CN109099996A - A kind of minute gas flowmeter calibrating installation - Google Patents

A kind of minute gas flowmeter calibrating installation Download PDF

Info

Publication number
CN109099996A
CN109099996A CN201811066624.8A CN201811066624A CN109099996A CN 109099996 A CN109099996 A CN 109099996A CN 201811066624 A CN201811066624 A CN 201811066624A CN 109099996 A CN109099996 A CN 109099996A
Authority
CN
China
Prior art keywords
cylinder body
pedestal
type drive
drive block
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811066624.8A
Other languages
Chinese (zh)
Inventor
李长武
陈曹浪
张东飞
耿存杰
安平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Metrology And Testing Institute
Original Assignee
Suzhou Metrology And Testing Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Metrology And Testing Institute filed Critical Suzhou Metrology And Testing Institute
Priority to CN201811066624.8A priority Critical patent/CN109099996A/en
Publication of CN109099996A publication Critical patent/CN109099996A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume

Abstract

The embodiment of the invention discloses a kind of minute gas flowmeter calibrating installations, including driving mechanism, transmission mechanism, grating scale, pedestal, symmetric plunger, first cylinder body and the second cylinder body, the connection of one end of the driving mechanism and transmission mechanism, the transmission mechanism includes T-type drive block, one end of T-type drive block is connected by the gauge head of grating link block and grating scale, grating scale is arranged in the pedestal side, described pedestal one end is provided with the first cylinder body, the other end is provided with the second cylinder body, T-type drive block is connect with symmetric plunger, the symmetric plunger both ends are coaxially connected with the first cylinder body and the second cylinder body respectively, first cylinder body is connected to by connecting pipe with the second cylinder body, one-way flow indicator and bidirectional traffics indicator have been arranged in parallel in the connecting pipe.The present invention can be used for mesohigh gasmetry, have many advantages, such as that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.

