CN203636514U - Ultra-precise grinding/polishing platform for regular diamond tool head - Google Patents

Ultra-precise grinding/polishing platform for regular diamond tool head Download PDF

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CN203636514U
CN203636514U CN201320695779.4U CN201320695779U CN203636514U CN 203636514 U CN203636514 U CN 203636514U CN 201320695779 U CN201320695779 U CN 201320695779U CN 203636514 U CN203636514 U CN 203636514U
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tool head
polishing
diamond tool
sensor
freedom
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赵宏伟
韩磊
高景
张鹏
闫纪旺
佟达
鲁帅
刘宏达
程虹丙
董晓龙
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Jilin University
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Jilin University
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Abstract

The utility model relates to an ultra-precise grinding/polishing platform for a regular diamond tool head, and belongs to the field of precise and ultra-precise machining. The ultra-precise grinding/polishing platform comprises a platform supporting device, a three-freedom-degree device, a force sensor, an acoustic emission sensor, and a tool head clamping unit, wherein the three-freedom-degree device provides three degrees of freedom of motion including Z-axis movement, rotation around the Z axis and rotation around a Y axis, and in the meantime provides loading force for machining; the force sensor detects the acting force subject to a workpiece (the diamond tool head) in the machining process; the acoustic emission sensor detects the dynamic procedure of material removal in the machining process. The ultra-precise grinding/polishing platform can be applied to repairing and finishing the regular diamond tool head, and has the advantages of compact structure, simplicity in operation, high efficiency, strong applicability, and the like. The platform further can perform precise machining to the workpiece through adjustment of multi-degree of freedom, and controls the machining process through the sensor, so as to ensure the flatness of the workpiece finished surface, and improve the machining efficiency and the surface quality of the workpiece.

Description

面向规则金刚石工具头超精密研磨/抛光加工平台Ultra-precision grinding/polishing processing platform for regular diamond tool heads

技术领域 technical field

本实用新型涉及精密、超精密加工领域,面向规则金刚石工具头超精密研磨/抛光加工平台,针对金刚石多边且几何形状规则的特点,对规则金刚石工具头实现超精密研磨/抛光加工。 The utility model relates to the field of precision and ultra-precision processing, and is oriented to an ultra-precision grinding/polishing processing platform for regular diamond tool heads, aiming at the characteristics of diamond polygons and regular geometric shapes, and realizes ultra-precision grinding/polishing processing for regular diamond tool heads.

背景技术 Background technique

加工金刚石(钻石)最普通的方法是传统的打圆、锯和抛光。金刚石由粘附在转盘片上的其它金刚石或金刚石粉末进行机械加工—部分金刚石在加工过程中变成了金刚石粉末。尽管金刚石的重量减轻了,但由于经过抛光之后形状有了改变,它的价值反而提高了。当然,金刚石的净度也有了提高。除了传统的机械加工方法,镭射在今天已经成为一种非常重要的分割方法。与传统的机械相比,镭射加工的初始投资大,而且材枓的损耗也比较多。但可切成许多新形状的金刚石。然而,镭射也有其很大的优越性,在劈开金刚石时无需考虑金刚石晶体的生长方向,金刚石的机械性能也无关重要。这就使得人们可以分割多晶金刚石,先前这几乎是不可能的。由于劈金刚石过程中存在风险,特别对于大金刚石而言,因此传统劈钻法已很少使用。 The most common methods of processing diamonds (diamonds) are traditional rounding, sawing and polishing. Diamonds are machined from other diamonds or diamond powder adhering to the disc - some of the diamonds become diamond powder during machining. Although the weight of the diamond is reduced, its value increases because of the changed shape after polishing. Of course, the clarity of diamonds has also improved. In addition to traditional machining methods, laser has become a very important segmentation method today. Compared with traditional machinery, the initial investment of laser processing is large, and the loss of materials is also relatively large. But diamonds can be cut into many new shapes. However, laser also has its great advantages. It is not necessary to consider the growth direction of diamond crystals when cleaving diamonds, and the mechanical properties of diamonds are also irrelevant. This allows one to split polycrystalline diamond, which was almost impossible before. Due to the risks involved in diamond splitting, especially for large diamonds, traditional splitting is rarely used.

