CN203774274U - Positioning apparatus of rotation arm - Google Patents
Positioning apparatus of rotation arm Download PDFInfo
- Publication number
- CN203774274U CN203774274U CN201420155021.6U CN201420155021U CN203774274U CN 203774274 U CN203774274 U CN 203774274U CN 201420155021 U CN201420155021 U CN 201420155021U CN 203774274 U CN203774274 U CN 203774274U
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- CN
- China
- Prior art keywords
- full wind
- positioner
- roller
- chuck assembly
- draw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
Provided by the utility model is a positioning apparatus of a rotation arm. A rotation arm apparatus comprises a base, a rotary roller connected above the base, and a rotation arm connected above the rotary roller. The positioning apparatus comprises a round chuck device sleeving the bottom of the rotary roller. The outer side edge of the round chuck device is provided with three clamping grooves and a detection apparatus arranged above the base. The detection apparatus realizes external tangency with the round chuck device or clamping with the clamping grooves through telescoping. According to the utility model, according to the angle transmitted by the rotation arm, more accurate design is realized. The three clamping grooves and one detection device with a roller cooperate with system software, so that deviation problems can be timely reflected, adjustment is carried out timely, precision positioning is realized, the zero-degree offset problem is prevented, and production equipment is effectively protected from being damaged.
Description
Technical field
The utility model relates to a kind of semiconductor production equipment, particularly relates to a kind of positioner of full wind-up.
Background technology
Along with the development of semicon industry, more and more higher to the requirement of semiconductor production, as the direct semiconductor production equipment that affects semiconductor production quality, its performance requirement is also more and more higher.In the process of semiconductor machining, wafer need to be transmitted between each process procedure, and the transmission of wafer is all completed by mechanical arm conventionally.Full wind-up is a kind of mechanical arm of wherein relatively commonly using, full wind-up is applied on KT OVL/AIT/KLA board, its major function is that wafer is delivered to Pre-aligner and Table from SMIF, to the position that needs to arrive, carry out the loading and unloading of wafer according to the angle automatic rotation of default in this position.
Be illustrated in figure 1 full wind-up device 1 conventional in prior art, on 0 °, 90 ° of full wind-up device 1 and 180 ° of positions, be respectively equipped with SMIF (SMIF) system 13, prealignment (Pre-aligner) system 14 and wafer table (Table) system 15.In SMIF system 13, wafer is identified and takes out, and is loaded on full wind-up 12; Then according to 90 of default ° of angle rotations, wafer is sent to Pre-aligner system 14 places of 90 ° of positions, then wafer load is carried out to positioning action on Pre-aligner system 14; After completing, operation to be positioned by full wind-up 12, wafer is unloaded from Pre-aligner system 14 again, according to 90 of default ° of angle rotations, wafer is sent to Table system 15 places of 180 ° of positions, then wafer load is carried out to the operations such as next step measurement on Table system 15.
Full wind-up device can be sent to wafer each system very easily, but there are the following problems for current full wind-up device: the angle of system setting does not have checkout gear with the angle of essence, if servomotor voltage or electric current go wrong, the angle of encoder control also is just easy to occur deviation, causes the skew of 0 ° of position; Transmit wafer in Pre-aligner or Table system, need full wind-up to rotate according to the angle of default, if 0o position skew, arrive the also skew in succession of position of Pre-aligner and Table, the words that produce position deviation may cause production equipment collision, cause wafer damage, break Pre-aligner and Table, subsidiary Notch sensor in addition and high-power microscope are impaired.As shown in Figure 2, when full wind-up 12 moves to Pre-aligner alliance, due to 0 ° of position skew, full wind-up 12 will sever for a thimble that loads wafer in Pre-aligner system, clash into the Notch sensor that the vibrations that produce are takeoff wafer distortion sky to strike upper surface detecting, cause thimble and Notch sensor in wafer loss, system impaired.As shown in Figure 3, when full wind-up 12 moves to Table alliance, due to 0 ° of position skew, full wind-up 12 bumps with Table system, cause full wind-up 12 to be hit curved, the vibrations of simultaneously clashing into takeoff distortion sky to strike the high-power microscope of establishing above it, cause wafer loss, microscope eyeglass to be wounded and Table system is damaged, cause equipment damage, bring unnecessary economic loss.