Description

A kind of minute gas flowmeter calibrating installation
Technical field
The present invention relates to a kind of gas flowmeter calibrating installations, more particularly, to a kind of minute gas flowmeter calibration cartridge It sets.
Background technique
In recent years, gas small amount of flow measuring and control are in semiconductor manufacturing industry, medicine chemical industry, food hygiene, biological work The fields such as journey, new and high technology using more and more common, the assay calibration of tiny flow quantity correlation utensil becomes flow measurement instantly One of the important branch in field.By consulting minute gas flow measurement and standard set-up pertinent literature it is found that gas in pipelines Flow of the flow less than 10mL/min is tiny flow quantity.
Currently, minute gas flow measurement technology is mainly include the following types: soap film type installation method, pressure volume temperature time (PVTt) method, quality time (mt) method, constant pressure type, transfiguration area method etc., with the development of mechanical & electrical technology, the development of transfiguration area method is fast Speed, wherein the most typical with piston type.
The piston-type gas flow standard device that has come into operation in the world is divided into active and two kinds of passive type at present.Its In active piston standard set-up be to pass through servo motor or stepper motor etc. using precision machined piston piece as mete-wand Driving equipment pushes piston piece movement, stable, adjustable gas flow will be persistently generated during piston smooth motion, finally Gas passes through test pipeline and the discharge of tested flowmeter.In addition living by feedback systems real-time measurements such as grating scales in checking procedure Fill in move distance.The gas volume value that standard set-up can be obtained and be discharged within a certain period of time is calculated according to simple formula, in turn Realize the metering of flowmeter.And passive type piston standard set-up and the main distinction of active piston standard set-up are, device Structure has lacked power drive device, and piston can only be moved by the pressure between fluid media (medium) and pipeline.
Traditional active piston standard set-up is to directly drive piston or plunger by power mechanism steadily to move, by space It squeezes and generates stable flow.When carrying out tiny flow quantity metering, the extruding in one side space can change the state of gas, so that Measuring accuracy reduces, and on the other hand, if measurement instrument under condition of high voltage, power mechanism has huge load, it is difficult to realize.
Summary of the invention
In order to solve the above-mentioned technical problem, the embodiment of the invention provides a kind of minute gas flowmeter calibrating installation, packets Include driving mechanism, transmission mechanism, grating scale, pedestal, symmetric plunger, the first cylinder body and the second cylinder body, the driving mechanism and biography One end of motivation structure connects, and the transmission mechanism includes T-type drive block, and the grating scale is arranged in the pedestal side, the T One end of type drive block is connected by the gauge head of grating link block and grating scale, T-type drive block vertical portion and symmetric plunger Connection, the pedestal both ends are respectively arranged with the first cylinder body and the second cylinder body, the symmetric plunger both ends respectively with the first cylinder body Coaxially connected with the second cylinder body, first cylinder body is connected to by connecting pipe with the second cylinder body, in parallel in the connecting pipe It is provided with one-way flow indicator and bidirectional traffics indicator.
Further, first cylinder body is provided with the first cavity far from one end of pedestal, and second cylinder body is far from base One end of seat is provided with the second cavity, is equipped with temperature sensor and pressure sensor on first cavity and the second cavity, The outlet side of second cavity is connected to the inlet end of tested flowmeter, and the outlet side of the tested flowmeter and regulating valve connect It is logical.
Further, the driving mechanism includes motor, retarder, speed reducer base and shaft coupling, the motor and fixation Retarder connection on the speed reducer base, the retarder are connected through one end of shaft coupling and screw rod.
Further, the transmission mechanism includes screw rod, guide rail slide block group and T-type drive block, and the screw rod passes through screw rod Fixing seat is mounted on the pedestal, and the screw rod is connect by nut with T-type drive block, and the T-type drive block passes through guide rail Sliding block group is slidably connected with pedestal.
Further, the guide rail slide block group, screw rod and symmetric plunger are arranged in parallel in below the T-type drive block, and It is vertical with the holding of T-type drive block.
Further, the vertical portion of the T-type drive block is provided with the through-hole that symmetric plunger passes through, and the symmetric plunger is logical Plunger fixed block is crossed to connect with T-type drive block.
Further, first cylinder body and the second cylinder body are equipped with side through hole, the side through hole close to one end of pedestal It is connected to the connecting pipe.
Further, two groups of valves have also been arranged in parallel in the connecting pipe, one-way flow indicator two sides are equal It is provided with a valve, bidirectional traffics indicator two sides are also provided with a valve.
Further, the inlet end of first cavity is provided with air inlet, for being tested passing through for gas.
Further, the diameter of first cavity and the second cavity be greater than first cylinder body and the second cylinder body, and with First cylinder body and the connection of the second cylinder body, first cavity and the second cavity enter cylinder body for buffering mesohigh gas The mobile generated gas pulsation of symmetric plunger, guarantees detection accuracy when gas pressure and measurement.
