CN203450845U - Wafer taking mechanical arm - Google Patents
Wafer taking mechanical arm Download PDFInfo
- Publication number
- CN203450845U CN203450845U CN201320451596.8U CN201320451596U CN203450845U CN 203450845 U CN203450845 U CN 203450845U CN 201320451596 U CN201320451596 U CN 201320451596U CN 203450845 U CN203450845 U CN 203450845U
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- handgrip
- finger
- electric actuator
- air cylinder
- tongs
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Abstract
The utility model discloses a wafer taking mechanical arm. The wafer taking mechanical arm comprises an electronic control device and a mechanical arm body. The mechanical arm body is mainly composed of a support, an electric actuator, a tongs beam, an up-down air cylinder, a finger air cylinder and tongs, wherein the electric actuator is arranged on the support, the tongs beam is arranged on a working face of the electric actuator in a sliding mode and extends outward, the up-down air cylinder is fixed to the extending end of the tongs beam, the finger air cylinder is arranged on the up-down air cylinder, and the tongs are fixed to the power output end of the finger air cylinder. The electronic control device controls the electric actuator and the up-down air cylinder to drive the tongs beam and the finger air cylinder respectively so that front-back movement and up-down movement of the tongs can be achieved. After the tongs are judged to reach the designated position, the electronic control device controls the finger air cylinder to drive the tongs to gather together so as to take a silicon wafer to rise and then controls the finger air cylinder to drive the tongs to horizontally move to the designated position. When it is judged that no silicon wafer exists below the tongs, the electronic control device controls the tongs to open so as to release the silicon wafer. By means of the wafer taking mechanical arm, silicon wafers can be automatically transmitted, work efficiency is improved, labor intensity is lowered, and the possibility that the silicon wafers are contaminated is lowered.
Description
Technical field
The utility model relates to a kind of for transmit the slice getting device of silicon chip at crystal silicon solar energy battery manufacturing process, particularly a kind of sheet manipulator of getting.
Background technology
At present, in crystal silicon solar energy battery manufacturing process, conventionally adopt manipulator to transmit silicon chip by the monolithic mode of picking up.Existing manipulator comprises sucker, motor and vacuum pump, and motor drives sucker to move to the top of silicon chip, and vacuum pump is adsorbed on silicon chip on sucker after to suction disc vacuum pumping, and sucker moves to destination locations again, removes vacuum suction, thereby complete silicon chip, transmits.
But there is following defect in existing machinery hand: (1), in silicon chip transport process, sucker adsorbs silicon chip, and area of contact is larger, easily pollutes silicon chip; (2) the flexibility of motor is poor and cost is high.
Utility model content
The purpose of this utility model be to provide a kind of cost lower, can reduce wafer contamination probability, can increase work efficiency, realize automatic biography sheet get sheet manipulator.
Above-mentioned purpose of the present utility model realizes by following technical measures: a kind of sheet manipulator of getting, comprise electrical controller and manipulator, it is characterized in that: described manipulator is mainly by support, electric actuator, handgrip beam, upper and lower air cylinders, finger cylinder and handgrip form, described electric actuator is arranged on described support, described handgrip beam is slidably mounted on the driving surface of electric actuator and stretches out by electric actuator and drives handgrip beam to move forward and backward, described upper and lower air cylinders is fixed on the external part of described handgrip beam, described finger cylinder is arranged on described upper and lower air cylinders and drives finger cylinder to move up and down by upper and lower air cylinders, and described handgrip is fixed on the clutch end of finger cylinder and is gathered or opened by finger air cylinder driven handgrip, described electrical controller is controlled electric actuator, upper and lower air cylinders drives respectively handgrip beam, finger cylinder to realize handgrip and move forward and backward and move up and down, and judgement arrives after assigned address, controlling finger air cylinder driven handgrip gathers and picks up silicon chip and rise, move to after assigned address, and judge when handgrip below does not have silicon chip, control handgrip and open release silicon chip.
The transmission that the utility model adopts that electric actuator, upper and lower air cylinders and finger cylinder realize respectively that handgrip moves forward and backward, lifting moving and picking and placeing has been moved silicon chip, can realize automatic biography sheet, improved work efficiency, reduced the labour intensity of operating personal, and handgrip crawl silicon chip, reduced the contaminated probability of silicon chip; In addition, adopt electric actuator, upper and lower air cylinders and finger cylinder as driver train, flexible, and also cost is lower.
