CN203519541U - Recoverable repeatedly prepared gas micro-sensor - Google Patents
Recoverable repeatedly prepared gas micro-sensor Download PDFInfo
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- CN203519541U CN203519541U CN201320600029.4U CN201320600029U CN203519541U CN 203519541 U CN203519541 U CN 203519541U CN 201320600029 U CN201320600029 U CN 201320600029U CN 203519541 U CN203519541 U CN 203519541U
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- Prior art keywords
- silicon
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 92
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 92
- 239000010703 silicon Substances 0.000 claims abstract description 92
- 239000003054 catalyst Substances 0.000 claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 238000002360 preparation method Methods 0.000 claims abstract description 10
- 230000005611 electricity Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004484 Briquette Substances 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 239000003245 coal Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000725 suspension Substances 0.000 abstract 2
- 230000000295 complement effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 18
- 229910052697 platinum Inorganic materials 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- 239000007789 gas Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 4
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 4
- 229910052622 kaolinite Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000007084 catalytic combustion reaction Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The utility model provides a recoverable repeatedly prepared gas micro-sensor. The recoverable repeatedly prepared gas micro-sensor is characterized in that a heat dissipation-supporting silicon block is arranged in the middle of a silicon heater of the gas micro-sensor, one end of a silicon suspension arm is connected to one side of the silicon micro-heater, and the other end of the silicon suspension arm is fixedly connected to the fixing end of a silicon support; the fixing end of the silicon support is arranged on buried layer silicon oxide of the silicon support, a doped silicon layer is arranged in a silicon layer of the fixing end, and a metal layer is in contact with the doped silicon layer of the fixing end through a window of a silicon dioxide layer so as to form ohmic contact; the silicon heater is completely embedded in a catalyst carrier which penetrates through the middle of the silicon heater, and the catalyst carrier self forms an integral structure; a low-power dissipation gas sensor used for detecting the concentration of gas underground a coal mine, which is machined by using a MEMS (micro-electromechanical system), is adopted, and a preparation technology is compatible with a CMOS (complementary metal-oxide-semiconductor transistor) technology, so that the volume production can be realized; after the gas micro-sensor is recycled, the catalyst carrier and a catalyst can be repeatedly prepared. The gas micro-sensor has the advantages of long service life, stable performances, small size and low cost.
Description
Technical field
The utility model relates to a kind of micro-firedamp sensor, particularly a kind of recyclable micro-firedamp sensor that repeats preparation.
Background technology
Still widespread use under coal mine of catalytic combustion type gas sensor based on traditional platinum filament heating at present, but its power consumption is larger, is not well positioned to meet the application demand of Internet of Things to low-power consumption firedamp sensor.Other firedamp sensor cannot adapt to the environment of high humility under coal mine, especially the application demand of the portable equipment in down-hole.
Micro-firedamp sensor of existing report, mostly be still and adopt metal platinum as heating material, the metal platinum of heating use is produced on silicon propping material, the heating resistor that metal platinum is made is also temperature detecting resistance simultaneously, catalyst support loads on supporting surface, because the platinum resistance of making is that sheet resistance, deposit platinum need adhering material before, these have caused the life-span of platinum resistance shorter, thereby have directly had influence on the life-span of sensor.Traditional catalytic combustion type gas sensor, the platinum filament diameter that uses due to coiling is little, the platinum filament limited length after coiling, even if also coiling again after dissolving catalyst support, therefore cannot prepare again, therefore use sensor later to only have abandoned to fall.
Utility model content
Technical matters: the purpose of this utility model is to provide a kind of recyclable micro-firedamp sensor that repeats preparation, the gas sensors such as thermocatalysis combustion-type firedamp sensor that solve prior art cannot extend sensor heating element service time by Kaolinite Preparation of Catalyst carrier and catalyzer again, reduce and produce and the problem of use cost.
