CN204550712U - The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box - Google Patents
The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box Download PDFInfo
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- CN204550712U CN204550712U CN201520209504.4U CN201520209504U CN204550712U CN 204550712 U CN204550712 U CN 204550712U CN 201520209504 U CN201520209504 U CN 201520209504U CN 204550712 U CN204550712 U CN 204550712U
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- plate body
- electrode plate
- battery lead
- end cap
- lead plate
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Abstract
A kind of battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box, electrode plate body is not more than the appearance profile of PECVD substrate for the side surface appearance profile carrying PECVD substrate, and electrode plate body rear and front end is provided with edge end cap respectively by articulating device.Because electrode plate body side surface covers by PECVD substrate, two marginal ends that therefore rete can be plated to both sides in coating process cover, and electrode plate body can not adhere to coatings.After coating process completes, edge end cap is dismantled from electrode plate body, then the rete that marginal end covers is cleaned, be installed to again on primary electrode plate body after cleaning.Therefore can reduce the attachment of silica flour at reaction box battery lead plate and coating chip, effectively increase the access times of reaction box, reduce the labour intensity that cleaning is clean, improve the utilization ratio of reaction box, and improve coating quality.
Description
Technical field
The utility model relates to the battery lead plate of a kind of multi-disc deposition PECVD amorphous silicon membrane reaction box.
Background technology
For making amorphous silicon membrane at the consistency of thickness of deposited on substrates, must be evenly in the plasma body electric field distribution of plasma enhanced chemical vapor deposition device, therefore require that battery lead plate edge protrudes from deposition substrate, namely battery lead plate can leave one piece of part that cannot be covered completely by substrate.And can be uniformly distributed in order to electric field, battery lead plate is necessary for one piece of entirety.The unlapped battery lead plate edge of substrate is just inevitably also coated with one deck PECVD film at coating process.Come out of the stove at reaction box, blanking, in moving process, the rete (silica flour) at battery lead plate edge can come off, also can be scattering into battery lead plate inner and surperficial, this not only needs to spend more time and manpower to go to carry out the process at battery lead plate edge before upper once reaction box uses, and the access times of meeting serious curtailment reaction box, increase the cleaning frequency of reaction box.The costs such as human and material resources are caused to increase.
Utility model content
The utility model, in order to overcome the deficiency of above technology, provides and a kind ofly reduces the battery lead plate of silica flour at the multi-disc deposition PECVD amorphous silicon membrane reaction box of the attachment of reaction box battery lead plate and coating chip, the utilization ratio improving reaction box and coating quality.
The utility model overcomes the technical scheme that its technical problem adopts:
The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box, electrode plate body is not more than the appearance profile of PECVD substrate for the side surface appearance profile carrying PECVD substrate, described electrode plate body rear and front end is provided with edge end cap respectively by articulating device, when edge end cap is fixed on two ends, electrode plate body left and right, end cap side surface surface, edge is mutually concordant with the both side surface of electrode plate body respectively, and the side surface appearance profile after two edge end caps and electrode plate body combine is greater than the appearance profile of PECVD substrate.
Above-mentioned articulating device comprise be arranged at electrode plate body rear and front end respectively intercalation part, be arranged in edge end cap and the draw-in groove matched with intercalation part, edge end cap is plugged in after in the intercalation part of electrode plate body front end or rear end by draw-in groove and is fixed by escapement, and edge end cap side surface and battery lead plate front surface or battery lead plate rear surface fit.
For the ease of being placed in reaction box, above-mentioned edge end cap and electrode plate body contour, when edge end cap is fixed on electrode plate body left end or right-hand member, marginal end covers surface and acies lid lower surface is mutually concordant with battery lead plate lower surface with battery lead plate upper surface respectively.
Above-mentioned escapement comprises the chute that the number be arranged on intercalation part is more than or equal to from top to bottom, described chute outboard end opening, it is from top to bottom obliquely installed from the inside side of outboard end, is horizontally arranged with the bearing pin corresponding with chute in the draw-in groove of described edge end cap.