The implementation of the embodiments of the present invention has the following beneficial effects:
1, apparatus of the present invention can access the gas of mesohigh, and symmetric plunger movement is done the calibration used time, the first cylinder body and second Cylinder body is interconnected by interface channel, so that symmetric plunger both sides gas pressure is of substantially equal, in mesohigh gas flow school On time, the load of motor is substantially reduced.
2, apparatus of the present invention are respectively arranged with the first cavity and the second cavity in the first cylinder body and the second cylinder body both ends, pass through The buffering of two cavitys can effectively reduce the gas pulsation that symmetric plunger movement generates, and can guarantee the calibration essence of minute gas Degree.
3, apparatus of the present invention have been arranged in parallel one-way flow calibrator and bidirectional traffics calibrator, survey in conjunction with big flow The use for measuring the one-way flow indicator and the bidirectional traffics indicator with minimum flow measurement range of range is greatly improved The calibration accuracy of minute gas.
4, the present invention can be used for mass flowmenter, laminar flow flowmeter, thermal flowmeter, the soap of quick mesohigh tiny flow quantity Film flowmeter etc..
5, the present invention has the characteristics that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.
Detailed description of the invention
It, below will be to required in embodiment or description of the prior art in order to illustrate more clearly of technical solution of the present invention The attached drawing used is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, right For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings Its attached drawing.
Fig. 1 is a kind of structural schematic diagram of minute gas flowmeter calibrating installation of the present invention;
Wherein, appended drawing reference is corresponding in figure are as follows: 1- motor, 2- retarder, and 3- retarder fixing seat, 4- shaft coupling, 5- Bar fixing seat, 6- guide rail slide block group, 7-T type drive block, 8- screw rod, 9- pedestal, the second cylinder body of 10-, the second cavity of 11-, 12- temperature Sensor, 13- connecting pipe are spent, 14- is detected flowmeter, 15- regulating valve, 16- pressure sensor, 17- symmetric plunger, 18- column Plug fixed block, 19- grating link block, 20- one-way flow indicator, 21- bidirectional traffics indicator, 22- valve, 23- grating scale, 24- bottom plate, the first cylinder body of 25-, the second cavity of 26-, 27- driving mechanism, 28- transmission mechanism.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with attached drawing Step ground detailed description.
Embodiment 1:
As shown in Figure 1, a kind of minute gas flowmeter calibrating installation, including driving mechanism 27, transmission mechanism 28, grating scale 23, pedestal 9, symmetric plunger 17, the first cylinder body 25 and the second cylinder body 10, the driving mechanism 27 include motor 1, retarder 2, subtract Fast device seat 3 and shaft coupling 4, the transmission mechanism 28 include guide rail slide block group 6, T-type drive block 7 and screw rod 8, and the motor 1 subtracts Fast device seat 3, pedestal 9 and grating scale 23 are mounted on bottom plate 24, and motor 1 is connect with the retarder 2 being fixed on speed reducer base 3, Retarder 2 is connect through shaft coupling 4 with screw rod 8, and screw rod 8 is mounted on the pedestal 9 by screw rod fixing seat 5, and screw rod 8 passes through spiral shell Mother connect with T-type drive block 7.It is accurately and steady for guarantee transmission, the axis guarantor of motor 1, retarder 2, shaft coupling 4 and screw rod 8 It holds point-blank.Screw rod 8 is mounted on the both ends of pedestal 9 by screw rod fixing seat 5, and feed screw nut and screw rod 8 cooperate, screw rod Nut is located at 7 lower section of T-type drive block and T-type drive block 7 is fixed.For the precision for guaranteeing calibrating installation, screw rod 8, guide rail slide block group 6 It is arranged in parallel in 7 lower section of T-type drive block with symmetric plunger 17, and keeps vertical with T-type drive block 7.
As shown in Figure 1, be slidably connected on the downside of 7 liang of shoulders of T-type drive block through guide rail slide block group 6 and pedestal 9, T-type drive block 7 It is connect by plunger fixed block 18 with symmetric plunger 17, symmetric plunger 17 passes through the through-hole in T-type drive block vertical portion, symmetrically The middle part of plunger 17 is provided with the groove connecting with plunger fixed block 18, and symmetric plunger 17 and T-type drive block 7 are connected to one It rises, 7 two sides plunger equal length of T-type drive block, T-type drive block 7 drives 17 translational motion of symmetric plunger.
As shown in Figure 1,9 both ends of pedestal are symmetrically arranged with the first cylinder body 25 and the second cylinder body 10,25 He of the first cylinder body Second cylinder body 10 and the symmetric plunger 17 are coaxially connected, and the symmetric plunger 17 is moved close with the first cylinder body 25 and the second cylinder body 10 Envelope, 9 both ends of pedestal are additionally provided with through-hole be connected to the first cylinder body 25 and the second cylinder body 10, and symmetric plunger 17 passes through the through-hole and the One cylinder body 25 and the second cylinder body 10 are coaxially connected, and form two confined spaces.
The grating scale 23 is parallel to the side that guide rail slide block group 6 is set to pedestal 9, and one end of T-type drive block 7 is through grating Link block 19 is connect with the gauge head of grating scale 23, can be fed back by moving distance of the measurement grating link block 19 on grating scale 23 The moving distance of symmetric plunger 17 is obtained to programmable logic controller (PLC), calculates plunger mark according to parameters such as known diameters of plunger Quasi- flow.
