CN203385466U - Electric drive symmetrical plunger type gas micro flow standard device - Google Patents
Electric drive symmetrical plunger type gas micro flow standard device Download PDFInfo
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- CN203385466U CN203385466U CN201320336503.7U CN201320336503U CN203385466U CN 203385466 U CN203385466 U CN 203385466U CN 201320336503 U CN201320336503 U CN 201320336503U CN 203385466 U CN203385466 U CN 203385466U
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- plunger
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Abstract
The utility model discloses an electric drive symmetrical plunger type gas micro flow standard device. A right cylinder is fixed between a right support and a transmission end plate, and a left cylinder is fixed between a transmission support and a buffering tank. A plunger is arranged to be coaxial with the left cylinder and the right cylinder horizontally. The right cylinder is communicated with the left cylinder through a bi-directional flow indicator. A ball screw is arranged between the transmission end plate and the transmission support. The plunger is connected with a T-shaped connection block. A shoulder of the T-shaped connection block is matched with linear guide tracks on top faces on two sides of the transmission support. The lower portion of the T-shaped connection block is fixedly connected with a lead screw nut. A stepping motor with an encoder is connected with the right end of the ball screw through a reducer and a diaphragm coupler, a temperature transmitter is arranged on the top side of the buffering tank, an inlet of a detected flow meter is communicated with the buffering tank, and a flow controller is arranged at the outlet position of the detected flow meter. By means of complete complementary symmetry of volume variation in the left cylinder and the right cylinder during plunger movement, fluctuation of temperature and pressure of gas in the cylinders during detection is reduced, micro flow measuring is achieved, and meanwhile high-pressure measuring can be achieved.
Description
Technical field
The utility model relates to a kind of flow measurement device, especially relates to a kind of electricity and drives symmetric plunger formula gas tiny flow quantity standard set-up.
Background technology
In recent years, the gas small amount of flow measuring is more and more general with the application that is controlled at the fields such as semiconductor manufacturing industry, medical science chemical industry, food hygiene, bioengineering, new and high technology, the assay calibration of tiny flow quantity relevant appliance becomes one of the important branch in flow metering field instantly, usually, by the scope definition of tiny flow quantity below 10mL/min.
Current, small measurement of gas flow technology mainly contains following several: soap film type installation method, pressure volume temperature-time (PVTt) method, quality time (mt) method, constant pressure type, capacity method (as piston type) etc., development along with mechanical & electrical technology, the development of capacity method rapidly, wherein typical with piston type.
Traditional piston type standard set-up is steadily to be moved by actuating unit driven plunger or plunger, by the space extruding, produces stable flow.When carrying out the tiny flow quantity metering, the extruding in space can change the state of gas on the one hand, makes measuring accuracy reduce, and on the other hand, if measurement instrument under condition of high voltage, actuating unit has huge load, is difficult to realize.
Summary of the invention
In order to solve the problem existed in background technology, the purpose of this utility model is to provide a kind of electricity and drives symmetric plunger formula gas tiny flow quantity standard set-up, the measurement and calibration of available small gas flow utensil.
In order to achieve the above object, the technical solution adopted in the utility model is:
Right support of the present utility model, transmission end plate, transmission bracket, surge tank, tested flowmeter, flow controller, pressure unit and electric machine support are separately fixed on substrate; Right cylinder is fixed between right support and transmission end plate, and right support has air intake opening and is communicated with right cylinder; Left cylinder is fixed between transmission bracket and surge tank, and surge tank is communicated with left cylinder gas outlet; Plunger and left cylinder and right cylinder level are coaxially installed, and, respectively by the motive seal of twice O type circle, the twice O type circle of left cylinder is near transmission bracket, and the twice O type circle of right cylinder is near the transmission end plate; Right cylinder gas outlet is communicated with left cylinder air inlet through the bidirectional traffics indicator, and its right cylinder gas outlet is near its O type circle right side, and left cylinder air inlet is near its O type circle left side; Between transmission end plate and transmission bracket, ball-screw is installed, ball-screw be positioned at plunger under; Plunger axis has groove to middle part, T-shaped contiguous block top has through hole, and T-shaped contiguous block top has the plane groove be communicated with through hole, plunger is through the through hole on T-shaped contiguous block top, latch segment is fastened in the plane groove of T-shaped contiguous block, bottom is pressed into the plunger groove, realizes being rigidly connected of plunger and T-shaped contiguous block; Before and after T-shaped contiguous block, the shoulder downside is installed respectively slide block, and slide block matches with the line slideway that before and after transmission bracket, the both sides end face is corresponding; The feed screw nut coordinated with ball-screw is fixed on the bottom of T-shaped contiguous block; Stepper motor is connected with the ball-screw right-hand member with diaphragm coupling through reductor, and the right side of stepper motor is equipped with scrambler, and reductor and diaphragm coupling are separately fixed at right side and the left side of electric machine support; Temperature transmitter is arranged on the surge tank top side, and pressure unit is arranged on the right side of surge tank, and tested flowmeter entrance is communicated with surge tank, and flow controller is arranged on the exit of tested flowmeter.