研磨和抛光几乎是同时应用和出现的加工技术。研磨能提高工件的形状和位置精度,而抛光能降低表面粗糙度等,但不能提高工件的形状和位置精度。抛光通常采用极细的微粒,使得磨料和工件间不至于达到破坏的作用力,不产生裂纹等。微细磨粒粒径一般在1μm以下,在更细的磨粒的作用下进行抛光加工,获得更高质量的表面。一般都能达到纳米级的表面粗糙度和表面损伤。 Grinding and polishing are processing technologies that are applied and emerged almost at the same time. Grinding can improve the shape and position accuracy of the workpiece, while polishing can reduce the surface roughness, etc., but it cannot improve the shape and position accuracy of the workpiece. Polishing usually uses very fine particles, so that the force between the abrasive and the workpiece will not reach the destructive force, and no cracks will occur. The particle size of the fine abrasive grains is generally below 1 μm, and polishing is performed under the action of finer abrasive grains to obtain a higher-quality surface. Generally, nanometer-scale surface roughness and surface damage can be achieved.

随着科学技术的发展,人们对产品性能的需求和要求更加苛刻,不但从质量方面,还要从效率等方面考虑,尤其在国防工业、微电子技术、航空航天、精密仪器仪表等领域,对器件的精度、质量方面要求越来越高。而金刚石工具头无论是在加工生产还是在科学研究领域都有着极其重要地位,例如紧密切削的道具、纳米压痕/划痕的工具头等都会利用金刚石。而以“世界最硬的材料”也使金刚石在人类的各个领域得以广泛应用,然而这也正是因为它的优点也带来了加工困难,尤其是对金刚石的超精密加工还是处于科学探索阶段。因此,针对几何形状规则的金刚石体来说,设计一种能够提高加工效率,改善加工精度的超精密研磨/抛光加工平台是十分必要的。 With the development of science and technology, people's demand and requirements for product performance are more stringent, not only in terms of quality, but also in terms of efficiency, especially in the fields of defense industry, microelectronics technology, aerospace, precision instruments and meters. The precision and quality requirements of devices are getting higher and higher. Diamond tool heads play an extremely important role in both processing and production as well as scientific research. For example, diamonds are used in tools for tight cutting and nano-indentation/scratching. And "the hardest material in the world" also makes diamond widely used in various fields of human beings. However, it is precisely because of its advantages that it also brings processing difficulties, especially the ultra-precision processing of diamond is still in the stage of scientific exploration. . Therefore, for diamond bodies with regular geometric shapes, it is very necessary to design an ultra-precision grinding/polishing processing platform that can improve processing efficiency and processing accuracy.

发明内容 Contents of the invention

本实用新型的目的在于提供一种面向规则金刚石工具头超精密研磨/抛光加工平台,解决了现有技术存在的上述问题,具有结构紧凑、操作简单、效率高、适用性强等优点;同时保证工件加工表面的平面度、提高工件的加工效率和表面质量。 The purpose of this utility model is to provide an ultra-precision grinding/polishing processing platform for regular diamond tool heads, which solves the above-mentioned problems in the prior art, and has the advantages of compact structure, simple operation, high efficiency, and strong applicability; Improve the flatness of the workpiece processing surface, improve the processing efficiency and surface quality of the workpiece.

本实用新型的上述目的通过以下技术方案实现: Above-mentioned purpose of the utility model is realized through the following technical solutions:

