CN203454875U - Vapor chamber - Google Patents

Vapor chamber Download PDF

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Publication number
CN203454875U
CN203454875U CN201320437880.XU CN201320437880U CN203454875U CN 203454875 U CN203454875 U CN 203454875U CN 201320437880 U CN201320437880 U CN 201320437880U CN 203454875 U CN203454875 U CN 203454875U
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soaking plate
heated sheet
groove
heat sink
capillary structure
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CN201320437880.XU
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Chinese (zh)
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施金城
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Abstract

The utility model discloses an vapor chamber and a manufacturing method of the vapor chamber. The vapor chamber is simple in structure, easy and convenient to manufacture, low in cost and good in heat conduction effect. The vapor chamber comprises a heated plate and a flat-plate-shaped heat dissipation plate, wherein the inner face of the heated plate is provided with a groove, and the flat-plate-shaped heat dissipation plate and the heated plate are welded together. A vacuum inner cavity is formed between the heat dissipation plate and the groove, and work media are injected into the vacuum inner cavity. The part, in the vacuum inner cavity, of the heated plate is provided with a capillary structure layer formed by elementary substance metal powder in a sintering mode. The vapor chamber is easy to manufacture, and the working media on an evaporation and condensation area can be rapidly adsorbed by the capillary structure layer, so that high-speed cycling and rapid heat conduction effects are achieved. Furthermore, supporting columns of the capillary structure are arranged in the vacuum inner cavity, so that the reflux effect is more obvious after steam condensation, and the inwards concave or crack deformation phenomenon caused by too high temperature or externally exerted pressure can not happen. The vapor chamber is even in heat dissipation, thermal resistance is reduced, the structure is simple, cost is low, manufacturing processes are few, operation is easy, and the vapor chamber is suitable for being produced automatically in an intensive and large-scale mode.

Description

Soaking plate
Technical field
The utility model relates to a kind of for dispersing the Radiator and its preparation method of electronic devices and components work calories, particularly a kind of soaking plate and manufacture method thereof for IC chip operation heat is led away.
Background technology
Along with scientific and technological progress, electronic equipment is towards multi-functional now, two-forty, and undersized future development, the work calories that IC chip produces in unit are significantly increases, and how to improve heat dissipating method, is a major challenge that industry faces always.The CPU of computer server of take is example, and its caloric value has surpassed 100W/cm 2, how the upper work calories producing of small size CPU being effectively distributed in environment, cooling technology must be constantly progressive, improves heat dissipation.
In prior art, main flow radiating mode is mainly the fin that fan, fin, heat pipe combine, such as aluminium extruded type fin, aluminium punching press fin, aluminium or copper cutting fin and copper aluminium and the chimeric fin of heat pipe etc.Most typical radiator and heat abstractor are a kind of fin type heat-pipe radiators that has fan, by radiator, contact with pyrotoxin 91 object that reaches heat radiation.
Along with improving constantly of chip integration, the heat of electronic building brick 9 pyrotoxins 91 constantly increases, and above-mentioned radiator can not meet heat radiation requirement far away.Therefore must between electronic building brick 9 pyrotoxins 91 and above-mentioned fin, install a kind of soaking plate 1 with good heat conductivity additional.Its effect is that the heat that electronic building brick 9 pyrotoxins 91 are produced is uniformly distributed and reaches fast on fin, its operation principle as shown in Figure 1, soaking plate 1 is joined with electronic building brick 9 pyrotoxin 91 surfaces for having the be heated one side (being called for short heated sheet 2) of evaporation working media 7 of being filled with of vacuum lumen 11, the transition heat conduction member that another side (be called for short heat sink 3) and external described fin join, heated sheet 2 in soaking plate 1 absorbs the heat of electronic building brick 9 pyrotoxins 91, make 7 gasifications of the liquid-working-medium in evaporating area 21 in vacuum lumen 11, be evaporated to steam 71, be distributed to the condensing zone 31 on heat sink 3 and heat energy passed to fast to the heat sink 3 joining with described fin, through heat exchange, heat energy is passed to fin and is distributed in environment, and be evaporated to steam 71 on heat sink 3 condensing zones 31 in vacuum lumen 11, surrender the evaporating area 21 that condensation after heat energy is back to heated sheet 2 places again, high-speed circulating like this, just the heat on described pyrotoxin 91 is derived fast.