First cylinder body 25 and the second cylinder body 10 are equipped with side outlet, the side outlet and company close to the one end side of pedestal 9 Adapter tube road 13 is connected to.First cylinder body is connected to by connecting pipe 13 with the second cylinder body 10, and connecting pipe 13 is divided to for two branches, and Connection is provided with one-way flow indicator 20 and bidirectional traffics indicator 21, and two groups of valves have also been arranged in parallel in connecting pipe 13 22,20 two sides of one-way flow indicator are provided with a valve, and bidirectional traffics indicator two sides are also provided with One valve.Gas can control to indicate in connecting pipe 13 through one-way flow by the valve in parallel 22 in control connecting pipe The branch of device 20 flows through or the branch through bidirectional traffics indicator 21 flows through.
One end of first cylinder body 25 and the second cylinder body 10 is respectively arranged with the first cavity 26 and the second cavity 11, and first Cavity 26 and the second cavity 11 are connected to the first cylinder body 25 and the second cylinder body 10 respectively, the first cavity 26 and the second cavity 11 it is straight Diameter is greater than first cylinder body 25 and the second cylinder body 10.12 He of temperature sensor is respectively arranged on first cavity 26 and the second cavity 11 Pressure sensor 16, the inlet end of the first cavity 26 are provided with the air inlet being passed through for gas, the outlet side of the second cavity 11 It is connected to the inlet end of tested flowmeter 14, the outlet side of the tested flowmeter 14 is connected to regulating valve 15.First cavity 26, First cylinder body 25, symmetric plunger 17, the second cylinder body 10, the second cavity 11, tested flowmeter 14 and regulating valve 15 are mounted on one On straight line.When the setting of first cavity 26 and the second cavity 11 can buffer the pressure and measurement that mesohigh gas enters in cylinder body because The mobile gas pulsation generated of symmetric plunger 17, improves detection accuracy.
Temperature sensor 12 and pressure sensor 16 can in the cavity of real-time monitoring symmetric plunger two sides the temperature of gas and Pressure keeps two sides temperature and pressure to stablize.Work cavity pressure can be adjusted by regulating valve 15, complete different pressures item The calibration of gas flowmeter under part.
Working principle of the present invention is as follows:
The air-flow of mesohigh flows into inside the first cylinder body 25 from the air inlet of the first cavity 26, goes out from the side of the first cylinder body 25 Mouth enters the second cylinder body 10 and the second cavity 11 through one-way flow indicator 20, and gas flows through tested flowmeter 14, by regulating valve 15 are arranged calibrated fluxes point, if being detected flowmeter 14 indicating value at this time is Q1, symmetric plunger 17 is not displaced at this time, has big stream The valve 22 of 20 two sides of one-way flow indicator of measurement range is opened, and channel gating has minimum flow measurement range Bidirectional traffics indicator 21 closedown of pipeline;
According to Q1Value setting symmetric plunger 17 kinematic parameter, motor driven screw rod 8 rotate, with screw rod 8 cooperate spiral shell Master tape moves T-type drive block 7 and symmetric plunger 17 and does translational motion to the second cylinder body 10, feeds back to and can compile by 23 signal of grating scale Plunger normal flow Q can be obtained in journey logic controller2, the registration on one-way flow indicator 20, that is, plunger normal flow at this time Q2
The valve with 20 two sides of one-way flow indicator of big flow measurement range is closed, opening, there is minimum flow to survey The valve for measuring 21 two sides of bidirectional traffics indicator of range, makes the pipeline flow, records the indicating value of the bidirectional traffics indicator 21 For Q3, Q3For actual flow Q0With plunger normal flow Q2Differential flow, actual flow: Q0=Q2+Q3
When calibration, programmable logic controller (PLC) issues specified pulse to motor driver, and motor speed is patrolled with programmable The pulse frequency of volume controller is proportional, the umber of pulse of the distance (circle number) of motor rotation and programmable logic controller (PLC) transmission at Ratio, motor, which receives a pulse, will rotate a fixed angle, by screw rod by rotation be changed into drive symmetric plunger into Row linear movement is to generate plunger normal flow, and wherein bidirectional traffics indicator for displaying is actual flow and plunger normal stream The differential flow of amount takes the sum of plunger normal flow and differential flow as the standard value of calibration.
Tested flowmeter can be calibrated as the following formula:
Δ=(Q1-Q0)/Q0
To reduce measurement error, flow detection point should be set, to flow test point according to the vertification regulation of tested flowmeter It takes multiple measurements and averages.
Apparatus of the present invention can access the gas of mesohigh, and symmetric plunger movement is done the calibration used time, the first cylinder body and the second cylinder Body is interconnected by interface channel, so that symmetric plunger both sides gas pressure is of substantially equal, in mesohigh gas flow calibration When, substantially reduce the load of motor, the first cylinder body and the second cylinder body both ends are respectively arranged with the first cavity and the second cavity, lead to The buffering for crossing two cavitys can effectively reduce the gas pulsation that symmetric plunger movement generates, and can guarantee the calibration essence of minute gas Degree.Apparatus of the present invention have been arranged in parallel one-way flow calibrator and bidirectional traffics calibrator, in conjunction with big flow measurement range The use of one-way flow indicator and the bidirectional traffics indicator with minimum flow measurement range be greatly improved small gas The calibration accuracy of body.It can be used for mass flowmenter, laminar flow flowmeter, thermal flowmeter, the soap-film of quick mesohigh tiny flow quantity Flowmeter etc. has the characteristics that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as Protection scope of the present invention.