Support described in the utility model is by vertical plate body, horizontal plate body and forming for rack-mounted permanent seat, described permanent seat is arranged on the upper end of vertical plate body, the lower end of described vertical plate body is arranged on the upper face of horizontal plate body, and described electric actuator is arranged on the lower face of horizontal plate body by electric actuator adapter plate.
Preferably, described vertical plate body and horizontal plate body all adopt aluminium section bar to make.
As a kind of embodiment of the present utility model, described handgrip is by handgrip slide rail, gripper frame and hook form, described handgrip slide rail is at least a pair of, each handgrip slide rail is the blocks of " П " shape and is horizontal positioned, handgrip slide rail comprises the travelling arm that connecting portion is parallel with being positioned at these connecting portion two ends, described connecting portion is fixed on the clutch end of pointing cylinder and these two opposing settings of handgrip slide rail, the upper surface of described travelling arm has the chute connecting along its length, described gripper frame is bar shaped block, described gripper frame is slidably mounted in chute, the outer end that described hook is vertically fixed on gripper frame forms the jaws that clamps silicon chip.The limit of handgrip folding, by handgrip slide control on handgrip slide rail, can adapt to the silicon chip that captures different size.
The two sides of electric actuator adapter plate described in the utility model have breach, between described electric actuator adapter plate and horizontal plate body, be provided with lacing film, the bottom adaptation of described lacing film is fixed in breach, and its top is fixed on realizes on the side of horizontal plate body electric actuator adapter plate and horizontal being connected of plate body.
As a kind of optimal way of the present utility model, described upper and lower air cylinders is positioned on the end face of described finger cylinder, between the two, be provided with finger air cylinder fixed plate, described finger air cylinder fixed plate is the plates that middle facial planes raises up, the power take-off shaft of described upper and lower air cylinders is fixed on the middle facial planes of finger air cylinder fixed plate, and has gap between the end of this power take-off shaft and the end face of finger cylinder.
In order to prevent that the power take-off shaft of upper and lower air cylinders from rotating, as a kind of improvement of the present utility model, on the middle facial planes of described finger air cylinder fixed plate, be provided with the sheet anti-rotation clamping plate of level, described anti-rotation clamping plate are " H " shape, form two jaws, the power take-off shaft of described upper and lower air cylinders is that two relative side is the cylindrical body of plane, and the power take-off shaft of described upper and lower air cylinders is stuck in one of them jaws of anti-rotation clamping plate.
Electrical controller described in the utility model comprises sensor, controller and for the control circuit of electric power is provided, the position of described Sensor monitoring handgrip action and the location status of silicon chip also feed back to controller by these information, send instruction move to control handgrip by controller.
Described sensor adopts two pairs, wherein pair of sensors is used for monitoring handgrip lifting position, this is arranged on the external part of described handgrip beam and near upper and lower air cylinders by sensor fixation plate to sensor, sensor fixation plate is vertical with the side of handgrip beam, is provided with sensor-triggered plate and is used for triggering this to sensor in finger air cylinder fixed plate; Another pair of sensors is used for monitoring handgrip folding condition, and this is being pointed on the side of cylinder sensor setting, and is positioned at the below of upper and lower air cylinders.
When operation, opto-electronic pickup detects silicon chip and whether arrives assigned address, arrive after assigned address handgrip carry out open, move down, closed, upper mobile work pick up silicon chip and mention, handgrip picks up silicon chip and mentions backward next position translation, arrive after assigned address, if sensor detects handgrip, below does not have silicon chip, and handgrip can be carried out to open to move silicon chip is fallen.By above operation scheme make silicon chip by a position transfer to another position.
Electrical controller described in the utility model also comprises alternating interface between man and computer, and described alternating interface between man and computer is by delay parameter and the start/stop instruction of manually inputting handgrip action.
Compared with prior art, the utlity model has following significant effect:
The transmission that the utility model adopts that electric actuator, upper and lower air cylinders and finger cylinder realize respectively that handgrip moves forward and backward, lifting moving and picking and placeing has been moved silicon chip, can realize automatic biography sheet, improved work efficiency, reduced the labour intensity of operating personal, and handgrip crawl silicon chip, reduced the contaminated probability of silicon chip; In addition, adopt electric actuator, upper and lower air cylinders and finger cylinder as driver train, flexible, and also cost is lower.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is constructional drawing of the present utility model;
Fig. 2 is the local enlarged diagram of A in Fig. 1;
Fig. 3 is the constructional drawing of electric actuator adapter plate;
Fig. 4 is the constructional drawing of handgrip slide rail;
Fig. 5 is the lateral plan of finger air cylinder fixed plate;
Fig. 6 is the upward view of finger air cylinder fixed plate;
Fig. 7 is the birds-eye view of anti-rotation clamping plate.
