CN203738818U - Anti-pollution system used for mechanical arm - Google Patents
Anti-pollution system used for mechanical arm Download PDFInfo
- Publication number
- CN203738818U CN203738818U CN201420128380.2U CN201420128380U CN203738818U CN 203738818 U CN203738818 U CN 203738818U CN 201420128380 U CN201420128380 U CN 201420128380U CN 203738818 U CN203738818 U CN 203738818U
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- CN
- China
- Prior art keywords
- mechanical arm
- heating plate
- decontamination system
- main part
- controller
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Abstract
The utility model provides an anti-pollution system used for a mechanical arm. The anti-pollution system used for the mechanical arm is characterized in that the system at least comprises the mechanical arm, at least one heating element fixed into the mechanical arm, at least one thermometer connected to each heating element, a controller arranged outside the mechanical arm, and a relay connected with the heating element and the controller, wherein the heating elements and the thermometers are respectively connected with the controller, and the relay is connected with a power source. The temperature of the heating elements located in the mechanical arm is controlled through the arrangement of the controller, the relay, the power source and the like, so that the mechanical arm is heated and used for evaporating off caustic acid or water adhering to the outer surface of the mechanical arm, and thus the mechanical arm can have the erosion resisting effect.
Description
Technical field
The utility model relates to a kind of toilet mechanism system, particularly relates to a kind of decontamination system for mechanical arm.
Background technology
In manufacture of semiconductor process equipment, all kinds of acid tank boards (as the BHF etching in acid etch board, BOE etching, DHF etching etc.) and alkali scouring machine platform (as alkaline etching KOH etc.) are conventional IC manufacturing equipments at present.The mechanical arm of this type of board, owing to moving under the environment through be everlasting acid and water, after long operation, has water or acid and condenses on mechanical arm, can form in the course of time crystallization and be difficult to remove.And be agglomerated to a certain amount of time when acid on mechanical arm or water, can have influence on the normal operation of board, the liquid even condensing drips on wafer, can cause the defect of crystal column surface, thereby causes the problem of producing sheet yield.
For this phenomenon, those skilled in the art's way has following several at present: the mechanical arm 1) installing described in engineer's periodic cleaning; 2) increase the time that mechanical arm cleans automatically, but the in the situation that of identical wash number, condense into the more difficult removal of crystallization on the mechanical arm due to described mechanical device, therefore each cleaning all can extend the time of cleaning.Although the shortcoming of above two kinds of solutions is periodic cleanings, cannot forms the time of crystallization by Accurate Prediction, thereby in the situation that there is no cleaning, affect the yield of chip production; Waste time and energy simultaneously, increase the downtime of board, the progress that impact is produced.
In this field, there is no so far to propose effectively to solve the method that prevents the contaminated or corrosion of the mechanical arm of described mechanical device.Therefore be necessary to propose the described mechanical arm of a kind of new solution causes crystal column surface to produce the problem of defect because the water condensing or acid are corroded simultaneously.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of decontamination system for mechanical arm, for solving prior art in acidity or aqueous environments and corroding described mechanical arm and cause crystal column surface to produce the problem of defect because acid or water condense in mechanical arm.
For achieving the above object and other relevant objects, the utility model provides a kind of decontamination system for mechanical arm, it is characterized in that, the described decontamination system for mechanical arm at least comprises:
Mechanical arm;
At least one thermometer that is fixed at least one heating plate of described mechanical arm inside and is connected with described each heating plate;
Be placed in the controller of described mechanical arm outside; Described heating plate, described thermometer are connected with described controller respectively; The relay being connected with described heating plate and controller; Described relay is connected with power supply.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, described mechanical arm is " F " shape, the clamping part that it comprises main part and extends in the same way from described main part.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, the number of described heating plate is three.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, two heating plates in described three heating plates lay respectively at the clamping part of described " F " shape mechanical arm, and another heating plate is positioned at the main part of described mechanical arm.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, the heating plate of described " F " shape mechanical arm main part is connected with two thermometers, and two heating plate ends that are positioned at its clamping part are connected with respectively a thermometer.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, described mechanical arm main part is divided into three equal parts by two thermometers that are positioned at described mechanical arm main part.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, described mechanical arm outer surface is provided with the preserving timber bed of material.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, the described preserving timber bed of material is teflon coatings.
