CN204154679U - A kind of methane transducer based on single heating element - Google Patents
A kind of methane transducer based on single heating element Download PDFInfo
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- CN204154679U CN204154679U CN201420647114.0U CN201420647114U CN204154679U CN 204154679 U CN204154679 U CN 204154679U CN 201420647114 U CN201420647114 U CN 201420647114U CN 204154679 U CN204154679 U CN 204154679U
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- heating element
- measuring sensor
- ambient temperature
- sway brace
- temperature measurement
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 title claims abstract description 130
- 238000010438 heat treatment Methods 0.000 title claims abstract description 75
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 35
- 238000005259 measurement Methods 0.000 claims abstract description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 30
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000002131 composite material Substances 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- 241000588731 Hafnia Species 0.000 claims description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 15
- 238000002161 passivation Methods 0.000 claims description 14
- 238000002955 isolation Methods 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 229910003978 SiClx Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000005065 mining Methods 0.000 abstract 1
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000007084 catalytic combustion reaction Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 231100000572 poisoning Toxicity 0.000 description 3
- 230000000607 poisoning effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000003245 coal Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Based on a methane transducer for single heating element, be applicable to use in industrial and mining enterprises.This methane transducer comprises heating element, measuring sensor, ambient temperature measurement element.The well heater of the heating element of this methane transducer and the measurement component of measuring sensor are suspended in air by sway brace, heating element is heated to separately hot operation state, measuring sensor is separately for detecting methane gas concentration, and on ambient temperature measurement element testing sheet, temperature is used for temperature compensation.The advantage of this sensor is: structure is simple, low in energy consumption, highly sensitive, anti-interference is good, cost is low.
Description
Technical field
The utility model relates to a kind of methane transducer, the methane transducer based on single heating element particularly used in a kind of industrial and mineral Internet of Things.
Background technology
Along with the development of Internet of Things, current methane transducer cannot meet the demand to the methane transducer of the detection low-concentration methane of low-power consumption, long-life, low cost such as individual equipment.
Detecting the still mostly of low-concentration methane for underground coal mine is at present the catalytic combustion type methane transducers heated based on traditional platinum filament, and its principle is the catalyst combustion reaction heat release effect based on methane gas.Catalytic combustion type methane transducer power consumption is comparatively large, and due to the use of catalyzer, this kind of methane transducer has the shortcomings such as carbon distribution, poisoning, activation, and unstable properties, checking time are short.In addition, existing catalytic combustion type methane transducer adopts the coil of the noble metal craft such as platinum filament or mechanical coiling as heating element, be difficult to mass production and consistance and interchangeability poor, therefore, the application demand of Internet of Things to Low Power High Performance methane transducer is not well positioned to meet.And infrared methane sensor price is high, sensing element has a strong impact on by dust and steam; These two kinds of methane transducers are not well positioned to meet the application demand of Internet of Things to low-power consumption methane transducer.Other methane transducer is also difficult to adapt to the special environment for use of underground coal mine.
Summary of the invention
Technical matters: it is simple that the purpose of this utility model is to provide a kind of structure, do not rely on catalyzer, based on the methane transducer based on single heating element that can detect low-concentration methane of single heating element.
Technical scheme: for achieving the above object, the methane transducer based on single heating element of the present utility model comprises heating element, measuring sensor and ambient temperature measurement element; Described ambient temperature measurement element is located on bearing;
Described heating element is made up of two stiff ends, two sway brace A be arranged side by side and well heater, and the two ends of two sway brace A are connected with well heater with stiff end respectively, forms two-terminal device; The length at least 300um of described each sway brace A; Described measuring sensor is made up of two stiff ends, measurement component and two sway brace B, and two sway brace B are connected with the two ends measuring component respectively, and the other end of two sway brace B is connected with two stiff ends respectively, form two-terminal device; The length at least 100um of described each supporting cantilever B; The stiff end of described heating element and the stiff end of measuring sensor separate be located on bearing, remainder suspension in atmosphere; Heating element and measuring sensor are all structurally cantilever beam structure; The well heater of described heating element is loop configuration, and the measurement component of described measuring sensor is " one " word structure or convex structure, and do not contact between the well heater of described heating element and the measurement component of measuring sensor, described standoff distance is 2um to 200um.