The specific embodiment
As shown in Fig. 1～7, it is a kind of sheet manipulator of getting of the utility model, comprise electrical controller and manipulator, manipulator is mainly by support, electric actuator 1, handgrip beam 2, upper and lower air cylinders 3, finger cylinder 4 and handgrip form, electric actuator 1 is arranged on support, handgrip beam 2 is slidably mounted on the driving surface of electric actuator 1 and stretches out by electric actuator 1 and drives handgrip beam 2 to move forward and backward, the side of handgrip beam 2 has the logical gap matching with electric actuator 1, upper and lower air cylinders 3 is fixed on the external part of handgrip beam 2 by upper and lower air cylinders adapter plate 21, finger cylinder 4 is arranged on upper and lower air cylinders 3 and drives finger cylinder to move up and down by upper and lower air cylinders, and handgrip is fixed on the clutch end of finger cylinder 4 and is gathered or opened by finger air cylinder driven handgrip, electrical controller is controlled electric actuator, upper and lower air cylinders drives respectively handgrip beam, finger cylinder to realize handgrip and move forward and backward and move up and down, and judgement arrives after assigned address, controlling finger air cylinder driven handgrip gathers and picks up silicon chip and rise, move to after assigned address, and judge when handgrip below does not have silicon chip, control handgrip and open release silicon chip.
Support is by vertical plate body 5, horizontal plate body 6 and forming for rack-mounted permanent seat 7, vertical plate body and laterally plate body all adopt aluminium section bar, permanent seat 7 is arranged on the upper end of vertical plate body 5, the lower end of vertical plate body 5 is arranged on the upper face of horizontal plate body 6, at the two connecting portion, be provided with reinforcement 18, on vertical plate body 5, be provided with fixed hook 22, electric actuator is arranged on the lower face of horizontal plate body by electric actuator adapter plate 19.As shown in Figure 3, the two sides of electric actuator adapter plate 19 have breach 20, between electric actuator adapter plate 19 and horizontal plate body, be provided with lacing film 11, the bottom adaptation of lacing film 11 is fixed in breach 20, and its top is fixed on realizes on the side of horizontal plate body 6 electric actuator adapter plate 19 and horizontal being connected of plate body 6.
Handgrip is by handgrip slide rail 8, gripper frame 9 and hook 10 form, handgrip slide rail 8 is a pair of, each handgrip slide rail 8 is blockss of " П " shape and is horizontal positioned, handgrip slide rail 8 comprises the travelling arm 82 that connecting portion 81 is parallel with being positioned at these connecting portion 81 two ends, connecting portion 81 is fixed on the clutch end of pointing cylinder and these two handgrip slide rails are symmetrical arranged, the upper surface of travelling arm 82 has the chute 83 connecting along its length, referring to Fig. 4, gripper frame 9 is bar shaped blocks, gripper frame is provided with the microscler through hole of up/down perforation along its length, gripper frame 9 is slidably mounted in chute, by microscler through hole, coordinate jointly that gripper frame is spacing in chute with the limited post in being arranged on this through hole, the outer end that hook 10 is vertically fixed on gripper frame 9 forms the jaws that clamps silicon chip.The limit of handgrip folding, by handgrip slide control on handgrip slide rail, can adapt to the silicon chip that captures different size.