The beneficial effects of the utility model are: be placed into by PECVD substrate when electrode plate body performing coating process, because electrode plate body side surface covers by PECVD substrate, two marginal ends that therefore rete can be plated to both sides in coating process cover, and electrode plate body can not adhere to coatings.After coating process completes, edge end cap is dismantled from electrode plate body, then the rete that marginal end covers is cleaned, be installed to again on primary electrode plate body after cleaning.Therefore the attachment of silica flour at reaction box battery lead plate and coating chip can be reduced, the access times of effective increase reaction box, the electricity usage when reaction box after for the use of the deionized water of cleaning reaction box and cleaning is baked to drying regime can be reduced, reduce the labour intensity that cleaning is clean, improve the utilization ratio of reaction box, and improve coating quality.
Accompanying drawing explanation
Fig. 1 is battery lead plate perspective view of the present utility model;
Fig. 2 is edge of the present utility model end cap perspective view;
In figure, 1. end cap 9. draw-in groove 10. edge, intercalation part 7. chute 8. edge, electrode plate body 2. battery lead plate upper surface 3. battery lead plate lower surface 4. battery lead plate front surface 5. battery lead plate rear surface 6. end cap side surface 11. marginal end covers surperficial 12. edge end cap lower surface 13. bearing pins.
Embodiment
Be described further below in conjunction with accompanying drawing 1, accompanying drawing 2 pairs of the utility model.
A kind of battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box, electrode plate body 1 is not more than the appearance profile of PECVD substrate for the side surface appearance profile carrying PECVD substrate, described electrode plate body 1 rear and front end is provided with edge end cap 8 respectively by articulating device, when edge end cap 8 is fixed on electrode plate body about 1 two ends, end cap side surface 10 surface, edge is mutually concordant with the both side surface of electrode plate body 1 respectively, and the side surface appearance profile after two edge end caps 8 and electrode plate body 1 combine is greater than the appearance profile of PECVD substrate.PECVD substrate is placed into when electrode plate body 1 performs coating process, because electrode plate body 1 side surface covers by PECVD substrate, therefore rete can be plated on two edge end caps 8 of both sides in coating process, and electrode plate body 1 can not adheres to coatings.After coating process completes, edge end cap 8 is dismantled from electrode plate body 1, then the rete on edge end cap 8 is cleaned, be installed to again on primary electrode plate body 1 after cleaning.Therefore can reduce the attachment of silica flour at reaction box battery lead plate and coating chip, effectively increase the access times of reaction box, reduce the labour intensity that cleaning is clean, improve the utilization ratio of reaction box, and improve coating quality.
Articulating device can be following structure, it comprise be arranged at electrode plate body 1 rear and front end respectively intercalation part 6, be arranged in edge end cap 8 and the draw-in groove 9 matched with intercalation part 6, edge end cap 8 is plugged in after in the intercalation part 6 of electrode plate body 1 front end or rear end by draw-in groove 9 and is fixed by escapement, and edge end cap side surface 10 fits with battery lead plate front surface 4 or battery lead plate rear surface 5.Being inserted on the intercalation part 6 at electrode plate body 1 two ends by being convenient to end cap 8 during use, using simple and fast.
Further, edge end cap 8 is contour with electrode plate body 1, when edge end cap 8 is fixed on electrode plate body 1 left end or right-hand member, marginal end cover surface 11 and acies lid lower surface 12 mutually concordant with battery lead plate lower surface 3 with battery lead plate upper surface 2 respectively.Edge end cap 8 is contour and installs consistency from top to bottom afterwards and can guarantee to be installed to smoothly in reaction box with electrode plate body 1, improves working efficiency.