Technical scheme: the purpose of this utility model is achieved in that this micro-firedamp sensor comprises silicon bearing, stiff end, symmetrically arranged silicon cantilever, silicon well heater and catalyst support; Described silicon well heater is preferably annular, the better heat radiation-support silico briquette stretched in two symmetries that is provided with in centre of annular silicon well heater; Described silicon bearing comprises silicon substrate and is located at the buried regions monox on silicon substrate; Described silicon cantilever, silicon well heater include and support silicon layer, are located at the silicon oxide layer supporting outside silicon layer; One end of described silicon cantilever is connected with silicon well heater one side, and the other end is connected with the stiff end on silicon bearing; Described stiff end is located on the buried regions monox of silicon bearing, stiff end comprises and supports silicon layer, is located at the silicon oxide layer that supports outside silicon layer, is located at the metal level that the conduct electricity on silicon oxide layer is drawn pad Pad, in the support silicon layer of stiff end, be provided with doped silicon layer, the metal level that described electricity is drawn pad Pad contacts to form Ohmic contact by the window of silicon oxide layer and the doped silicon layer of stiff end; Described silicon well heater is embedded in catalyst support completely, and especially catalyst support is through the centre of silicon well heater, and catalyst support is a complete one-piece construction.
Beneficial effect, the utility model adopts silicon well heater heatable catalytic agent carrier, described silicon well heater is also the element of detected temperatures simultaneously, apply certain curtage and make catalyzer reach required hot operation state to silicon well heater, when having methane gas to contact with the sensor of duty with oxygen, themopositive reaction occurs, sensor temperature raises, cause its voltage or electric current to change, detect the variation of this voltage or electric current, can know the concentration of gas.Firedamp sensor of the present utility model can form Wheatstone bridge and detect gas density, after the catalyst performance of micro-firedamp sensor reduces or is deteriorated, utilize micro-heater structure and in the lead-in wire location of back up pad, Kaolinite Preparation of Catalyst carrier and catalyzer, regain the firedamp sensor that performance is intact again.Be conducive to improve the electricity-heating efficiency of well heater, its long service life, this well heater is reusable; The all-in-one-piece catalyzer of silicon heater load, all-in-one-piece catalyzer wraps up well heater comprehensively, has reduced a heat dissipation path of well heater, thereby has utilized efficiently the heat of well heater, has guaranteed the performance of low-power consumption.The micro-firedamp sensor providing, its preparation method can with CMOS process compatible, batch making can reduce costs and improve consistance; Sensor low in energy consumption and highly sensitive, can meet the demand of colliery subsurface environment Internet of Things to firedamp sensor; Particularly outstanding is after reclaiming Kaolinite Preparation of Catalyst carrier and catalyzer again.
Advantage: this micro-firedamp sensor has reduced power consumption and had higher sensitivity, can reclaim rear repetition Kaolinite Preparation of Catalyst carrier and catalyzer, be equivalent to extend the serviceable life of sensor, reduced production and use cost, minimizing electron device and abandoned the pollution causing.Also there is low-power consumption, microminiaturization simultaneously.
Accompanying drawing explanation
Fig. 1 is the schematic top plan view of discrete silicon device of the present utility model.
Fig. 2 is the schematic top plan view after discrete silicon device supported catalyst agent carrier of the present utility model.
Fig. 3 is that the master after discrete silicon device supported catalyst agent carrier of the present utility model looks schematic diagram.
Fig. 4 is the cut-open view of the stiff end of micro-firedamp sensor of the present utility model or discrete silicon device, i.e. A-A cross-sectional view in Fig. 2.
Fig. 5 is the cut-open view after discrete silicon device supported catalyst agent carrier of the present utility model, i.e. B-B cross-sectional view in Fig. 2.