Soaking plate 1 of the prior art, technology exploration is still not mature enough, although theoretical principle is simple, but internal structure design is multifarious, too complicated, particularly manufacturing link, difficulty is large, cost is high, (shown in Figure 5), soaking plate 1 of the prior art roughly can be generalized into following two kinds of large classifications:
1) at some of the heated sheet 2 of soaking plate 1 and the inner face etchings of heat sink 3 staggered fine grooves anyhow, and place grid and guide support 8 in vacuo in chamber 11 so that condensed working media 7 flow to the evaporating area 21 at heated sheet 2 places along guide support 8.This structure manufacturing process is complicated, cost is high, and its heat-conducting effect can be a greater impact because of soaking plate 1 putting position difference.
2) there is capillary structure layer 22 evaporating area on the heated sheet 2 of soaking plate 1 21 with the interior equal sintering of condensing zone 31 on heat sink 3, and at heated sheet 2 and 3 guide supports 8 of placing absolute construction of heat sink, so that condensed working media 7 is flow to the evaporating area 21 at heated sheet 2 places by this guide support 8.This structure need be on the two sides of heated sheet 2 and heat sink 3 sintering capillary structure layer 22, increase cost of manufacture, waste material again, because the capillary structure layer 22 in condensing zone 31 on heat sink 3 can be stored a large amount of condensed working medias 7, if it can not lead away the evaporating area 21 at inflow heated sheet 2 places in time, will greatly affect working media 7 after the gasification heat radiation conduction efficiency on heat sink 3.
Above-mentioned two kinds of structures all exist manufactures complicated, high in cost of production shortcoming.
Utility model content
The technical problems to be solved in the utility model be to provide a kind of simple in structure, manufacture easy, cost is lower and the soaking plate of good heat conduction effect and manufacture method thereof.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is:
Soaking plate of the present utility model, comprise heat absorption and radiator portion, described heat absorbing part is that inner face is established reeded heated sheet, described radiator portion is the flat plate radiation plate welding together with described heated sheet inner face, between this heat sink and described groove, form the vacuum lumen that is marked with working media, the heated sheet in described vacuum lumen is partly provided with by the powder sintered capillary structure layer forming of elemental metals.
The support column that is evenly provided with at least two capillary structures that are connected as a single entity perpendicular to groove floor and with described capillary structure layer in described groove floor, described support column extends and joins to described heat sink.
Described metal dust is that order number is the copper powders of 50-150.
It is made that described heated sheet and heat sink are oxygenless copper material.
Described working media is pure water, acetone or methyl alcohol, and injection rate is described cavity volume 10%-40%.
Vacuum in described vacuum lumen is 10 -2pascal-10 -5pascal.
The thickness of described capillary structure layer is at 0.3mm-0.8mm.