Described bearing comprises substrate and the isolation oxidation silicon layer be located on substrate, and is located at the top monocrystalline silicon layer in isolation from oxygen SiClx; Heating element, measuring sensor and ambient temperature measurement element adopt the top monocrystalline silicon layer be located in isolation from oxygen SiClx to be processed to form, and heating element, measuring sensor are all isolated with other the top monocrystalline silicon layer in isolation from oxygen SiClx respectively with the silicon structure of ambient temperature measurement element and be not connected; Described substrate is silicon or other material that MEMS technology can be adopted to process; The described ambient temperature measurement element be located on bearing comprises two electrode leads to client and measuring resistance;
The stiff end of heating element and measuring sensor and the electrode leads to client of ambient temperature measurement element are processed into by top monocrystalline silicon layer shape, at the outer silica layer of top monocrystalline silicon layer, silicon oxide layer is provided with electricity and draws pad metal; Doped silicon layer is provided with in the top monocrystalline silicon layer of described stiff end and electrode leads to client; Described electricity is drawn pad metal and to be contacted with the doped silicon layer of stiff end formation Ohmic contact by the window of silicon oxide layer;
Described heating element stretch out aerial sway brace A and well heater and measuring sensor stretch out aerial measurement component, the outside surface of sway brace B is provided with passivation protection layer; The outside surface of the measurement sensistor of described ambient temperature measurement element is provided with passivation protection layer equally; Described passivation protection layer is monox, or hafnia, or silica/alumina composite bed, or hafnia/aluminum oxide composite layers, or hafnia/silicon nitride composite bed, or aluminium oxide/silicon nitride composite bed, or monox/silicon nitride composite bed, or the composite bed that monox, hafnia, aluminium oxide, silicon nitride different materials are combined to form; The wherein thickness of monox at least 10nm, the thickness of hafnia is at least 5um, aluminium oxide thickness at least 6nm, and silicon nitride thickness is 10nm at least, and the thickness of whole passivation protection layer is no more than 1um.
Beneficial effect: the utility model provides a kind of novel methane transducer, this methane transducer take silicon as rapidoprint, cmos compatible MEMS technology is adopted to process, this methane transducer is based on single heating element, independent measuring sensor and do not adopt catalyzer to realize detection to low-concentration methane, and temperature on the sheet being provided with independent environment temperature sensing element senses sensor.Owing to have employed such scheme, methane transducer of the present utility model has following effective effect:
1, methane transducer of the present utility model uses independently heating element and measuring sensor to detect low concentration (0 ~ 4%) methane gas, does not use catalyzer; Owing to not using catalyzer and catalytic carrier, therefore, by the impact of catalyzer, there is not catalyst activity and reduce the problems such as the sensitivity decrease caused, poisoning, activation in the performance of sensor; And instead can realize CH_4 detection without the need to carrying out catalysis combustion to methane, just not needing the participation of oxygen yet, therefore methane transducer of the present utility model is not subject to the impact of oxygen in air on the detection of methane;
2, the well heater of the heating element of methane transducer of the present utility model is outstanding in atmosphere and away from silicon substrate, distance is greater than more than 300um, and silicon well heater can be heated to the high temperature of more than 500 DEG C with lower power, corresponding power consumption is about 80 ~ 90mW; Heating element and measuring sensor separate, directly do not contact, namely do not exist solid state medium connect, therefore there is not the energy loss path of the heat transfer form from heating element to temperature element, therefore also effectively reduce heating element work time power consumption; Further, methane transducer of the present utility model only has heating element to need to be heated to high temperature; Measuring sensor and ambient temperature measurement element all only need extremely low electric current to get final product work, and without the need to being heated to high temperature, therefore the power consumption of measuring sensor and ambient temperature measurement element is all extremely low; Above-mentioned aggregate measures significantly reduce the overall power consumption of methane transducer of the present utility model, therefore have the advantage of low-power consumption.
3, the heating element of methane transducer of the present utility model, measuring sensor and ambient temperature measurement element are all that starting material are processed and obtained with monocrystalline silicon, make processing technology unified, simple, and technique and CMOS compatibility, employing CMOS technology is produced in batches, with low cost, also the methane transducer of processing can be made to have good consistance, interchangeability, be easy to realize batch calibration, sensor performance can be improved further and reduce the cost of pick up calibration link.
