CN203559120U - Shielding box for vacuum plating - Google Patents

Shielding box for vacuum plating Download PDF

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Publication number
CN203559120U
CN203559120U CN201320582330.7U CN201320582330U CN203559120U CN 203559120 U CN203559120 U CN 203559120U CN 201320582330 U CN201320582330 U CN 201320582330U CN 203559120 U CN203559120 U CN 203559120U
Authority
CN
China
Prior art keywords
shielding
plating
shell
shield blade
shielding box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201320582330.7U
Other languages
Chinese (zh)
Inventor
王朝阳
宫睿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI QIHUI PHOTOELECTRIC TECHNOLOGY Co Ltd
Original Assignee
WUXI QIHUI PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUXI QIHUI PHOTOELECTRIC TECHNOLOGY Co Ltd filed Critical WUXI QIHUI PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority to CN201320582330.7U priority Critical patent/CN203559120U/en
Application granted granted Critical
Publication of CN203559120U publication Critical patent/CN203559120U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a shielding box for vacuum plating. The shielding box comprises a shell (1) and a plurality of shielding sheets (2). The shielding box is characterized in that the shielding sheets (2) are independently arranged in parallel in the shell (1), wherein a plurality of through holes (3) are formed in each shielding sheet (2). The shielding box disclosed by the utility model is provided with the independent shielding sheets (2), and the through hole are formed in each shielding sheet (2), so that a metal layer can be effectively adsorbed in multiple plating processes or a long-term plating process, metal residues cannot fall to a plated workpiece, then plating defects of the plated workpiece are reduced, and purposes of improving optical and mechanical properties of the plating film layer are achieved; furthermore, the independent shielding sheets are easily drawn and separated and singly cleaned, so that the unnecessary losses of the manpower and the material resources are effectively reduced; the shielding box has the characteristics of simple structure, convenience in use and high adsorption efficiency and can be mounted at a proper position adjacent to a plating source in a plating chamber in a single or combined manner according to the requirement.

Description

A kind of shielded cell for vacuum plating
Technical field
The utility model relates to coating technique field, specifically a kind ofly strengthens the adsorptive power of plated film chamber to metal level and prevents the shielded cell for vacuum plating that metallic residue drops on workpiece to be plated in coating process.
Background technology
In vacuum plating process, when the metallic vapor being sent by coating source is deposited to workpiece to be plated, also can partly be splashed on the inwall of plated film chamber, in the course of time cause the accumulation of metal level on chamber inner wall, these metal levels can have influence on the working effect of chamber on the one hand, cleaning gets up to be not easy very much on the other hand, causes unnecessary manpower and materials loss.And along with the increase of coating times or time, the metal level depositing on plated film chamber inner wall is also more and more thicker, and these metal levels adhere to and built on the sand, metallic residue is just very easy to drop on workpiece to be plated in coating process at chamber wall surface, cause the coating defects of workpiece to be plated.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, and the utility model provides a kind of to be strengthened the adsorptive power of plated film chamber to metal level and prevents the shielded cell for vacuum plating that metallic residue drops on workpiece to be plated in coating process.
The purpose of this utility model solves by the following technical programs:
For a shielded cell for vacuum plating, comprise shell and shield blade, it is characterized in that being provided with in described shell multiple independent shield blade that arrange, shield blade be arranged in parallel each other and each shield blade on be all provided with multiple through holes.
The inwall that described shell is " Qian " shape and shell is provided with groove, and each shield blade is all inserted in shell along corresponding groove.
Described through hole is evenly distributed on the through hole correspondence all mutually in shield blade and any two shield blade.
Described shell and shield blade adopt steel, copper material, aluminium or alloy material to make.
The utility model has the following advantages compared to existing technology:
The shielded cell that the utility model adopts, owing to having in multiple independently shield blade and each shield blade, there are multiple emptying apertures, can be in plated film repeatedly or long-time plated film active adsorption metal level, metallic residue also can not drop on workpiece to be plated, thereby reduced the coating defects of workpiece to be plated, reached the object of improving plated film rete optics and mechanical property; This shielded cell can be arranged near the suitable position of coating source in plated film chamber as required alone or in combination.
In shielded cell of the present utility model, there are multiple separate shield blade, can extract as required and separate and clean separately, effectively reduced unnecessary manpower and materials loss; There is feature simple in structure, easy to use and that adsorption efficiency is high, suitable promoting the use of.
Accompanying drawing explanation
Accompanying drawing 1 is structural representation of the present utility model.
Wherein: 1-shell; 2-shield blade; 3-through hole.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is further described.
As shown in Figure 1: a kind of shielded cell for vacuum plating, comprise shell 1 and shield blade 2, shell, 1 and shield blade 2 adopt steel, copper material, aluminium or alloy material to make, in shell 1, be provided with multiple independent shield blade 2 that arrange, shield blade 2 be arranged in parallel each other and each shield blade 2 on be all provided with multiple through holes 3, it is all mutually corresponding that through hole 3 is evenly distributed on through hole 3 in shield blade 2 and any two shield blade 2.Specifically, the inwall that shell 1 is " Qian " shape and shell 1 is provided with groove, and each shield blade 2 is all inserted in shell 1 along corresponding groove.
The shielded cell that the utility model adopts, owing to having, in multiple independently shield blade 2 and each shield blade 2, there are multiple emptying apertures 3, can be in plated film repeatedly or long-time plated film active adsorption metal level, metallic residue also can not drop on workpiece to be plated, thereby reduced the coating defects of workpiece to be plated, reached the object of improving plated film rete optics and mechanical property; Multiple separate shield blade 2 can extract as required and separate and clean separately, have effectively reduced unnecessary manpower and materials loss; This shielded cell there is feature simple in structure, easy to use and that adsorption efficiency is high, therefore can be arranged near the suitable position of coating source in plated film chamber as required alone or in combination.
Above embodiment is only explanation technological thought of the present utility model, can not limit protection domain of the present utility model with this, every technological thought according to the utility model proposes, any change of doing on technical scheme basis, within all falling into the utility model protection domain; The technology that the utility model does not relate to all can be realized by prior art.