Manufacture the method for the utility model soaking plate, the heated sheet with capillary structure layer of being made by the good metal material of heat conduction and heat sink are welded together and make the soaking plate with vacuum lumen, its step is as follows:
1) choose the sheet metal that two thickness are 0.2mm-1.6mm, wherein, make the heated sheet that inner face has groove and reserved exhaust tube position for one through punching press, another piece is flat heat sink;
2) heated sheet and heat sink are cleaned to scrubbing, oven dry;
3) mould of being made by graphite material of design is in advance put into the groove of heated sheet, between mould and groove floor, sidewall, fill elemental metals powder; Or the mould of being made by graphite material of design is in advance put into the groove of heated sheet, in this mould, be provided with at least two perpendicular to the hollow pillar stand cylinder of groove floor, between mould and groove floor, sidewall and fill metal dust in stud cylinder;
4) heated sheet that is filled with metal dust is placed in to vibrator and vibrates, make the packed density value of described metal dust reach 2-5 gram/cm 3;
5) heated sheet is put into the hot stove that is filled with protective gas and there is the intensification, insulation and the temperature descending section that adapt to this heated sheet Metal Phase and carried out sintering;
6) sintering in groove is had to the heated sheet of capillary structure layer, or have the heated sheet of capillary structure layer and capillary structure support column to take out sintering in groove, extract described mould;
7) heat sink is combined with mode and the heated sheet being sealed on described groove, put into the hot stove that is filled with protective gas and there is the intensification, insulation and the temperature descending section that adapt with the welding of this heat sink and heated sheet and carry out high intermediate temperature sealing;
8) good heat sink and the heated sheet of sealing-in taken out, air to the vacuum of extracting out in its inner chamber is 10 -2pascal-10 -5pascal;
9) inject working media, soldering and sealing exhaust tube.
It is made that described heated sheet and heat sink are oxygenless copper material.
During sintering, the section that heats up speed is 6 ℃/min to 900 ℃, and soaking zone maintains 50min in 900 ℃ of situations, and temperature descending section is down to room temperature with the speed of 2 ℃/min.
Compared with prior art, soaking plate of the present utility model adopts in heated sheet face portion setting by the structure of the powder sintered capillary structure layer forming of elemental metals and dull and stereotyped heat sink, make the utility model make simple and also make to be evaporated to the steam-condensation of the working media on heat sink inner face after can by described capillary structure layer, be adsorbed fast, thereby reach the effect of high-speed circulating quick conductive.The utility model further in chamber in vacuo, arrange be connected as a single entity with described capillary structure layer and with heat sink join also for the support column of capillary structure time, backflow effect after described steam-condensation is more remarkable, and, after working media evaporation in being stored in heated sheet capillary structure layer, the liquid-working-medium of laying in this support column can add in heated sheet capillary structure layer in time; In addition, due to the effect of support column, also make soaking plate of the present utility model can or not exert pressure and produce and cave in or Fracture Deformation phenomenon because of its temperature height outward.The utility model is owing to only at heated sheet inner face, capillary structure layer being set, not only simplified the making of soaking plate, reduced manufacturing cost, and, though by soaking plate of the present utility model being obliquely installed, level is inverted, level is just being put or vertically arrange, all little to the condensed backflow direction of working media and rate, thus its job stability and reliability can effectively be improved.
The manufacture method of soaking plate of the present utility model, technique is simple, flow process is few, easy to operate, is suitable for automation, intensive and large-scale production.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is soaking plate operation principle schematic diagram.
Fig. 2 is soaking plate schematic perspective view of the present utility model.
Fig. 3 is A-A cutaway view in Fig. 2.
Fig. 4 is the utility model soaking plate structure exploded perspective view.
Fig. 5 is the temperature profile of the heat sink of prior art soaking plate.
Fig. 6 is the temperature profile of the heat sink of the utility model soaking plate.
Fig. 7 is the utility model soaking plate entire thermal resistance variation diagram while adopting different directions to arrange.
Fig. 8 is the withstand voltage deformation curve figure of soaking plate of the present utility model.
Reference numeral is as follows:
Soaking plate 1, vacuum lumen 11, heated sheet 2, evaporating area 21, capillary structure layer 22, support column 23, heat sink 3, condensing zone 31, groove 4, exhaust tube 5, installing hole 6, working media 7, steam 71, drop 72, guide support 8, electronic building brick 9, pyrotoxin 91.
