CN203542884U - Clamp used for orientation of carbonization silicon single crystal positioning edge - Google Patents
Clamp used for orientation of carbonization silicon single crystal positioning edge Download PDFInfo
- Publication number
- CN203542884U CN203542884U CN201320773012.9U CN201320773012U CN203542884U CN 203542884 U CN203542884 U CN 203542884U CN 201320773012 U CN201320773012 U CN 201320773012U CN 203542884 U CN203542884 U CN 203542884U
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- crystal
- parallel
- main body
- jig main
- precision
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- 239000013078 crystal Substances 0.000 title claims abstract description 52
- 229910052710 silicon Inorganic materials 0.000 title abstract description 5
- 239000010703 silicon Substances 0.000 title abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 3
- 238000003763 carbonization Methods 0.000 title abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052742 iron Inorganic materials 0.000 claims abstract description 12
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 20
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 17
- 238000000034 method Methods 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 12
- 230000003139 buffering effect Effects 0.000 abstract 3
- 238000005516 engineering process Methods 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- -1 cushion Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a clamp used for orientation of a carbonization silicon single crystal positioning edge. A clamp body is placed on a precision sample table of an orientation device and is almost cuboid, one top angle of the clamp body is a concave cube, a crystal is placed in the concave cube, the top of the crystal is provided with parallel precision iron, the parallel precision iron is covered with a buffering layer, the clamp body and the buffering layer are covered with a whole cover plate, a fastening screw penetrates through the cover plate and can extend to the buffering layer, the side, close to the concave cube, of the clamp body is provided with a parallel block tightly attached to the clamp body, and an orientation device precision vertical plate is tightly attached to the outer side of a parallel plate. The clamp is suitable for being used as an auxiliary accessory of a split type carbonization silicon single crystal processing process, can effectively improve the input-output ratio of the whole process equipment, improves the effective occupied time ratio, obviously reduces equipment input and reduces cost.
Description
Technical field
The utility model relates to a kind of fixture, relates in particular to a kind of fixture for single-crystal silicon carbide gulde edge orientation, belongs to carborundum crystals manufacture field.
Background technology
The application prerequisite of silicon carbide-based device is in the certain thickness functional layer of silicon carbide substrates surface extension (Epitaxy).Meanwhile, for the substrate of different surfaces drift angle degree, can there is marked change in its epitaxy technique condition.Based on this, wafer surface drift angle, drift angle precision must strictly be controlled.
At present, be commonly the feature of physical vapor transport deposition technique (PVT) based on silicon carbide monocrystal growth technique, the monocrystalline length after growth is shorter (<50mm) generally.Consider this point, the equipment that single-crystal silicon carbide machining adopts, can not apply mechanically silicon, sapphire process equipment that monocrystalline length is grown.
For monocrystalline such as silicon, sapphires, the higher process equipment of automaticity such as crystal orientation, the processing of original position crystal for multiselect.But, for the shorter single-crystal silicon carbide of monocrystalline length, adopt identical process equipment, there are the following problems:
1) the compare hardware of expensive automation equipment (directed, original position processing) drops into, and output is on the low side, is unfavorable for mass production operation;
2) consider that crystal is short, more highlight and take too much shortcoming ineffective time; Wherein this place's definition: effective time---the time that worked crystal process consumes; When ineffective time---assembling crystal, replacing crystallization process, make the time of equipment in wait state.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of fixture for single-crystal silicon carbide gulde edge orientation, belong to the auxiliary accessories that is applicable to split type single-crystal silicon carbide crystal processing technology (direction finder separates with grinding machine), can effectively improve input, the output ratio of whole piece process equipment, improve equipment accounting effective time.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: a kind of fixture for single-crystal silicon carbide gulde edge orientation, comprise direction finder precision sample stage, jig main body, cover plate, holding screw, parallel accuracy iron, cushion, crystal, parallel fast, direction finder precision riser, described jig main body is placed on direction finder precision sample stage, described jig main body is roughly cuboid, one jiao of its top is the depression of a square bodily form, in the depression of the described square bodily form, be placed with crystal, the top of described crystal is provided with parallel accuracy iron, described cushion covers on parallel accuracy iron, what described cover plate was complete covers on jig main body and cushion, described holding screw runs through cover plate and can extend to cushion, described jig main body is provided with near a side of the square bodily form depression parallel block of being close on it, described direction finder precision riser is close to the outside of parallel-plate.
