CN203577609U - Novel germane waste gas treatment device - Google Patents
Novel germane waste gas treatment device Download PDFInfo
- Publication number
- CN203577609U CN203577609U CN201320763519.6U CN201320763519U CN203577609U CN 203577609 U CN203577609 U CN 203577609U CN 201320763519 U CN201320763519 U CN 201320763519U CN 203577609 U CN203577609 U CN 203577609U
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- Prior art keywords
- ultrasonic
- germane
- tower body
- cleaning
- packing layer
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- Expired - Lifetime
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- 229910000078 germane Inorganic materials 0.000 title claims abstract description 18
- 239000002912 waste gas Substances 0.000 title abstract description 8
- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000012856 packing Methods 0.000 claims description 23
- 239000012530 fluid Substances 0.000 claims description 9
- 239000000945 filler Substances 0.000 abstract description 5
- 239000007789 gas Substances 0.000 abstract description 3
- 238000004506 ultrasonic cleaning Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004089 microcirculation Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model discloses a novel germane waste gas treatment device which mainly comprises a tower body, a filler layer, a gas inlet channel, a liquid storage tank and an exhaust fan, the device further comprises a circulating pump, as well as an ultrasonic device, wherein circulating pump pumps liquid in the liquid storage tank into the filler layer, the ultrasonic device comprises an ultrasonic power supply and an ultrasonic generator which are sequentially connected, and at least one ultrasonic energy transducer which is arranged at the bottom of the tower body, when the germane waste gas treatment device is in cleaning, the ultrasonic device is started, cleaning liquid in the liquid storage tank is pumped in the filler layer through the circulating pump for cleaning. An ultrasonic cleaning device is additionally arranged in the novel germane waste gas treatment device, so that the filler layer does not need to be taken out for cleaning, and the use is convenient.
Description
Technical field
The utility model relates to a kind of new germane emission-control equipment.
Background technology
Chinese patent CN102078759 discloses a kind for the treatment of apparatus containing germane waste gas, described device comprises tower body, in described tower body inside, there is packing layer, described packing layer below is inlet channel, described tower body bottom is provided with reservoir, top has air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, the described germane waste gas that contains is via described inlet channel, under the effect of air exhauster, enter the liquid reactions in described packing layer inside and packing layer, remove Germane gas, residual gas is discharged tower body by air exhauster.The treating apparatus containing germane waste gas of this patent can directly apply to the processing containing germane waste gas of solar cell and integrated circuit manufacturing enterprise, but when being cleaned, filler need to be taken out in tower, clean complete refilling back, waste time and energy, operate very inconvenient.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of new germane emission-control equipment, and this device can conveniently clean inner-tower filling material.
For achieving the above object, the utility model is realized by the following technical solutions:
New germane emission-control equipment, mainly comprise: tower body, described tower body inside has packing layer, described packing layer below is provided with inlet channel, described tower body bottom is provided with reservoir, top is provided with air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, it is characterized in that, this treating apparatus also comprises a ultrasonic unit, this ultrasonic unit comprises the ultrasonic-frequency power supply connecting successively, supersonic generator is located at the ultrasonic transducer of tower body bottom with at least one, during cleaning, start described ultrasonic unit, cleaning fluid in reservoir pumps in packing layer and cleans via circulating pump.
Wherein, have at least four groups of ultrasonic transducers to be evenly located at described tower body bottom.
Beneficial effect: the utility model, by set up ultrasonic cleaning equipment in germane emission-control equipment, needn't take out packing layer to clean again, easy to use.
Accompanying drawing explanation
Fig. 1 is the new germane emission-control equipment of the utility model structural representation.
Main element symbol
10 tower body 11 packing layer 12 inlet channel 13 reservoir 14 air exhauster 15 circulating pump 161 ultrasonic-frequency power supply 162 supersonic generator 163 ultrasonic transducers
The specific embodiment
By describing technology contents of the present utility model, structural feature in detail, being realized object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be explained in detail.