The specific embodiment
As shown in Figure 2,3, 4, soaking plate 1 of the present utility model, be by the heated sheet 2 absorbing heat and be welded on a heat sink 3 that plays thermolysis with heated sheet 2 and form, the outer surface of heated sheet 2 and electronic building brick 9 pyrotoxins 91 join, the outer surface of heat sink 3 and the fin of peripheral hardware join, and at the periphery of this soaking plate 1, are also provided with installing hole 6.Described heated sheet 2 and heat sink 3 are made by the good metal material of heat conduction, can be copper or aluminium, and heated sheet 2 and heat sink 3 can be metal of the same race, also can be different metal and are used in combination.The made thin plate of the preferred oxygen-free copper of the utility model is made heated sheet 2 and heat sink 3, and lamella thickness, in 0.2mm-1.6mm scope, is preferably 0.5mm, 0.8mm, 1.0mm or 1.2mm.
The inner face of described heated sheet 2 is provided with groove 4, the shape of groove 4 is determined according to the shape of electronic building brick 9 pyrotoxin 91 parts, can be circle, ellipse, triangle, quadrangle, pentagon or hexagon, in the bottom surface of groove 4 (being evaporating area 21) and side, be provided with thickness in the capillary structure layer 22 of 0.3mm-0.8mm, preferred thickness is 0.5mm, this capillary structure layer 22 forms by elemental metals is powder sintered, metal dust d 50order number be 50-150mesh, the utility model is preferably copper powders, its d 50order number be 80mesh.
The utility model further improves, several can also be evenly set in groove 4 bottom surfaces is connected as a single entity perpendicular to groove 4 bottom surfaces and with described capillary structure layer 22 and is the support column 23 of identical capillary structure, support column 23 be shaped as truncated cone-shaped, its bottom diameter is at 2mm-8mm, preferred 5mm, described support column 23 extends to the uncovered direction of groove 4.
The inner face of described heat sink 3 (being condensing zone 31) is smooth plates, its inner face and described heated sheet 2 inner faces are welded together, thus, between heat sink 3 and described groove 4, form an inner chamber, this inner chamber just becomes a vacuum lumen 11 through the sealing of bleeding, the heat of reinjecting in this vacuum lumen 11 is evaporated to steam 71, be condensed into the working media 7 of drop 72 shapes after meeting cold heat radiation, can form a complete soaking plate 1 that plays conductive force.
If while being provided with described support column 23 in this inner chamber, the round platform top of support column 23 and the inner face of heat sink 3 join, support column 23 adopts the structure that top handles are large not only can the condensed working media 7 of quick adsorption condensing zone 31, but also can expand as much as possible the area of condensing zone 31, in addition, the top of support column 23 is welded and fixed and is connected with the inner face of heat sink 3, due to the traction action of support column 23, it also can prevent from this soaking plate 1 because of variations in temperature or exert pressure outward producing crack or distortion.
Described working media 7 is pure water, acetone or methyl alcohol, and injection rate is described cavity volume 10%-40%, and when working media 7 is pure water, its injection rate is preferably the 15-30% of described cavity volume.; Above-mentioned preferred proportion can make working media 7 in vacuum lumen 11 in best evaporation-condensation-backflow duty, and can not cause low evaporation efficiency or cause because lacking liquid-working-medium 7 generation that is interrupted the phenomenon of absorbing heat because of too much liquid-working-medium 7.
Vacuum in described vacuum lumen 11 is 10 -2pascal-10 -5pascal, preferably vacuum is 10 -3pascal, so both can meet working media 7 is subject to the required vacuum condition of thermal evaporation, can save again vacuum is evacuated to spent time of high vacuum state, financial resources and electric power resource.
The beneficial effect that soaking plate 1 of the present utility model adopts the inner capillary structure of globality to produce is as follows:
(1) strengthening capillary force
As shown in Figure 6, by copper powders sintering, produce capillary structure, the circulating path of working fluid is provided, and the Evaporation Phenomenon that strengthens surface.By the evaporating area on the heated sheet of soaking plate 12 21, whole steam 71 inner chambers to the condensing zone 31 on heat sink 3 are connected this capillary structure, greatly strengthen the backflow ability of the working media 7 of condensing zone 31 drop 72 shapes, timely and effective this working media 7 is added to evaporating area 21, the cycle that shortens evaporation, exchange and reflux, thereby lifting task performance, the uniformity of raising heat sink 3 Temperature Distribution.