On the basis of technique scheme, the utility model can also do following improvement.
Further, described crystal is cylindrical, and its diameter is greater than the length of side of the depression of the square bodily form.
Further, the level height at described parallel fast top is lower than the level height of crystal bottom, and the level height at described direction finder precision riser top is higher than the level height of crystal bottom.
Further, the outside of the inner side at described direction finder precision riser top and crystal bottom is tangent.
Further, described jig main body bottom is provided with lifting rotation stepper motor, and described lifting rotation stepper motor runs through jig main body bottom and extends to the bottom of crystal, and can make crystal axial-rotation.
Because the diameter of crystal is greater than the length of side of the depression of the square bodily form, so crystal is placed in the depression of the square bodily form, a part of circular arc can be given prominence to out in edge, outstanding circular arc portion is just in time tangent with the extended part in direction finder precision riser top, by lifting rotation stepper motor, drive crystal axial-rotation, process.
Conventional machining equipment is often realized gulde edge orientation, original position processing together on cylindrical grinder, and automaticity no doubt improves a lot, but equipment investment increases significantly.Use after fixture fittings of the present utility model, only need to be equipped with a split type X-ray orientation device, can realize the directed task of single-crystal silicon carbide gulde edge; The processing tasks of gulde edge only need to utilize in crystal machining process, and the surface grinding machine that must be equipped with completes.
The beneficial effects of the utility model are: the utility model belongs to the auxiliary accessories that is applicable to split type single-crystal silicon carbide crystal processing technology (direction finder separates with grinding machine), can effectively improve input, the output ratio of whole piece process equipment, raising equipment accounting effective time, significantly the input of reduction equipment, reduces costs.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation figure.
In accompanying drawing, the list of parts of each label representative is as follows:
1, direction finder precision sample stage, 2, jig main body, 3, cover plate, 4, holding screw, 5, parallel accuracy iron, 6, cushion, 7, crystal, 8, parallel fast, 9, direction finder precision riser.
The specific embodiment
Below in conjunction with accompanying drawing, principle of the present utility model and feature are described, example, only for explaining the utility model, is not intended to limit scope of the present utility model.
As shown in Figure 1, a kind of fixture for single-crystal silicon carbide gulde edge orientation, comprise direction finder precision sample stage 1, jig main body 2, cover plate 3, holding screw 4, parallel accuracy iron 5, cushion 6, crystal 7, parallel fast 8, direction finder precision riser 9, described jig main body 2 is placed on direction finder precision sample stage 1, described jig main body 2 is roughly cuboid, one jiao of its top is the depression of a square bodily form, in the depression of the described square bodily form, be placed with crystal 7, the top of described crystal 7 is provided with parallel accuracy iron 5, described cushion 6 covers on parallel accuracy iron 5, what described cover plate 3 was complete covers on jig main body 2 and cushion 6, described holding screw 4 runs through cover plate 3 and can extend to cushion 6, described jig main body 2 is provided with near a side of the square bodily form depression parallel block 8 of being close on it, described direction finder precision riser 9 is close to the outside of parallel-plate 8.
Described crystal 7 is cylindrical, and its diameter is greater than the length of side of the depression of the square bodily form.
The level height at described parallel fast 8 tops is lower than the level height of crystal 7 bottoms, and the level height at described direction finder precision riser 9 tops is higher than the level height of crystal 7 bottoms.
The inner side at described direction finder precision riser 9 tops and the outside of crystal 7 bottoms are tangent.
Described jig main body 2 bottoms are provided with lifting rotation stepper motor, and described lifting rotation stepper motor runs through jig main body 2 bottoms and extends to the bottom of crystal 7, and can make crystal 7 axial-rotations.
Because the diameter of crystal 7 is greater than the length of side of the depression of the square bodily form, so crystal 7 is placed in the depression of the square bodily form, a part of circular arc can be given prominence to out in edge, outstanding circular arc portion is just in time tangent with the direction finder precision riser 9 extended parts in top, by lifting rotation stepper motor, drive crystal 7 axial-rotations, process.
