CN203610362U - 硅片腐前清洗机用清洗框 - Google Patents
硅片腐前清洗机用清洗框 Download PDFInfo
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- CN203610362U CN203610362U CN201320803510.3U CN201320803510U CN203610362U CN 203610362 U CN203610362 U CN 203610362U CN 201320803510 U CN201320803510 U CN 201320803510U CN 203610362 U CN203610362 U CN 203610362U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 33
- 239000010703 silicon Substances 0.000 title claims abstract description 33
- 238000005406 washing Methods 0.000 title abstract 6
- 238000005260 corrosion Methods 0.000 title abstract 2
- 238000004140 cleaning Methods 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 5
- -1 Polypropylene Polymers 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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Abstract
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Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320803510.3U CN203610362U (zh) | 2013-12-05 | 2013-12-05 | 硅片腐前清洗机用清洗框 |
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CN201320803510.3U CN203610362U (zh) | 2013-12-05 | 2013-12-05 | 硅片腐前清洗机用清洗框 |
Publications (1)
Publication Number | Publication Date |
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CN203610362U true CN203610362U (zh) | 2014-05-28 |
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CN201320803510.3U Expired - Lifetime CN203610362U (zh) | 2013-12-05 | 2013-12-05 | 硅片腐前清洗机用清洗框 |
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CN (1) | CN203610362U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104353654A (zh) * | 2014-11-05 | 2015-02-18 | 东晶锐康晶体(成都)有限公司 | 一种条状晶片清洗提篮 |
CN104690028A (zh) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | 硅片腐前清洗机用清洗框 |
-
2013
- 2013-12-05 CN CN201320803510.3U patent/CN203610362U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104690028A (zh) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | 硅片腐前清洗机用清洗框 |
CN104690028B (zh) * | 2013-12-05 | 2017-01-25 | 天津中环领先材料技术有限公司 | 硅片腐前清洗机用清洗框 |
CN104353654A (zh) * | 2014-11-05 | 2015-02-18 | 东晶锐康晶体(成都)有限公司 | 一种条状晶片清洗提篮 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191219 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20140528 |
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CX01 | Expiry of patent term |