面向规则金刚石工具头超精密研磨/抛光加工平台,包括平台支撑装置、三自由度装置、力传感器与声发射传感器控制单元、工具头加持单元,所述三自由度装置分别提供Z轴转动、Y轴转动、Z轴移动,三自由度装置提供工件所需要的加工位置和向下的载荷力;所述力传感器与声发射传感器控制单元包括力传感器13及声发射传感器25,由连接环12、法兰14和工具头加持单元11固定,力传感器13通过连接环12、法兰14测量工件在加工过程中所受到的作用力;声发射传感器25与金刚石工具头10接触,监控加工时材料去除动态过程;所述力传感器与声发射传感器控制单元连接三自由度传动装置与工具头加持单元。 The ultra-precision grinding/polishing processing platform for regular diamond tool heads includes a platform support device, a three-degree-of-freedom device, a force sensor and an acoustic emission sensor control unit, and a tool head holding unit. The three-degree-of-freedom device provides Z-axis rotation, Y Axis rotation, Z-axis movement, the three-degree-of-freedom device provides the required processing position and the downward load force of the workpiece; the force sensor and the acoustic emission sensor control unit include a force sensor 13 and an acoustic emission sensor 25, connected by the connecting ring 12, The flange 14 and the tool head holding unit 11 are fixed, and the force sensor 13 measures the force on the workpiece during processing through the connecting ring 12 and the flange 14; the acoustic emission sensor 25 is in contact with the diamond tool head 10 to monitor material removal during processing Dynamic process: the force sensor and the acoustic emission sensor control unit are connected to the three-degree-of-freedom transmission device and the tool head holding unit.

所述的三自由度装置由安川交流伺服旋转电机15、脉冲控制数字舵机16、安川交流伺服直线电机19组成,Z轴移动由安川交流伺服直线电机19提供,通过紧固螺钉Ⅰ20固定在连接板1上,电机具有自锁并自带编码器,能够实现对转速的检测,形成半闭环控制,电机的输出轴、滚珠丝杠23与联轴器21通过紧固螺钉Ⅱ22相连,滚珠丝杠23与丝杠螺母18相连接,丝杠螺母18与滑块7通过内六角螺钉Ⅱ17相连,Z轴位移沿导轨6产生;Y轴旋转由脉冲控制数字舵机16提供,数字舵机通过紧固螺钉固定在滑块7上,舵机由数字脉冲控制,舵机以单脉冲1分度为单位绕Y轴旋转,舵机具有自锁功能,实现待加工面的角度调整;Z轴旋转由安川交流伺服旋转电机15提供,并通过紧固螺钉将其固定在舵机上,安川交流伺服旋转电机具有自锁并自带编码器,能够实现对转速的检测,形成半闭环控制,严格输出需要的角度。 The three-degree-of-freedom device is composed of Yaskawa AC servo rotating motor 15, pulse control digital steering gear 16, and Yaskawa AC servo linear motor 19. The Z-axis movement is provided by Yaskawa AC servo linear motor 19, and is fixed on the connection by fastening screw I20. On board 1, the motor has a self-locking and self-contained encoder, which can realize the detection of the rotational speed and form a semi-closed-loop control. The output shaft of the motor, the ball screw 23 and the coupling 21 are connected through the fastening screw II 22, and the ball screw 23 is connected with the lead screw nut 18, the lead screw nut 18 is connected with the slider 7 through the hexagon socket head screw II 17, the Z-axis displacement is generated along the guide rail 6; the Y-axis rotation is provided by the pulse control digital steering gear 16, and the digital steering gear is tightened by The screw is fixed on the slider 7, the steering gear is controlled by digital pulse, and the steering gear rotates around the Y axis with a single pulse 1 division as a unit. The steering gear has a self-locking function to realize the angle adjustment of the surface to be processed; the Z axis rotation is controlled by Yaskawa AC servo rotating motor 15 is provided, and it is fixed on the steering gear by fastening screws. Yaskawa AC servo rotating motor has self-locking and built-in encoder, which can realize the detection of rotational speed, form a semi-closed-loop control, and strictly output the required angle .

所述的力传感器13与法兰14、连接环12相连,夹头11与连接环12螺纹连接,同时通过调整两者的位置使声发射传感器25与金刚石工具头10相接触。 The force sensor 13 is connected to the flange 14 and the connecting ring 12, and the collet 11 is screwed to the connecting ring 12. At the same time, the acoustic emission sensor 25 is in contact with the diamond tool head 10 by adjusting the positions of both.

所述的工具头加持单元的金刚石夹头11与连接环12螺纹连接,并通过紧固螺钉Ⅲ24将金刚石工具头10固定。 The diamond chuck 11 of the tool bit clamping unit is screwed to the connecting ring 12, and the diamond tool bit 10 is fixed by the fastening screw III24.

