CN203799099U - Telecentric scanning lens - Google Patents
Telecentric scanning lens Download PDFInfo
- Publication number
- CN203799099U CN203799099U CN201420136981.8U CN201420136981U CN203799099U CN 203799099 U CN203799099 U CN 203799099U CN 201420136981 U CN201420136981 U CN 201420136981U CN 203799099 U CN203799099 U CN 203799099U
- Authority
- CN
- China
- Prior art keywords
- lens
- millimeters
- telecentric scanning
- scanning lens
- telecentric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000001747 pupil Anatomy 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 9
- 238000003754 machining Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The utility model discloses a telecentric scanning lens applied during the laser boring process. The telecentric scanning lens comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens, wherein the above five lenses are arranged to approach a to-be-machined object in turn. The entrance pupil diameter of the telecentric scanning lens is 10 mm, and the effective focal length of the telecentric scanning lens is 121.95 mm. According to the technical scheme of the utility model, the optical axis of the emergent light is enabled to be substantially vertical to the to-be-machined object by means of the telecentric scanning lens. Therefore, when the relatively deep interior of a hole is to be machined, the interior of the hole is not easily tilted during the depth machining process. Meanwhile, the circularity of the hole is ensured. At the same time, the machining location of the hole is within an allowable offset range.
Description
Technical field
The utility model relates to field of laser processing, relates in particular to the Telecentric scanning lens of beating micropore for Ultra-Violet Laser.
Background technology
Existing ultraviolet laser machining apparatus is used non-Telecentric scanning lens conventionally, thereby when processing is put compared with deep-seated, on the one hand, hole internal depth easily tilts, and hole shape is not round yet; On the other hand, when processing object out of focus, there is skew in the Working position of processed position and actual needs, thereby cannot reach the requirement of processing.
Utility model content
The purpose of this utility model is to provide a kind of Telecentric scanning lens, uses this Telecentric scanning lens can guarantee the circularity in hole, and the Working position in hole is also within the deviation range allowing simultaneously.
For realizing above utility model object, the utility model adopts following technical scheme: a kind of Telecentric scanning lens, for laser boring, described Telecentric scanning lens comprises first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens of close object to be processed successively, the entrance pupil diameter of described Telecentric scanning lens is 10 millimeters, and effective lens focal length is 121.95 millimeters.
As further improvement of the utility model, described first lens is concave surface away from a side of the second lens, a side near the second lens is plane, described the second lens are concave surface near a side of first lens, a side near the 3rd lens is convex surface, described the 3rd lens are plane near a side of the second lens, a side near the 4th lens is convex surface, the two sides of described the 4th lens are convex surface, described the 5th lens are convex surface near a side of the 4th lens, and relative another side is plane.
As further improvement of the utility model, two spherical radius of described first lens are respectively-40.923 millimeters and 354.791 millimeters, and two corresponding thickness are respectively 5.000 millimeters and 7.710 millimeters.
As further improvement of the utility model, two spherical radius of described the second lens are respectively-94.768 millimeters and-72.256 millimeters, and two corresponding thickness are respectively 18.000 millimeters and 0.500 millimeter.
As further improvement of the utility model, two spherical radius of described the 3rd lens are respectively 2457.454 millimeters and-72.650 millimeters, and two corresponding thickness are respectively 22.820 millimeters and 0.500 millimeter.
As further improvement of the utility model, two spherical radius of described the 4th lens are respectively 341.579 millimeters and-342.776 millimeters, and two corresponding thickness are respectively 12.730 millimeters and 0.500 millimeter.
As further improvement of the utility model, two spherical radius of described the 5th lens are respectively 161.983 millimeters and 748.621 millimeters, and two corresponding thickness are respectively 18.000 millimeters and 168.825 millimeters.
As further improvement of the utility model, the maximum far heart degree of described Telecentric scanning lens is 0.346 degree.
As further improvement of the utility model, described Telecentric scanning lens is applicable to the laser that wavelength is 354.7 nanometers, and cutting the toe factor is 1.83, and Laser Beam Quality Factor is 1.2.
Compared to prior art, Telecentric scanning lens of the present utility model is in camera lens field range, the optical axis of emergent light is basically perpendicular to object to be processed, and when processing is put compared with deep-seated, hole internal depth is not easy, also can guarantee the circularity in hole, the Working position in hole is also within the deviation range allowing simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of Telecentric scanning lens of the present utility model.
Fig. 2 is the modulation transmissions curve map of the Telecentric scanning lens shown in Fig. 1.
Fig. 3 is the astigmatism of the Telecentric scanning lens shown in Fig. 1, the curvature of field, distortion figure.
Fig. 4 is the camera lens aberration diagram of the Telecentric scanning lens shown in Fig. 1.
Fig. 5 is the optical system schematic diagram that uses the Telecentric scanning lens shown in Fig. 1.
Embodiment
As Figure 1-4, Telecentric scanning lens 10 of the present utility model is for laser boring.Described Telecentric scanning lens 10 comprises first lens 11, the second lens 12, the 3rd lens 13, the 4th lens 14 and the 5th lens 15 of close object to be processed successively.The entrance pupil diameter of described Telecentric scanning lens 10 is 10 millimeters, and effective lens focal length (EFL) is 121.95 millimeters, and applicable wavelengths (λ) is the ultraviolet laser of 354.7 nanometers.