(2) support function
As shown in Figure 8, the support column 23 of the capillary structure being connected as a single entity with described evaporating area 21 capillary structure layer 22, the soaking plate 1 that can make heated sheet 2 and heat sink 3 constitute has very strong support anti-pressure ability, when vacuum lumen 11 is during in low-pressure state, described support column 23 is given full play to supporting role, make heated sheet 2 and heat sink 3 can not produce interior notch distortion because of external pressure, thereby guarantee the flatness of heated sheet 2 and heat sink 3 outer surfaces, prevent between heated sheet 2 and electronic building brick 9, thermal resistance between heat sink 3 and external fin increases and reduction heat conduction and heat radiation effect.
(3) opposing thermal expansion function
When thermal source 91 or environment temperature surmount normal limits, whole evaporations due to working media 7, likely cause the air pressure in vacuum lumen 11 to raise, because the top of described support column 23 and the inner face of heat sink 3 are welded to connect, also make thus heated sheet 2 pass through this support column 23 together with heat sink 3 strong bonded, this structure can effectively be avoided the generation because of sealing-off cracking phenomena between the heated sheet 2 that in vacuum lumen 11, gas rapid expansion produces and heat sink 3.
(4) good directionality
As shown in Figure 7, in product actual application, the riding position of soaking plate 1, direction are suitable with arranging of electronic building brick 9, be that soaking plate 1 can be obliquely installed, level is inverted, level is just being put or vertically setting, therefore, the heat conduction and heat radiation usefulness of soaking plate 1, the direction position that can not put with it changes, and entire thermal resistance difference can not be too large.Soaking plate 1 of the present utility model, due to only in the evaporating area 21 of heated sheet 2 and described groove 4 sidewalls arrange capillary structure layer 22 and the support column 23 of the capillary structure that is connected as a single entity with capillary structure layer 22 in evaporating area 21, the working media 7 that makes to be evaporated to condensed drop 72 shapes of condensing zone 31 can overcome centrifugal force very soon by support column 23 absorption of described capillary structure layer 22 and capillary structure, and the working media 7 that described drop 72 shapes can not occur because of soaking plate 1 in being obliquely installed, level is inverted or vertically arranges the phenomenon that is trapped in certain non-evaporating area 21.Therefore, anyway soaking plate 1 of the present utility model arranges, and the working media 7 of condensed described drop 72 shapes of condensing zone 31 can be back to described evaporating area 21 in time, and the working media 7 of described drop 72 shapes refluxes and has good directionality.
The manufacture method of the utility model soaking plate 1 is as follows:
1) choose the oxygen-free copper that two thickness are 0.5mm, 0.8mm, 1.0mm or 1.2mm (C1020) thin plate, be shaped as square, one is used for making heated sheet 2, another piece is made heat sink 3, at heated sheet 2 and heat sink 3 four jiaos, offers in order to soaking plate 1 is assemblied in to the installing hole 6 on electronic building brick 9.
Heated sheet 2 appearance and sizes are 90mm * 90mm, face arranges groove 4 within it, this groove 4 is to make through punching press, during by heated sheet 2 horizontal positioned, the horizontal cross sectional geometry of described groove 4 is for removing the square (concrete shape of groove 4 of four jiaos, area and the degree of depth, will be according to the shape on electronic building brick 9 pyrotoxin 91 surfaces that are combined with this soaking plate 1, size and its installing space size in electronic equipment internal decide), recess of burying copper exhaust tube 5 underground communicating with described groove 4 of edge (on arbitrary corner or arbitrary limit) punching press at heated sheet 2.
