CN102288264B - Electric drive piston liquid micro flow measurement standard device - Google Patents
Electric drive piston liquid micro flow measurement standard device Download PDFInfo
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- CN102288264B CN102288264B CN201110208724A CN201110208724A CN102288264B CN 102288264 B CN102288264 B CN 102288264B CN 201110208724 A CN201110208724 A CN 201110208724A CN 201110208724 A CN201110208724 A CN 201110208724A CN 102288264 B CN102288264 B CN 102288264B
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Abstract
The invention discloses an electric drive piston liquid micro flow measurement standard device. A stepping motor is connected with one end of a ball screw through a speed reducer and a rigid coupler; the other end of the ball screw is connected with a piston hole in a sliding mode; a piston cylinder is connected with a water outlet of an electromagnetic valve through a three-way joint; a water inlet of the electromagnetic valve is connected with a water tank; guide rails parallel to the ball screw are arranged on the two beams of a base; two proximity switches are arranged at the two ends of one guide rail and are electrically connected with an input terminal of a lower programmable logic controller (PLC) of a control system; concave connecting blocks are arranged on the sliding blocks of the two guide rails; a screw nut and the end of a piston are fixed on the side faces of the connecting blocks; a grating ruler is arranged on one side of the other guide rail; and grating heads are arranged below L-shaped connecting plates arranged on the concave connecting blocks. By using a piston principle and measuring a movement distance of the piston through the grating ruler, the position of the piston is fed back to the control system, the movement velocity, time and position of the piston can be controlled, and micro flow is measured and calibrated.
Description
Technical field
The present invention relates to a kind of tiny flow quantity metrological standard unit, especially relate to a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit.
Background technology
Rise along with industries such as semiconductor manufacturing industry, bioengineering, medical science chemical industry makes flow measurement extend to low side, and the measurement demand of low discharge tiny flow quantity highlights gradually.Also caused increasing scientific worker's attention for the research of microfluid and the demand of tiny flow quantity measuring accuracy, tiny flow quantity metering then becomes one of measurement technology of fluid metering field instantly being badly in need of.
The generation way of traditional fluid flow standard set-up traffic sources has two kinds, and the one, the constant voltage traffic sources, this method stability of flow, but general pressure stabilizing device is bulky, and expense is higher; Another kind is to rely on flow pump that flow is provided, and flow has pulsation, poor stability.More than two kinds of methods because various shortcoming, all can't be applied to liquid tiny flow quantity measurement verification system.The metering that tiny flow quantity meter commonly used at present such as thermal mass flow meter, section's formula mass flowmeter etc. all are applied to the microfluid aspect, simultaneously, microfluidic control elements such as miniature valve, micropump, micro flowmeter are also increasing to be widely used.But because the national at present vertification regulation of not examining and determine microfluidic control elements such as miniature valve, micropump, micro flowmeter; Be difficult to guarantee this class component result's accuracy; Then can't guarantee the accurate of their detection data, so need the perfect liquid tiny flow quantity metrological standard unit of a cover.
Concluding the prior art weak point is:
1. also do not have perfect liquid tiny flow quantity metrological standard unit, can't satisfy the metering demand of liquid tiny flow quantity instantly.
2. fluid source is a key factor that influences the calibrating accuracy of tiny flow quantity system, can provide the fluid source device of regime flow and scalable flow size then to become an important difficult problem.
Summary of the invention
To disadvantages of background technology, the object of the present invention is to provide a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit.
The technical solution adopted for the present invention to solve the technical problems is:
Stepper motor among the present invention is connected through reductor, positive coupling and the end that is supported on the ball screw of device pedestal one side, and the other end of ball screw stretches in the piston hole, is slidingly connected through guide ring and piston hole; One end of piston cylinder is connected with the device pedestal opposite side, and the other end of piston cylinder is connected through the water delivering orifice of three-way connection with the solenoid valve that is installed in the water tank side, and the water inlet of solenoid valve is connected with water tank; Be positioned on two crossbeams of device pedestal both sides a guide rail that is parallel to ball screw is installed respectively; Two two ends that are installed in a guide rail near switch respectively; Be the initial and end position of piston, two are electrically connected near the input terminal of switch with the next PLC of control system; On two guide rails slide block is installed respectively, on two slide blocks the spill contiguous block is housed, the bolt and nut and the pistons end that match with ball screw all are fixed on spill contiguous block side; Be positioned on the grating chi base of another root guide rail one side the grating chi that is parallel to ball screw is installed, L type web joint is installed on the spill contiguous block, under the L type web joint grating head that matches with the grating chi is housed.
Described device pedestal has 5 ° of acclivitous angles towards the piston cylinder direction.
Compare with background technology, the invention has the beneficial effects as follows:
1. the present invention electricity driven plunger formula liquid tiny flow quantity metrological standard unit is the fairly perfect measurement verification system of a cover, can carry out assay calibration at the mass flowmeter of 0.1ml/h ~ 1000ml/h, miniature valve, micropump etc. to the tiny flow quantity scope.The expanded uncertainty of device is (0.5 ~ 1.0) % (k=2).