0 ° of offset problem greatly affects the operating efficiency of full wind-up device, damages wafer and production equipment simultaneously, causes unnecessary economic loss, is semiconductor production equipment field problem demanding prompt solution.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of positioner of full wind-up, the wafer loss and the device damage problem that cause for solving 0 ° of skew of prior art.
For achieving the above object and other relevant objects, the utility model provides a kind of positioner of full wind-up, described full wind-up device comprises base, be connected in the swing roller of described base top, and be connected in the full wind-up of described swing roller top, described positioner comprises the circular chuck assembly of the bottom that is sheathed on described swing roller, the outer ledge of described circular chuck assembly is provided with three draw-in grooves, and be arranged at the sniffer of described base top, described sniffer by flexible realize with the circumscribed of described circular chuck assembly or with the engaging of described draw-in groove.
Preferably, the height setting of described circular chuck assembly is 3cm～5cm.
Preferably, the external diameter of described circular chuck assembly is less than the external diameter of described base.
Preferably, described draw-in groove is triangle column breach.
Preferably, described three draw-in grooves on circular chuck assembly with 90 ° of angle adjacent distributions.
Preferably, described sniffer comprises roller, is connected to the slide block on described roller and is connected in the spring on described slide block.
Preferably, described sniffer is connected with transducer, and described transducer is connected in the time that described roller enters draw-in groove, disconnects when circumscribed at described roller and described circular chuck assembly.
Preferably, described sniffer is arranged at 0 ° of position of described base.
As mentioned above; the positioner of full wind-up of the present utility model; there is following beneficial effect: three draw-in grooves of the positioner of full wind-up of the present utility model and a sniffer with roller coordinate with systems soft ware; there is the problem of deviation in reaction in time; realize accurate precise positioning; avoid 0 ° of skew, and then the instrument collision problem of avoiding 0 ° of skew to cause, effectively protect production equipment not to be damaged.
Brief description of the drawings
Fig. 1 is shown as full wind-up device schematic diagram of the prior art.
Fig. 2 is shown as the schematic diagram bumping when full wind-up of the prior art moves on Pre-aligner position.
Fig. 3 is shown as the schematic diagram bumping when full wind-up of the prior art moves on Table position.
Fig. 4 and Fig. 5 are shown as the schematic top plan view of the positioner of full wind-up of the present utility model.
Fig. 6 is shown as the schematic side view of the positioner of full wind-up of the present utility model.
Element numbers explanation
1 full wind-up device
11 swing rollers
12 full wind-ups
13 SMIF systems
14 pre-alignment systems
15 wafer table systems
2 full wind-up devices
21 bases
22 swing rollers
23 full wind-ups
241 circular chuck assemblies
2411 first draw-in grooves
2412 second draw-in grooves
2413 the 3rd draw-in grooves
242 sniffers
2421 rollers
2422 slide blocks
2423 springs
The height of the circular chuck assembly of H1
Embodiment
By specific instantiation, execution mode of the present utility model is described below, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this specification.The utility model can also be implemented or be applied by other different embodiment, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Refer to Fig. 4 to Fig. 6.It should be noted that, the diagram providing in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy and only show with assembly relevant in the utility model in graphic but not component count, shape and size drafting while implementing according to reality, when its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layout kenel also may be more complicated.
As shown in Figures 4 to 6, the utility model provides a kind of positioner of full wind-up, described full wind-up device 2 comprises base 21, be connected in the swing roller 22 of described base 21 tops, and be connected in the full wind-up 23 of described swing roller 22 tops, described positioner 24 comprises the circular chuck assembly 241 that is sheathed on described swing roller 22 bottoms, the outer ledge of described circular chuck assembly 241 is provided with three draw-in grooves, and be arranged at the sniffer 242 of described base 21 tops, described sniffer 242 by flexible realize with the circumscribed of described circular chuck assembly 241 or with the engaging of described draw-in groove.
As shown in Figure 6, the height H 1 of described circular chuck assembly 241 is set as 3cm～5cm, and in the present embodiment, the height H 1 of circular chuck assembly 241 is preferably 3cm.The external diameter of described circular chuck assembly 241 is less than the external diameter of described base 21.