所述的平台支撑装置由抛光台8、立柱2、支撑块4组成,抛光盘9由闭环控制电路控制研磨/抛光转速并固定于抛光台8中心,支撑块4通过紧固螺栓5固定在立柱2上,连接板1通过内六角螺钉Ⅰ3固定于支撑块上。 The platform supporting device is composed of a polishing table 8, a column 2, and a support block 4. The polishing disc 9 is controlled by a closed-loop control circuit for grinding/polishing speed and is fixed at the center of the polishing table 8. The support block 4 is fixed on the column by fastening bolts 5. 2, the connection plate 1 is fixed on the support block by the hexagon socket head screw I3.

本实用新型的有益效果在于:与现有的金刚石材料加工工艺相比,本实用新型具有结构紧凑、操作简单、效率高、适用性强等优点;同时保证工件加工表面的平面度、提高工件的加工效率和表面质量;同时检测工件加工结束的时间,能够及时停止研磨/抛光过程,以节省加工成本与加工时间,具有投资少、见效快、效益高等优点,有广阔的应用前景和较强的实用性。 The beneficial effect of the utility model is that: compared with the existing diamond material processing technology, the utility model has the advantages of compact structure, simple operation, high efficiency, strong applicability, etc.; at the same time, it can ensure the flatness of the workpiece processing surface and improve the Processing efficiency and surface quality; at the same time, detect the time when the workpiece processing is finished, and can stop the grinding/polishing process in time to save processing costs and processing time. It has the advantages of less investment, quick results, and high benefits. It has broad application prospects and strong practicality.

附图说明 Description of drawings

此处所说明的附图用来提供对本实用新型的进一步理解,构成本申请的一部分,本实用新型的示意性实例及其说明用于解释本实用新型,并不构成对本实用新型的不当限定。 The accompanying drawings described here are used to provide a further understanding of the utility model and constitute a part of the application. The schematic examples and descriptions of the utility model are used to explain the utility model and do not constitute improper limitations to the utility model.

图1是本实用新型的装配体轴测示意图; Fig. 1 is a schematic diagram of an axonometric view of an assembly of the present utility model;

图2是本实用新型的三自由度装置示意图; Fig. 2 is a schematic diagram of a three-degree-of-freedom device of the present invention;

图3是本实用新型的检测控制剖视图。 Fig. 3 is a sectional view of the detection control of the present invention.

图中:1. 连接板;2. 立柱;3. 内六角螺钉Ⅰ;4. 支撑块;5. 紧固螺栓;6. 导轨;7,滑块;8. 抛光台;9. 抛光盘;10. 金刚石工具头;11. 金刚石夹头;12. 连接环;13. 力传感器;14. 法兰;15. 安川交流伺服旋转电机;16. 脉冲控制数字舵机;17. 内六角螺钉Ⅱ;18. 丝杠螺母;19. 安川交流伺服直线电机;20. 紧固螺钉Ⅰ;21. 联轴器;22. 紧固螺钉Ⅱ;23. 滚珠丝杠;24. 紧固螺钉Ⅲ;25. 声发射传感器。 In the figure: 1. connecting plate; 2. column; 3. hexagon socket head cap screw Ⅰ; 4. support block; 5. fastening bolt; 6. guide rail; 7, slider; 8. polishing table; 9. polishing disc; 10 .Diamond tool head; 11. Diamond chuck; 12. Connecting ring; 13. Force sensor; 14. Flange; 15. Yaskawa AC servo rotating motor; 16. Pulse control digital steering gear; 17. Hexagon socket screw II; 18 . Lead screw nut; 19. Yaskawa AC servo linear motor; 20. Fastening screw Ⅰ; 21. Coupling; 22. Fastening screw Ⅱ; 23. Ball screw; 24. Fastening screw Ⅲ; 25. Acoustic emission sensor.

具体实施方式 Detailed ways

下面结合附图进一步说明本实用新型的详细内容及其具体实施方式。 Further illustrate the detailed content of the utility model and its specific implementation below in conjunction with accompanying drawing.