2. whole system has adopted the piston type principle, utilizes the displacement of optical grating ruler measurement piston simultaneously, simultaneously position of piston is fed back to control system; Control system is made up of host computer and slave computer, may command piston movement speed, time, position.This not only can carry out tiny flow quantity control fast, easily, has improved the tiny flow quantity accuracy of measuring of system simultaneously.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present invention.
Fig. 2 is a schematic perspective view of the present invention.
Among the figure: 1, stepper motor, 2, reductor, 3, positive coupling, 4, set nut, 5, bearing cap, 6, deep groove ball bearing; 7, grating chi, 8, L type web joint, 9, bolt and nut, 10, ball screw, 11, guide ring; 12, spring collar, 13, piston, 14, piston cylinder, 15, solenoid valve, 16, water tank; 17, O RunddichtringO, 18, Glais ring, 19, wear-resisting band, 20, guide rail, 21, slide block; 22, device pedestal, 23, grating chi base, 24, near switch, 25, the spill contiguous block, 26, adapter sleeve.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified, it is more obvious that the object of the invention and effect will become.
Like Fig. 1, shown in Figure 2, the present invention electricity driven plunger formula liquid tiny flow quantity metrological standard unit comprises stepper motor 1, reductor 2, positive coupling 3, set nut 4, bearing cap 5, deep groove ball bearing 6, grating chi 7, L type web joint 8, feed screw nut 9, ball screw 10, guide ring 11, spring collar 12, piston 13, piston cylinder 14, solenoid valve 15, water tank 16 and O RunddichtringO 17, Glais ring 18, wear-resistingly is with 19, guide rail 20, slide block 21, device pedestal 22, grating chi base 23, near switch 24, spill contiguous block 25, adapter sleeve 26 and control system.Wherein, Stepper motor 1 is connected through reductor 2, positive coupling 3, adapter sleeve 26 and the end that is supported on the ball screw 10 of device pedestal 22 1 sides; The other end of ball screw 10 stretches in piston 13 holes; Be slidingly connected through guide ring 11 and piston 13 holes, guide ring 11 be fixed on ball screw 10 ends with spring collar 12.Stepper motor 1 is used for drive speed reducer 2 and carries out rotating to drive ball screw 10 rotations.Ball screw 10 connects through positive coupling 3 lockings with reductor 2, must guarantee that simultaneously stepper motor 1, reductor 2, positive coupling 3, ball screw 10 are on the same axis with piston 13.Adapter sleeve 26 is fixed on reductor 2 on the device pedestal 22, for positive coupling 3 rotation space is provided simultaneously.Deep groove ball bearing 6 provides support when rotating for ball screw 10, with bearing cap 5 it is compressed; Simultaneously set nut 4 is deep groove ball bearing 6 lockings, in order to avoid the axial force that produces during ball screw 10 axial rotation is pulled out deep groove ball bearing 6.
One end of piston cylinder 14 is connected with device pedestal 22 opposite sides; The other end of piston cylinder 14 is connected through the water delivering orifice of three-way connection with the solenoid valve 15 that is installed in water tank 16 sides; With O RunddichtringO 17 the piston cylinder outlet is sealed, the water inlet of solenoid valve 15 is connected with water tank 16.The piston crown of piston 13 and piston cylinder 14 close installation seal, wear-resistingly are with 19 to lead with Glais ring 18 simultaneously.
As shown in Figure 2, the course of work of the present invention is:
As the metered volume standard, device drives standard metering piston cylinder 14 pistons 13 through stepper motor 1 and produces fluid sources with piston cylinder 14, through the three-way interface seized flowmeter of flowing through; Piston cylinder 14 cooperates the formation Flow Measuring System with grating chi 7, grating chi 7 is installed in ball screw 10 1 sides, gives control system with the position feedback of piston 13; Control system is made up of host computer and slave computer, may command piston 13 movement velocitys, time, position; Utilize high-accuracy electronic balance, in certain Measuring Time, promote piston 13 discharge piston cylinders 14 inner fluid quality through the Fluid Computation medium and come proving flowmeter.
The characteristics of piston type liquid tiny flow quantity metrological standard unit of the present invention also are that inventive point is: carry out rotating through the step motor drive reductor and rotate to drive ball screw; The ball screw driven plunger moves forward and backward; Drive the grating chi at piston and move forward and backward the willing while, can also guarantee High Accuracy Control and metering; The 2 crossbeam upper rails and the slide block that are installed in base are that contiguous block provides support, and have not only guaranteed the right alignment of stepper motor, reductor, positive coupling, ball screw and piston, prevent the contiguous block generation uncertainty of measurement of vacillating now to the left, now to the right simultaneously; Device pedestal has the degree of tilt at 5 ° of angles, when guaranteeing that full of liquid leaves bubble in the piston cylinder, makes things convenient for bubble to discharge piston cylinder smoothly; The design that load-bearing is emitted is not only with stepper motor and reductor and device pedestal close-coupled, the space that for positive coupling reductor and connecting of ball screw is provided simultaneously; The various piece of electricity driven plunger formula liquid tiny flow quantity metrological standard unit integral body is relatively independent, and installation and maintenance is very convenient.