Described heat sink 3 is identical with heated sheet 2 shape and size, and it is to utilize blanking punched formation tabular, and its inner face is smooth surface (in the situation that not considering manufacture craft and cost, also within it some of face etchings staggered fine guiding gutters anyhow).
2) heated sheet 2 and heat sink 3 are cleaned to scrubbing, oven dry.
3) by heated sheet 2, the mode with groove 4 opening upwards is placed on workbench, the more pre-designed mould of being made by graphite material is put into the groove 4 of heated sheet 2.
Described mould has two kinds, and a kind of is the die identical with described groove 4 shapes, while putting into groove 4, between the bottom surface of this mould and described groove 4, sidewall, has certain gap; It is another kind of that in order several hollow pillar stand cylinders perpendicular to die bottom surface to be set on the basis of front kind of mould on the bottom surface of its die again, (cross sectional shape of this stud cylinder can be circle, triangle or ellipse, it can be up and down the straight tube with area, also can be lower large little column casing), when the second mould is put into groove 4, between the bottom surface of mould and described groove 4, sidewall, have certain gap, described hollow cylinder communicates with groove 4 bottom surfaces.
While using the first mould, between mould and groove 4 bottom surfaces, sidewall, fill elemental copper powder; While using the second mould, between mould and groove 4 bottom surfaces, sidewall and fill elemental copper powder in described hollow pillar stand cylinder.
4) heated sheet 2 that is filled with above copper powders is placed in to vibrator and vibrates, make the packed density of described metal dust reach 2-5 gram/cm of setting 3.
5) heated sheet 2 is put in the hot stove that is filled with protective gas (this protective gas is that mixing ratio is the nitrogen hydrogen mixeding gas of 95:5, or other gas of commonly using in prior art) and there is the intensification, insulation and the temperature descending section that adapt to this heated sheet 2 Metal Phases and carried out sintering.
The preferred sintering temperature of the utility model is that intensification section speed is 6 ℃/min to 900 ℃, and soaking zone is in 900 ℃ of situations, to maintain 50min, and temperature descending section is down to room temperature with the speed of 2 ℃/min.
6) will at the interior sintering of groove 4, there is the heated sheet 2 of capillary structure layer 22, or by there is the heated sheet 2 of capillary structure layer 22 and capillary structure support column 23 to take out at the interior sintering of groove 4, extract described mould.
7) heat sink 3 is combined with mode and the heated sheet 2 being sealed on described groove 4, put into be filled with protective gas and to there is the hot stove that welds the intensification, insulation and the temperature descending section that adapt with this heat sink 3 and heated sheet 2 and carry out high intermediate temperature sealing.
Utilize the airtight soaking plate 1 of the disposable welding of solder technology, it is integrally welded with soaking plate 1 that recycling high-frequency welding manner is put into described recess by the copper exhaust tube 5 that injects working media 7 and bleed used.
8) good heat sink 3 and the heated sheet 2 of sealing-in taken out, air to the vacuum of extracting out in its inner chamber is 10 -2pascal-10 -5pascal, preferably 10 -3pascal.
While vacuumizing with degasification to soaking plate 1, when vacuum is down to 10 -1during Pascal, start to calculate after the degasification time is 10 minutes, its vacuum can reach 10 -2pascal~10 -3pascal.
9) degasification is complete, just can in vacuum lumen 11, inject appropriate working media 7, soldering and sealing exhaust tube 5.
Soaking plate 1 of the prior art exists complex structural designs, production technology to be difficult to the defects such as control and production cost height, these defects restrict the development of the industry always, therefore the utility model be take simply, practicality, steady quality, production difficulty reduction, the saving energy be target, use one matter, disposable formation, a globality functional structure have been made, and can bring into play the soaking plate 1 of several functions, structure is practical, produce simplify, energy conservation.Its various performances that show are very good, and resultant effect is remarkable, are that new standard is produced in the design that following soaking plate 1 universalness is used.Briefly, this utility model is " possible, can use, earn ".