Have between described right cylinder twice O type circle to survey and let out hole, have between left cylinder twice O type circle to survey and let out hole, differential pressure transmitter is let out hole by pipeline with two surveys and is connected.
The beneficial effect the utlity model has is:
1. the gas that certain pressure intensity is supplied with in the utility model upstream is to two cylinder interior, and flow regulation is completed by flow controller, and during metering, the fluctuation that plunger motion produces can be compensated by the left and right cylinder body, so the gaseous state fluctuation is little, can realize the tiny flow quantity accurate measurement; During the calibrating sonic nozzle, system does not need to install flow controller, and system can directly be examined and determine sonic nozzle.
2. the utility model interconnects by the left and right cylinder, makes plunger front and back pressure equate, the load of actuating unit is only kinetic friction between parts, can realize the gases at high pressure metering.
3. the utility model can be used for examining and determine fast sonic nozzle that flow range is (5-1000) mL/h, mass flowmeter, laminar flow flowmeter etc.
4. the utlity model has the characteristics such as precision is high, pressure is adjustable, reliable operation, easy to operate, the calibrating time is short.
The accompanying drawing explanation
Fig. 1 is structural principle schematic diagram of the present utility model.
Fig. 2 is spatial structure principle schematic of the present utility model.
In figure: 1, air intake opening, 2, right support, 3, right cylinder, 4, O type circle, 5, the transmission end plate, 6, plunger, 7, latch segment, 8, T-shaped contiguous block, 9, transmission bracket, 10, left cylinder, 11, temperature transmitter, 12, surge tank, 13, tested flowmeter, 14, flow controller, 15, pipeline, 16, pressure unit, 17, the spring bearing lid, 18, deep groove ball bearing, 19, feed screw nut, 20, ball-screw, 21, angular contact ball bearing, 22, the solid bearing lid, 23, set nut, 24, diaphragm coupling, 25, electric machine support, 26, reductor, 27, stepper motor, 28, scrambler, 29, substrate, 30, the bidirectional traffics indicator, 31, slide block, 32, differential pressure transmitter, 33, line slideway.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
As shown in Figure 1 and Figure 2, right support 2, transmission end plate 5, transmission bracket 9, surge tank 12, tested flowmeter 13, flow controller 14, pressure unit 16 and electric machine support 25 are separately fixed on substrate 29; Right cylinder 3 is fixed between right support 2 and transmission end plate 5, adopt rubber washer to guarantee the sealing between connection, have air intake opening 1 on right support 2 and be communicated with right cylinder 3, the source of the gas that pressure stability and pressure are adjustable enters right cylinder body 3 inside, the traffic sources during as gas dosing from air intake opening 1.