As a kind of preferred version of the decontamination system for mechanical arm of the present utility model, described anticorrosive layer is evenly coated in described mechanical arm outer surface.
As mentioned above, decontamination system for mechanical arm of the present utility model, there is following beneficial effect: insert heating plate in described mechanical arm inside, and by being set, controller, relay and power supply etc. control the temperature of the heating plate that is positioned at described mechanical arm inside, make described mechanical arm heated, be attached to the corrosive acid of having of described mechanical arm outer surface or water in order to evaporate, thereby make described mechanical arm reach erosion-resisting effect.
Brief description of the drawings
Fig. 1 is the generalized section of a kind of decontamination system for mechanical arm of the present utility model.
Fig. 2 is the generalized section of another kind of the present utility model for the decontamination system of mechanical arm.
Element numbers explanation
10 mechanical arms
11 anticorrosives
120,121,122,123 heating plates
131,132,133,134 thermometers
14 controllers
15 holding wires
16 relays
17 power lines
18 supports
Detailed description of the invention
By specific instantiation, embodiment of the present utility model is described below, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this description.The utility model can also be implemented or be applied by other different detailed description of the invention, and the every details in this description also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Refer to Fig. 1 to Fig. 2.It should be noted that, the diagram providing in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy and only show with assembly relevant in the utility model in graphic but not component count, shape and size drafting while implementing according to reality, when its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layout kenel also may be more complicated.
As shown in Figure 1, the utility model provides a kind of decontamination system for mechanical arm.Fig. 1 is the generalized section of the decontamination system for mechanical arm of the present utility model.In the utility model, mechanical arm 10 is for being placed in the mechanical arm of acid or water environment.Described mechanical arm 10 is held up by support 18.Be placed in the mechanical arm of this environment and easily corroded by acid or water, therefore need described mechanical arm 10 that decontamination system is set.As shown in Figure 1, the outer surface of described mechanical arm 10 scribbles anticorrosive 11.In the utility model, the kind of anticorrosive comprises organosilicon temperature resisting paint, inorganic anti-corrosion paint, asphalt primer etc.Anti-corrosion material described in the present embodiment is the Teflon in high-molecular organic material.Select Teflon as the former of the anticorrosive of the present embodiment because: 1) Teflon material has good insulating properties; 2) Teflon material is high temperature resistant, and spendable maximum temperature is 300 degree left and right; Occupation mode of the present utility model utilizes the resistance to elevated temperatures of Teflon that described mechanical arm is heated just, thereby evaporates the acid or the water that are bonded at described mechanical arm surface; 3) simultaneously, Teflon material also has moisture resistance, if there is water to condense in its when surface, when this coating can fine isolated water etching mechanism arm, himself is difficult drop-off in water environment; 4) the most important thing is that Teflon material has good corrosion resistance, can protect parts to avoid suffering the chemical attack of any kind.
For described mechanical arm is not polluted by acid or water, except being coated with anti-corrosion material, also the acid or the water that condense in described mechanical arm surface must be removed, therefore, as shown in Figure 1, be equipped with heating plate in the inside of described mechanical arm 10.The number of described heating plate is at least one.As an embodiment of the present utility model, mechanical arm described in Fig. 1 is " F " shape, the clamping part that the mechanical arm of described " F " shape comprises main part and extends in the same way from described main part.Described heating plate can be an overall heating plate as shown in Figure 1, be positioned at heating plate 121 and the heating plate 122 of two clamping parts of described mechanical arm, the heating plate 123 that is positioned at described mechanical arm main part, the heating plate 120 that is positioned at described mechanical arm support end interconnect do as a whole.Also can be as shown in Figure 2 lay respectively at the described main part of " F " shape mechanical arm and 3 heating plates of clamping part, heating plate 120, heating plate 121, heating plate 122, heating plate 123 are as separate heating plate.In the time that described mechanical arm is " F " shape, described in be positioned at mechanical arm main part the similar strip of heating plate 123 be embedded in the main part of described mechanical arm.The effect of described heating plate is for heating described mechanical arm 10, makes described mechanical arm 10 surface condensations have the crystallization of acid or water to be evaporated.In the utility model, the kind of described heating plate has aluminium alloy, stainless steel, micarex or high temperature polymeric materials etc.As a kind of preferred version, in the present embodiment, the material of described heating plate is stainless steel, because its feature with good heat conductive performance is widely used in heater.As a kind of preferred version of the present utility model, described heating plate evenly arranges in described mechanical arm everywhere, to ensure the uniformity of heating.Be described heating plate can make the heating of described mechanical arm in described mechanical arm 10 time, various piece is heated evenly.As a kind of preferred version, in the utility model, the maximum temperature of described heating plate heating is 300 DEG C.
