CN202177433U - Electric drive piston type standard metering device for micro-flow - Google Patents

Electric drive piston type standard metering device for micro-flow Download PDF

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Publication number
CN202177433U
CN202177433U CN2011202640432U CN201120264043U CN202177433U CN 202177433 U CN202177433 U CN 202177433U CN 2011202640432 U CN2011202640432 U CN 2011202640432U CN 201120264043 U CN201120264043 U CN 201120264043U CN 202177433 U CN202177433 U CN 202177433U
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CN
China
Prior art keywords
piston
ball screw
guide rail
device pedestal
grating
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Expired - Lifetime
Application number
CN2011202640432U
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Chinese (zh)
Inventor
程佳
田冠亚
詹志杰
沈文新
黄震威
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Zhejiang Province Institute of Metrology
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Zhejiang Province Institute of Metrology
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Priority to CN2011202640432U priority Critical patent/CN202177433U/en
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Abstract

The utility model discloses an electric drive piston type standard metering device for micro-flow. A stepping motor is connected with one end of a ball screw through a speed reducer and a rigid coupler; the other end of the ball screw is connected with a piston hole in a sliding way; a piston cylinder is connected with a water outlet of an electromagnetic valve via a T-joint; a water inlet of the electromagnetic valve is connected with a water tank; guide rails parallel with the ball screw are respectively arranged on two cross bars of a base; two approach switches are respectively arranged at two ends of one guide rail and further electrically connected with an input terminal of a lower PLC (programmable logic controller) of a control system; a concave connection block is arranged on a sliding block of each guide rail; screws, nuts and piston ends are fixed on the side faces of connection blocks; a grating ruler is arranged on one side of the other guide rail; a grating head is arranged below an L-shaped connection plate arranged on the concave connection blocks. The shifting distance of the piston is measured by the grating ruler based on the piston principle; when the position of the piston is fed back to the control system, the shifting speed, time and position of the piston can be controlled; then, the micro-flow is metered and demarcated.

