofluoric acid, hydrofluoric acid easily volatilizees, therefore, further scheme of the present utility model is, support comprises along the hold-down arm 17 of the cantilever-shaped setting of load-transfer device 14 bandwidth direction, the end that suspends of hold-down arm 17 is provided for the deck 15 of fixing filling rifle 11 and for extracting the extraction hood 16 of the hydrofluoric acid of volatilization when filling, extraction hood 16 is an annular element formation as for filling bucket bung top, the barral of a gun of filling rifle 11 extends to filling bucket 12 bung places through annular element, the body of annular element is arranged to be evenly provided on cavity-like and its inner ring surface to be communicated with its internal cavities and extraneous through hole 161, the inner chamber of extraction hood 16 is connected and is connected with air inducing assembly 19.Hold-down arm 17 is that a tube-like piece forms, the inner chamber of extraction hood 16 is connected and is connected with the tube chamber of tube-like piece, the support tubes 18 that the other end of hold-down arm 17 is arranged with vertical shape forms normal-running fit around support tubes 18 pipe range directions and is connected, the tube chamber that forms the tube-like piece of hold-down arm 17 is connected and is connected with the tube chamber of support tubes 18, and the lower end of support tubes 18 is connected and is connected with air inducing assembly 19.By extraction hood 16, the hydrofluoric acid of volatilization is got rid of, prevented contaminated environment.For the ease of different workman's practical operations, therefore require filling rifle 11 can regulate in the position of load-transfer device 14 Widths, and hold-down arm 17 needs to be connected with support body 18, therefore both being formed to normal-running fit in vertical connects, that is regulate the position of filling rifle 11 on load-transfer device 14 Widths by rotational support arm 17, meet different operating workman's operation.
In order to ensure stable being fixed of filling rifle 11, in the utility model, deck 15 is according to scheme implementation as shown in Figure 2, described deck 15 comprises the plate body 151 that a vertical shape is arranged, the flap of arranging along load-transfer device 14 throughput directions is set on the plate face of plate body 151 bottoms near extraction hood 16 1 sides, flap and plate body constitute first bayonet socket 152 for fixing filling rifle 11 of opening upwards, the vacancy portion of an inverted "convex" shape is offered at the middle part, edge of plate body 151 upper side edges to plate body 151 bodies, this vacancy portion is configured for the second bayonet socket 153 of fixing filling rifle 11, plate body is also provided with the probe fixedly detecting 154 on deck 15 to filling rifle 11 near the plate face middle part of extraction hood 16 1 sides.Filling rifle 11 comprises an adapter plate of fixing pikestaff, upper and lower limit, the back side portion of adapter plate arranges respectively the hook that flap forms, two hooks carry out clamping cooperation respectively at first and second bayonet socket 151,152, the first bayonet socket 151 is realized the location of filling rifle 11 in load-transfer device 14 Widths and vertical, whether the second bayonet socket 153 is realized the location of filling rifle 11 in load-transfer device length direction and vertical, pop one's head in 154 can reliably detect canned rifle is fixing simultaneously.In the time of concrete operations same load-transfer device 14 on multiple object placing platforms 13 and canned rifle 11 can be set.Whole filling apparatus is arranged in clean canned chamber, when the filling bucket 12 of carrying continuously when load-transfer device 14 arrives filling rifle 11 position, operator by this filling bucket 12 get be placed on object placing platform 13, carry out filling.In the time that needs change canned specification, by adjusting part regulate spacing between object placing platform 13 and filling rifle 11 with change after filling bucket 12 highly suitable, and then carry out filling.In a word, it is filling that the utility model can adapt to the hydrofluoric acid of different size.