CN202177433U - Electric drive piston type standard metering device for micro-flow - Google Patents

Electric drive piston type standard metering device for micro-flow Download PDF

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CN202177433U
CN202177433U CN2011202640432U CN201120264043U CN202177433U CN 202177433 U CN202177433 U CN 202177433U CN 2011202640432 U CN2011202640432 U CN 2011202640432U CN 201120264043 U CN201120264043 U CN 201120264043U CN 202177433 U CN202177433 U CN 202177433U
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piston
ball screw
grating
micro
flow
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程佳
田冠亚
詹志杰
沈文新
黄震威
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Zhejiang Province Institute of Metrology
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Zhejiang Province Institute of Metrology
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Abstract

本实用新型公开了一种电驱动活塞式液体微小流量计量标准装置。步进电机经减速机、刚性联轴器与滚珠螺杆的一端连接,其另一端与活塞孔滑动连接;活塞缸通过三通接头与电磁阀的出水口连接,电磁阀的进水口与水箱连接;底座的两根横梁上分别安装平行于滚珠螺杆的导轨,两个接近开关分别安装在一根导轨的两端,并与控制系统的下位PLC的输入端子电连接;两根导轨的滑块上装有凹形连接块,螺杆螺母和活塞端部均固定连接块侧面;位于另一根导轨一侧安装有光栅尺,安装在凹形连接块上的L型连接板下方装有光栅头。采用活塞式原理和利用光栅尺测量活塞的移动距离,将活塞的位置反馈给控制系统,可控制活塞运动速度、时间和位置,对微小流量进行计量标定。

Figure 201120264043

The utility model discloses an electrically driven piston type measuring standard device for micro flow rate of liquid. The stepper motor is connected to one end of the ball screw through a reducer and a rigid coupling, and the other end is slidingly connected to the piston hole; the piston cylinder is connected to the water outlet of the solenoid valve through a three-way joint, and the water inlet of the solenoid valve is connected to the water tank; The guide rails parallel to the ball screw are respectively installed on the two beams of the base, and the two proximity switches are respectively installed at both ends of a guide rail, and are electrically connected with the input terminals of the lower PLC of the control system; the sliders of the two guide rails are equipped with The concave connection block, the screw nut and the end of the piston are all fixed on the side of the connection block; a grating scale is installed on one side of the other guide rail, and a grating head is installed under the L-shaped connection plate installed on the concave connection block. Adopting the piston principle and using the grating ruler to measure the moving distance of the piston, the position of the piston is fed back to the control system, which can control the speed, time and position of the piston movement, and measure and calibrate the small flow.

Figure 201120264043

Description

一种电驱动活塞式液体微小流量计量标准装置An electric-driven piston type liquid micro-flow measurement standard device

技术领域 technical field

本实用新型涉及一种微小流量计量标准装置,尤其是涉及一种电驱动活塞式液体微小流量计量标准装置。 The utility model relates to a micro-flow measurement standard device, in particular to an electric-driven piston-type liquid micro-flow measurement standard device.

背景技术 Background technique

随着半导体制造业、生物工程、医学化工等行业的兴起,使流量测量向低端延伸,小流量微小流量的测量需求渐渐凸显起来。对于微流体的研究以及微小流量计量精度的需求也引起了越来越多的科学工作者的重视,而微小流量计量则成为了当下流体计量领域急需的计量技术之一。 With the rise of semiconductor manufacturing, bioengineering, medical chemical industry and other industries, the flow measurement has been extended to the low end, and the measurement demand of small flow and micro flow has gradually become prominent. The research on microfluidics and the demand for micro-flow metering accuracy have also attracted the attention of more and more scientific workers, and micro-flow metering has become one of the urgently needed metering technologies in the field of fluid metering.