Above content is in conjunction with concrete preferred embodiment, and further detailed description of the utility model can not assert that concrete enforcement of the present utility model is confined to these explanations.Without departing from the concept of the premise utility, can also make some simple deduction or replace, all should be considered as belonging to the utility model by the definite scope of patent protection of submitted to claims.

Claims (7)

1. a soaking plate, comprise heat absorption and radiator portion, it is characterized in that: described heat absorbing part is the heated sheet (2) that inner face is provided with groove (4), described radiator portion is the flat plate radiation plate (3) welding together with described heated sheet (2) inner face, between this heat sink (3) and described groove (4), form the vacuum lumen (11) that is marked with working media (7), heated sheet (2) part in described vacuum lumen (11) is provided with by the powder sintered capillary structure layer forming of elemental metals (22).
2. soaking plate according to claim 1, it is characterized in that: in described groove (4) bottom surface, be evenly provided with the support column (23) of at least two capillary structures that are connected as a single entity perpendicular to groove (4) bottom surface and with described capillary structure layer (22), described support column (23) extends and joins to described heat sink (3).
3. soaking plate according to claim 2, is characterized in that: described metal dust is that order number is the copper powders of 50-150.
4. soaking plate according to claim 2, is characterized in that: it is made that described heated sheet (2) and heat sink (3) are oxygenless copper material.
5. soaking plate according to claim 2, is characterized in that: described working media (7) is pure water, acetone or methyl alcohol, and injection rate is described cavity volume 10%-40%.
6. soaking plate according to claim 2, is characterized in that: the vacuum in described vacuum lumen (11) is 10 -2pascal-10 -5pascal.
7. according to the soaking plate described in any one in claim 1-6, it is characterized in that: the thickness of described capillary structure layer (22) is at 0.3mm-0.8mm.
CN201320437880.XU 2013-07-22 2013-07-22 Vapor chamber Expired - Fee Related CN203454875U (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103398613A (en) * 2013-07-22 2013-11-20 施金城 Vapor chamber and method for manufacturing same
CN105318756A (en) * 2014-07-22 2016-02-10 苏州泰硕电子有限公司 Ultrathin uniform temperature plate and manufacturing method thereof
CN105636403A (en) * 2014-10-29 2016-06-01 奇鋐科技股份有限公司 Heat-dissipation device
US9989321B2 (en) 2014-11-20 2018-06-05 Asia Vital Components Co., Ltd. Heat dissipation device
CN108458613A (en) * 2017-02-21 2018-08-28 Ibt株式会社 For outdoor template vacuum heat transfer unit (HTU)
CN108788430A (en) * 2018-05-28 2018-11-13 苏州天脉导热科技股份有限公司 The method that soaking plate is welded using high frequency induction welding
WO2021073158A1 (en) * 2019-10-15 2021-04-22 昆山联德电子科技有限公司 Thin capillary structure supporting vapor chamber

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103398613A (en) * 2013-07-22 2013-11-20 施金城 Vapor chamber and method for manufacturing same
CN103398613B (en) * 2013-07-22 2016-01-20 施金城 Soaking plate and manufacture method thereof
CN105318756A (en) * 2014-07-22 2016-02-10 苏州泰硕电子有限公司 Ultrathin uniform temperature plate and manufacturing method thereof
CN105636403A (en) * 2014-10-29 2016-06-01 奇鋐科技股份有限公司 Heat-dissipation device
US9989321B2 (en) 2014-11-20 2018-06-05 Asia Vital Components Co., Ltd. Heat dissipation device
CN108458613A (en) * 2017-02-21 2018-08-28 Ibt株式会社 For outdoor template vacuum heat transfer unit (HTU)
CN108788430A (en) * 2018-05-28 2018-11-13 苏州天脉导热科技股份有限公司 The method that soaking plate is welded using high frequency induction welding
WO2021073158A1 (en) * 2019-10-15 2021-04-22 昆山联德电子科技有限公司 Thin capillary structure supporting vapor chamber

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