Escapement comprises the chute 7 that the number be arranged on intercalation part 6 is more than or equal to 2 from top to bottom, described chute 7 outboard end opening, it is from top to bottom obliquely installed from the inside side of outboard end, is horizontally arranged with the bearing pin 13 corresponding with chute 7 in the draw-in groove 9 of described edge end cap 8.Edge end cap 8 is slided by bearing pin 13 and inserts in chute 7, edge end cap 8 is along the chute 7 tilted oliquely downward to slip under gravity, and final and electrode plate body 1 locking, prevents edge end cap 8 from departing from from electrode plate body 1, structure is simple, and assembling and disassembling is convenient.
Claims (4)
1. the battery lead plate of a multi-disc deposition PECVD amorphous silicon membrane reaction box, it is characterized in that: electrode plate body (1) is not more than the appearance profile of PECVD substrate for the side surface appearance profile carrying PECVD substrate, described electrode plate body (1) rear and front end is provided with edge end cap (8) respectively by articulating device, when edge end cap (8) is fixed on electrode plate body (1) two ends, left and right, end cap side surface (10) surface, edge is mutually concordant with the both side surface of electrode plate body (1) respectively, side surface appearance profile after two edge end caps (8) and electrode plate body (1) combine is greater than the appearance profile of PECVD substrate.
2. the battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box according to claim 1, it is characterized in that: described articulating device comprises the intercalation part (6) being arranged at electrode plate body (1) rear and front end respectively, to be arranged in edge end cap (8) and the draw-in groove (9) matched with intercalation part (6), edge end cap (8) is plugged in after in the intercalation part (6) of electrode plate body (1) front end or rear end by draw-in groove (9) and is fixed by escapement, and edge end cap side surface (10) fits with battery lead plate front surface (4) or battery lead plate rear surface (5).
3. the battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box according to claim 1 and 2, it is characterized in that: described edge end cap (8) is contour with electrode plate body (1), when edge end cap (8) is fixed on electrode plate body (1) left end or right-hand member, marginal end covers surface (11) and acies lid lower surface (12) is mutually concordant with battery lead plate lower surface (3) with battery lead plate upper surface (2) respectively.
4. the battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box according to claim 2, it is characterized in that: upper described escapement comprises the chute (7) that the number be arranged on intercalation part (6) is more than or equal to 2 from top to bottom, described chute (7) outboard end opening, it is from top to bottom obliquely installed from the inside side of outboard end, is horizontally arranged with the bearing pin (13) corresponding with chute (7) in the draw-in groove (9) at described edge end cap (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520209504.4U CN204550712U (en) | 2015-04-09 | 2015-04-09 | The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520209504.4U CN204550712U (en) | 2015-04-09 | 2015-04-09 | The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204550712U true CN204550712U (en) | 2015-08-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520209504.4U Withdrawn - After Issue CN204550712U (en) | 2015-04-09 | 2015-04-09 | The battery lead plate of multi-disc deposition PECVD amorphous silicon membrane reaction box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204550712U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104775106A (en) * | 2015-04-09 | 2015-07-15 | 山东禹城汉能薄膜太阳能有限公司 | Electrode plate of reaction box deposited with multiple PECVD (Plasma Enhanced Chemical Vapour Deposition) amorphous silicon membranes and amorphous silicon membrane deposition method |
-
2015
- 2015-04-09 CN CN201520209504.4U patent/CN204550712U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104775106A (en) * | 2015-04-09 | 2015-07-15 | 山东禹城汉能薄膜太阳能有限公司 | Electrode plate of reaction box deposited with multiple PECVD (Plasma Enhanced Chemical Vapour Deposition) amorphous silicon membranes and amorphous silicon membrane deposition method |
| CN104775106B (en) * | 2015-04-09 | 2017-08-08 | 山东禹城汉能薄膜太阳能有限公司 | Multi-disc deposits the battery lead plate and amorphous silicon membrane deposition process of PECVD amorphous silicon membrane reaction boxes |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150812 Effective date of abandoning: 20170808 |
|
| AV01 | Patent right actively abandoned |