传统的液体流量标准装置流量源的产生办法有两种,一是恒压流量源,这种方法流量稳定,但一般稳压设备体积庞大,费用较高;另一种是依靠流量泵提供流量,流量有脉动,稳定性差。以上两种方法,由于种种缺点,均无法应用于液体微小流量计量检定系统。目前常用的微小流量计如热式质量流量计、科式质量流量计等均应用于微流体方面的计量,同时,微型阀、微型泵、微型流量计等微流体控制元件也越来越多的广泛使用。但由于目前国家没有检定微型阀、微型泵、微型流量计等微流体控制元件的检定规程,很难保证此类元件结果的准确度,继而无法保证它们检测数据的准确,所以亟须一套完善的液体微小流量计量标准装置。 There are two ways to produce the flow source of the traditional liquid flow standard device. One is the constant pressure flow source. This method has stable flow, but the general voltage stabilization equipment is bulky and expensive; the other is to rely on the flow pump to provide flow. The flow is pulsating and the stability is poor. The above two methods, due to various shortcomings, cannot be applied to the liquid micro-flow metering verification system. At present, commonly used micro flow meters such as thermal mass flow meters and Corian mass flow meters are used in the measurement of micro fluids. At the same time, micro fluid control components such as micro valves, micro pumps, and micro flow meters are also increasingly used. widely used. However, since there is currently no verification procedure for microfluidic control components such as micro valves, micro pumps, and micro flow meters in the country, it is difficult to guarantee the accuracy of the results of such components, and then the accuracy of their detection data, so a complete set is urgently needed Liquid micro-flow measurement standard device.

归纳现有技术不足之处为: Summarize the deficiencies of the prior art as follows:

1.还没有完善的液体微小流量计量标准装置,无法满足当下液体微小流量的计量需求。 1. There is no perfect liquid micro-flow measurement standard device, which cannot meet the current measurement needs of liquid micro-flow.

2.流体源是影响微小流量系统检定准确度的一个关键因素,而能提供稳定流量且可调节流量大小的流体源装置则成了一个重要难题。 2. The fluid source is a key factor affecting the verification accuracy of the micro-flow system, and a fluid source device that can provide a stable flow rate and can adjust the flow rate has become an important problem.

发明内容 Contents of the invention

针对背景技术的不足,本实用新型的目的在于提供一种电驱动活塞式液体微小流量计量标准装置。 Aiming at the deficiency of the background technology, the purpose of the utility model is to provide an electrically driven piston type liquid micro-flow measurement standard device.

本实用新型解决其技术问题所采用的技术方案是:  The technical scheme that the utility model solves its technical problem adopts is:

本实用新型中的步进电机经减速机、刚性联轴器与支撑在装置底座一侧的滚珠螺杆的一端连接,滚珠螺杆的另一端伸入活塞孔中,通过导向环与活塞孔滑动连接;活塞缸的一端与装置底座另一侧连接,活塞缸的另一端通过三通接头与安装在水箱侧面的电磁阀的出水口连接,电磁阀的进水口与水箱连接;位于装置底座两侧内的两根横梁上分别安装一条平行于滚珠螺杆的导轨,两个接近开关分别安装在一根导轨的两端,即活塞的起始与结束位置,两个接近开关与控制系统的下位PLC的输入端子电连接;两根导轨上分别安装滑块,两个滑块上装有凹形连接块,与滚珠螺杆相配合的螺杆螺母和活塞端部均一起固定在凹形连接块侧面;位于另一根导轨一侧的光栅尺底座上安装有平行于滚珠螺杆的光栅尺,凹形连接块上安装L型连接板,L型连接板下装有与光栅尺相配的光栅头。 The stepping motor in the utility model is connected with one end of the ball screw supported on one side of the device base through a reducer and a rigid coupling, and the other end of the ball screw extends into the piston hole, and is slidably connected with the piston hole through a guide ring; One end of the piston cylinder is connected to the other side of the device base, the other end of the piston cylinder is connected to the water outlet of the solenoid valve installed on the side of the water tank through a three-way joint, and the water inlet of the solenoid valve is connected to the water tank; A guide rail parallel to the ball screw is installed on the two beams, and two proximity switches are respectively installed at both ends of a guide rail, that is, the starting and ending positions of the piston, and the two proximity switches are connected to the input terminals of the lower PLC of the control system. Electrical connection; slide blocks are respectively installed on the two guide rails, and concave connection blocks are installed on the two slide blocks, and the screw nut and the end of the piston matched with the ball screw are fixed on the side of the concave connection block together; located on the other guide rail A grating scale parallel to the ball screw is installed on the base of the grating scale on one side, an L-shaped connecting plate is installed on the concave connecting block, and a grating head matching the grating scale is installed under the L-shaped connecting plate.

