CN203630226U - Device for automatically testing crystal silicon battery diffusion sheet resistance - Google Patents
Device for automatically testing crystal silicon battery diffusion sheet resistance Download PDFInfo
- Publication number
- CN203630226U CN203630226U CN201320704521.6U CN201320704521U CN203630226U CN 203630226 U CN203630226 U CN 203630226U CN 201320704521 U CN201320704521 U CN 201320704521U CN 203630226 U CN203630226 U CN 203630226U
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- Prior art keywords
- probe
- objective table
- square resistance
- crystal silicon
- silicon battery
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- Expired - Lifetime
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- 238000012360 testing method Methods 0.000 title claims abstract description 33
- 238000009792 diffusion process Methods 0.000 title claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 20
- 239000010703 silicon Substances 0.000 title claims abstract description 20
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- 239000000523 sample Substances 0.000 claims abstract description 31
- 230000005484 gravity Effects 0.000 claims abstract description 8
- 238000010276 construction Methods 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000012634 fragment Substances 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a device for automatically testing the crystal silicon battery diffusion sheet resistance. The device comprises an object stage, a stepping device, a rotating shaft and a probe. A regular polygonal groove is arranged below the center of gravity of the object stage. The probe which is driven by a stepping motor to go up and down and the rotating shaft which is driven by the stepping motor to go up and down and can rotate are sequentially arranged in the stepping direction of the object stage. According to the device for automatically testing the crystal silicon battery diffusion sheet resistance, the accuracy of sheet resistance test point selection is improved, and the error in measurement is reduced. The test device is simple in design structure, economic and practical. Compared with manual test, the probability of damage and fragment generation due to misoperation in the production process is reduced to a certain extent. The sheet resistance can be tested more quickly after diffusion, the work efficiency is greatly improved, and the productivity of the production line is further improved.
Description
Technical field
The utility model relates to the crystal silicon solar energy battery diffusion technique in photovoltaic plant field, relates in particular to a kind of device of automatic test crystal silicon battery diffusion square resistance.
Background technology
The diffusion of solar cell is a kind of high temperature dopping process, be mainly impurity gas is imported and is placed with in the high temperature furnace pipe of silicon chip, by Impurity Diffusion in silicon chip to change the conduction type of semiconductor chip diffusion zone or a kind of method of surface impurity concentration.In boiler tube, because foreign atom near foreign atom plane of crystal and silicon crystal exists concentration gradient, distribute again thereby form foreign atom concentration by thermal motion.
Square resistance claims again sheet resistance, and it is defined as foursquare semiconductor lamella, the resistance presenting at direction of current, and unit is the every side of ohm.In simple terms, square resistance (Sheet Resistance) is exactly the resistance value instructing in electric material unit thickness unit area, is called for short sheet resistance, and the resistivity that ideally it equals this material is divided by thickness.
After diffusion in the test of square resistance, the way that most company adopts is to use the manual film releasing test of RTS probe, then getting the mode of sheet, this mode once can only be tested the square resistance of a point, test mode is numerous and diverse, has greatly affected the testing efficiency of square resistance, and in test process, usually, owing to manually placing the difference of position of silicon wafer and operating personnel's artificial custom, in the measurement of square resistance, also there are a lot of errors.
Utility model content
Utility model object: the purpose of this utility model is that overcoming the deficiencies in the prior art provides a kind of device of automatic test crystal silicon battery diffusion square resistance.
Technical scheme: the device of automatic test crystal silicon battery diffusion square resistance described in the utility model, comprises objective table, step device, turning axle and probe;
Objective table center of gravity below arranges regular polygon groove;
Step device is made up of two parallel leading screws and stepper motor, is positioned at objective table below; Regular polygon groove center of gravity overlaps with two leading screw center lines of step device;
Objective table step direction sets gradually by stepper motor and drives the probe of lifting and drive lifting rotatable turning axle by stepper motor;
Probe is arranged on objective table top, intersects vertical with two leading screw center lines of step device;
Turning axle is arranged on objective table below, intersects vertically with two leading screw center lines of step device, and turning axle and probe place parallel lines spacing are 150mm;
Turning axle is column construction, and xsect is the regular polygon mating with regular polygon groove.
Objective table is positive circular platform.
Objective table diameter equates with square resistance catercorner length.
Shuo Wei3-6 limit, regular polygon groove limit.
Probe is the four point probe of test square resistance.
Inventive principle: square resistance after diffusion is manually positioned on objective table, and stepper motor drives guide screw movement to take square resistance to probe below, the decline engaged test of probe alignment square resistance center; Record after resistance value, promote probe, stepper motor drives the leading screw 150mm that advances, and turning axle promotes, and inserts groove, the probe contact square resistance test resistance that declines; Record after resistance value, promote probe, turning axle drives objective table half-twist, and probe declines and contacts square resistance test resistance, repeats 3 times; After square resistance central point and each angle resistance are completed, turning axle declines, and stepper motor drives leading screw to advance to carry out next step, and next piece square resistance repeats this process.
Beneficial effect: the device that 1, the utility model is tested crystal silicon battery diffusion square resistance has automatically improved the accuracy that square resistance test point is selected, and has reduced the error existing in measuring; Proving installation project organization is simple, economical and practical, and compared with manual test, the ratio of damaging and produce fragment because of maloperation in production run also has certain decline; And can after diffusion finishes, test more fast square resistance, greatly improve work efficiency, further promote the production capacity of production line.2, as adopted positive circular stage, objective table center of gravity and center superposition, be convenient to arrange bottom groove.3, square resistance catercorner length be convenient to definite square resistance center identical with circular stage diameter.