In order to monitor the heating-up temperature of described heating plate, described heating plate is connected with thermometer, in order to monitor the situation of being heated of described mechanical arm each several part, the number of described thermometer is more than one, and whether even in order more fully to monitor being heated of described mechanical arm each several part, described thermometer is uniformly distributed on the heating plate of described mechanical arm inside.As a kind of preferred version of the present utility model, the thermometer that described and each heating plate is connected has one at least, when described mechanical arm be shaped as " F " shape as shown in Figure 1 time, and described heating plate can be an overall heating plate that is positioned at described " F " shape mechanical arm main part and clamping part, at this moment described temperature has been counted four, and the heating plate of described mechanical arm main part 123 is divided into three equal parts by wherein two thermometers 133 and thermometer 134 in described four thermometers., two other thermometer 131 and thermometer 132 are connected to the heating plate 122 of described two clamping parts and the end of heating plate 121.When described mechanical arm be shaped as " F " shape as shown in Figure 1 time, described heating plate can be also three independently heating plates, as shown in Figure 2, and described one of them heating plate 123 of three heating plates is positioned at the main part of described mechanical arm, two other heating plate 121 and heating plate 122 lay respectively at two clamping parts of described mechanical arm.Described three heating plates are uniformly distributed in described mechanical arm.On each heating plate, be equipped with thermometer simultaneously.And wherein two thermometers 131 and thermometer 132 lay respectively at two heating plates 122 of described clamping part and the terminal position of heating plate 121.Amount thermometer 133 and thermometer 134 are positioned on the heating plate 123 of described mechanical arm main part in addition, and the heating plate of described mechanical arm main part is divided into three equal parts by two thermometers that are positioned at described mechanical arm main part.The described mechanical arm partial interior being held up by described support 18 also can arrange independent described heating plate 120.The reading of described thermometer will be shown and be regulated and controled by micro control system.
For the heating plate in described mechanical arm is normally worked, be also provided with controller 14 in the outside of described mechanical arm, described controller 14 is provided with micro control system.Described controller 14 is linked together by holding wire 15 with described heating plate; Meanwhile, described thermometer is also connected by described holding wire 15 with described controller 14.The effect of described controller 14 is the readings that show each thermometer described in described mechanical arm inside, allows described thermometer notify described controller: the heated temperature of described mechanical arm each several part.
Described heating plate free end is also connected with relay 16; Meanwhile, described relay is also connected with power supply 17; Power supply when described power supply 17 is described mechanical arm heating.In Fig. 1, described relay 16 is connected with described controller 14.Described controller is monitored the temperature reading of described each thermometer on the one hand, utilizes on the other hand its inner micro control system to set as required the required temperature of heating and ensures the needs of heating and the safety of described heating plate.The object that described controller connects described relay is to open and close described relay by the temperature showing and set described heating plate, and when described relay is during in opening, heating plate is normally worked described in described Control; In the time of described cut-off, heating plate quits work described in described Control.