The jig main body 2 of the single-crystal silicon carbide gulde edge orientation that has precision is positioned on X-ray orientation device precision sample stage 1; Precision face and the X-ray orientation device precision face of jig main body 2 are adjacent to, guarantee on the focal position of crystal 7 edges in X ray; By lifting rotation stepper motor rotating crystal 7, find the appointment diffraction surfaces of single-crystal silicon carbide; Determine after diffraction surfaces, fall lifting rotation stepper motor, utilize holding screw 4 fixed crystals such as grade, by surely complete to crystal 7 be transferred on surface grinding machine and process.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (5)
1. the fixture for single-crystal silicon carbide gulde edge orientation, it is characterized in that, comprise direction finder precision sample stage (1), jig main body (2), cover plate (3), holding screw (4), parallel accuracy iron (5), cushion (6), crystal (7), parallel fast (8), direction finder precision riser (9), described jig main body (2) is placed on direction finder precision sample stage (1), described jig main body (2) is roughly cuboid, one jiao of its top is the depression of a square bodily form, in the depression of the described square bodily form, be placed with crystal (7), the top of described crystal (7) is provided with parallel accuracy iron (5), described cushion (6) covers on parallel accuracy iron (5), what described cover plate (3) was complete covers on jig main body (2) and cushion (6), described holding screw (4) runs through cover plate (3) and can extend to cushion (6), described jig main body (2) is provided with near a side of the square bodily form depression parallel block (8) of being close on it, described direction finder precision riser (9) is close to the outside of parallel-plate (8).
2. according to claim 1 for the fixture of single-crystal silicon carbide gulde edge orientation, it is characterized in that, described crystal (7) is cylindrical, and its diameter is greater than the length of side of the depression of the square bodily form.
3. according to claim 1 for the fixture of single-crystal silicon carbide gulde edge orientation, it is characterized in that, the level height at described parallel fast (8) top is lower than the level height of crystal (7) bottom, and the level height at described direction finder precision riser (9) top is higher than the level height of crystal (7) bottom.
4. according to claim 1 for the fixture of single-crystal silicon carbide gulde edge orientation, it is characterized in that, the outside of the inner side at described direction finder precision riser (9) top and crystal (7) bottom is tangent.
5. according to the fixture for single-crystal silicon carbide gulde edge orientation described in claim 1 to 4 any one, it is characterized in that, described jig main body (2) bottom is provided with lifting rotation stepper motor, described lifting rotation stepper motor runs through jig main body (2) bottom and extends to the bottom of crystal (7), and can make crystal (7) axial-rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320773012.9U CN203542884U (en) | 2013-11-29 | 2013-11-29 | Clamp used for orientation of carbonization silicon single crystal positioning edge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320773012.9U CN203542884U (en) | 2013-11-29 | 2013-11-29 | Clamp used for orientation of carbonization silicon single crystal positioning edge |
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| Publication Number | Publication Date |
|---|---|
| CN203542884U true CN203542884U (en) | 2014-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320773012.9U Expired - Lifetime CN203542884U (en) | 2013-11-29 | 2013-11-29 | Clamp used for orientation of carbonization silicon single crystal positioning edge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203542884U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104827397A (en) * | 2015-05-19 | 2015-08-12 | 山东大学 | Clamp for polishing positioning edges of SiC single crystals and application thereof |
| CN105479280A (en) * | 2015-12-30 | 2016-04-13 | 中国科学院上海硅酸盐研究所 | Device and method for silicon carbide crystal deflection shaping |
| CN105543981A (en) * | 2016-02-02 | 2016-05-04 | 北京华进创威电子有限公司 | Horizontal type cylindrical saw device used for fetching silicon carbide single crystal ingot |
-
2013
- 2013-11-29 CN CN201320773012.9U patent/CN203542884U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104827397A (en) * | 2015-05-19 | 2015-08-12 | 山东大学 | Clamp for polishing positioning edges of SiC single crystals and application thereof |
| CN105479280A (en) * | 2015-12-30 | 2016-04-13 | 中国科学院上海硅酸盐研究所 | Device and method for silicon carbide crystal deflection shaping |
| CN105543981A (en) * | 2016-02-02 | 2016-05-04 | 北京华进创威电子有限公司 | Horizontal type cylindrical saw device used for fetching silicon carbide single crystal ingot |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 071066 No. 6001, North Third Ring Road, Baoding City, Hebei Province Patentee after: Hebei Tongguang Semiconductor Co.,Ltd. Address before: 071000 A007, 4th floor, block B, building 6, University Science Park, No. 5699, North 2nd Ring Road, Baoding City, Hebei Province Patentee before: HEBEI TONGGUANG CRYSTAL Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140416 |