Accompanying drawing explanation
Fig. 1 is the device three-dimensional structure diagram that the utility model is tested crystal silicon battery diffusion square resistance automatically.
Embodiment
Below technical solutions of the utility model are elaborated, but protection domain of the present utility model is not limited to described embodiment.
Embodiment 1
Automatic test crystal silicon battery described in the utility model spreads the device of square resistance, comprises the four point probe 5 of positive circular stage 1, step device 2, turning axle 4 and test square resistance;
Objective table 1 diameter equates with square resistance catercorner length, and regular hexagon groove 2 is set below center of gravity;
Step device 3 is made up of two parallel leading screws and stepper motor, is positioned at objective table 1 below; Regular hexagon groove 2 centers of gravity overlap with two leading screw center lines of step device 3;
Objective table 1 step direction sets gradually by stepper motor and drives the probe 5 of lifting and drive lifting rotatable turning axle 4 by stepper motor;
Turning axle 4 is arranged on objective table 1 below, intersects vertically with two leading screw center lines of step device 3, and turning axle 4 is 150mm with probe 5 place parallel lines spacings;
Turning axle 4 is column construction, and xsect is the regular polygon mating with regular polygon groove 2.
Square resistance after diffusion is manually positioned on circular stage, and stepper motor drives guide screw movement to take square resistance to probe below, the decline engaged test of probe alignment square resistance center; Record after resistance value, promote probe, stepper motor drives the leading screw 150mm that advances, and turning axle promotes, and inserts groove, the probe contact square resistance test resistance that declines; Record after resistance value, promote probe, turning axle drives objective table half-twist, and probe declines and contacts square resistance test resistance, repeats 3 times; After square resistance central point and each angle resistance are completed, turning axle declines, and stepper motor drives leading screw to advance to carry out next step, and next piece square resistance repeats this process.
As mentioned above, although represented and explained the utility model with reference to specific preferred embodiment, it shall not be construed as the restriction to the utility model self.Not departing under the spirit and scope prerequisite of the present utility model of claims definition, can make in the form and details various variations to it.
Claims (5)
1. a device of automatically testing crystal silicon battery diffusion square resistance, is characterized in that: comprise objective table (1), step device (3), turning axle (4) and probe (5);
Described objective table (1) center of gravity below arranges regular polygon groove (2);
Described step device (3) is made up of two parallel leading screws and stepper motor, is positioned at objective table (1) below; Regular polygon groove (2) center of gravity overlaps with two leading screw center lines of step device (3);
Described objective table (1) step direction sets gradually by stepper motor and drives the probe (5) of lifting and drive lifting rotatable turning axle (4) by stepper motor;
Described probe (5) is arranged on objective table (1) top, intersects vertical with two leading screw center lines of step device (3);
Described turning axle (4) is arranged on objective table (1) below, intersects vertically with two leading screw center lines of step device (3), and turning axle (4) and probe (5) place parallel lines spacing are 120mm to 150mm;
Described turning axle (4) is column construction, and xsect is the regular polygon mating with regular polygon groove (2).
2. the device of automatic test crystal silicon battery diffusion square resistance according to claim 1, is characterized in that: described objective table (1) is positive circular platform.
3. the device of automatic test crystal silicon battery diffusion square resistance according to claim 2, is characterized in that: described objective table (1) diameter equates with square resistance catercorner length.
4. the device of automatic test crystal silicon battery diffusion square resistance according to claim 1, is characterized in that: Shuo Wei3-6 limit, described regular polygon groove (2) limit.
5. the device of automatic test crystal silicon battery diffusion square resistance according to claim 1, is characterized in that: described probe (5) is the four point probe of test square resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320704521.6U CN203630226U (en) | 2013-11-07 | 2013-11-07 | Device for automatically testing crystal silicon battery diffusion sheet resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320704521.6U CN203630226U (en) | 2013-11-07 | 2013-11-07 | Device for automatically testing crystal silicon battery diffusion sheet resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203630226U true CN203630226U (en) | 2014-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320704521.6U Expired - Lifetime CN203630226U (en) | 2013-11-07 | 2013-11-07 | Device for automatically testing crystal silicon battery diffusion sheet resistance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203630226U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111103460A (en) * | 2018-10-25 | 2020-05-05 | 株洲中车时代电气股份有限公司 | Method for improving accuracy of four-probe RS test |
| CN115267339A (en) * | 2022-07-20 | 2022-11-01 | 无锡卓海科技股份有限公司 | Automatic measuring system and method for film resistance |
-
2013
- 2013-11-07 CN CN201320704521.6U patent/CN203630226U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111103460A (en) * | 2018-10-25 | 2020-05-05 | 株洲中车时代电气股份有限公司 | Method for improving accuracy of four-probe RS test |
| CN111103460B (en) * | 2018-10-25 | 2021-03-16 | 株洲中车时代半导体有限公司 | Method for improving accuracy of four-probe RS test |
| CN115267339A (en) * | 2022-07-20 | 2022-11-01 | 无锡卓海科技股份有限公司 | Automatic measuring system and method for film resistance |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140604 |
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| CX01 | Expiry of patent term |