Claims (2)
1. electric driven plunger formula liquid tiny flow quantity metrological standard unit; It is characterized in that: stepper motor (1) is connected with an end of the ball screw that is supported on device pedestal (22) one sides (10) through reductor (2), positive coupling (3); The other end of ball screw (10) stretches in piston (13) hole, is slidingly connected through guide ring (11) and piston (13) hole; One end of piston cylinder (14) is connected with device pedestal (22) opposite side; The other end of piston cylinder (14) is connected through the water delivering orifice of three-way connection with the solenoid valve (15) that is installed in water tank (16) side, and the water inlet of solenoid valve (15) is connected with water tank (16); Be positioned on two crossbeams of device pedestal (22) both sides a guide rail (20) that is parallel to ball screw (10) is installed respectively; Two two ends that are installed in a guide rail (20) near switch (24) respectively; Be the initial and end position of piston (13), two are electrically connected with the input terminal of the next PLC of control system near switch (24); Slide block (22) is installed respectively on two guide rails (20), spill contiguous block (25) is housed on two slide blocks (22), the bolt and nut (9) and piston (13) end of matching with ball screw (10) all are fixed on spill contiguous block (25) side; Be positioned on the grating chi base (23) of another root guide rail one side the grating chi (7) that is parallel to ball screw (10) is installed; Spill contiguous block (25) is gone up L type web joint (8) is installed, and the grating head that matches with grating chi (7) is housed under the L type web joint (8).
2. a kind of electric driven plunger formula liquid tiny flow quantity metrological standard unit according to claim 1, it is characterized in that: described device pedestal (22) has 5 ° of acclivitous angles towards the piston cylinder direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110208724A CN102288264B (en) | 2011-07-25 | 2011-07-25 | Electric drive piston liquid micro flow measurement standard device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110208724A CN102288264B (en) | 2011-07-25 | 2011-07-25 | Electric drive piston liquid micro flow measurement standard device |
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| CN102288264A CN102288264A (en) | 2011-12-21 |
| CN102288264B true CN102288264B (en) | 2012-09-26 |
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| CN201110208724A Active CN102288264B (en) | 2011-07-25 | 2011-07-25 | Electric drive piston liquid micro flow measurement standard device |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680057B (en) * | 2012-05-17 | 2014-01-01 | 上海市计量测试技术研究院 | Piston type gas-liquid dual-purpose micro-flow standard device |
| CN102879062A (en) * | 2012-10-26 | 2013-01-16 | 浙江省计量科学研究院 | Multi-plunger parallel type liquid micro flow rate standard device |
| CN102944293B (en) * | 2012-12-03 | 2016-03-30 | 中国航空工业集团公司北京长城计量测试技术研究所 | The passive piston volume tube of raster pattern |
| CN103344309B (en) * | 2013-06-08 | 2015-08-26 | 浙江省计量科学研究院 | Electric drive symmetrical posts plug gas micro flow standard device |
| CN106768203B (en) * | 2016-12-28 | 2023-05-23 | 新乡航空工业(集团)有限公司 | Combined active piston liquid flow standard device |
| CN107843315A (en) * | 2017-11-13 | 2018-03-27 | 李盛 | A kind of flowmeter verification device and its calibration method |
| CN113974782A (en) * | 2021-11-10 | 2022-01-28 | 山东华博电气有限公司 | Water jet medical pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3882724A (en) * | 1973-05-04 | 1975-05-13 | William Rouse Hearn | Flowmeter |
| CN2890855Y (en) * | 2005-12-20 | 2007-04-18 | 浙江省质量技术监督检测研究院 | Piston type flow calibrator employing zero balance method |
| CN101666670A (en) * | 2009-09-18 | 2010-03-10 | 浙江省计量科学研究院 | Gas flow calibration device based on standard plunger piston |
| CN101762307A (en) * | 2010-01-25 | 2010-06-30 | 浙江省计量科学研究院 | Gas flow calibrating device based on bell shape-column shape dual piston structure |
| CN202177433U (en) * | 2011-07-25 | 2012-03-28 | 浙江省计量科学研究院 | Electric drive piston type standard metering device for micro-flow |
-
2011
- 2011-07-25 CN CN201110208724A patent/CN102288264B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3882724A (en) * | 1973-05-04 | 1975-05-13 | William Rouse Hearn | Flowmeter |
| CN2890855Y (en) * | 2005-12-20 | 2007-04-18 | 浙江省质量技术监督检测研究院 | Piston type flow calibrator employing zero balance method |
| CN101666670A (en) * | 2009-09-18 | 2010-03-10 | 浙江省计量科学研究院 | Gas flow calibration device based on standard plunger piston |
| CN101762307A (en) * | 2010-01-25 | 2010-06-30 | 浙江省计量科学研究院 | Gas flow calibrating device based on bell shape-column shape dual piston structure |
| CN202177433U (en) * | 2011-07-25 | 2012-03-28 | 浙江省计量科学研究院 | Electric drive piston type standard metering device for micro-flow |
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| CN102288264A (en) | 2011-12-21 |
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