4, the heating element of methane transducer of the present utility model, measuring sensor and ambient temperature measurement element are all processed with monocrystalline silicon and are obtained, because monocrystalline silicon at high temperature has stable performance, this makes methane transducer of the present utility model under hot operation state, have good stability and long life-span.Monocrystalline silicon do not exist the shortcomings such as the high temperature of the METAL HEATING PROCESS such as platinum, tungsten material more than 500 degrees Celsius easily volatilizees, distils, migration, also do not exist polysilicon resistance at high temperature grain boundary resistance be easy to the shortcoming that changes, cannot control.Simultaneously, the passivation layer arranged at the outside surface of heating element of the present utility model, measuring sensor and ambient temperature measurement element also reduces the impact of external environment on above-mentioned components and parts, thus further increases the stability of methane transducer performance of the present utility model.
5, the independence on the heating element of methane transducer of the present utility model, measuring sensor and ambient temperature measurement component structure, be convenient to regulate and control separately heating element, simultaneously independent temperature element detected, make to there is not coupled relation between heating and thermometric, no longer by the restriction that traditional single element heating is multiplexing with temp sensing function, this makes methane transducer of the present utility model have multiple-working mode, and it is simple, flexible to make regulation and control configure, and can improve intelligent level and the sensing capabilities of the utility model methane transducer further.
6, the ambient temperature measurement element of methane transducer of the present utility model temperature on the sheet of independent detection methane transducer of the present utility model, this provide and heating element, nearest, the most real temperature data of measuring sensor, be conducive to measurement data is carried out to best temperature compensation, also laid a good foundation for methane transducer intellectuality of the present utility model simultaneously.
7, methane transducer of the present utility model, size is little, low in energy consumption, and fast response time, can reach about 40ms; Heating element and the structural independence of measuring sensor can make measuring sensor detect methane concentration with extremely low self-heating effect, and the reduction of self thermonoise makes the sensitivity of sensor of the present utility model get a promotion further.
Advantage: the methane transducer based on single heating element that the utility model provides, with the silicon of stable performance for heating material, without the need to the high-sensitivity detection adopting catalyzer to realize low-concentration methane; This makes this methane transducer have stable performance, advantage that long-time stability are good, without the shortcoming such as poisoning, carbon distribution, activation; The power consumption of methane transducer of the present utility model determines primarily of the power consumption of the single heating element adopted, and the power consumption of measuring sensor and ambient temperature measurement components consume is extremely low, and therefore the overall power consumption of sensor is low; The environment temperature that methane transducer of the present utility model is conducive to adopting computing machine to obtain according to ambient temperature measurement element integrated on sheet regulates the temperature of heating element flexibly, completes and directly carry out temperature compensation, thus improves the performance of sensor.Methane transducer good in anti-interference performance of the present utility model, highly sensitive, batch production cost is low and consistance good, is easy to batch quickly calibrated.
Accompanying drawing explanation
Fig. 1 is the schematic top plan view of the methane transducer based on single heating element of the present utility model.
Fig. 2 is the cut-open view of the stiff end of heating element of the present utility model and measuring sensor, the A-A cross-sectional view namely in Fig. 1.
Schematic top plan view when Fig. 3 is heating element of the present utility model, measuring sensor is arranged on the same side.
In figure: 100-bearing, 101-heating element, 102-measuring sensor; 103-ambient temperature measurement element, 1001-stiff end, 1012-sway brace A; 1011-well heater, 1021-measures component, 1022-sway brace B; 1031-electrode leads to client, 1032-measuring resistance, 11-substrate; 12-isolation oxidation silicon layer, 13-top monocrystalline silicon layer, 14-passivation protection layer; 22-electricity draws pad metal, 23-silicon oxide layer, 24-doped silicon layer.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is further described:
Embodiment 1: as in Fig. 1, Fig. 2, this methane transducer comprises heating element 101, measuring sensor 102 and ambient temperature measurement element 103; Described ambient temperature measurement element 103 is located on bearing 100;