参见图1至图3所示,本实用新型的面向规则金刚石工具头超精密研磨/抛光加工平台,是根据现有的金刚石研磨/抛光技术基础之上设计的,由于该平台的主体部分即三自由度装置、力传感器与声发射传感器控制单元、工具头加持单元所占用空间较小,同时所述的抛光盘9加工时旋转对工件进行加工,因此根据加工需要可以将抛光台的其余各角分别安装此平台,以实现多工位加工,这样能够提高加工、生产效率;如果单工位加工也可以将抛光盘换成合适大小的尺寸,以便减少加工空间和降低加工成本。此外,本实用新型的设计方案对于需要加工的金刚石工具头的要求是:法向与待加工面的夹角不小于45°,如果小于45°时,夹头11将与抛光盘9发生干涉。 Referring to Fig. 1 to Fig. 3, the ultra-precision grinding/polishing processing platform for regular diamond tool heads of the present utility model is designed on the basis of existing diamond grinding/polishing technology, because the main part of the platform is three The space occupied by the degree of freedom device, the force sensor and the acoustic emission sensor control unit, and the tool head holding unit is small, and the polishing disc 9 is rotated during processing to process the workpiece, so the remaining corners of the polishing table can be rotated according to processing needs. Install this platform separately to realize multi-station processing, which can improve processing and production efficiency; if single-station processing can also change the polishing disc to a suitable size, so as to reduce processing space and reduce processing costs. In addition, the requirement of the design scheme of the present invention for the diamond tool head to be processed is: the angle between the normal direction and the surface to be processed is not less than 45°, if it is less than 45°, the collet 11 will interfere with the polishing disc 9.

本实用新型的面向规则金刚石工具头超精密研磨/抛光加工平台,包括平台支撑装置、三自由度装置、力传感器与声发射传感器控制单元、工具头加持单元,所述三自由度装置分别提供Z轴转动、Y轴转动、Z轴移动,三自由度装置提供工件所需要的加工位置和向下的载荷力;所述力传感器与声发射传感器控制单元包括力传感器13及声发射传感器25,由连接环12、法兰14和工具头加持单元11固定,力传感器13通过连接环12、法兰14测量工件在加工过程中所受到的作用力;声发射传感器25与金刚石工具头10接触,监控加工时材料去除动态过程;所述力传感器与声发射传感器控制单元连接三自由度传动装置与工具头加持单元。 The utility model-oriented ultra-precision grinding/polishing processing platform for regular diamond tool heads includes a platform support device, a three-degree-of-freedom device, a force sensor and an acoustic emission sensor control unit, and a tool head holding unit. The three-degree-of-freedom devices respectively provide Z Axis rotation, Y-axis rotation, Z-axis movement, the three-degree-of-freedom device provides the required processing position and the downward load force of the workpiece; the force sensor and acoustic emission sensor control unit includes a force sensor 13 and an acoustic emission sensor 25. The connecting ring 12, the flange 14 and the tool head holding unit 11 are fixed, and the force sensor 13 measures the force on the workpiece during the processing through the connecting ring 12 and the flange 14; the acoustic emission sensor 25 is in contact with the diamond tool head 10 to monitor The dynamic process of material removal during processing; the force sensor and the acoustic emission sensor control unit are connected with the three-degree-of-freedom transmission device and the tool head holding unit.