Upper and lower air cylinders 3 is positioned on the end face of finger cylinder 4, between the two, be provided with finger air cylinder fixed plate 13, referring to Fig. 5,6, finger air cylinder fixed plate 13 is plates that middle facial planes raises up, the power take-off shaft of upper and lower air cylinders 3 is fixed on the middle facial planes of finger air cylinder fixed plate 13, and has gap between the end of this power take-off shaft and the end face of finger cylinder.As shown in Figure 7, on the middle facial planes of finger air cylinder fixed plate 13, be provided with the sheet anti-rotation clamping plate 14 of level, anti-rotation clamping plate 14 are " H " shape, form two jaws, the power take-off shaft of upper and lower air cylinders 3 is that two relative side is the cylindrical body of plane, and the power take-off shaft of upper and lower air cylinders is stuck in one of them jaws of anti-rotation clamping plate.The power take-off shaft that prevents upper and lower air cylinders rotates,
Electrical controller comprises sensor, controller, for control circuit and the alternating interface between man and computer of electric power are provided, control circuit is mainly left with contactless switch and is formed by sky, controls the electric energy of whole device and supplies with.Sensor adopts two pairs, wherein pair of sensors 15 is for monitoring handgrip lifting position, this is arranged on the external part of handgrip beam 2 and near upper and lower air cylinders by sensor fixation plate 16 to sensor, sensor fixation plate 16 is vertical with the side of handgrip beam 2, is provided with sensor-triggered plate 17 and is used for triggering this to sensor in finger air cylinder fixed plate; Another pair of sensors 24 is for monitoring handgrip folding condition, and this is arranged in the groove of finger cylinder side sensor 24, and is positioned at the below of upper and lower air cylinders.The position of Sensor monitoring handgrip action and the location status of silicon chip also feed back to controller by these information, send instruction move to control handgrip by controller.Alternating interface between man and computer is by delay parameter and the start/stop instruction of manually inputting handgrip action.
Working process of the present utility model is as follows: this device is when operation, opto-electronic pickup detects silicon chip and whether arrives assigned address, arrive after assigned address and by controller (PLC), to be controlled respectively that finger cylinder drives handgrip to carry out with upper and lower air cylinders to open, moves down, closed, the upper work that moves picks up silicon chip and mentions, control again electric actuator to next position translation, arrive after assigned address, if opto-electronic pickup detects handgrip, below does not have silicon chip, and handgrip can be carried out to open to move silicon chip is fallen.By above operation scheme make silicon chip by a position transfer to another position.In said process, handgrip captures silicon chip, has reduced the contaminated probability of silicon chip, adopts electric actuator, upper and lower air cylinders and finger cylinder as driver train, flexible, and cost is lower.
Embodiment of the present utility model is not limited to this; according to foregoing of the present utility model; according to ordinary skill knowledge and the customary means of this area, the utility model can also be made modification, replacement or the change of other various ways, within all dropping on the utility model rights protection scope.
Claims (10)
1. get sheet manipulator for one kind, comprise electrical controller and manipulator, it is characterized in that: described manipulator is mainly by support, electric actuator, handgrip beam, upper and lower air cylinders, finger cylinder and handgrip form, described electric actuator is arranged on described support, described handgrip beam is slidably mounted on the driving surface of electric actuator and stretches out by electric actuator and drives handgrip beam to move forward and backward, described upper and lower air cylinders is fixed on the external part of described handgrip beam, described finger cylinder is arranged on described upper and lower air cylinders and drives finger cylinder to move up and down by upper and lower air cylinders, and described handgrip is fixed on the clutch end of finger cylinder and is gathered or opened by finger air cylinder driven handgrip, described electrical controller is controlled electric actuator, upper and lower air cylinders drives respectively handgrip beam, finger cylinder to realize handgrip and move forward and backward and move up and down, and judgement arrives after assigned address, controlling finger air cylinder driven handgrip gathers and picks up silicon chip and rise, move to after assigned address, and judge when handgrip below does not have silicon chip, control handgrip and open release silicon chip.
2. the sheet manipulator of getting according to claim 1, it is characterized in that: described support is by vertical plate body, horizontal plate body and forming for rack-mounted permanent seat, described permanent seat is arranged on the upper end of vertical plate body, the lower end of described vertical plate body is arranged on the upper face of horizontal plate body, and described electric actuator is arranged on the lower face of horizontal plate body by electric actuator adapter plate.
3. the sheet manipulator of getting according to claim 2, it is characterized in that: described handgrip is by handgrip slide rail, gripper frame and hook form, described handgrip slide rail is at least a pair of, each handgrip slide rail is the blocks of " П " shape and is horizontal positioned, handgrip slide rail comprises the travelling arm that connecting portion is parallel with being positioned at these connecting portion two ends, described connecting portion is fixed on the clutch end of pointing cylinder and these two handgrip slide rails are symmetrical arranged, the upper surface of described travelling arm has the chute connecting along its length, described gripper frame is bar shaped block, described gripper frame is slidably mounted in chute, the outer end that described hook is vertically fixed on gripper frame forms the jaws that clamps silicon chip.