The sway brace A1012 that described heating element 101 is arranged side by side by two stiff ends 1001, two and well heater 1011 are formed, and the two ends of two sway brace A1012 are connected with well heater 1011 with stiff end 1001 respectively, form two-terminal device; The length at least 300um of described each sway brace A1012; Described measuring sensor 102 is made up of two stiff ends 1001, measurement component 1021 and two sway brace B1022, two sway brace B1022 are connected with the two ends measuring component 1021 respectively, the other end of two sway brace B1022 is connected with two stiff ends 1001 respectively, forms two-terminal device; The length at least 100um of described each supporting cantilever B1022; What the stiff end 1001 of described heating element 101 and the stiff end 1001 of measuring sensor 102 were separate is located on bearing 100, and remainder suspension in atmosphere; Heating element 101 and measuring sensor 102 are all structurally cantilever beam structure; The well heater 1011 of described heating element 101 is loop configuration, and the measurement component 1021 of measuring sensor 102 is " one " word structure or convex structure as shown in Figure 3; As shown in Figure 1, described heating element 101 is located at the left and right sides with measuring sensor 102; Do not contact between the well heater 1011 of described heating element 101 and the measurement component 1021 of measuring sensor 102, described standoff distance is 2um to 200um.Described bearing 101 comprises substrate 11 and the isolation oxidation silicon layer 12 established on the substrate 11, and is located at the top monocrystalline silicon layer 13 in isolation from oxygen SiClx 12; Heating element 101, measuring sensor 102 adopt the top monocrystalline silicon layer 13 be located in isolation from oxygen SiClx 12 to be processed to form with ambient temperature measurement element 103, and heating element 101, measuring sensor 102 are all isolated with other the top monocrystalline silicon layer 13 in isolation from oxygen SiClx 12 respectively with the silicon structure of ambient temperature measurement element 103 and be not connected; Described substrate 11 is silicon or other material that MEMS technology can be adopted to process; The described ambient temperature measurement element 103 be located on bearing 100 comprises two electrode leads to client 1031 and measuring resistance 1032;
Heating element 101 is processed to form by top monocrystalline silicon layer 13 with the stiff end 1001 of measuring sensor 102 and the electrode leads to client 1031 of ambient temperature measurement element 103, at top monocrystalline silicon layer 13 peripheral hardware silica layer 23, silicon oxide layer 23 is provided with electricity and draws pad metal 22; Doped silicon layer 24 is provided with in described stiff end 1001 and the top monocrystalline silicon layer 13 of electrode leads to client 1031; Described electricity is drawn pad metal 22 and to be contacted with the doped silicon layer 24 of stiff end 1001 formation Ohmic contact by the window of silicon oxide layer 23;
Described heating element 101 stretch out aerial sway brace A1012 and well heater 1011 and measuring sensor 102 stretch out aerial measurement component 1021, the outside surface of sway brace B1022 is provided with passivation protection layer 14; The outside surface of the measurement sensistor 1031 of described ambient temperature measurement element 103 is provided with passivation protection layer 14 equally; Described passivation protection layer 14 is monox, or hafnia, or silica/alumina composite bed, or hafnia/aluminum oxide composite layers, or hafnia/silicon nitride composite bed, or aluminium oxide/silicon nitride composite bed, or monox/silicon nitride composite bed, or the composite bed that monox, hafnia, aluminium oxide, silicon nitride different materials are combined to form; The wherein thickness of monox at least 10nm, the thickness of hafnia is at least 5um, aluminium oxide thickness at least 6nm, and silicon nitride thickness is 10nm at least, and the thickness of whole passivation protection layer is no more than 1um.
A kind of CH_4 detection application process of the methane transducer based on single heating element, the heating element 101 of the described methane transducer based on single heating element pass to larger current or apply larger voltage enter perform region in current-resistance family curve on the left of turning point, well heater 1011 heating-up temperature more than 500 DEG C, described turning point is that electrical resistance curtage increases the point of greatest resistance occurred, when curtage continues to increase, resistance no longer continues to increase and reduces on the contrary; Measuring sensor 102 and ambient temperature measurement element 103 all pass to the Weak current do not produced apparently higher than ambient air temperature; When not having methane gas, measuring sensor 102 raises by the heating temperatures involved temperature of heating element 101, and resistance also increases; When methane gas occurs and concentration increases, the temperature of heating element 101 reduces, independently measuring sensor 102 affects temperature by it and also reduces, and causes the reduction of self-resistance, and the change of electrical parameter as resistance detecting measuring sensor 102 by electric measurement method realizes the measurement of methane concentration; Adopt ambient temperature measurement element 103 measures ambient temperature, in order to adjust the heated condition of heating element 101, also can in order to carry out temperature compensation to measuring the data obtained.