所述的装置底座朝向活塞缸方向具有5°向上倾斜的角度。 The base of the device has an upwardly inclined angle of 5° towards the direction of the piston cylinder.

与背景技术相比,本实用新型的有益效果是: Compared with the background technology, the beneficial effects of the utility model are:

1.本实用新型电驱动活塞式液体微小流量计量标准装置是一套比较完善的计量检定系统,能对微小流量范围在0.1ml/h~1000ml/h的质量流量计、微型阀、微型泵等进行检定校准。装置的扩展不确定度为(0.5~1.0)%(k=2)。 1. The electric-driven piston-type liquid micro-flow measurement standard device of the utility model is a relatively complete measurement verification system, which can measure mass flow meters, micro-valves, micro-pumps, etc. with a micro-flow range of 0.1ml/h~1000ml/h Perform verification calibration. The expanded uncertainty of the device is (0.5~1.0)% (k=2).

2.整套系统采用了活塞式原理,同时利用光栅尺测量活塞的移动距离,同时将活塞的位置反馈给控制系统;控制系统由上位机和下位机组成,可控制活塞运动速度、时间、位置。这不仅可快速、便捷地进行微小流量控制,同时提高了系统的微小流量计量准确度。 2. The whole system adopts the piston principle, and uses the grating scale to measure the moving distance of the piston, and at the same time feeds back the position of the piston to the control system; the control system consists of a host computer and a lower computer, which can control the speed, time and position of the piston. This can not only quickly and conveniently carry out small flow control, but also improve the measurement accuracy of the small flow of the system.

附图说明 Description of drawings

图1是本实用新型的结构原理示意图。 Fig. 1 is the structural principle schematic diagram of the utility model.

图2是本实用新型的立体示意图。 Fig. 2 is a perspective view of the utility model.

图中:1、步进电机,2、减速机,3、刚性联轴器,4、锁紧螺母,5、轴承盖,6、深沟球轴承,7、光栅尺,8、L型连接板,9、螺杆螺母,10、滚珠螺杆,11、导向环,12、弹簧挡圈,13、活塞,14、活塞缸,15、电磁阀,16、水箱, 17、O型密封圈,18、格莱圈,19、耐磨带,20、导轨,21、滑块,22、装置底座,23、光栅尺底座,24、接近开关,25、凹形连接块,26、连接套。 In the figure: 1. Stepper motor, 2. Reducer, 3. Rigid coupling, 4. Lock nut, 5. Bearing cover, 6. Deep groove ball bearing, 7. Grating ruler, 8. L-shaped connecting plate , 9. Screw nut, 10. Ball screw, 11. Guide ring, 12. Spring retaining ring, 13. Piston, 14. Piston cylinder, 15. Solenoid valve, 16. Water tank, 17. O-ring, 18. Grid Lai circle, 19, wear-resistant band, 20, guide rail, 21, slide block, 22, device base, 23, grating ruler base, 24, proximity switch, 25, concave connection block, 26, connection cover.

具体实施方式 Detailed ways

下面结合附图和实施例对本实用新型进一步说明,本实用新型的目的和效果将变得更加明显。 The utility model will be further described below in conjunction with the accompanying drawings and embodiments, and the purpose and effect of the utility model will become more obvious.