Description

A kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit
Technical field
The utility model relates to a kind of tiny flow quantity metrological standard unit, especially relates to a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit.
Background technology
Rise along with industries such as semiconductor manufacturing industry, bioengineering, medical science chemical industry makes flow measurement extend to low side, and the measurement demand of low discharge tiny flow quantity highlights gradually.Also caused increasing scientific worker's attention for the research of microfluid and the demand of tiny flow quantity measuring accuracy, tiny flow quantity metering then becomes one of measurement technology of fluid metering field instantly being badly in need of.
The generation way of traditional fluid flow standard set-up traffic sources has two kinds, and the one, the constant voltage traffic sources, this method stability of flow, but general pressure stabilizing device is bulky, and expense is higher; Another kind is to rely on flow pump that flow is provided, and flow has pulsation, poor stability.More than two kinds of methods because various shortcoming, all can't be applied to liquid tiny flow quantity measurement verification system.The metering that tiny flow quantity meter commonly used at present such as thermal mass flow meter, section's formula mass flowmeter etc. all are applied to the microfluid aspect, simultaneously, microfluidic control elements such as miniature valve, micropump, micro flowmeter are also increasing to be widely used.But because the national at present vertification regulation of not examining and determine microfluidic control elements such as miniature valve, micropump, micro flowmeter; Be difficult to guarantee this class component result's accuracy; Then can't guarantee the accurate of their detection data, so need the perfect liquid tiny flow quantity metrological standard unit of a cover.
Concluding the prior art weak point is:
1. also do not have perfect liquid tiny flow quantity metrological standard unit, can't satisfy the metering demand of liquid tiny flow quantity instantly.
2. fluid source is a key factor that influences the calibrating accuracy of tiny flow quantity system, can provide the fluid source device of regime flow and scalable flow size then to become an important difficult problem.
Summary of the invention
To disadvantages of background technology, the purpose of the utility model is to provide a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit.
The utility model solves the technical scheme that its technical matters adopted:
Stepper motor in the utility model is connected through reductor, positive coupling and the end that is supported on the ball screw of device pedestal one side, and the other end of ball screw stretches in the piston hole, is slidingly connected through guide ring and piston hole; One end of piston cylinder is connected with the device pedestal opposite side, and the other end of piston cylinder is connected through the water delivering orifice of three-way connection with the solenoid valve that is installed in the water tank side, and the water inlet of solenoid valve is connected with water tank; Be positioned on two crossbeams of device pedestal both sides a guide rail that is parallel to ball screw is installed respectively; Two two ends that are installed in a guide rail near switch respectively; Be the initial and end position of piston, two are electrically connected near the input terminal of switch with the next PLC of control system; On two guide rails slide block is installed respectively, on two slide blocks the spill contiguous block is housed, the bolt and nut and the pistons end that match with ball screw all are fixed on spill contiguous block side; Be positioned on the grating chi base of another root guide rail one side the grating chi that is parallel to ball screw is installed, L type web joint is installed on the spill contiguous block, under the L type web joint grating head that matches with the grating chi is housed.
Described device pedestal has 5 ° of acclivitous angles towards the piston cylinder direction.
Compare with background technology, the beneficial effect of the utility model is:
1. the utility model electricity driven plunger formula liquid tiny flow quantity metrological standard unit is the fairly perfect measurement verification system of a cover, can carry out assay calibration at the mass flowmeter of 0.1ml/h ~ 1000ml/h, miniature valve, micropump etc. to the tiny flow quantity scope.The expanded uncertainty of device is (0.5 ~ 1.0) % (k=2).
2. whole system has adopted the piston type principle, utilizes the displacement of optical grating ruler measurement piston simultaneously, simultaneously position of piston is fed back to control system; Control system is made up of host computer and slave computer, may command piston movement speed, time, position.This not only can carry out tiny flow quantity control fast, easily, has improved the tiny flow quantity accuracy of measuring of system simultaneously.
Description of drawings
Fig. 1 is the structural principle synoptic diagram of the utility model.
Fig. 2 is the schematic perspective view of the utility model.
Among the figure: 1, stepper motor, 2, reductor, 3, positive coupling, 4, set nut, 5, bearing cap, 6, deep groove ball bearing; 7, grating chi, 8, L type web joint, 9, bolt and nut, 10, ball screw, 11, guide ring; 12, spring collar, 13, piston, 14, piston cylinder, 15, solenoid valve, 16, water tank; 17, O RunddichtringO, 18, Glais ring, 19, wear-resisting band, 20, guide rail, 21, slide block; 22, device pedestal, 23, grating chi base, 24, near switch, 25, the spill contiguous block, 26, adapter sleeve.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further specified, it is more obvious that purpose of the utility model and effect will become.