Claims (10)

1. a kind of minute gas flowmeter calibrating installation, it is characterised in that: including driving mechanism (27), transmission mechanism (28), light Grid ruler (23), pedestal (9), symmetric plunger (17), the first cylinder body (25) and the second cylinder body (10), the driving mechanism (27) and biography One end of motivation structure (28) connects, and the transmission mechanism (28) includes T-type drive block (7), one end of the T-type drive block (7) It is connect by grating link block (19) with the gauge head of grating scale (23), the grating scale (23) is arranged in the pedestal side, institute It states pedestal (9) one end to be provided with the first cylinder body (25), the other end is provided with the second cylinder body (10), and the T-type drive block (7) is vertical Portion is connect with symmetric plunger (17), and symmetric plunger (17) both ends are coaxial with the first cylinder body (25) and the second cylinder body (10) respectively Connection, first cylinder body (25) are connected to by connecting pipe (13) with the second cylinder body (10), on the connecting pipe (13) simultaneously Connection is provided with one-way flow indicator (20) and bidirectional traffics indicator (21).
2. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cylinder body (25) It is provided with the first cavity (26) far from the one end of pedestal (9), second cylinder body (10) is provided with the far from the one end of pedestal (9) Two cavitys (11) are equipped with temperature sensor (12) and pressure sensor on first cavity (26) and the second cavity (11) (16), the outlet side of second cavity (11) is connected to the inlet end of tested flowmeter (14), the tested flowmeter (14) Outlet side be connected to regulating valve (15).
3. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the driving mechanism (27) Including motor (1), retarder (2), speed reducer base (3) and shaft coupling (4), the motor (1) and it is fixed on the speed reducer base (3) retarder (2) connection on, the retarder (2) connect through shaft coupling (4) with one end of screw rod (8).
4. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the transmission mechanism (28) It further include screw rod (8) and guide rail slide block group (6), the screw rod (8) is mounted on the pedestal (9) by screw rod fixing seat (5), The screw rod (8) is connect by nut with T-type drive block (7), and the T-type drive block (7) passes through guide rail slide block group (6) and pedestal (9) it is slidably connected.
5. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the guide rail slide block group (6), screw rod (8) and symmetric plunger (17) are arranged in parallel in below the T-type drive block (7), and are kept with T-type drive block (7) Vertically.
6. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the T-type drive block (7) Vertical portion be provided with the through-hole that symmetric plunger (17) passes through, the symmetric plunger is driven by plunger fixed block (18) and T-type Block (7) connection.
7. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cylinder body (25) It is equipped with side through hole close to the one end of pedestal (9) with the second cylinder body (10), the side through hole is connected to the connecting pipe (13).
8. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the connecting pipe (13) On be also arranged in parallel two groups of valves (22), one-way flow indicator (20) two sides are provided with a valve, described double A valve is also provided with to flow indicator two sides.
9. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cavity (26) Inlet end be provided with air inlet.
10. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cavity (26) and the diameter of the second cavity (11) be greater than first cylinder body (25) and the second cylinder body (10), and with first cylinder body (25) it is connected to the second cylinder body (10).
CN201811066624.8A 2018-09-13 2018-09-13 A kind of minute gas flowmeter calibrating installation Pending CN109099996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811066624.8A CN109099996A (en) 2018-09-13 2018-09-13 A kind of minute gas flowmeter calibrating installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811066624.8A CN109099996A (en) 2018-09-13 2018-09-13 A kind of minute gas flowmeter calibrating installation