如图1、图2所示,本实用新型电驱动活塞式液体微小流量计量标准装置包括步进电机1、减速机2、刚性联轴器3、锁紧螺母4、轴承盖5、深沟球轴承6、光栅尺7、L型连接板8、丝杆螺母9、滚珠螺杆10、导向环11、弹簧挡圈12、活塞13、活塞缸14、电磁阀15、水箱16、和O型密封圈17、格莱圈18、耐磨带19、导轨20、滑块21、装置底座22、光栅尺底座23、接近开关24、凹形连接块25、连接套26及控制系统。其中,步进电机1经减速机2、刚性联轴器3、连接套26与支撑在装置底座22一侧的滚珠螺杆10的一端连接,滚珠螺杆10的另一端伸入活塞13孔中,通过导向环11与活塞13孔滑动连接,用弹簧挡圈12将导向环11固定在滚珠螺杆10端部。步进电机1用于驱动减速机2进行正反转以带动滚珠螺杆10转动。滚珠螺杆10与减速机2通过刚性联轴器3锁紧联接,同时须保证步进电机1、减速机2、刚性联轴器3、滚珠螺杆10与活塞13处在同一轴线上。连接套26将减速机2固定在装置底座22上,同时为刚性联轴器3提供转动空间。深沟球轴承6为滚珠螺杆10转动时提供支撑,用轴承盖5将其压紧;同时锁紧螺母4将深沟球轴承6锁紧,以免滚珠螺杆10轴向转动时产生的轴向力将深沟球轴承6拉出。 As shown in Figure 1 and Figure 2, the electric drive piston type liquid micro-flow measurement standard device of the utility model includes a stepping motor 1, a reducer 2, a rigid coupling 3, a lock nut 4, a bearing cover 5, and a deep groove ball Bearing 6, grating ruler 7, L-shaped connecting plate 8, screw nut 9, ball screw 10, guide ring 11, spring retaining ring 12, piston 13, piston cylinder 14, solenoid valve 15, water tank 16, and O-shaped sealing ring 17. Gray ring 18, wear-resistant belt 19, guide rail 20, slider 21, device base 22, grating ruler base 23, proximity switch 24, concave connection block 25, connection sleeve 26 and control system. Wherein, the stepper motor 1 is connected to one end of the ball screw 10 supported on one side of the device base 22 through the reducer 2, the rigid coupling 3, and the connecting sleeve 26, and the other end of the ball screw 10 extends into the hole of the piston 13. The guide ring 11 is slidingly connected with the hole of the piston 13 , and the guide ring 11 is fixed on the end of the ball screw 10 with the spring retaining ring 12 . The stepping motor 1 is used to drive the speed reducer 2 to rotate forward and backward to drive the ball screw 10 to rotate. The ball screw 10 and the reducer 2 are locked and connected through the rigid coupling 3, and at the same time, it is necessary to ensure that the stepping motor 1, the reducer 2, the rigid coupling 3, the ball screw 10 and the piston 13 are on the same axis. The connecting sleeve 26 fixes the reducer 2 on the device base 22 and provides a rotation space for the rigid coupling 3 at the same time. The deep groove ball bearing 6 provides support for the ball screw 10 when it rotates, and it is pressed tightly with the bearing cover 5; at the same time, the lock nut 4 locks the deep groove ball bearing 6 to avoid the axial force generated when the ball screw 10 rotates axially. Pull out the deep groove ball bearing 6.

活塞缸14的一端与装置底座22另一侧连接,活塞缸14的另一端通过三通接头与安装在水箱16侧面的电磁阀15的出水口连接,用O型密封圈17将活塞缸出口进行密封,电磁阀15的进水口与水箱16连接。活塞13的活塞头部与活塞缸14紧密安装,同时用格莱圈18进行密封、耐磨带19进行导向。 One end of the piston cylinder 14 is connected with the other side of the device base 22, and the other end of the piston cylinder 14 is connected with the water outlet of the electromagnetic valve 15 installed on the side of the water tank 16 through a three-way joint, and the outlet of the piston cylinder is sealed with an O-shaped sealing ring 17. Sealing, the water inlet of electromagnetic valve 15 is connected with water tank 16. The piston head of the piston 13 is closely installed with the piston cylinder 14, and the gray ring 18 is used for sealing and the wear-resistant belt 19 is used for guiding.