Described draw-in groove can be any shape that meets production requirement, and as triangle column, rectangle column, round rectangle column, semi-cylindrical etc., as shown in Figure 5, in the present embodiment, this draw-in groove is triangle column breach.
As shown in Figure 5, described three draw-in grooves are with 90 ° of angle adjacent distributions on circular chuck assembly 241, and in the present embodiment, described three draw-in grooves lay respectively at 0 °, 180 ° and 270 ° of positions of base 21.
As shown in Figure 5, in the present embodiment, described sniffer 242 is positioned at 0 ° of position of described base 21.Described sniffer 242 is arranged on described base 21, with described circular chuck assembly 241 in same level.
As shown in Figure 5, described sniffer comprises roller 2421, be connected to the slide block 2422 on described roller 2421 and be connected in the spring 2423 on described slide block 2422, described roller 2421 is connected in one end of described slide block 2422, and the other end of described slide block 2422 is connected with described spring 2423.
On described sniffer 242, be also connected with transducer.In the time that circular chuck assembly 241 starts to rotate according to the angle of default, spring 2422 is along with stretching motion occurs from the different of circular chuck assembly 241 contact points roller 2421, in the time that sniffer 242 engages with draw-in groove, spring 2422 extends, roller 2421 and slide block 2422 are pushed draw-in groove 2411 parts by spring 2423, the transmitting terminal of transducer and receiving terminal are connected, and transducer is triggered; In the time that the outer ring of sniffer 242 and circular chuck assembly 241 is tangent, spring 2423 shrinks, roller 2421 and slide block 2422 resilience thereupon, and slide block 2422 blocks the transmitting terminal of transducer and receiving terminal, and transducer disconnects, lost efficacy.The signal detecting is passed to control system by transducer, further to control full wind-up.
The positioner of described full wind-up is coupled system software also, in processing procedure, need to meet the angle of default and the unified condition of the positioner anglec of rotation of full wind-up could normally be carried out work, show as the unification between instruction and the signal of sensor feedback that systems soft ware sends, both embody harmony and the accuracy of moving component, guarantee can not occur in arm motion process deviation; If both can not realize unification, board can quit work, and can react in time by error reporting system the problem that occurs deviation, makes corresponding adjustment.
The operation principle of the positioner of above-mentioned full wind-up is as follows:
On 0 °, 90 ° of base 21 and 180 ° of positions, be respectively equipped with SMIF (SMIF) system, prealignment (Pre-aligner) system and wafer table (Table) system, sniffer 242 is positioned at 0 ° of base 21 and locates, roller 2421 is fastened in the first draw-in groove 2411, guarantee that 0 ° of position is definitely accurate, there will not be the situation of 0 ° of skew; The second draw-in groove 2412 and the 3rd draw-in groove 2413 lay respectively at 180 ° and 270 ° of positions of base 21, now the transmitting terminal of transducer and receiving terminal are connected, transducer is in onset state, namely make full wind-up device 2 in halted state, sensor states signal feedback is to system, consistent with the order that systems soft ware itself sends, full wind-up device 2 is normally worked.In SMIF system, wafer is identified and takes out, and is loaded on full wind-up 23, then system is sent instruction, swing roller 22 drives circular chuck assembly 241 and full wind-up 23 to turn clockwise according to 90 ° of angles of default, now because roller 2421 exits from the first draw-in groove 2411, spring 2423 is compressed, roller 2421 does tangent motion with the outer ring of circular chuck assembly 241, slide block 2422 cuts off transmitting terminal and the receiving terminal of transducer, transducer disconnects, lost efficacy, namely make full wind-up device 2 in rotation status, sensor states signal feedback is to system, consistent with the rotate command that systems soft ware itself sends, full wind-up device 2 is by instruction rotation.In the time that the anglec of rotation just in time reaches 90 °, the second draw-in groove 2412 arrives the position of sniffer 242, roller 2421 and the second draw-in groove 2412 engage, spring 2422 extends, roller 2421 and slide block 2422 are pushed in the second draw-in groove 2412 by spring 2423, the transmitting terminal of transducer and receiving terminal are connected, transducer is triggered, transducer is in onset state, full wind-up device 2 is in halted state, sensor states signal feedback is to system, is consistent with ceasing and desisting order of sending of systems soft ware itself, and swing roller 22 stop motions.Due to 0 ° do not occur skew simultaneously the anglec of rotation be absolute 90 °, therefore, wafer is just sent to Pre-aligner alliance place, can not produce any collision with equipment, protection wafer and production equipment are intact.
