CN103451617B - A kind of shielded box for vacuum coating - Google Patents
A kind of shielded box for vacuum coating Download PDFInfo
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- CN103451617B CN103451617B CN201310430022.7A CN201310430022A CN103451617B CN 103451617 B CN103451617 B CN 103451617B CN 201310430022 A CN201310430022 A CN 201310430022A CN 103451617 B CN103451617 B CN 103451617B
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- shielding sheet
- plated film
- plated
- shielded box
- shell
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Abstract
The invention discloses a kind of shielded box for vacuum coating, including shell (1) and shielding sheet (2), it is characterized in that being provided with multiple shielding sheet (2) being independently arranged in described shell (1), shielding sheet (2) be arranged in parallel each other and is all provided with multiple through hole (3) on each shielding sheet (2). The shielded box that the present invention adopts, owing to having on multiple independent shielding sheet and each shielding sheet, there is multiple emptying aperture, can in repeatedly plated film or long-time plated film active adsorption metal level, metallic residue is without dropping on workpiece to be plated, thus decreasing the coating defects of workpiece to be plated, reach to improve the purpose of plated film rete optically and mechanically performance; And separate shielding sheet easily extracts separation and individually cleans, it is effectively reduced unnecessary manpower and materials loss, there is simple in construction, the feature that easy to use and adsorption efficiency is high, it is possible to be arranged on position suitable near coating source in plated film chamber as required alone or in combination.
Description
Technical field
The present invention relates to coating technique field, specifically a kind of plated film chamber that strengthens is to the absorbability of metal level the shielded box for vacuum coating that prevents metallic residue in coating process from dropping on workpiece to be plated.
Background technology
In vacuum coating process, while the metallic vapour sent by coating source is deposited to workpiece to be plated, also can partly be splashed on the inwall of plated film chamber, in the course of time the accumulation of metal level on chamber inner wall is caused, these metal levels influence whether the working effect of chamber on the one hand, cleaning gets up to be not easy very much on the other hand, causes unnecessary manpower and materials to lose. And along with the increase of coating times or time, on plated film chamber inner wall, the metal level of deposition is also increasingly thicker, and these metal levels are in cavity wall surface attachment and built on the sand, in coating process, metallic residue is just very easy to drop on workpiece to be plated, causes the coating defects of workpiece to be plated.
Summary of the invention
It is an object of the invention to for the deficiencies in the prior art, the present invention provides a kind of plated film chamber that strengthens to the absorbability of metal level the shielded box for vacuum coating that prevents metallic residue in coating process from dropping on workpiece to be plated.
It is an object of the invention to solve by the following technical programs:
A kind of shielded box for vacuum coating, including shell and shielding sheet, it is characterised in that being provided with multiple shielding sheet being independently arranged in described shell, shielding sheet be arranged in parallel each other and is all provided with multiple through hole on each shielding sheet.
The inwall that described shell is " Qian " shape and shell is provided with groove, and each shielding sheet all inserts along shell along corresponding groove.
The through hole that described through hole is evenly distributed on shielding sheet and any two shielding sheets is all mutually corresponding.
Described shell and shielding sheet adopt steel, copper material, aluminium or alloy material to make.
The present invention has the following advantages compared to existing technology:
The shielded box that the present invention adopts, owing to having on multiple independent shielding sheet and each shielding sheet, there is multiple emptying aperture, can in repeatedly plated film or long-time plated film active adsorption metal level, metallic residue is without dropping on workpiece to be plated, thus decreasing the coating defects of workpiece to be plated, reach to improve the purpose of plated film rete optically and mechanically performance; This shielded box can be arranged on position suitable near coating source in plated film chamber as required alone or in combination.
There is multiple separate shielding sheet, it is possible to extract as required and separate and individually clean in the shielded box of the present invention, be effectively reduced unnecessary manpower and materials loss; There is simple in construction, the feature that easy to use and adsorption efficiency is high, suitable promote the use of.
Accompanying drawing explanation
Accompanying drawing 1 is the structural representation of the present invention.
Wherein: 1 shell; 2 shielding sheets; 3 through holes.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further illustrated with embodiment.