装置底座22朝向活塞缸14方向具有5°向上倾斜的角度以保证活塞缸14内充满液体留有气泡时,方便气泡顺利排出活塞缸14。位于装置底座22两侧内的两根横梁上分别安装一条平行于滚珠螺杆10的导轨20,两根导轨20上分别安装滑块22,两个滑块22上装有凹形连接块25,与滚珠螺杆10相配合的螺杆螺母9和活塞13端部均一起固定在凹形连接块25侧面;导轨20为滑块21和凹形连接块25提供支撑,同时保证步进电机1、减速机2、刚性联轴器3、滚珠螺杆10与活塞13的同轴度。两个接近开关24分别安装在一根导轨20的两端,即活塞13的起始与结束位置,与控制系统的下位PLC的输入端子电连接,反馈活塞13的零位与结束位,以控制活塞13前后移动的起始与停止。位于另一根导轨一侧的光栅尺底座23上安装有平行于滚珠螺杆10的光栅尺7,凹形连接块25上安装L型连接板8,L型连接板8下紧密安装光栅尺7。光栅尺7将活塞13的位置反馈给控制系统;控制系统由上位机和下位机组成,可控制活塞13的运动速度、时间、位置。L型连接板8使凹形连接块25与光栅尺7的光栅头在同一水平面上,以保证在滚珠螺杆10正反转带动活塞13前后移动时光栅尺7能与活塞13移动同步而精确测量活塞前后移动的距离。 The device base 22 has an angle of 5° upward inclination towards the direction of the piston cylinder 14 to ensure that when the piston cylinder 14 is filled with liquid and leaves bubbles, it is convenient for the bubbles to be discharged from the piston cylinder 14 smoothly. A guide rail 20 parallel to the ball screw 10 is installed on the two beams on both sides of the device base 22, and a slide block 22 is respectively installed on the two guide rails 20. The two slide blocks 22 are equipped with a concave connecting block 25, which is connected with the ball screw. The screw nut 9 and the end of the piston 13 that the screw rod 10 matches are all fixed on the side of the concave connection block 25; The coaxiality of the rigid coupling 3, the ball screw 10 and the piston 13. Two proximity switches 24 are respectively installed on the two ends of a guide rail 20, i.e. the initial and end positions of the piston 13, are electrically connected with the input terminals of the lower PLC of the control system, and feedback the zero position and the end position of the piston 13 to control The start and stop of piston 13 moving back and forth. A grating scale 7 parallel to the ball screw 10 is installed on the grating scale base 23 on one side of the other guide rail, an L-shaped connecting plate 8 is installed on the concave connecting block 25, and the grating scale 7 is closely installed under the L-shaped connecting plate 8. The grating ruler 7 feeds back the position of the piston 13 to the control system; the control system consists of a host computer and a lower computer, which can control the movement speed, time and position of the piston 13 . The L-shaped connecting plate 8 makes the concave connecting block 25 and the grating head of the grating ruler 7 on the same horizontal plane, so as to ensure that the grating ruler 7 can move synchronously with the piston 13 and measure accurately when the ball screw 10 rotates forward and backward to drive the piston 13 to move forward and backward. The distance the piston moves back and forth.