所述的三自由度装置由安川交流伺服旋转电机15、脉冲控制数字舵机16、安川交流伺服直线电机19组成,Z轴移动由安川交流伺服直线电机19提供,通过紧固螺钉Ⅰ20固定在连接板1上,电机具有自锁并自带编码器,能够实现对转速的检测,形成半闭环控制,电机的输出轴、滚珠丝杠23与联轴器21通过紧固螺钉Ⅱ22相连,滚珠丝杠23与丝杠螺母18相连接,丝杠螺母18与滑块7通过内六角螺钉Ⅱ17相连,Z轴位移沿导轨6产生;Y轴旋转由脉冲控制数字舵机16提供,数字舵机通过紧固螺钉固定在滑块7上,舵机由数字脉冲控制,舵机以单脉冲1分度为单位绕Y轴旋转,舵机具有自锁功能,实现待加工面的角度调整;Z轴旋转由安川交流伺服旋转电机15提供,并通过紧固螺钉将其固定在舵机上,安川交流伺服旋转电机具有自锁并自带编码器,能够实现对转速的检测,形成半闭环控制,严格输出需要的角度。 The three-degree-of-freedom device is composed of Yaskawa AC servo rotating motor 15, pulse control digital steering gear 16, and Yaskawa AC servo linear motor 19. The Z-axis movement is provided by Yaskawa AC servo linear motor 19, and is fixed on the connection by fastening screw I20. On board 1, the motor has a self-locking and self-contained encoder, which can realize the detection of the rotational speed and form a semi-closed-loop control. The output shaft of the motor, the ball screw 23 and the coupling 21 are connected through the fastening screw II 22, and the ball screw 23 is connected with the lead screw nut 18, the lead screw nut 18 is connected with the slider 7 through the hexagon socket head screw II 17, the Z-axis displacement is generated along the guide rail 6; the Y-axis rotation is provided by the pulse control digital steering gear 16, and the digital steering gear is tightened by The screw is fixed on the slider 7, the steering gear is controlled by digital pulse, and the steering gear rotates around the Y axis with a single pulse 1 division as a unit. The steering gear has a self-locking function to realize the angle adjustment of the surface to be processed; the Z axis rotation is controlled by Yaskawa AC servo rotating motor 15 is provided, and it is fixed on the steering gear by fastening screws. Yaskawa AC servo rotating motor has self-locking and built-in encoder, which can realize the detection of rotational speed, form a semi-closed-loop control, and strictly output the required angle .

所述的力传感器13与法兰14、连接环12相连,夹头11与连接环12螺纹连接,同时通过调整两者的位置使声发射传感器25与金刚石工具头10相接触。 The force sensor 13 is connected to the flange 14 and the connecting ring 12, and the collet 11 is screwed to the connecting ring 12. At the same time, the acoustic emission sensor 25 is in contact with the diamond tool head 10 by adjusting the positions of both.

所述的工具头加持单元的金刚石夹头11与连接环12螺纹连接,并通过紧固螺钉Ⅲ24将金刚石工具头10固定。 The diamond chuck 11 of the tool bit clamping unit is screwed to the connecting ring 12, and the diamond tool bit 10 is fixed by the fastening screw III24.

所述的平台支撑装置由抛光台8、立柱2、支撑块4组成,抛光盘9由闭环控制电路控制研磨/抛光转速并固定于抛光台8中心,支撑块4通过紧固螺栓5固定在立柱2上,连接板1通过内六角螺钉Ⅰ3固定于支撑块上。 The platform supporting device is composed of a polishing table 8, a column 2, and a support block 4. The polishing disc 9 is controlled by a closed-loop control circuit for grinding/polishing speed and is fixed at the center of the polishing table 8. The support block 4 is fixed on the column by fastening bolts 5. 2, the connection plate 1 is fixed on the support block by the hexagon socket head screw I3.

以上所述仅为本实用新型的优选实例而已,并不用于限制本实用新型,对于本领域的技术人员来说,本实用新型可以有各种更改和变化。凡对本实用新型所作的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。 The above descriptions are only preferred examples of the utility model, and are not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made to the utility model shall be included in the protection scope of the utility model.

Claims (5)