Like Fig. 1, shown in Figure 2, the utility model electricity driven plunger formula liquid tiny flow quantity metrological standard unit comprises stepper motor 1, reductor 2, positive coupling 3, set nut 4, bearing cap 5, deep groove ball bearing 6, grating chi 7, L type web joint 8, feed screw nut 9, ball screw 10, guide ring 11, spring collar 12, piston 13, piston cylinder 14, solenoid valve 15, water tank 16 and O RunddichtringO 17, Glais ring 18, wear-resistingly is with 19, guide rail 20, slide block 21, device pedestal 22, grating chi base 23, near switch 24, spill contiguous block 25, adapter sleeve 26 and control system.Wherein, Stepper motor 1 is connected through reductor 2, positive coupling 3, adapter sleeve 26 and the end that is supported on the ball screw 10 of device pedestal 22 1 sides; The other end of ball screw 10 stretches in piston 13 holes; Be slidingly connected through guide ring 11 and piston 13 holes, guide ring 11 be fixed on ball screw 10 ends with spring collar 12.Stepper motor 1 is used for drive speed reducer 2 and carries out rotating to drive ball screw 10 rotations.Ball screw 10 connects through positive coupling 3 lockings with reductor 2, must guarantee that simultaneously stepper motor 1, reductor 2, positive coupling 3, ball screw 10 are on the same axis with piston 13.Adapter sleeve 26 is fixed on reductor 2 on the device pedestal 22, for positive coupling 3 rotation space is provided simultaneously.Deep groove ball bearing 6 provides support when rotating for ball screw 10, with bearing cap 5 it is compressed; Simultaneously set nut 4 is deep groove ball bearing 6 lockings, in order to avoid the axial force that produces during ball screw 10 axial rotation is pulled out deep groove ball bearing 6.
One end of piston cylinder 14 is connected with device pedestal 22 opposite sides; The other end of piston cylinder 14 is connected through the water delivering orifice of three-way connection with the solenoid valve 15 that is installed in water tank 16 sides; With O RunddichtringO 17 the piston cylinder outlet is sealed, the water inlet of solenoid valve 15 is connected with water tank 16.The piston crown of piston 13 and piston cylinder 14 close installation seal, wear-resistingly are with 19 to lead with Glais ring 18 simultaneously.
Device pedestal 22 has 5 ° of acclivitous angles when guaranteeing that full of liquid leaves bubble in the piston cylinder 14 towards piston cylinder 14 directions, makes things convenient for bubble to discharge piston cylinder 14 smoothly.Be positioned on two crossbeams of device pedestal 22 both sides a guide rail 20 that is parallel to ball screw 10 is installed respectively; On two guide rails 20 slide block 22 is installed respectively; On two slide blocks 22 spill contiguous block 25 is housed, the bolt and nut 9 that matches with ball screw 10 all is fixed on spill contiguous block 25 sides with piston 13 ends; Guide rail 20 guarantees the right alignment of stepper motor 1, reductor 2, positive coupling 3, ball screw 10 and piston 13 simultaneously for slide block 21 and spill contiguous block 25 provide support.Two two ends that are installed in a guide rail 20 near switch 24 respectively; It is the initial and end position of piston 13; Be electrically connected with the input terminal of the next PLC of control system, the zero-bit and the stop bit of feedback piston 13, with control piston 13 move forward and backward initial with stop.Be positioned on the grating chi base 23 of another root guide rail one side the grating chi 7 that is parallel to ball screw 10 is installed, L type web joint 8 is installed, 8 times close installation gratings of L type web joint chi 7 on the spill contiguous block 25.Grating chi 7 is given control system with the position feedback of piston 13; Control system is made up of host computer and slave computer, the movement velocity of may command piston 13, time, position.L type web joint 8 makes the grating head of spill contiguous block 25 and grating chi 7 on same surface level, measures the distance that piston moves forward and backward synchronously and accurately to guarantee that grating chi 7 can move with piston 13 when ball screw 10 rotatings drive piston 13 moves forward and backward.
As shown in Figure 2, the course of work of the utility model is:
As the metered volume standard, device drives standard metering piston cylinder 14 pistons 13 through stepper motor 1 and produces fluid sources with piston cylinder 14, through the three-way interface seized flowmeter of flowing through; Piston cylinder 14 cooperates the formation Flow Measuring System with grating chi 7, grating chi 7 is installed in ball screw 10 1 sides, gives control system with the position feedback of piston 13; Control system is made up of host computer and slave computer, may command piston 13 movement velocitys, time, position; Utilize high-accuracy electronic balance, in certain Measuring Time, promote piston 13 discharge piston cylinders 14 inner fluid quality through the Fluid Computation medium and come proving flowmeter.
The characteristics of the utility model piston type liquid tiny flow quantity metrological standard unit also are that inventive point is: carry out rotating through the step motor drive reductor and rotate to drive ball screw; The ball screw driven plunger moves forward and backward; Drive the grating chi at piston and move forward and backward the willing while, can also guarantee High Accuracy Control and metering; The 2 crossbeam upper rails and the slide block that are installed in base are that contiguous block provides support, and have not only guaranteed the right alignment of stepper motor, reductor, positive coupling, ball screw and piston, prevent the contiguous block generation uncertainty of measurement of vacillating now to the left, now to the right simultaneously; Device pedestal has the degree of tilt at 5 ° of angles, when guaranteeing that full of liquid leaves bubble in the piston cylinder, makes things convenient for bubble to discharge piston cylinder smoothly; The design that load-bearing is emitted is not only with stepper motor and reductor and device pedestal close-coupled, the space that for positive coupling reductor and connecting of ball screw is provided simultaneously; The various piece of electricity driven plunger formula liquid tiny flow quantity metrological standard unit integral body is relatively independent, and installation and maintenance is very convenient.

