CN203726497U - Glass substrate storage device - Google Patents

Glass substrate storage device Download PDF

Info

Publication number
CN203726497U
CN203726497U CN201320893096.XU CN201320893096U CN203726497U CN 203726497 U CN203726497 U CN 203726497U CN 201320893096 U CN201320893096 U CN 201320893096U CN 203726497 U CN203726497 U CN 203726497U
Authority
CN
China
Prior art keywords
glass substrate
robot arm
laser sensor
storing unit
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201320893096.XU
Other languages
Chinese (zh)
Inventor
程文举
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Tianma Microelectronics Co Ltd
Original Assignee
Wuhan Tianma Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Tianma Microelectronics Co Ltd filed Critical Wuhan Tianma Microelectronics Co Ltd
Priority to CN201320893096.XU priority Critical patent/CN203726497U/en
Application granted granted Critical
Publication of CN203726497U publication Critical patent/CN203726497U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

The utility model provides a glass substrate storage device. The glass substrate storage device comprises a robot arm, the robot arm is used for moving glass substrates, a laser sensor is arranged at an end of the robot arm and is used for testing the distance between the robot arm and an obstacle by transmitting and receiving reflected laser beams. The glass substrate storage device is capable of protecting the glass substrates from breaking during storing the glass substrates.

Description

A kind of glass substrate storing unit
Technical field
The utility model relates to glass substrate and deposits technology, particularly relates to a kind of robot arm that can prevent glass substrates crash.
Background technology
In recent years, sensor is towards sensitive, accurate, strong adaptability, small and exquisite and intelligentized future development.In this course, the newcomer of this sensor family of Fibre Optical Sensor gains great popularity.Optical fiber has the performance of a lot of excellences, for example: the performance of anti-electromagnetic interference and atomic radiation, footpath is thin, matter is soft, lightweight mechanical performance; Insulation, inductionless electric property; Water-fast, high temperature resistant, corrosion resistant chemical property etc., the place that it can not reach people, as high-temperature region, or the area being pernicious to people, as nuclear radiation district, plays the effect of people's knowledge, and can also surmount people's physiological limits, recipient's sense organ impression less than external information.
In LCD manufacturing, the robot arm of moving glass substrate and the collision of glass substrate register have two kinds of reasons: the one, and the bracing frame of register inner support glass substrate is out of shape caused collision; The 2nd, between that robot arm malposition occurs and register outside framework, collide.The robot that glass substrate conveyance is used is expensive, and glass substrate is very thin, only has 0.5mm to 0.7mm, so once there is above-mentioned arbitrary collision, can cause glass substrates crash and/or robot arm damage, loses very large.
Utility model content
The utility model provides a kind of glass substrate storing unit, comprise robot arm, described robot arm is for movable glass substrate, end at described robot arm is provided with laser sensor, and described laser sensor is tested the distance of robot arm apart from barrier by the laser beam of launching and accept to reflect.
Preferably, described robot arm comprises many arms that are arranged in parallel, and the end of every arm is respectively arranged with laser sensor.
Preferably, the end of every arm is respectively arranged with laser sensor and is arranged at same position.
Preferably, also comprise a glass substrate receptacle, when robot arm moves glass substrate to described glass substrate receptacle content, whether described laser sensor is for there being barrier and the robot arm distance apart from barrier in glass substrate receptacle.
Preferably, in the time that robot arm is less than predetermined value apart from the distance of barrier, robot arm shuts down.
Preferably, described robot arm also comprises an alarm, and when in the time that robot arm is less than predetermined value apart from the distance of barrier, alarm gives the alarm.
Preferably, the diameter of described laser beam is 1.5mm.
Brief description of the drawings
The schematic diagram of the robot arm 10 that Fig. 1 provides for the utility model;
Fig. 2 is the schematic diagram of robot arm 10 while depositing glass to glass substrate receptacle.
Detailed description of the invention
Please refer to Fig. 1, the schematic diagram of the robot arm 10 that Fig. 1 provides for the utility model, described robot arm 10 comprises many arms that are arranged in parallel 11 and 12, every arm end be all provided with laser sensor, be respectively laser sensor 13 and laser sensor 14.Particularly, described laser sensor 13 is arranged on the end of arm 11, and described laser sensor 14 is arranged on the end of arm 12.And laser sensor 13 and laser sensor 14 arrange in the same horizontal line, the same position place of each arm arranges laser sensor.
Described laser sensor 13 and 14 can send laser beam, and described laser beam is transmitted on object, and object meeting reflect beams of laser light is to the direction of laser sensor.In the time that described object is less than predetermined value D to the distance of laser sensor, laser sensor can receive the laser beam that object reflects, and laser sensor has detected object.