1. rule-oriented diamond tool head ultraprecision grinding/polishing platform, comprising that platform supporting device, Three Degree Of Freedom device, power sensor and calibrate AE sensor control module, tool heads add holds unit, it is characterized in that: described Three Degree Of Freedom device provides respectively Z axis rotation, Y-axis rotation, Z axis to move, and Three Degree Of Freedom device provides the needed Working position of workpiece and downward loading force; Described power sensor and calibrate AE sensor control module comprise power sensor (13) and calibrate AE sensor (25), added by connecting ring (12), flange (14) and tool heads that to hold unit (11) fixing, power sensor (13) is by connecting ring (12), flange (14) measuring workpieces suffered active force in process; Calibrate AE sensor (25) contacts with diamond tool head (10), and monitoring adds material removal in man-hour dynamic process; Described power sensor is connected Three Degree Of Freedom transmission device and tool heads and adds and hold unit with calibrate AE sensor control module.
2. rule-oriented diamond tool head ultraprecision grinding/polishing platform according to claim 1, it is characterized in that: described Three Degree Of Freedom device is by pacifying river AC servo electric rotating machine (15), pulse control figure steering wheel (16), peace river AC servo linear electric motors (19) composition, Z axis moves by peace river AC servo linear electric motors (19) and provides, be fixed on connecting plate (1) by trip bolt I (20), motor has self-locking and carries encoder, can realize the detection to rotating speed, form half-closed loop control, the output shaft of motor, ball-screw (23) is connected by trip bolt II (22) with shaft coupling (21), ball-screw (23) is connected with feed screw nut (18), feed screw nut (18) is connected by soket head cap screw II (17) with slide block (7), Z axis displacement produces along guide rail (6), Y-axis rotation is provided by pulse control figure steering wheel (16), it is upper that digital rudder controller is fixed on slide block (7) by trip bolt, and steering wheel is by digit pulse control, and steering wheel rotates around Y-axis take pulse 1 calibration as unit, steering wheel has auto-lock function, realizes the angle adjustment of to be processed, Z axis rotation is provided by peace river AC servo electric rotating machine (15), and be fixed on steering wheel by trip bolt, peace river AC servo electric rotating machine has self-locking and carries encoder, can realize the detection to rotating speed, form half-closed loop control, the angle that strict output needs.
3. rule-oriented diamond tool head ultraprecision grinding/polishing platform according to claim 1, it is characterized in that: described power sensor (13) is connected with flange (14), connecting ring (12), chuck (11) is threaded with connecting ring (12), by the position of adjusting both, calibrate AE sensor (25) is contacted with diamond tool head (10) simultaneously.
4. rule-oriented diamond tool head ultraprecision grinding/polishing platform according to claim 1, it is characterized in that: described tool heads adds the diamond chuck (11) of holding unit and is threaded with connecting ring (12), and by trip bolt III (24), diamond tool head (10) is fixing.
5. rule-oriented diamond tool head ultraprecision grinding/polishing platform according to claim 1, it is characterized in that: described platform supporting device is made up of polishing block (8), column (2), back-up block (4), polishing disk (9) is by closed control circuit control grinding/polishing rotating speed and be fixed on polishing block (8) center, it is upper that back-up block (4) is fixed on column (2) by fastening bolt (5), and connecting plate (1) is fixed on back-up block by soket head cap screw I (3).
CN201320695779.4U 2013-11-07 2013-11-07 Ultra-precise grinding/polishing platform for regular diamond tool head Expired - Lifetime CN203636514U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104308701A (en) * 2014-09-30 2015-01-28 浙江华祥皮革有限公司 Double-grinding-head numerical control round table plain surface grinding machine
CN105945669A (en) * 2016-05-12 2016-09-21 上海理工大学 View screen self-guiding type machined part burr removing machine
CN106622877A (en) * 2016-12-27 2017-05-10 哈尔滨工业大学 Surface coating, polishing and wiping equipment
CN108312010A (en) * 2018-03-21 2018-07-24 华中科技大学 A kind of flexible grinding and polishing flange apparatus of Three Degree Of Freedom series connection
CN115143892A (en) * 2022-06-23 2022-10-04 南京农业大学 A kind of oxide film thickness monitoring method and realization device for electrochemical superfinishing of rotary workpiece

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104308701A (en) * 2014-09-30 2015-01-28 浙江华祥皮革有限公司 Double-grinding-head numerical control round table plain surface grinding machine
CN105945669A (en) * 2016-05-12 2016-09-21 上海理工大学 View screen self-guiding type machined part burr removing machine
CN105945669B (en) * 2016-05-12 2018-03-13 上海理工大学 The self-contained workpiece burr of screen removes machine
CN106622877A (en) * 2016-12-27 2017-05-10 哈尔滨工业大学 Surface coating, polishing and wiping equipment
CN106622877B (en) * 2016-12-27 2019-03-19 哈尔滨工业大学 Surface, which applies to throw, wipes equipment
CN108312010A (en) * 2018-03-21 2018-07-24 华中科技大学 A kind of flexible grinding and polishing flange apparatus of Three Degree Of Freedom series connection
CN115143892A (en) * 2022-06-23 2022-10-04 南京农业大学 A kind of oxide film thickness monitoring method and realization device for electrochemical superfinishing of rotary workpiece

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