Embodiment
Below in conjunction with accompanying drawing, an embodiment of the present utility model is further described:
In Fig. 1, Fig. 2 and Fig. 3, this micro-firedamp sensor comprises: silicon bearing 101, stiff end 102, symmetrically arranged silicon cantilever 103, silicon well heater 104 and catalyst support 106; Described silicon well heater 104 is preferably annular, the better heat radiation-support silico briquette 105 stretched in two symmetries of establishing in centre of annular silicon well heater 104; Described silicon bearing 101 comprises silicon substrate 11 and is located at the buried regions monox 12 on silicon substrate 11; Described silicon cantilever 103, silicon well heater 104 include and support silicon layer 21, are located at the silicon oxide layer 23 supporting outside silicon layer 21; One end of described silicon cantilever 103 is connected with silicon well heater 104 1 sides, and the other end is connected with the stiff end 102 on silicon bearing 101; Described stiff end 102 is located on the buried regions monox 12 of silicon bearing 101, stiff end 102 comprises and supports silicon layer 21, is located at the silicon oxide layer 23 that supports outside silicon layer 21, is located at the metal level 22 that the conduct electricity on silicon oxide layer 23 is drawn pad Pad, in the support silicon layer 21 of stiff end 102, be provided with doped silicon layer 24, the metal level 22 that described electricity is drawn pad Pad contacts to form Ohmic contact by the window of silicon oxide layer 23 and the doped silicon layer of stiff end 24, as shown in Figure 4; Described silicon well heater 104 is embedded in catalyst support 106 completely, and especially catalyst support 106 is through the centre of silicon well heater 104, and catalyst support 106 is complete one-piece constructions, as shown in Figure 5.
Claims (1)
1. a recyclable micro-firedamp sensor that repeats preparation, is characterized in that: this micro-firedamp sensor comprises silicon bearing (101), stiff end (102), symmetrically arranged silicon cantilever (103), silicon well heater (104) and catalyst support (106); Described silicon well heater (104) is preferably annular, the better heat radiation-support silico briquette (105) stretched in two symmetries that is provided with in centre of annular silicon well heater (104); Described silicon bearing (101) comprises silicon substrate (11) and is located at the buried regions monox (12) on silicon substrate (11); Described silicon cantilever (103), silicon well heater (104) include and support silicon layer (21), are located at and support the outer silicon oxide layer (23) of silicon layer (21); One end of described silicon cantilever (103) is connected with silicon well heater (104) one sides, and the other end is connected with the stiff end (102) on silicon bearing (101); Described stiff end (102) is located on the buried regions monox (12) of silicon bearing (101), stiff end (102) comprises support silicon layer (21), is located at the outer silicon oxide layer (23) of support silicon layer (21), is located at the metal level (22) that the conduct electricity on silicon oxide layer (23) is drawn pad Pad, in the support silicon layer (21) of stiff end (102), be provided with doped silicon layer (24), the metal level (22) that described electricity is drawn pad Pad contacts to form Ohmic contact by the window of silicon oxide layer (23) and the doped silicon layer (24) of stiff end; Described silicon well heater (104) is embedded in catalyst support (106) completely, and catalyst support (106), through the centre of silicon well heater (104), is a complete one-piece construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320600029.4U CN203519541U (en) | 2013-09-26 | 2013-09-26 | Recoverable repeatedly prepared gas micro-sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320600029.4U CN203519541U (en) | 2013-09-26 | 2013-09-26 | Recoverable repeatedly prepared gas micro-sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203519541U true CN203519541U (en) | 2014-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320600029.4U Expired - Lifetime CN203519541U (en) | 2013-09-26 | 2013-09-26 | Recoverable repeatedly prepared gas micro-sensor |
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| CN (1) | CN203519541U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472097A (en) * | 2013-09-26 | 2013-12-25 | 中国矿业大学 | Micro gas sensor recoverable for repeated preparation and preparation method thereof |
| WO2016066089A1 (en) * | 2014-10-31 | 2016-05-06 | 中国矿业大学 | Methane sensor based on single heating component, manufacturing method, and applications |
| WO2016066106A1 (en) * | 2014-10-31 | 2016-05-06 | 中国矿业大学 | All-silicon mems methane sensor, fuel gas detection application, and manufacturing method |
-
2013
- 2013-09-26 CN CN201320600029.4U patent/CN203519541U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472097A (en) * | 2013-09-26 | 2013-12-25 | 中国矿业大学 | Micro gas sensor recoverable for repeated preparation and preparation method thereof |
| WO2016066089A1 (en) * | 2014-10-31 | 2016-05-06 | 中国矿业大学 | Methane sensor based on single heating component, manufacturing method, and applications |
| WO2016066106A1 (en) * | 2014-10-31 | 2016-05-06 | 中国矿业大学 | All-silicon mems methane sensor, fuel gas detection application, and manufacturing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140402 Effective date of abandoning: 20150513 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20140402 Effective date of abandoning: 20150513 |
|
| RGAV | Abandon patent right to avoid regrant |