如图2所示,本实用新型的工作过程是: As shown in Figure 2, the working process of the present utility model is:

以活塞缸14作为计量容积标准,装置通过步进电机1驱动标准计量活塞缸14活塞13产生流体源,通过三通接口流经被检流量计;活塞缸14与光栅尺7配合构成流量测量系统,光栅尺7安装在滚珠螺杆10一侧,将活塞13的位置反馈给控制系统;控制系统由上位机和下位机组成,可控制活塞13运动速度、时间、位置;利用高精密电子天平,通过计算流体介质在一定测量时间内推动活塞13排出活塞缸14内流体质量来标定流量计。 Taking the piston cylinder 14 as the metering volume standard, the device drives the standard metering piston cylinder 14 and the piston 13 through the stepping motor 1 to generate a fluid source, which flows through the tested flowmeter through the three-way interface; the piston cylinder 14 cooperates with the grating ruler 7 to form a flow measurement system , the grating ruler 7 is installed on the side of the ball screw 10, and feeds back the position of the piston 13 to the control system; the control system is composed of a host computer and a lower computer, which can control the movement speed, time, and position of the piston 13; using a high-precision electronic balance, through Calculate the fluid medium to push the piston 13 to discharge the fluid mass in the piston cylinder 14 within a certain measurement time to calibrate the flowmeter.

本实用新型活塞式液体微小流量计量标准装置的特点也即发明点是:通过步进电机驱动减速机进行正反转以带动滚珠螺杆转动,滚珠螺杆驱动活塞进行前后移动,在活塞带动光栅尺前后移动反应迅速的同时,还能确保高精度控制与计量;安装在底座的2根横梁上导轨与滑块为连接块提供支撑,不仅保证了步进电机、减速机、刚性联轴器、滚珠螺杆与活塞的同轴度,同时防止连接块左右摇摆产生测量不确定度;装置底座有5°角的倾斜度,以保证活塞缸内充满液体留有气泡时,方便气泡顺利排出活塞缸;承重冒的设计不仅将步进电机和减速机与装置底座紧密联接,同时为刚性联轴器将减速机与滚珠螺杆的联接提供的空间;电驱动活塞式液体微小流量计量标准装置整体的各个部分相对独立,安装和维护非常方便。 The feature of the utility model piston-type liquid micro-flow metering standard device is that the invention point is: the stepping motor drives the reducer to carry out positive and negative rotation to drive the ball screw to rotate, and the ball screw drives the piston to move back and forth, before and after the piston drives the grating ruler. While the moving response is fast, it can also ensure high-precision control and measurement; the guide rails and sliders installed on the two beams on the base provide support for the connecting block, which not only ensures the stepping motor, reducer, rigid coupling, and ball screw. The coaxiality with the piston prevents the measurement uncertainty caused by the left and right swing of the connecting block; the base of the device has an inclination of 5° to ensure that when the piston cylinder is filled with liquid and there are air bubbles, it is convenient for the bubbles to discharge smoothly from the piston cylinder; The unique design not only tightly connects the stepper motor and reducer with the device base, but also provides space for the rigid coupling to connect the reducer with the ball screw; each part of the electric-driven piston type liquid micro-flow measurement standard device is relatively independent , It is very convenient to install and maintain.

Claims (2)