Claims (4)

1. the shielded cell for vacuum plating, comprise shell (1) and shield blade (2), it is characterized in that being provided with in described shell (1) multiple independent shield blade (2) that arrange, shield blade (2) be arranged in parallel each other and each shield blade (2) on be all provided with multiple through holes (3).
2. the shielded cell for vacuum plating according to claim 1, the inwall that the shell (1) described in it is characterized in that is " Qian " shape and shell (1) is provided with groove, and each shield blade (2) is all inserted in shell (1) along corresponding groove.
3. the shielded cell for vacuum plating according to claim 1, is characterized in that described through hole (3) is evenly distributed on through hole (3) correspondence all mutually in shield blade (2) and any two shield blade (2).
4. the shielded cell for vacuum plating according to claim 1, is characterized in that described shell (1) and shield blade (2) adopt steel, copper material, aluminium or alloy material to make.
CN201320582330.7U 2013-09-22 2013-09-22 Shielding box for vacuum plating Expired - Fee Related CN203559120U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320582330.7U CN203559120U (en) 2013-09-22 2013-09-22 Shielding box for vacuum plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320582330.7U CN203559120U (en) 2013-09-22 2013-09-22 Shielding box for vacuum plating

Publications (1)

Publication Number Publication Date
CN203559120U true CN203559120U (en) 2014-04-23

Family

ID=50508851

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201320582330.7U Expired - Fee Related CN203559120U (en) 2013-09-22 2013-09-22 Shielding box for vacuum plating

Country Status (1)

Country Link
CN (1) CN203559120U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451617A (en) * 2013-09-22 2013-12-18 无锡启晖光电科技有限公司 Shielding box for vacuum coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451617A (en) * 2013-09-22 2013-12-18 无锡启晖光电科技有限公司 Shielding box for vacuum coating
CN103451617B (en) * 2013-09-22 2016-06-15 江苏宜达新材料科技股份有限公司 A kind of shielded box for vacuum coating

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140423

Termination date: 20160922