As shown in Figure 1: a kind of shielded box for vacuum coating, including shell 1 and shielding sheet 2, shell, 1 adopts steel, copper material, aluminium or alloy material to make with shielding sheet 2, multiple shielding sheet 2 being independently arranged it is provided with in shell 1, shielding sheet 2 be arranged in parallel each other and is all provided with multiple through hole 3 on each shielding sheet 2, and the through hole 3 that through hole 3 is evenly distributed on shielding sheet 2 and any two shielding sheets 2 is all mutually corresponding. Specifically, the inwall that shell 1 is " Qian " shape and shell 1 is provided with groove, and each shielding sheet 2 all inserts along shell 1 along corresponding groove.
The shielded box that the present invention adopts, owing to having on multiple independent shielding sheet 2 and each shielding sheet 2, there is multiple emptying aperture 3, can in repeatedly plated film or long-time plated film active adsorption metal level, metallic residue is without dropping on workpiece to be plated, thus decreasing the coating defects of workpiece to be plated, reach to improve the purpose of plated film rete optically and mechanically performance; Multiple separate shielding sheets 2 can extract separation as required and individually clean, and are effectively reduced unnecessary manpower and materials loss; There is simple in construction, the feature that easy to use and adsorption efficiency is high, therefore this shielded box can be arranged on position suitable near coating source in plated film chamber as required alone or in combination.
Above example is only the technological thought that the present invention is described, it is impossible to limits protection scope of the present invention, every technological thought proposed according to the present invention, any change done on technical scheme basis with this, each falls within scope; The technology that the present invention is not directed to all can be passed through prior art and be realized.
Claims (2)
1. the shielded box for vacuum coating, including shell (1) and shielding sheet (2), it is characterized in that being provided with multiple shielding sheet (2) being independently arranged in described shell (1), shielding sheet (2) be arranged in parallel each other and is all provided with multiple through hole (3) on each shielding sheet (2); The inwall that described shell (1) is " Qian " shape and shell (1) is provided with groove, and each shielding sheet (2) is all inserted along shell (1) along corresponding groove; The through hole (3) that described through hole (3) is evenly distributed in shielding sheet (2) and any two shieldings sheet (2) is all mutually corresponding.
2. the shielded box for vacuum coating according to claim 1, it is characterised in that described shell (1) and shielding sheet (2) adopt steel, copper material, aluminium or alloy material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310430022.7A CN103451617B (en) | 2013-09-22 | 2013-09-22 | A kind of shielded box for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310430022.7A CN103451617B (en) | 2013-09-22 | 2013-09-22 | A kind of shielded box for vacuum coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103451617A CN103451617A (en) | 2013-12-18 |
| CN103451617B true CN103451617B (en) | 2016-06-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310430022.7A Active CN103451617B (en) | 2013-09-22 | 2013-09-22 | A kind of shielded box for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103451617B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109355631B (en) * | 2018-11-29 | 2020-12-22 | 宁波江丰电子材料股份有限公司 | Device for improving film uniformity on sputtering system and processing method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201400713Y (en) * | 2009-03-06 | 2010-02-10 | 中国南玻集团股份有限公司 | Baffle plate structure of vacuum coating |
| CN203559120U (en) * | 2013-09-22 | 2014-04-23 | 无锡启晖光电科技有限公司 | Shielding box for vacuum plating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10140351A (en) * | 1996-11-05 | 1998-05-26 | Kobe Steel Ltd | Inline type vacuum film forming device |
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2013
- 2013-09-22 CN CN201310430022.7A patent/CN103451617B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201400713Y (en) * | 2009-03-06 | 2010-02-10 | 中国南玻集团股份有限公司 | Baffle plate structure of vacuum coating |
| CN203559120U (en) * | 2013-09-22 | 2014-04-23 | 无锡启晖光电科技有限公司 | Shielding box for vacuum plating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103451617A (en) | 2013-12-18 |
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Effective date of registration: 20160229 Address after: 214213, Jiangsu Yixing economic and Technological Development Zone Pioneer Park two phase A5 building Applicant after: JIANGSU YITA NEW MATERIAL TECHNOLOGY CO., LTD. Address before: Huishan Economic Development Zone Xingzhi WITHUB Park B District 39-37-101 road 214174 Jiangsu city of Wuxi Province Applicant before: Wuxi Qihui Photoelectric Technology Co., Ltd. |
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