Described first lens 11 is concave surface away from a side 111 of the second lens 12, and a side 112 of close the second lens 12 is plane; Described the second lens 12 are concave surface near a side 121 of first lens 11, and a side 122 of close the 3rd lens 13 is convex surface; Described the 3rd lens 13 are plane near a side 131 of the second lens 12, and a side 132 of close the 4th lens 14 is convex surface; The two sides 141,142 of described the 4th lens 14 are convex surface; Described the 5th lens 15 are convex surface near a side 151 of the 4th lens 14, and relative another side 152 is plane.Therefore, described first lens 11 to each lens in described the 5th lens 15 form by two radiuses, and these five lens combinations together, just can obtain a complete Telecentric scanning lens 10.
Described first lens 11 to concrete spherical radius value and the one-tenth-value thickness 1/10 of the 5th lens 15 please be joined following table.The optical performance curve figure of described Telecentric scanning lens 10 as in Figure 2-4.
It should be noted that, the spherical radius numerical value of above-mentioned each lens and thickness value meet every optical index and design.
As shown in Figure 5, be the optical system 100 that adopts 10 pairs of objects to be processed 200 of Telecentric scanning lens of the present utility model to punch.Described optical system 100 comprises ultraviolet laser 20, the beam expanding lens unit 30 that the light signal that ultraviolet laser 20 is sent expands, the light that beam expanding lens unit 30 is sent carries out the first mirror unit 40 of 90 degree reflections, the light that the first mirror unit 40 is sent carries out the second mirror unit 50 of 90 degree reflections, the light that the second mirror unit 50 is sent carries out the 3rd mirror unit 60 of 90 degree reflections, the light that the 3rd mirror unit 60 is sent carries out the 4th mirror unit 70 of 90 degree reflections, the light that the 4th mirror unit 70 is sent carries out the 5th mirror unit 80 of 90 degree reflections, accept the iris 90 of the light that the 5th mirror unit 80 sends, the light that iris 90 is sent carries out the 6th mirror unit 91 of 90 degree reflections, the light that the 6th mirror unit 91 is sent carries out the 7th mirror unit 92 of 90 degree reflections, receive the light that the 7th mirror unit 92 sends galvanometer unit 93 and with the Telecentric scanning lens 10 of galvanometer unit 93 optically-coupled.
Theoretical according to optical diffraction, minimum focal beam spot=λ * EFL*FAP*M2/D=0.0003547*121.95*1.83*1.2/10 ≈ 0.0095mm of the described Telecentric scanning lens 10 being formed by five lens combinations, be 9.5um, can meet the demand of 20 dozens of micropores of ultraviolet laser.Wherein λ is the wavelength of ultraviolet laser 20, and EFL is the effective focal length of Telecentric scanning lens 10, and FAP, for cutting the toe factor, gets the beam quality factor that 1.83, M2 is ultraviolet laser 20, gets 1.2.In addition, the maximum far heart degree of the described Telecentric scanning lens 10 being formed by five lens combinations is 0.346 °, when depth of focus changes 0.1mm, facula position variation only has 0.0006mm, substantially can ignore, and at the 0.1mm place of object to be processed 200 inside, the inclination vertical range in hole also only has 0.0006mm, substantially can ignore, on the impact of micropore circularity, also can ignore simultaneously.
In sum, Telecentric scanning lens 10 of the present utility model is in camera lens field range, the optical axis of emergent light is basically perpendicular to object to be processed 200, and when processing is put compared with deep-seated, hole internal depth is not easy, also can guarantee the circularity in hole, the Working position in hole is also within the deviation range allowing simultaneously.
These are only preferred embodiment of the present utility model, should not limit scope of the present utility model with this, be that every simple equivalence of doing according to the utility model claims and utility model description changes and modifies, all should still belong in the scope that the utility model patent contains.
Claims (9)
1. a Telecentric scanning lens, for laser boring, it is characterized in that: described Telecentric scanning lens comprises first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens of close object to be processed successively, the entrance pupil diameter of described Telecentric scanning lens is 10 millimeters, and effective lens focal length is 121.95 millimeters.
2. Telecentric scanning lens as claimed in claim 1, it is characterized in that: described first lens is concave surface away from a side of the second lens, a side near the second lens is plane, described the second lens are concave surface near a side of first lens, a side near the 3rd lens is convex surface, described the 3rd lens are plane near a side of the second lens, a side near the 4th lens is convex surface, the two sides of described the 4th lens are convex surface, described the 5th lens are convex surface near a side of the 4th lens, and relative another side is plane.
3. Telecentric scanning lens as claimed in claim 2, is characterized in that: two spherical radius of described first lens are respectively-40.923 millimeters and 354.791 millimeters, and two corresponding thickness are respectively 5.000 millimeters and 7.710 millimeters.
4. Telecentric scanning lens as claimed in claim 2, is characterized in that: two spherical radius of described the second lens are respectively-94.768 millimeters and-72.256 millimeters, and two corresponding thickness are respectively 18.000 millimeters and 0.500 millimeter.
