CN103638798A - Novel treating device for germane waste gas - Google Patents
Novel treating device for germane waste gas Download PDFInfo
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- CN103638798A CN103638798A CN201310613434.4A CN201310613434A CN103638798A CN 103638798 A CN103638798 A CN 103638798A CN 201310613434 A CN201310613434 A CN 201310613434A CN 103638798 A CN103638798 A CN 103638798A
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- ultrasonic
- tower body
- germane
- packing layer
- circulating pump
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Abstract
The invention discloses a novel treating device for germane waste gas. The novel treating device mainly comprises a tower body, a filler layer, a gas feeding channel, a liquid storage groove and an exhaust fan and also comprises a circulating pump and an ultrasonic device, wherein the circulating pump pumps liquid in the liquid storage groove into the filler layer; the ultrasonic device comprises an ultrasonic power supply, an ultrasonic generator and at least one ultrasonic transducer which are connected in sequence; the ultrasonic transducer is arranged at the bottom of the tower body; during cleaning, the ultrasonic device is started, cleaning liquid in the liquid storage groove is pumped into the filler layer by the circulating pump to be cleaned. The novel treating device disclosed by the invention has the advantages that since the ultrasonic cleaning device is additionally arranged in the treating device for the germane waste gas, the filler layer does not need to be taken out for cleaning, and the use is convenient.
Description
Technical field
The present invention relates to a kind of new germane emission-control equipment.
Background technology
Chinese patent CN102078759 discloses a kind for the treatment of apparatus containing germane waste gas, described device comprises tower body, in described tower body inside, there is packing layer, described packing layer below is inlet channel, described tower body bottom is provided with reservoir, top has air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, the described germane waste gas that contains is via described inlet channel, under the effect of air exhauster, enter the liquid reactions in described packing layer inside and packing layer, remove Germane gas, residual gas is discharged tower body by air exhauster.The treating apparatus containing germane waste gas of this patent can directly apply to the processing containing germane waste gas of solar cell and integrated circuit manufacturing enterprise, but when being cleaned, filler need to be taken out in tower, clean complete refilling back, waste time and energy, operate very inconvenient.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of new germane emission-control equipment, and this device can conveniently clean inner-tower filling material.
For achieving the above object, the present invention realizes by the following technical solutions:
New germane emission-control equipment, mainly comprise: tower body, described tower body inside has packing layer, described packing layer below is provided with inlet channel, described tower body bottom is provided with reservoir, top is provided with air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, it is characterized in that, this treating apparatus also comprises a ultrasonic unit, this ultrasonic unit comprises the ultrasonic-frequency power supply connecting successively, supersonic generator is located at the ultrasonic transducer of tower body bottom with at least one, during cleaning, start described ultrasonic unit, cleaning fluid in reservoir pumps in packing layer and cleans via circulating pump.
Wherein, have at least four groups of ultrasonic transducers to be evenly located at described tower body bottom.
Beneficial effect: the present invention, by set up ultrasonic cleaning equipment in germane emission-control equipment, needn't take out packing layer to clean again, easy to use.
Accompanying drawing explanation
Fig. 1 is the new germane emission-control equipment of the present invention structural representation.
Main element symbol
10 tower body 11 packing layer 12 inlet channel 13 reservoir 14 air exhauster 15 circulating pump 161 ultrasonic-frequency power supply 162 supersonic generator 163 ultrasonic transducers
The specific embodiment
By describing technology contents of the present invention, structural feature in detail, being realized object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be explained in detail.
Refer to Fig. 1, new germane emission-control equipment, mainly comprise: tower body 10, described tower body inside have packing layer 11, packing layer 11 belows are provided with inlet channel 12, tower body 10 bottoms are provided with reservoir 13, top is provided with air exhauster 14, this device also comprises the liquid in reservoir is pumped into the circulating pump 15 in packing layer 11, this treating apparatus also comprises a ultrasonic unit, and this ultrasonic unit comprises that successively the ultrasonic-frequency power supply 161 that connects, supersonic generator 162 and at least one be located at the ultrasonic transducer 163 of tower body bottom.
Wherein, have at least four groups of ultrasonic transducers 163 to be evenly located at described tower body bottom.
The main cleaning function of Ultrasonic Cleaning depends on hyperacoustic " cavitation " effect, cavitation nucleus in liquid vibrates under the effect of ultrasonic field, when acoustic pressure reaches certain critical value, cavitation bubble will increase rapidly, suddenly broken, in cavitation bubble broken moment, produce huge shock wave, destroy the pollutant on cleaned material surface, make it dissolve or be deposited in cleaning fluid.Cavitation bubble, in oscillatory process, is accompanied by acoustic effect, produces radiation torsion, causes micro-circulation movement of liquid itself.