As shown in Figure 1 and Figure 2, transmission end plate 5 is as the connection object of right cylinder 3 and ball-screw 20 fixation side, and transmission end plate 5 directly is fastened on transmission bracket 9, and transmission end plate 5 forms gear train with transmission bracket 9; Left cylinder 10 is arranged between transmission bracket 9 and surge tank 12, surge tank 12 serves as the fixed support of left cylinder 10 on the one hand, mainly that the installation for temperature transmitter 11 and pressure unit 16 provides space on the other hand in order further to alleviate the fluctuation of internal system gas; The horizontal coaxial cooperation of plunger 6 is arranged in the middle of the cylinder of left and right, and three's right alignment is had relatively high expectations, and with the axis parallel degree of ball-screw 20, high-precision requirement is also arranged simultaneously; Realize motive seal by twice O type circle 4 respectively between plunger 6 and left and right inboard wall of cylinder block, have between the twice O type circle of right cylinder to survey and let out hole, have between the twice O type circle of left cylinder to survey and let out hole, differential pressure transmitter 32 is let out hole by pipeline with two surveys and is connected; Right cylinder has gas outlet near O type circle right side, and left cylinder has air intake opening near O type circle left side, and the gas outlet of right cylinder and the air intake opening of left cylinder are connected to respectively the two ends of bidirectional traffics indicator.
As shown in Figure 1 and Figure 2, the feed screw nut 19 coordinated with ball-screw 20 is fixed on T-shaped contiguous block 8 bottoms, plunger 6 is through the through hole on T-shaped contiguous block 8 tops, plunger 6 axially middle part has groove, T-shaped contiguous block 8 tops have the plane groove be communicated with through hole, and latch segment 7 is fastened in the plane groove of T-shaped contiguous block 8, and latch segment 7 bottoms are pressed into plunger 6 grooves, realize being rigidly connected of plunger 6 and ball-screw 20, realize plunger 6 axially and location radially simultaneously; T-shaped contiguous block 8 front and back shoulder downsides are installed respectively slide block 31, and the line slideway 33 matched with slide block 31 is arranged on transmission bracket 9 both sides, front and back end faces, vibration radially when plunger 6 motion is subdued in the cooperation of slide block 31 and line slideway 33; Ball-screw 20 adopts the mounting means of fixing-support, wherein, fixation side mainly is comprised of pair of horns contact ball bearing 21, solid bearing lid 22 and set nut 23, wherein angular contact ball bearing 21 outer ring interference fit are arranged on the endoporus of solid bearing lid 22, solid bearing covers the bottom surface that 22 left ends push up the mounting hole of transmission end plate 5, right-hand member is arranged on the surface of transmission end plate 5 through ring flange, on ball-screw 20 axles after ring flange, set nut 23 is installed, realizes radially fixing of ball-screw 20; The support-side of ball-screw 20 is comprised of deep groove ball bearing 18 and spring bearing lid 17, and wherein deep groove ball bearing 18 outer ring interference fit are arranged in the endoporus of spring bearing lid 17, and spring bearing lid 17 is arranged on transmission bracket 9 by its ring flange.
As shown in Figure 1 and Figure 2, ball-screw 20 and reductor 26 are realized being connected of axle and axle by diaphragm coupling 24, being arranged on electric machine support 25 of reductor 26, stepper motor 27 is arranged on reductor 26 by flange, and the axle of stepper motor 27, reductor 26, ball-screw 20 remains on the same level axis as far as possible; Scrambler 28 is arranged on the right side of stepper motor 27, by the position feedback of plunger to control system; Stepper motor 27 is driven by TT&C system, and the control parameter of given appointment can realize the stable motion of plunger 6 corresponding speeds, and the parameter of coupling apparatus can realize the accurate measurement of gas flow.
As shown in Figure 1 and Figure 2, tested flowmeter 13 entrances are connected to surge tank 12 by pipeline, outlet is connected to flow controller 14 through pipeline 15, and the connection of flow controller 14 is connected to TT&C system, can write the flow control that order completes whole system by host computer.
As shown in Figure 1 and Figure 2, principle of work of the present utility model is:
This invention is usingd plunger 6 as the volumetric metering standard.During this device work, the upstream source of the gas continues to provide pressure stability and the adjustable gas of pressure, gas flows into right cylinder 3 inside through the air intake opening 1 of right support 2, through bidirectional traffics indicator 30, enters left cylinder 10 until be full of whole system, enters gas after cylinder very soon in pressure equilibrium; Flow value by host computer adjust flux controller 14 (supposes that flow is Q
0), due to the gaseous tension provided of source of the gas, always higher than the flow controller endpiece, under the effect of pressure reduction, system can produce the setting flow Q of flow controller
0; Computer-controlled stepper motor 27 (is flow Q with a certain speed v
s) driving the ball-screw rotation, plunger 6 is done translation motion under the drive of ball-screw 20, and plunger 6 travels forward and enters left cylinder 10, detaches right cylinder 3 simultaneously; The left and right cylinder of plunger 6 has equal diameter d
k, the flow that plunger is discharged is:
Plunger 6 motions cause that left cylinder 10 and right cylinder 3 produce respectively Q
k1and Q
k2flow value, the speed of plunger 6 motions is determined jointly by the rotational frequency f of stepper motor 27 and the pitch s of screw mandrel.