Operation principle of the present utility model is: 1), in the time that the contaminated even acidity of the mechanical arm in described acidity or aqueous environments or water condense into crystallization on the surface of described mechanical arm due to long time integration, the heating plate that is placed in described mechanical arm inside need to start heating function and evaporate the crystallization that condenses in described mechanical arm 10 surfaces.2), when heating plate is worked, connect the power supply 17 being connected with described relay 16.Controller 14, by reading the reading that is positioned at inner each thermometer of described mechanical arm, if this reading does not meet heating requirement, needs design temperature by the micro control system of described controller inside by heating; 3) simultaneously, relay is opened described in the micro controller system control in described controller, is described heating plate power supply; 4) in described controller, micro control system is transferred to described heating plate by holding wire 15 by the temperature signal setting in advance, makes described heating plate temperature under the state of energising be elevated to needed temperature; 5) in the time that heating reaches certain temperature, described controller 14 reads the reading of described thermometer, heats if do not need again, and sets by the micro control system of described controller, described relay is quit work, thus make described heating plate power-off and stop heating.
In sum, decontamination system for mechanical arm of the present utility model, by being set, controller, relay and power supply etc. control the temperature of the heating plate that is positioned at described mechanical arm inside, make described mechanical arm heated, be attached to the corrosive acid of having of described mechanical arm outer surface or water in order to evaporate, thereby make described mechanical arm reach erosion-resisting effect.So the utility model has effectively overcome various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (9)
1. for a decontamination system for mechanical arm, it is characterized in that, the described decontamination system for mechanical arm at least comprises:
Mechanical arm;
At least one thermometer that is fixed at least one heating plate of described mechanical arm inside and is connected with described each heating plate;
Be placed in the controller of described mechanical arm outside; Described heating plate, described thermometer are connected with described controller respectively;
The relay being connected with described heating plate and controller; Described relay is connected with power supply.
2. the decontamination system for mechanical arm according to claim 1, is characterized in that: described mechanical arm is " F " shape, the clamping part that it comprises main part and extends in the same way from described main part.
3. the decontamination system for mechanical arm according to claim 2, is characterized in that: the number of described heating plate is three.
4. the decontamination system for mechanical arm according to claim 3, it is characterized in that: two heating plates in described three heating plates lay respectively at the clamping part of described " F " shape mechanical arm, and another heating plate is positioned at the main part of described mechanical arm.
5. the decontamination system for mechanical arm according to claim 4, is characterized in that: the heating plate of described " F " shape mechanical arm main part is connected with two thermometers, and two heating plate ends that are positioned at its clamping part are connected with respectively a thermometer.
6. the decontamination system for mechanical arm according to claim 5, is characterized in that: described mechanical arm main part is divided into three equal parts by two thermometers that are positioned at described mechanical arm main part.
7. the decontamination system for mechanical arm according to claim 1, is characterized in that: described mechanical arm outer surface is provided with the preserving timber bed of material.
8. the decontamination system for mechanical arm according to claim 7, is characterized in that: the described preserving timber bed of material is teflon coatings.
9. the decontamination system for mechanical arm according to claim 8, is characterized in that: described anticorrosive layer is evenly coated in described mechanical arm outer surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420128380.2U CN203738818U (en) | 2014-03-20 | 2014-03-20 | Anti-pollution system used for mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420128380.2U CN203738818U (en) | 2014-03-20 | 2014-03-20 | Anti-pollution system used for mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203738818U true CN203738818U (en) | 2014-07-30 |
Family
ID=51338680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420128380.2U Expired - Fee Related CN203738818U (en) | 2014-03-20 | 2014-03-20 | Anti-pollution system used for mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203738818U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111554595A (en) * | 2020-05-11 | 2020-08-18 | 上海果纳半导体技术有限公司 | Semiconductor chip preparation device |
-
2014
- 2014-03-20 CN CN201420128380.2U patent/CN203738818U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111554595A (en) * | 2020-05-11 | 2020-08-18 | 上海果纳半导体技术有限公司 | Semiconductor chip preparation device |
| CN111554595B (en) * | 2020-05-11 | 2021-03-23 | 上海果纳半导体技术有限公司 | Semiconductor chip preparation device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140730 Termination date: 20190320 |