Then, please refer to Fig. 2, Fig. 2 is the schematic diagram of robot arm 10 while depositing glass to glass substrate receptacle.Described glass substrate receptacle 20 is the object of a chest shape, and its bottom surface and four sides are airtight, and there is a lid on its top, and lid can be opened.Not shown lid in Fig. 2, and illustrate that for clear mechanical arm 10, to the action of depositing glass substrate in glass substrate receptacle 20, has a side not shown.
Described glass substrate receptacle 20 comprises multiple grooves interval 21, has formed the spatial accommodation 23 of glass substrate 22 between described adjacent groove interval 21.When after robot arm 10 bearing glass substrates 22, can be by glass substrate 22 vacuum suction on arm, then to the interior movement of spatial accommodation 23.
Whether meanwhile, laser sensor 13 and 14 successively outwards sends laser beam and detects has reflected signal to return.And the direction of described laser sensor 13 and 14 Emission Lasers light beams is the immediate interior side directions towards glass substrate receptacle 20, or at least towards an interior side direction of glass substrate receptacle 20.
On madial wall such as glass substrate receptacle 20, there is a foreign matter 30, in the time that robot arm 10 bearing glass substrates 22 have just entered spatial accommodation 23, although laser sensor 13 and 14 Emission Lasers light beams, but because of foreign matter 30 distant, robot arm 10 is for foreign matter 30 being detected, thereby can continue to move inward.Along with further moving inward, in the time that foreign matter 30 is less than preset distance D13 apart from the distance of laser sensor 13, robot arm 10 can detect the laser beam that foreign matter 30 is reflected back, thereby the existence of foreign matter 30 detected.Now, robot arm 10 stops mobile, places foreign matter 30 and causes the broken or damaged of glass substrate 22.
Further, described robot arm 10 is also provided with alarm, and when robot arm 10 is when foreign matter 30 detected, alarm can be reported to the police, and notifies personnel to carry out processing problem.
Further, the minimum of a value of described preset distance D13 is the reaction distance of robot arm 10.That is, in the time that robot arm 10 moves with certain speed, when detecting that foreign matter 30 starts, signal transfers to signal processing part, and signal processing part produces a stop signal, until mobile distance in the time period that robot arm 10 is completely static between getting off.By calibration, every arm all possesses a preset distance D, can get the preset distance D of a mechanical arm 10 of preset distance D maximum in each arm, also can use different preset distances for every arm.General, robot arm 10 be also foremost glass substrate 22 foremost, if glass substrate 22 grows a part than robot arm 10, this preset distance D also should add glass substrate 22 and grow than robot arm 10 length of part.
Further, the diameter of the laser beam of described laser sensor 13 and 14 transmittings is in 1.5mm left and right.Because the LCD that 22 later stages of glass substrate enter makes in technique, very responsive to foreign particles etc., if foreign matter scratches glass substrate 22, or stick on glass substrate 22, all may cause make bad.The less foreign matter that detects that diameter can be responsive at the laser beam of about 1.5mm is set, guarantees the intact of glass substrate 22.
The above is only preferred embodiment of the present utility model; should be understood that; for those skilled in the art; do not departing under the prerequisite of the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection domain of the present utility model.

Claims (7)

1. a glass substrate storing unit, comprise robot arm, described robot arm is for movable glass substrate, end at described robot arm is provided with laser sensor, and described laser sensor is tested the distance of robot arm apart from barrier by the laser beam of launching and accept to reflect.
2. glass substrate storing unit as claimed in claim 1, is characterized in that, described robot arm comprises many arms that are arranged in parallel, and the end of every arm is respectively arranged with laser sensor.
3. glass substrate storing unit as claimed in claim 1, is characterized in that, the end of every arm is respectively arranged with laser sensor and is arranged at same position.
4. glass substrate storing unit as claimed in claim 1, it is characterized in that, also comprise a glass substrate receptacle, when robot arm moves glass substrate to described glass substrate receptacle content, whether described laser sensor is for there being barrier and the robot arm distance apart from barrier in glass substrate receptacle.
5. glass substrate storing unit as claimed in claim 4, is characterized in that, in the time that robot arm is less than predetermined value apart from the distance of barrier, robot arm shuts down.
6. glass substrate storing unit as claimed in claim 4, is characterized in that, described robot arm also comprises an alarm, and in the time that robot arm is less than predetermined value apart from the distance of barrier, alarm gives the alarm.
7. glass substrate storing unit as claimed in claim 1, is characterized in that, the diameter of described laser beam is 1.5mm.
CN201320893096.XU 2013-10-23 2013-12-31 Glass substrate storage device Expired - Lifetime CN203726497U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320893096.XU CN203726497U (en) 2013-10-23 2013-12-31 Glass substrate storage device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201310502448.9 2013-10-23
CN201310502448 2013-10-23
CN201320893096.XU CN203726497U (en) 2013-10-23 2013-12-31 Glass substrate storage device