Gas flow Q when the left and right cylinder of plunger 6 displacement
sequal to flow through the flow Q of tested flowmeter
0the time, bidirectional traffics indicator indicating value equals 0, and cylinder interior pressure, temperature T be in equilibrium state, the parameters such as control system real time record stepper motor step-length and speed, plunger position, temperature, pressure, time; If Q
sbe not equal to Q
0the time, bidirectional traffics indicator indicating value is non-vanishing, and feedback system can, according to parameter adjustment plunger motion speed v, make it finally to reach equilibrium state.Due to the full remuneration of left and right cylinder, plunger motion is regulated and can the flow of tested flowmeter not exerted an influence; Finally, read the indicating value of bidirectional traffics indicator, according to last definite operational factor, the apparatus structure calculation of parameter of stepper motor, go out the flow that plunger motion produces, calculate the normal flow of tested flowmeter, tested flowmeter is carried out to assay calibration.
Claims (2)
1. an electricity drives symmetric plunger formula gas tiny flow quantity standard set-up, and it is characterized in that: right support (2), transmission end plate (5), transmission bracket (9), surge tank (12), tested flowmeter (13), flow controller (14), pressure unit (16) and electric machine support (25) are separately fixed on substrate (29); Right cylinder (3) is fixed between right support (2) and transmission end plate (5), and right support (2) has air intake opening (1) and is communicated with right cylinder (3); Left cylinder (10) is fixed between transmission bracket (9) and surge tank (12), and surge tank (12) is communicated with left cylinder (10) gas outlet; Plunger (6) is coaxially installed with left cylinder (10) and right cylinder (3) level, and respectively by twice O type circle (4) motive seal, the twice O type circle of left cylinder (10) is near transmission bracket (9), and the twice O type circle of right cylinder (2) is near transmission end plate (5); Right cylinder (3) gas outlet is communicated with left cylinder (10) air intake opening through bidirectional traffics indicator (30), and its right cylinder (3) gas outlet is near its O type circle right side, and left cylinder (10) air intake opening is near its O type circle left side; Between transmission end plate (5) and transmission bracket (9), ball-screw (20) is installed, ball-screw (20) be positioned at plunger (6) under; Plunger (6) axially middle part has groove, T-shaped contiguous block (8) top has through hole, and T-shaped contiguous block (8) top has the plane groove be communicated with through hole, plunger (6) is through the through hole on T-shaped contiguous block (8) top, latch segment (7) is fastened in the plane groove of T-shaped contiguous block (8), bottom is pressed into plunger (6) groove, realizes being rigidly connected of plunger (6) and T-shaped contiguous block (8); Before and after T-shaped contiguous block (8), the shoulder downside is installed respectively slide block (31), and slide block (31) matches with the line slideway (33) that before and after transmission bracket (9), the both sides end face is corresponding; The feed screw nut (19) coordinated with ball-screw (20) is fixed on the bottom of T-shaped contiguous block (8); The stepper motor (27) of band scrambler (28) is connected with ball-screw (20) right-hand member with diaphragm coupling (24) through reductor (26), and reductor (26) and diaphragm coupling (24) are separately fixed at right side and the left side of electric machine support (25); Temperature transmitter (11) is arranged on surge tank (12) top side, pressure unit (16) is arranged on the right side of surge tank (12), tested flowmeter (13) entrance is communicated with surge tank (12), and flow controller (14) is arranged on the exit of tested flowmeter (13).