Refer to Fig. 1,
New germane emission-control equipment, mainly comprise: tower body 10, described tower body inside have packing layer 11, packing layer 11 belows are provided with inlet channel 12, tower body 10 bottoms are provided with reservoir 13, top is provided with air exhauster 14, this device also comprises the liquid in reservoir is pumped into the circulating pump 15 in packing layer 11, this treating apparatus also comprises a ultrasonic unit, and this ultrasonic unit comprises that successively the ultrasonic-frequency power supply 161 that connects, supersonic generator 162 and at least one be located at the ultrasonic transducer 163 of tower body bottom.
Wherein, have at least four groups of ultrasonic transducers 163 to be evenly located at described tower body bottom.
The main cleaning function of Ultrasonic Cleaning depends on hyperacoustic " cavitation " effect, cavitation nucleus in liquid vibrates under the effect of ultrasonic field, when acoustic pressure reaches certain critical value, cavitation bubble will increase rapidly, suddenly broken, in cavitation bubble broken moment, produce huge shock wave, destroy the pollutant on cleaned material surface, make it dissolve or be deposited in cleaning fluid.Cavitation bubble, in oscillatory process, is accompanied by acoustic effect, produces radiation torsion, causes micro-circulation movement of liquid itself.
During cleaning, first liquid in reservoir is extracted out, cleaning fluid is packed in reservoir 13, cleaning fluid height can be by packing layer 11 submergences, start described ultrasonic unit 16, cleaning fluid in reservoir 13 via circulating pump 15 from packing layer 11 tops are drenched, and drive and constantly in tower, circulate by circulating pump 15, packing layer 11 is downloaded in cleaning fluid and is produced and shake at ul-trasonic irradiation, packing layer 11 can fully contact with cleaning fluid thus, its surperficial mud is subject to ultrasonic wave shock and vibrations come off, and fully reacts with cleaning fluid, reaches cleaning object.
The utility model is simple in structure, can effectively remove the dirt on packing layer 11 surfaces; The device of this structure, easy to clean, can alleviate hand labor intensity greatly, increases productivity effect.
The foregoing is only embodiment of the present utility model; not thereby limit the scope of the claims of the present utility model; every equivalent structure or conversion of equivalent flow process that utilizes the utility model description and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (2)
1. new germane emission-control equipment, mainly comprise: tower body, in described tower body inside, there is packing layer, described packing layer below is provided with inlet channel, described tower body bottom is provided with reservoir, top is provided with air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, it is characterized in that, this treating apparatus also comprises a ultrasonic unit, this ultrasonic unit comprises the ultrasonic-frequency power supply connecting successively, supersonic generator is located at the ultrasonic transducer of tower body bottom with at least one, during cleaning, start described ultrasonic unit, cleaning fluid in reservoir pumps in packing layer and cleans via circulating pump.
2. new germane emission-control equipment according to claim 1, has at least four groups of ultrasonic transducers to be evenly located at described tower body bottom.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320763519.6U CN203577609U (en) | 2013-11-27 | 2013-11-27 | Novel germane waste gas treatment device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320763519.6U CN203577609U (en) | 2013-11-27 | 2013-11-27 | Novel germane waste gas treatment device |
Publications (1)
Publication Number | Publication Date |
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CN203577609U true CN203577609U (en) | 2014-05-07 |
Family
ID=50575589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201320763519.6U Expired - Lifetime CN203577609U (en) | 2013-11-27 | 2013-11-27 | Novel germane waste gas treatment device |
Country Status (1)
Country | Link |
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CN (1) | CN203577609U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103638798A (en) * | 2013-11-27 | 2014-03-19 | 福建博纯材料有限公司 | Novel treating device for germane waste gas |
-
2013
- 2013-11-27 CN CN201320763519.6U patent/CN203577609U/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103638798A (en) * | 2013-11-27 | 2014-03-19 | 福建博纯材料有限公司 | Novel treating device for germane waste gas |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 362617 Darong Village, Xiayang Town, Yongchun County, Quanzhou City, Fujian Province Patentee after: SPECTRUM MATERIALS Corp.,Ltd. Address before: 362617 Darong Village, Xiayang Town, Yongchun County, Quanzhou City, Fujian Province Patentee before: FUJIAN BOCHUN MATERIALS CO.,LTD. |
|
CP01 | Change in the name or title of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20140507 |
|
CX01 | Expiry of patent term |