Wafer completes after positioning action in Pre-aligner system, need to be sent in Table system and carry out next step operation, and this process and said process are similar.Wafer can be accurately sent in Table system, can not produce any collision with equipment, and protection wafer and production equipment are intact.
In sum, the utility model provides a kind of positioner of full wind-up, described full wind-up device comprises base, be connected in the swing roller of described base top, and be connected in the full wind-up of described swing roller top, described positioner comprises the circular chuck assembly that is sheathed on described swing roller bottom, the outer ledge of described circular chuck assembly is provided with three draw-in grooves, and be arranged at the sniffer of described base top, described sniffer by flexible realize with the circumscribed of described circular chuck assembly or with the engaging of described draw-in groove.The angle that the positioner of full wind-up of the present utility model transmits according to full wind-up; do more accurately design; coordinate with systems soft ware with three draw-in grooves and a sniffer with roller; there is the problem of deviation and adjust in time in reaction in time; realize precise positioning; avoid the appearance of 0 ° of offset problem, effectively protect production equipment not to be damaged.So the utility model has effectively overcome various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (8)
1. the positioner of a full wind-up, described full wind-up device comprises base, be connected in the swing roller of described base top, and be connected in the full wind-up of described swing roller top, it is characterized in that, described positioner comprises the circular chuck assembly that is sheathed on described swing roller bottom, the outer ledge of described circular chuck assembly is provided with three draw-in grooves, and be arranged at the sniffer of described base top, described sniffer by flexible realize with the circumscribed of described circular chuck assembly or with the engaging of described draw-in groove.
2. the positioner of full wind-up according to claim 1, is characterized in that: the height setting of described circular chuck assembly is 3cm～5cm.
3. the positioner of full wind-up according to claim 1, is characterized in that: the external diameter of described circular chuck assembly is less than the external diameter of described base.
4. the positioner of full wind-up according to claim 1, is characterized in that: described draw-in groove is triangle column breach.
5. the positioner of full wind-up according to claim 1, is characterized in that: described three draw-in grooves on circular chuck assembly with 90 ° of angle adjacent distributions.
6. the positioner of full wind-up according to claim 1, is characterized in that: described sniffer comprises roller, is connected to the slide block on described roller and is connected in the spring on described slide block.
7. the positioner of full wind-up according to claim 6, is characterized in that: described sniffer is connected with transducer, and described transducer is connected in the time that described roller enters draw-in groove, disconnects when circumscribed at described roller and described circular chuck assembly.
8. the positioner of full wind-up according to claim 1, is characterized in that: described sniffer is arranged at 0 ° of position of described base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420155021.6U CN203774274U (en) | 2014-04-01 | 2014-04-01 | Positioning apparatus of rotation arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420155021.6U CN203774274U (en) | 2014-04-01 | 2014-04-01 | Positioning apparatus of rotation arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203774274U true CN203774274U (en) | 2014-08-13 |
Family
ID=51291432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420155021.6U Expired - Fee Related CN203774274U (en) | 2014-04-01 | 2014-04-01 | Positioning apparatus of rotation arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203774274U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109036146A (en) * | 2018-09-14 | 2018-12-18 | 合肥福映光电有限公司 | A kind of display glue frame auxiliary rubberizing equipment |
-
2014
- 2014-04-01 CN CN201420155021.6U patent/CN203774274U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109036146A (en) * | 2018-09-14 | 2018-12-18 | 合肥福映光电有限公司 | A kind of display glue frame auxiliary rubberizing equipment |
| CN109036146B (en) * | 2018-09-14 | 2020-10-20 | 合肥福映光电有限公司 | Auxiliary rubberizing equipment for display rubber frame |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20190401 |