4. the sheet manipulator of getting according to claim 3, it is characterized in that: the two sides of described electric actuator adapter plate have breach, between described electric actuator adapter plate and horizontal plate body, be provided with lacing film, the bottom adaptation of described lacing film is fixed in breach, and its top is fixed on realizes on the side of horizontal plate body electric actuator adapter plate and horizontal being connected of plate body.
5. the sheet manipulator of getting according to claim 4, it is characterized in that: described upper and lower air cylinders is positioned on the end face of described finger cylinder, between the two, be provided with finger air cylinder fixed plate, described finger air cylinder fixed plate is the plates that middle facial planes raises up, the power take-off shaft of described upper and lower air cylinders is fixed on the middle facial planes of finger air cylinder fixed plate, and has gap between the end of this power take-off shaft and the end face of finger cylinder.
6. the sheet manipulator of getting according to claim 5, it is characterized in that: the sheet anti-rotation clamping plate that are provided with level on the middle facial planes of described finger air cylinder fixed plate, described anti-rotation clamping plate are " H " shape, form two jaws, the power take-off shaft of described upper and lower air cylinders is that two relative side is the cylindrical body of plane, and the power take-off shaft of described upper and lower air cylinders is stuck in one of them jaws of anti-rotation clamping plate.
7. the sheet manipulator of getting according to claim 6, it is characterized in that: described electrical controller comprises sensor, controller and for the control circuit of electric power is provided, the position of described Sensor monitoring handgrip action and the location status of silicon chip also feed back to controller by these information, send instruction move to control handgrip by controller.
8. the sheet manipulator of getting according to claim 7, it is characterized in that: described sensor adopts two pairs, wherein pair of sensors is used for monitoring handgrip lifting position, this is arranged on the external part of described handgrip beam and near upper and lower air cylinders by sensor fixation plate to sensor, sensor fixation plate is vertical with the side of handgrip beam, is provided with sensor-triggered plate and is used for triggering this to sensor in finger air cylinder fixed plate; Another pair of sensors is used for monitoring handgrip folding condition, and this is being pointed on the side of cylinder sensor setting, and is positioned at the below of upper and lower air cylinders.
9. the sheet manipulator of getting according to claim 8, is characterized in that: described electrical controller also comprises alternating interface between man and computer, and described alternating interface between man and computer is by delay parameter and the start/stop instruction of manually inputting handgrip action.
10. the sheet manipulator of getting according to claim 9, is characterized in that: described vertical plate body and laterally plate body all adopt aluminium section bar to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320451596.8U CN203450845U (en) | 2013-07-26 | 2013-07-26 | Wafer taking mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320451596.8U CN203450845U (en) | 2013-07-26 | 2013-07-26 | Wafer taking mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203450845U true CN203450845U (en) | 2014-02-26 |
Family
ID=50130742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320451596.8U Expired - Fee Related CN203450845U (en) | 2013-07-26 | 2013-07-26 | Wafer taking mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203450845U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104526166A (en) * | 2014-12-25 | 2015-04-22 | 深圳雷柏科技股份有限公司 | Jig, feeding mechanism with jig and laser equipment |
| CN104985607A (en) * | 2015-08-10 | 2015-10-21 | 苏州驱指自动化科技有限公司 | Chute finger |
| CN105501963A (en) * | 2016-01-11 | 2016-04-20 | 厦门市富桥机械有限公司 | Intelligent board grabbing machine |
| CN110899488A (en) * | 2019-12-27 | 2020-03-24 | 重庆美心·麦森门业有限公司 | Intelligent door plate processing production line |
-
2013
- 2013-07-26 CN CN201320451596.8U patent/CN203450845U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104526166A (en) * | 2014-12-25 | 2015-04-22 | 深圳雷柏科技股份有限公司 | Jig, feeding mechanism with jig and laser equipment |
| CN104985607A (en) * | 2015-08-10 | 2015-10-21 | 苏州驱指自动化科技有限公司 | Chute finger |
| CN105501963A (en) * | 2016-01-11 | 2016-04-20 | 厦门市富桥机械有限公司 | Intelligent board grabbing machine |
| CN105501963B (en) * | 2016-01-11 | 2024-05-24 | 厦门市富桥科技有限公司 | Intelligent plate grabbing machine |
| CN110899488A (en) * | 2019-12-27 | 2020-03-24 | 重庆美心·麦森门业有限公司 | Intelligent door plate processing production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140226 |
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| CF01 | Termination of patent right due to non-payment of annual fee |