CN207727145U - A kind of flat-plate type PECVD board of solar battery sheet double-sided coating - Google Patents
A kind of flat-plate type PECVD board of solar battery sheet double-sided coating Download PDFInfo
- Publication number
- CN207727145U CN207727145U CN201820025972.XU CN201820025972U CN207727145U CN 207727145 U CN207727145 U CN 207727145U CN 201820025972 U CN201820025972 U CN 201820025972U CN 207727145 U CN207727145 U CN 207727145U
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- Prior art keywords
- ladder
- microwave
- type trough
- plasma apparatus
- graphite
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of flat-plate type PECVD boards of solar battery sheet double-sided coating, including graphite frame and microwave-excitation plasma apparatus, the utility model is used is equipped with microwave-excitation plasma apparatus in replacing over and under with graphite carrying plate equidistant position for graphite frame, its microwave-excitation plasma apparatus by ladder-type trough and set of permanent magnets at, permanent magnet setting is in two outside of ladder-type trough, uniform magnetic field is formed on ladder-type trough periphery, in the silane that magnetic field and ammonia nozzle and silane gas jets spray, the plasma of microwave-excitation is formed under the collective effect of ammonia, complete the deposition process of ammonia and silane and silicon chip, realize disposable double-sided coating, filming process is simplified, reduce handling process, reduce the risk that back side film layer is damaged, have the advantages that battery is at low cost and battery passivation effect is good.
Description
Technical field
The utility model is related to solar battery sheet manufacturing technology field, especially a kind of solar battery sheet double-sided coating
Flat-plate type PECVD board.
Background technology
In existing sustainable energy, solar energy is undoubtedly a kind of most cleaning, most universal and most potential replacement energy
Source.Device of solar generating is also known as solar cell or photovoltaic cell, and solar energy can be directly changed into electric energy, power generation
Principle is the photovoltaic effect based on semiconductor PN.The core of device of solar generating is cell piece, most at present
All it is made of silicon chip.In photovoltaic cell production process, PERC techniques have obtained extensively in the technology of high-efficiency battery piece at present
It promotes, PERC technologies need to deposit film layers different three times to complete the passivation of front and back, i.e. back side AL2O3, the back of the body
Face Si3N4, front Si3N4.PERC techniques are in volume production technology, and using microwave excited plasma and ALD as the two big of mainstream
Technology, wherein in microwave plasma body technique, back side AL2O3 and back side Si3N4 are completed in same equipment board, front
Si3N4 is completed in individual PECVD filming equipments board；And in ALD technique, back side AL2O3 is first deposited on ALD boards,
Then back side Si3N4 is deposited on PECVD boards, finally need to also deposit front Si3N4, such method again in PECVD boards
Point three steps are needed, the plated film of front and back is respectively completed, cause the PERC battery high expensives of ALD technique, and multiple
During carrying, easily causes AL2O3 film layers to be damaged, influence passivation effect.
Utility model content
The purpose of this utility model be in view of the deficiencies of the prior art and provide a kind of solar battery sheet double-sided coating
Flat-plate type PECVD board, the utility model use replacing with graphite carrying plate equidistant position over and under in graphite frame
Equipped with microwave-excitation plasma apparatus, microwave-excitation plasma apparatus is by ladder-type trough and set of permanent magnets at permanent magnet setting exists
The outside of ladder-type trough two forms uniform magnetic field on ladder-type trough periphery, the silane that sprays in magnetic field and ammonia nozzle and silane gas jets,
The plasma that microwave-excitation is formed under the collective effect of ammonia, completes the deposition process of ammonia and silane and silicon chip, realizes one
Secondary property double-sided coating, has simplified filming process, has reduced handling process, reduces the risk that back side film layer is damaged, and has electricity
The advantage that pond is at low cost and battery passivation effect is good.
Realizing the specific technical solution of the utility model aim is：
A kind of flat-plate type PECVD board of solar battery sheet double-sided coating, feature include graphite frame and microwave-excitation
Plasma apparatus, is provided with the graphite carrying plate moved horizontally in the middle part of the graphite frame, graphite frame over and under with graphite
Support plate equidistant position is equipped with microwave-excitation plasma apparatus；
The microwave-excitation plasma apparatus is by ladder-type trough and set of permanent magnets at the cross section of ladder-type trough is by a bottom edge and two
Waist constitutes open isosceles trapezoid, and the open position of two waist of ladder-type trough is equipped with the flank to turn up, and bottom edge is equipped with several ammonias
Nozzle, two flanks are equipped with several silane gas jets；Several ammonia nozzles are along the axially spaced-apart distribution on ladder-type trough bottom edge, several silicon
Alkane gas jets are distributed along the axially spaced-apart of ladder-type trough flank；Permanent magnet is set to the outside of two waist of ladder-type trough.