Claims (2)

1. electric driven plunger formula liquid tiny flow quantity metrological standard unit; It is characterized in that: stepper motor (1) is connected with an end of the ball screw that is supported on device pedestal (22) one sides (10) through reductor (2), positive coupling (3); The other end of ball screw (10) stretches in piston (13) hole, is slidingly connected through guide ring (11) and piston (13) hole; One end of piston cylinder (14) is connected with device pedestal (22) opposite side; The other end of piston cylinder (14) is connected through the water delivering orifice of three-way connection with the solenoid valve (15) that is installed in water tank (16) side, and the water inlet of solenoid valve (15) is connected with water tank (16); Be positioned on two crossbeams of device pedestal (22) both sides a guide rail (20) that is parallel to ball screw (10) is installed respectively; Two two ends that are installed in a guide rail (20) near switch (24) respectively; Be the initial and end position of piston (13), two are electrically connected with the input terminal of the next PLC of control system near switch (24); Slide block (22) is installed respectively on two guide rails (20), spill contiguous block (25) is housed on two slide blocks (22), the bolt and nut (9) and piston (13) end of matching with ball screw (10) all are fixed on spill contiguous block (25) side; Be positioned on the grating chi base (23) of another root guide rail one side the grating chi (7) that is parallel to ball screw (10) is installed; Spill contiguous block (25) is gone up L type web joint (8) is installed, and the grating head that matches with grating chi (7) is housed under the L type web joint (8).
2. a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit according to claim 1, it is characterized in that: described device pedestal (22) has 5 ° of acclivitous angles towards the piston cylinder direction.
CN2011202640432U 2011-07-25 2011-07-25 Electric drive piston type standard metering device for micro-flow Expired - Lifetime CN202177433U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011202640432U CN202177433U (en) 2011-07-25 2011-07-25 Electric drive piston type standard metering device for micro-flow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011202640432U CN202177433U (en) 2011-07-25 2011-07-25 Electric drive piston type standard metering device for micro-flow

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288264A (en) * 2011-07-25 2011-12-21 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN103290181A (en) * 2013-06-26 2013-09-11 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103940496B (en) * 2014-04-21 2017-02-22 杭州宏量科技有限公司 Small liquid flow standard device special for hemodialysis machine calibrator
CN106768092A (en) * 2016-11-22 2017-05-31 大连大开污水处理有限公司 A kind of portable spring flowmeter
CN108709607A (en) * 2018-05-28 2018-10-26 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN109099996A (en) * 2018-09-13 2018-12-28 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288264A (en) * 2011-07-25 2011-12-21 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN102288264B (en) * 2011-07-25 2012-09-26 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN103290181A (en) * 2013-06-26 2013-09-11 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103290181B (en) * 2013-06-26 2015-04-22 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103940496B (en) * 2014-04-21 2017-02-22 杭州宏量科技有限公司 Small liquid flow standard device special for hemodialysis machine calibrator
CN106768092A (en) * 2016-11-22 2017-05-31 大连大开污水处理有限公司 A kind of portable spring flowmeter
CN108709607A (en) * 2018-05-28 2018-10-26 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN108709607B (en) * 2018-05-28 2019-11-19 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN109099996A (en) * 2018-09-13 2018-12-28 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation
CN109099996B (en) * 2018-09-13 2024-05-28 苏州市计量测试院 Calibrating device for micro gas flowmeter

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20120328

Effective date of abandoning: 20120926