2. symmetric plunger formula gas tiny flow quantity standard set-up according to claim 1, it is characterized in that: have between described right cylinder (3) twice O type circle to survey and let out hole, have between left cylinder (10) twice O type circle to survey and let out hole, differential pressure transmitter (32) is let out hole by pipeline with two surveys and is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320336503.7U CN203385466U (en) | 2013-06-08 | 2013-06-08 | Electric drive symmetrical plunger type gas micro flow standard device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320336503.7U CN203385466U (en) | 2013-06-08 | 2013-06-08 | Electric drive symmetrical plunger type gas micro flow standard device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203385466U true CN203385466U (en) | 2014-01-08 |
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ID=49873944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320336503.7U Withdrawn - After Issue CN203385466U (en) | 2013-06-08 | 2013-06-08 | Electric drive symmetrical plunger type gas micro flow standard device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203385466U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344309A (en) * | 2013-06-08 | 2013-10-09 | 浙江省计量科学研究院 | Electrically-driven symmetric plunger gas micro flow standard device |
| CN104034395A (en) * | 2014-06-25 | 2014-09-10 | 中国计量学院 | Double-piston-type rack-gear liquid small-flow standard device |
| CN104048735A (en) * | 2014-06-25 | 2014-09-17 | 中国计量学院 | Single-piston rack and gear type liquid small-flow standard device |
| CN104165050A (en) * | 2014-08-29 | 2014-11-26 | 荆州市明德科技有限公司 | Device for directly metering oil and gas production of crude oil of single well |
| CN109099996A (en) * | 2018-09-13 | 2018-12-28 | 苏州市计量测试院 | A kind of minute gas flowmeter calibrating installation |
| CN110375967A (en) * | 2019-04-22 | 2019-10-25 | 北京航空航天大学 | It is a kind of from air-cooled piston type cylinder key parameter performance test evaluation experimental platform |
| CN112124634A (en) * | 2020-09-07 | 2020-12-25 | 兰州空间技术物理研究所 | Micro flow storage and supply device for colloid propeller |
-
2013
- 2013-06-08 CN CN201320336503.7U patent/CN203385466U/en not_active Withdrawn - After Issue
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344309A (en) * | 2013-06-08 | 2013-10-09 | 浙江省计量科学研究院 | Electrically-driven symmetric plunger gas micro flow standard device |
| CN103344309B (en) * | 2013-06-08 | 2015-08-26 | 浙江省计量科学研究院 | Electric drive symmetrical posts plug gas micro flow standard device |
| CN104034395B (en) * | 2014-06-25 | 2017-03-29 | 中国计量学院 | The liquid small flow standard device of dual Piston rack pinion |
| CN104034395A (en) * | 2014-06-25 | 2014-09-10 | 中国计量学院 | Double-piston-type rack-gear liquid small-flow standard device |
| CN104048735A (en) * | 2014-06-25 | 2014-09-17 | 中国计量学院 | Single-piston rack and gear type liquid small-flow standard device |
| CN104048735B (en) * | 2014-06-25 | 2017-02-22 | 中国计量学院 | Single-piston rack and gear type liquid small-flow standard device |
| CN104165050A (en) * | 2014-08-29 | 2014-11-26 | 荆州市明德科技有限公司 | Device for directly metering oil and gas production of crude oil of single well |
| CN109099996A (en) * | 2018-09-13 | 2018-12-28 | 苏州市计量测试院 | A kind of minute gas flowmeter calibrating installation |
| CN109099996B (en) * | 2018-09-13 | 2024-05-28 | 苏州市计量测试院 | Calibrating device for micro gas flowmeter |
| CN110375967A (en) * | 2019-04-22 | 2019-10-25 | 北京航空航天大学 | It is a kind of from air-cooled piston type cylinder key parameter performance test evaluation experimental platform |
| CN110375967B (en) * | 2019-04-22 | 2022-02-08 | 北京航空航天大学 | Self-air-cooled piston type cylinder key parameter performance test evaluation experiment table |
| CN112124634A (en) * | 2020-09-07 | 2020-12-25 | 兰州空间技术物理研究所 | Micro flow storage and supply device for colloid propeller |
| CN112124634B (en) * | 2020-09-07 | 2023-12-22 | 兰州空间技术物理研究所 | Micro-flow storage and supply device for colloid propeller |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140108 Effective date of abandoning: 20150826 |
|
| RGAV | Abandon patent right to avoid regrant |