During cleaning, first liquid in reservoir is extracted out, cleaning fluid is packed in reservoir 13, cleaning fluid height can be by packing layer 11 submergences, start described ultrasonic unit 16, cleaning fluid in reservoir 13 via circulating pump 15 from packing layer 11 tops are drenched, and drive and constantly in tower, circulate by circulating pump 15, packing layer 11 is downloaded in cleaning fluid and is produced and shake at ul-trasonic irradiation, packing layer 11 can fully contact with cleaning fluid thus, its surperficial mud is subject to ultrasonic wave shock and vibrations come off, and fully reacts with cleaning fluid, reaches cleaning object.
The present invention is simple in structure, can effectively remove the dirt on packing layer 11 surfaces; The device of this structure, easy to clean, can alleviate hand labor intensity greatly, increases productivity effect.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes description of the present invention and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (2)
1. new germane emission-control equipment, mainly comprise: tower body, in described tower body inside, there is packing layer, described packing layer below is provided with inlet channel, described tower body bottom is provided with reservoir, top is provided with air exhauster, described device also comprises the liquid in reservoir is pumped into the circulating pump in packing layer, it is characterized in that, this treating apparatus also comprises a ultrasonic unit, this ultrasonic unit comprises the ultrasonic-frequency power supply connecting successively, supersonic generator is located at the ultrasonic transducer of tower body bottom with at least one, during cleaning, start described ultrasonic unit, cleaning fluid in reservoir pumps in packing layer and cleans via circulating pump.
2. new germane emission-control equipment according to claim 1, has at least four groups of ultrasonic transducers to be evenly located at described tower body bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310613434.4A CN103638798A (en) | 2013-11-27 | 2013-11-27 | Novel treating device for germane waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310613434.4A CN103638798A (en) | 2013-11-27 | 2013-11-27 | Novel treating device for germane waste gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103638798A true CN103638798A (en) | 2014-03-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310613434.4A Pending CN103638798A (en) | 2013-11-27 | 2013-11-27 | Novel treating device for germane waste gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103638798A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107185401A (en) * | 2017-05-25 | 2017-09-22 | 广西壮族自治区环境保护科学研究院 | A kind of absorption VOCS equipment |
| CN113181752A (en) * | 2021-03-26 | 2021-07-30 | 博纯材料股份有限公司 | Germane collecting and purifying equipment and method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5450041U (en) * | 1977-09-16 | 1979-04-06 | ||
| JP2001259330A (en) * | 2000-03-15 | 2001-09-25 | Mitsubishi Electric Corp | Air cleaner and household electric appliance |
| CN102078759A (en) * | 2010-11-30 | 2011-06-01 | 福建博纯材料有限公司 | Treatment device for germane-containing waste gas |
| CN202823268U (en) * | 2012-08-29 | 2013-03-27 | 杭州天蓝环保工程设计有限公司 | Slurring device for white mud or acetylene sludge |
| CN103127963A (en) * | 2011-11-30 | 2013-06-05 | 徐树元 | On-line regeneration system and method of flue gas denitration catalyst |
| CN103350078A (en) * | 2013-06-27 | 2013-10-16 | 宁波市镇海甬阳石化工程技术有限公司 | Cleaning method of structured packing |
| CN203577609U (en) * | 2013-11-27 | 2014-05-07 | 福建博纯材料有限公司 | Novel germane waste gas treatment device |
-
2013
- 2013-11-27 CN CN201310613434.4A patent/CN103638798A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5450041U (en) * | 1977-09-16 | 1979-04-06 | ||
| JP2001259330A (en) * | 2000-03-15 | 2001-09-25 | Mitsubishi Electric Corp | Air cleaner and household electric appliance |
| CN102078759A (en) * | 2010-11-30 | 2011-06-01 | 福建博纯材料有限公司 | Treatment device for germane-containing waste gas |
| CN103127963A (en) * | 2011-11-30 | 2013-06-05 | 徐树元 | On-line regeneration system and method of flue gas denitration catalyst |
| CN202823268U (en) * | 2012-08-29 | 2013-03-27 | 杭州天蓝环保工程设计有限公司 | Slurring device for white mud or acetylene sludge |
| CN103350078A (en) * | 2013-06-27 | 2013-10-16 | 宁波市镇海甬阳石化工程技术有限公司 | Cleaning method of structured packing |
| CN203577609U (en) * | 2013-11-27 | 2014-05-07 | 福建博纯材料有限公司 | Novel germane waste gas treatment device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107185401A (en) * | 2017-05-25 | 2017-09-22 | 广西壮族自治区环境保护科学研究院 | A kind of absorption VOCS equipment |
| CN113181752A (en) * | 2021-03-26 | 2021-07-30 | 博纯材料股份有限公司 | Germane collecting and purifying equipment and method |
| CN113181752B (en) * | 2021-03-26 | 2021-12-07 | 博纯材料股份有限公司 | Germane collecting and purifying equipment and method |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140319 |