Publications (1)

Publication Number Publication Date
CN203726497U true CN203726497U (en) 2014-07-23

Family

ID=51196602

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201320893096.XU Expired - Lifetime CN203726497U (en) 2013-10-23 2013-12-31 Glass substrate storage device

Country Status (1)

Country Link
CN (1) CN203726497U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104385270A (en) * 2014-09-25 2015-03-04 国家电网公司 Intelligent laser sensing positioning system and method for intelligent meter warehouse
CN107601833A (en) * 2017-07-27 2018-01-19 彩虹(合肥)液晶玻璃有限公司 A kind of protection device and its method of cutting machine and industrial robot running
CN110815152A (en) * 2019-11-14 2020-02-21 徐州市威固特种玻璃有限公司 Strorage device for glass processing
CN110834897A (en) * 2019-11-19 2020-02-25 兰剑智能科技股份有限公司 Storage device for box body
CN110869300A (en) * 2017-07-04 2020-03-06 康宁股份有限公司 Method and apparatus for loading glass sheets

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104385270A (en) * 2014-09-25 2015-03-04 国家电网公司 Intelligent laser sensing positioning system and method for intelligent meter warehouse
CN110869300A (en) * 2017-07-04 2020-03-06 康宁股份有限公司 Method and apparatus for loading glass sheets
CN107601833A (en) * 2017-07-27 2018-01-19 彩虹(合肥)液晶玻璃有限公司 A kind of protection device and its method of cutting machine and industrial robot running
CN110815152A (en) * 2019-11-14 2020-02-21 徐州市威固特种玻璃有限公司 Strorage device for glass processing
CN110834897A (en) * 2019-11-19 2020-02-25 兰剑智能科技股份有限公司 Storage device for box body

Similar Documents

Publication Publication Date Title
CN203726497U (en) Glass substrate storage device
KR101108150B1 (en) Stocker system and method of managing stocker
CN111120827B (en) Control device of lifting platform of detection device and detection device
CN101533796A (en) Control system for silicone chip transmission and method
WO2013036963A3 (en) Storage and retrieval system case unit detection
ES2694137T3 (en) Collision sensor assembly for a stationary structure
WO2008051544A1 (en) Improved calibration of a substrate handling robot
US20180350637A1 (en) Carrier adapter insert apparatus and carrier adapter insert detection methods
CN102721692B (en) The pick-up unit of glass substrate board box
CN203858376U (en) Detection device for glass substrate in cartridge
WO2009135066A2 (en) End effector to substrate offset detection and correction
CN104752262A (en) Cover plate detection device and detection method, reaction chamber and semiconductor processing equipment
CN201608196U (en) Carrying equipment for carrying out detection on glass substrate
CN203012159U (en) Cartridge detection device and cartridge
US9659830B2 (en) Dimension detection device and cassette
CN102915749A (en) Automatic rapid and accurate positioning device and method for disc extractor of optical disc juke-box
CN202726892U (en) Glass substrate storage device
JP2003273190A (en) Vacuum processing device, gate valve, and method for detecting missing article during transportation
CN102299050A (en) Wafer position detection device
CN208606731U (en) Substrate warp detection device
US8777286B2 (en) Unpacking device for glass substrate
CN101633441B (en) Substrate processing system and substrate carrying device thereof
CN104576436B (en) Film magazine position detecting device, Transmission system and semiconductor processing equipment
CN210570543U (en) Device for rapidly detecting angle of laser radar reflector
JP6769796B2 (en) Tilt inspection device for the hand part of the robot and its tilt inspection method

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20140723

CX01 Expiry of patent term