5. Telecentric scanning lens as claimed in claim 2, is characterized in that: two spherical radius of described the 3rd lens are respectively 2457.454 millimeters and-72.650 millimeters, and two corresponding thickness are respectively 22.820 millimeters and 0.500 millimeter.
6. Telecentric scanning lens as claimed in claim 2, is characterized in that: two spherical radius of described the 4th lens are respectively 341.579 millimeters and-342.776 millimeters, and two corresponding thickness are respectively 12.730 millimeters and 0.500 millimeter.
7. Telecentric scanning lens as claimed in claim 2, is characterized in that: two spherical radius of described the 5th lens are respectively 161.983 millimeters and 748.621 millimeters, and two corresponding thickness are respectively 18.000 millimeters and 168.825 millimeters.
8. Telecentric scanning lens as claimed in claim 1, is characterized in that: the maximum far heart degree of described Telecentric scanning lens is 0.346 degree.
9. Telecentric scanning lens as claimed in claim 1, is characterized in that: described Telecentric scanning lens is applicable to the laser that wavelength is 354.7 nanometers, and cutting the toe factor is 1.83, and Laser Beam Quality Factor is 1.2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420136981.8U CN203799099U (en) | 2014-03-25 | 2014-03-25 | Telecentric scanning lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420136981.8U CN203799099U (en) | 2014-03-25 | 2014-03-25 | Telecentric scanning lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203799099U true CN203799099U (en) | 2014-08-27 |
Family
ID=51381302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420136981.8U Expired - Lifetime CN203799099U (en) | 2014-03-25 | 2014-03-25 | Telecentric scanning lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203799099U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016041161A1 (en) * | 2014-09-17 | 2016-03-24 | 深圳市大族激光科技股份有限公司 | Telecentric optical lens |
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
-
2014
- 2014-03-25 CN CN201420136981.8U patent/CN203799099U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016041161A1 (en) * | 2014-09-17 | 2016-03-24 | 深圳市大族激光科技股份有限公司 | Telecentric optical lens |
| CN106415352A (en) * | 2014-09-17 | 2017-02-15 | 大族激光科技产业集团股份有限公司 | Telecentric optical lens |
| US9897787B2 (en) | 2014-09-17 | 2018-02-20 | Han's Laser Technology Industry Group Co., Ltd. | Telecentric optical lens |
| CN106415352B (en) * | 2014-09-17 | 2018-04-27 | 大族激光科技产业集团股份有限公司 | Telecentric optics camera lens |
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203786376U (en) | F-theta objective lens | |
| CN103576316B (en) | A kind of infrared laser zoom beam-expanding system and laser process equipment | |
| CN104570363A (en) | Gauss laser beam shaping method and device and precise laser micropore processing device | |
| WO2019079417A3 (en) | Methods for laser processing transparent workpieces using pulsed laser beam focal lines and chemical etching solutions | |
| CN100546752C (en) | Adopt the laser cutting of thick metal parts of bifocal | |
| CN105891916B (en) | A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic | |
| CN204075509U (en) | Optical beam forming apparatus | |
| CN203799099U (en) | Telecentric scanning lens | |
| CN105689890A (en) | Annular laser welding head and annular laser welding method | |
| CN106773025B (en) | Focusing lens and lens vibrating type laser scanning system | |
| CN105607162B (en) | One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens | |
| CN104769474B (en) | A kind of Submillineter Wave Technology processing F θ camera lenses and laser process equipment | |
| CN106695113A (en) | Axial bifocus lens | |
| CN207020405U (en) | A kind of optical system for producing oval hollow focus on light beam | |
| CN101738654B (en) | Novel optical element for generating non-diffracting light | |
| CN107813060A (en) | A kind of optical-fiber laser cutting machine reflective cutting head and control method | |
| CN103576317B (en) | A kind of ultraviolet laser variable power beam-expanding system and laser process equipment | |
| CN106094226B (en) | One kind is based on two beam splitter prisms and wedge-shaped mirrors combinative optical system | |
| CN106670652A (en) | Laser coaxial processing device and method | |
| CN208895373U (en) | The confocal focusing optical system of dual wavelength | |
| CN203217180U (en) | 1064nm / 532nm dual-band beam expander | |
| CN103576318B (en) | A kind of green laser zoom beam-expanding system and laser process equipment | |
| CN210720852U (en) | Telecentric f-theta scanning lens of ultraviolet laser marking machine | |
| CN112305726B (en) | Objective lens for correcting distribution state of optical focusing point along light beam propagation direction | |
| CN203664922U (en) | Focusing device and laser cutting device with focusing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.188 Chuangyuan Road, industrial park, Suzhou, Jiangsu Province, 215000 Patentee after: Suzhou Weijia Technology Co.,Ltd. Address before: 215021 No.188, Xincheng Road, Dushuhu science and Education Innovation Zone, Suzhou Industrial Park, Jiangsu Province Patentee before: VEGA CNC TECHNOLOGY (SUZHOU) Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140827 |
|
| CX01 | Expiry of patent term |