1.一种电驱动活塞式液体微小流量计量标准装置,其特征在于:步进电机(1)经减速机(2)、刚性联轴器(3)与支撑在装置底座(22)一侧的滚珠螺杆(10)的一端连接,滚珠螺杆(10)的另一端伸入活塞(13)孔中,通过导向环(11)与活塞(13)孔滑动连接;活塞缸(14)的一端与装置底座(22)另一侧连接,活塞缸(14)的另一端通过三通接头与安装在水箱(16)侧面的电磁阀(15)的出水口连接,电磁阀(15)的进水口与水箱(16)连接;位于装置底座(22)两侧内的两根横梁上分别安装一条平行于滚珠螺杆(10)的导轨(20),两个接近开关(24)分别安装在一根导轨(20)的两端,即活塞(13)的起始与结束位置,两个接近开关(24)与控制系统的下位PLC的输入端子电连接;两根导轨(20)上分别安装滑块(22),两个滑块(22)上装有凹形连接块(25),与滚珠螺杆(10)相配合的螺杆螺母(9)和活塞(13)端部均一起固定在凹形连接块(25)侧面;位于另一根导轨一侧的光栅尺底座(23)上安装有平行于滚珠螺杆(10)的光栅尺(7),凹形连接块(25)上安装L型连接板(8),L型连接板(8)下装有与光栅尺(7)相配的光栅头。 1. An electric-driven piston-type liquid micro-flow measurement standard device, characterized in that: the stepper motor (1) is connected to the device supported on one side of the device base (22) via a reducer (2), a rigid coupling (3) One end of the ball screw (10) is connected, and the other end of the ball screw (10) extends into the hole of the piston (13), and is slidingly connected with the hole of the piston (13) through the guide ring (11); one end of the piston cylinder (14) is connected to the device The other side of the base (22) is connected, the other end of the piston cylinder (14) is connected to the water outlet of the solenoid valve (15) installed on the side of the water tank (16) through a three-way joint, and the water inlet of the solenoid valve (15) is connected to the water tank (16) connection; a guide rail (20) parallel to the ball screw (10) is respectively installed on two beams located on both sides of the device base (22), and two proximity switches (24) are respectively installed on a guide rail (20 ), namely the start and end positions of the piston (13), two proximity switches (24) are electrically connected to the input terminals of the lower PLC of the control system; slide blocks (22) are respectively installed on the two guide rails (20) , the two sliders (22) are equipped with a concave connecting block (25), and the end of the screw nut (9) and the piston (13) matched with the ball screw (10) are fixed on the concave connecting block (25) Side; the grating scale (7) parallel to the ball screw (10) is installed on the grating scale base (23) on the other side of the guide rail, and the L-shaped connecting plate (8) is installed on the concave connecting block (25), A grating head matched with the grating ruler (7) is housed under the L-shaped connecting plate (8). 2.根据权利要求1所述的一种电驱动活塞式液体微小流量计量标准装置,其特征在于:所述的装置底座(22)朝向活塞缸方向具有5°向上倾斜的角度。 2. An electric-driven piston-type liquid micro-flow metering standard device according to claim 1, characterized in that: the device base (22) has an upwardly inclined angle of 5° towards the direction of the piston cylinder.
CN2011202640432U 2011-07-25 2011-07-25 Electric drive piston type standard metering device for micro-flow Expired - Lifetime CN202177433U (en)

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Cited By (6)

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CN102288264A (en) * 2011-07-25 2011-12-21 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN103290181A (en) * 2013-06-26 2013-09-11 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103940496B (en) * 2014-04-21 2017-02-22 杭州宏量科技有限公司 Small liquid flow standard device special for hemodialysis machine calibrator
CN106768092A (en) * 2016-11-22 2017-05-31 大连大开污水处理有限公司 A kind of portable spring flowmeter
CN108709607A (en) * 2018-05-28 2018-10-26 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN109099996A (en) * 2018-09-13 2018-12-28 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288264A (en) * 2011-07-25 2011-12-21 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN102288264B (en) * 2011-07-25 2012-09-26 浙江省计量科学研究院 Electric drive piston liquid micro flow measurement standard device
CN103290181A (en) * 2013-06-26 2013-09-11 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103290181B (en) * 2013-06-26 2015-04-22 天津市天瑞硬化工程有限公司 Supersonic gas (fog) scanning quenching nozzle
CN103940496B (en) * 2014-04-21 2017-02-22 杭州宏量科技有限公司 Small liquid flow standard device special for hemodialysis machine calibrator
CN106768092A (en) * 2016-11-22 2017-05-31 大连大开污水处理有限公司 A kind of portable spring flowmeter
CN108709607A (en) * 2018-05-28 2018-10-26 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN108709607B (en) * 2018-05-28 2019-11-19 佛山市川东磁电股份有限公司 A kind of test fixture of urea liquid level sensor
CN109099996A (en) * 2018-09-13 2018-12-28 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation
CN109099996B (en) * 2018-09-13 2024-05-28 苏州市计量测试院 Calibrating device for micro gas flowmeter

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