The utility model, which is used, to swash in replacing over and under with graphite carrying plate equidistant position for graphite frame equipped with microwave
Plasma apparatus is sent out, microwave-excitation plasma apparatus is by ladder-type trough and set of permanent magnets at permanent magnet is arranged outside ladder-type trough two
Side forms uniform magnetic field on ladder-type trough periphery, the silane that sprays in magnetic field and ammonia nozzle and silane gas jets, ammonia it is common
The plasma of microwave-excitation is formed under effect, completes the deposition process of ammonia and silane and silicon chip, realizes disposable two-sided plating
Film has simplified filming process, reduces handling process, reduces the risk that back side film layer is damaged, have battery it is at low cost and
The good advantage of battery passivation effect.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of microwave-excitation plasma apparatus.
Specific implementation mode
Refering to fig. 1, Fig. 2, the utility model include graphite frame 1 and microwave-excitation plasma apparatus 2, the graphite frame 1
Middle part is provided with the graphite carrying plate 11 moved horizontally, and graphite frame 1 is equipped with 11 equidistant position of graphite carrying plate over and under
Microwave-excitation plasma apparatus 2；
The microwave-excitation plasma apparatus 2 is made of ladder-type trough 23 and permanent magnet 25, and the cross section of ladder-type trough 23 is by one
Bottom edge and two waists constitute open isosceles trapezoid, and the open position of 23 liang of waists of ladder-type trough is equipped with the flank to turn up, is set on bottom edge
There are several ammonia nozzles 231, two flanks to be equipped with several silane gas jets 232；Several ammonia nozzles 231 are along 23 bottom edge of ladder-type trough
Axially spaced-apart distribution, several silane gas jets 232 along 23 flank of ladder-type trough axially spaced-apart be distributed；Permanent magnet 25 is set to ladder type
The outside of 23 liang of waists of slot.
The utility model uses in this way：
Refering to fig. 1, Fig. 2 is provided with the graphite carrying plate 11 moved horizontally at the middle part of PECVD boards graphite frame 1, by microwave
Excite plasma apparatus 2 to be alternately packed into PECVD boards graphite frame 1 over and under, and make to be mounted above and lower section it is micro-
Wave excites plasma apparatus 2 equidistant with graphite carrying plate 11, and ladder-type trough 23 is open towards stone on microwave-excitation plasma apparatus 2
Black support plate 11；The appendix of ammonia nozzle 231 is connect with ammonia air source, by silane gas jets 232 appendix and silane gas
Source connects；
When work, the silicon chip for being intended to plated film is placed in graphite carrying plate 11, and driving graphite carrying plate 11 makes its water in graphite frame 1
Translation is dynamic, at this point, open ammonia air source and silane air source, by ammonia nozzle 231 and silane gas jets 232 from the upper surface of silicon chip
And be below uniformly deposited on ammonia and silane in the upper and lower surface of silicon chip, realize the double-sided coating to solar battery sheet.
The utility model is provided with permanent magnet 25 in the outside of 23 liang of waists of ladder-type trough, and permanent magnet 25 is in 23 periphery shape of ladder-type trough
At uniform magnetic field, ammonia and the deposition process of silane and silicon chip are completed in uniform magnetic field；Due to the setting of permanent magnet 25,
So that formed under the collective effect of the silane sprayed by ammonia nozzle 231 and silane gas jets 232, ammonia microwave-excitation etc. from
Daughter；
The chemical equation of its course of work is：
Complete the two-sided Si of silicon chip3N4Deposition.
Claims (1)
1. a kind of flat-plate type PECVD board of solar battery sheet double-sided coating, it is characterised in that it includes graphite frame（1）And it is micro-
Wave excites plasma apparatus（2）, the graphite frame（1）Middle part be provided with the graphite carrying plate moved horizontally（11）, graphite frame（1）
Over and under with graphite carrying plate（11）Equidistant position is equipped with microwave-excitation plasma apparatus（2）；
The microwave-excitation plasma apparatus（2）By ladder-type trough（23）And permanent magnet（25）Composition, ladder-type trough（23）Cross section
Open isosceles trapezoid, and ladder-type trough are made of a bottom edge and two waists（23）The open position of two waists is equipped with the flank to turn up, bottom
Side is equipped with several ammonia nozzles（231）, two flanks are equipped with several silane gas jets（232）；Several ammonia nozzles（231）Edge
Ladder-type trough（23）The axially spaced-apart distribution on bottom edge, several silane gas jets（232）Along ladder-type trough（23）The axially spaced-apart of flank point
Cloth；Permanent magnet（25）Set on ladder-type trough（23）The outside of two waists.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820025972.XU CN207727145U (en) | 2018-01-08 | 2018-01-08 | A kind of flat-plate type PECVD board of solar battery sheet double-sided coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820025972.XU CN207727145U (en) | 2018-01-08 | 2018-01-08 | A kind of flat-plate type PECVD board of solar battery sheet double-sided coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207727145U true CN207727145U (en) | 2018-08-14 |
Family
ID=63084920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820025972.XU Expired - Fee Related CN207727145U (en) | 2018-01-08 | 2018-01-08 | A kind of flat-plate type PECVD board of solar battery sheet double-sided coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207727145U (en) |
-
2018
- 2018-01-08 CN CN201820025972.XU patent/CN207727145U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180814 Termination date: 20210108 |