Claims (1)
1. based on a methane transducer for single heating element, it is characterized in that: it comprises heating element (101), measuring sensor (102) and ambient temperature measurement element (103); Described ambient temperature measurement element (103) is located on bearing (100);
Described heating element (101) is by two stiff ends (1001), two sway brace A(1012 be arranged side by side) form with well heater (1011), two sway brace A(1012) two ends be connected with well heater (1011) with stiff end (1001) respectively, formed two-terminal device; Described each sway brace A(1012) length at least 300um; Described measuring sensor (102) is by two stiff ends (1001), measurement component (1021) and two sway brace B(1022) form, two sway brace B(1022) be connected with the two ends measuring component (1021) respectively, two sway brace B(1022) the other end be connected with two stiff ends (1001) respectively, form two-terminal device; Described each sway brace B(1022) length at least 100um; What the stiff end (1001) of described heating element (101) and the stiff end (1001) of measuring sensor (102) were separate is located on bearing (100), and remainder suspension in atmosphere; Heating element (101) and measuring sensor (102) are all structurally cantilever beam structure; The well heater (1011) of described heating element (101) does not contact with the measurement component (1021) of measuring sensor (102), at a distance of 2um to 200um;
Described bearing (101) comprises substrate (11) and the isolation oxidation silicon layer (12) be located on substrate (11), and is located at the top monocrystalline silicon layer (13) in isolation from oxygen SiClx (12); Heating element (101), measuring sensor (102) and ambient temperature measurement element (103) adopt the top monocrystalline silicon layer (13) be located in isolation from oxygen SiClx (12) to be processed to form, and heating element (101), measuring sensor (102) are all isolated with other the top monocrystalline silicon layer (13) in isolation from oxygen SiClx (12) respectively with the silicon structure of ambient temperature measurement element (103) and be not connected; Described substrate (11) is silicon or other material that MEMS technology can be adopted to process; The described ambient temperature measurement element (103) be located on bearing (100) comprises two electrode leads to client (1031) and measuring resistance (1032);
Heating element (101) is processed to form by top monocrystalline silicon layer (13) with the stiff end (1001) of measuring sensor (102) and the electrode leads to client (1031) of ambient temperature measurement element (103), the outer silica layer (23) of top monocrystalline silicon layer (13), silicon oxide layer (23) is provided with electricity and draws pad metal (22); Doped silicon layer (24) is provided with in described stiff end (1001) and the top monocrystalline silicon layer (13) of electrode leads to client (1031); Described electricity is drawn pad metal (22) and to be contacted with the doped silicon layer (24) of stiff end (1001) formation Ohmic contact by the window of silicon oxide layer (23);
Described heating element (101) stretch out aerial sway brace A(1012) with well heater (1011) and measuring sensor (102) stretch out aerial measurement component (1021), sway brace B(1022) outside surface be provided with passivation protection layer (14); The outside surface of the measurement sensistor (1031) of described ambient temperature measurement element (103) is provided with passivation protection layer (14) equally; Described passivation protection layer (14) is monox, or hafnia, or silica/alumina composite bed, or hafnia/aluminum oxide composite layers, or hafnia/silicon nitride composite bed, or aluminium oxide/silicon nitride composite bed, or monox/silicon nitride composite bed, or the composite bed that monox, hafnia, aluminium oxide, silicon nitride different materials are combined to form; The wherein thickness of monox at least 10nm, the thickness of hafnia is at least 5um, aluminium oxide thickness at least 6nm, and silicon nitride thickness is 10nm at least, and the thickness of whole passivation protection layer is no more than 1um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420647114.0U CN204154679U (en) | 2014-10-31 | 2014-10-31 | A kind of methane transducer based on single heating element |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420647114.0U CN204154679U (en) | 2014-10-31 | 2014-10-31 | A kind of methane transducer based on single heating element |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104316574A (en) * | 2014-10-31 | 2015-01-28 | 中国矿业大学 | Methane sensor based on single heating element, preparation method and application |
| CN118583914A (en) * | 2024-08-01 | 2024-09-03 | 苏州芯镁信电子科技有限公司 | Thermal conductivity gas sensor, preparation method and gas thermal conductivity detection method |
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2014
- 2014-10-31 CN CN201420647114.0U patent/CN204154679U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104316574A (en) * | 2014-10-31 | 2015-01-28 | 中国矿业大学 | Methane sensor based on single heating element, preparation method and application |
| WO2016066089A1 (en) * | 2014-10-31 | 2016-05-06 | 中国矿业大学 | Methane sensor based on single heating component, manufacturing method, and applications |
| CN118583914A (en) * | 2024-08-01 | 2024-09-03 | 苏州芯镁信电子科技有限公司 | Thermal conductivity gas sensor, preparation method and gas thermal conductivity detection method |
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