Publications (1)

Publication Number Publication Date
CN109099996A true CN109099996A (en) 2018-12-28

Family

ID=64866153

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811066624.8A Pending CN109099996A (en) 2018-09-13 2018-09-13 A kind of minute gas flowmeter calibrating installation

Country Status (1)

Country Link
CN (1) CN109099996A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115790741A (en) * 2023-02-10 2023-03-14 河北传感自动化科技有限公司 Intelligent flowmeter with adjustable measurement range

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8911597D0 (en) * 1989-05-19 1989-07-05 Baker Roger C Flowmeters
JPH07120298A (en) * 1993-10-22 1995-05-12 Mitsui Petrochem Ind Ltd Instrumental error tester for flowmeter
CN202177433U (en) * 2011-07-25 2012-03-28 浙江省计量科学研究院 Electric drive piston type standard metering device for micro-flow
CN203385466U (en) * 2013-06-08 2014-01-08 浙江省计量科学研究院 Electric drive symmetrical plunger type gas micro flow standard device
CN103994806A (en) * 2014-05-20 2014-08-20 浙江省计量科学研究院 Double-cavity piston type flow calibrator
CN207351522U (en) * 2017-05-22 2018-05-11 镇江市计量检定测试中心 Piston type gas flow caliberating device
CN207515873U (en) * 2017-08-18 2018-06-19 上海新奥新能源技术有限公司 Flowmeter verification device and flowmeter verification system
CN208998899U (en) * 2018-09-13 2019-06-18 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8911597D0 (en) * 1989-05-19 1989-07-05 Baker Roger C Flowmeters
JPH07120298A (en) * 1993-10-22 1995-05-12 Mitsui Petrochem Ind Ltd Instrumental error tester for flowmeter
CN202177433U (en) * 2011-07-25 2012-03-28 浙江省计量科学研究院 Electric drive piston type standard metering device for micro-flow
CN203385466U (en) * 2013-06-08 2014-01-08 浙江省计量科学研究院 Electric drive symmetrical plunger type gas micro flow standard device
CN103994806A (en) * 2014-05-20 2014-08-20 浙江省计量科学研究院 Double-cavity piston type flow calibrator
CN207351522U (en) * 2017-05-22 2018-05-11 镇江市计量检定测试中心 Piston type gas flow caliberating device
CN207515873U (en) * 2017-08-18 2018-06-19 上海新奥新能源技术有限公司 Flowmeter verification device and flowmeter verification system
CN208998899U (en) * 2018-09-13 2019-06-18 苏州市计量测试院 A kind of minute gas flowmeter calibrating installation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115790741A (en) * 2023-02-10 2023-03-14 河北传感自动化科技有限公司 Intelligent flowmeter with adjustable measurement range

Similar Documents

Publication Publication Date Title
CN102680057B (en) Piston type gas-liquid dual-purpose micro-flow standard device
CN104596620B (en) Ultrasonic water meter flow verification standard set-up
CN106237877B (en) A kind of dynamic gas-liquid mixed distributing instrument
CN203385466U (en) Electric drive symmetrical plunger type gas micro flow standard device
CN204594548U (en) A kind of wide range tandem piston formula liquid flow standard device
CN208998899U (en) A kind of minute gas flowmeter calibrating installation
CN107830914A (en) The micrometeor calibrating installation and method of a kind of binary channels symmetrical structure
CN109099996A (en) A kind of minute gas flowmeter calibrating installation
CN103344309B (en) Electric drive symmetrical posts plug gas micro flow standard device
CN112146720B (en) Micro gas flow measuring device and method
CN111323338B (en) Gas flow online calibration system and method
CN109932283B (en) Device and method for measuring apparent viscosity of non-Newtonian fluid at high shear rate
CN201964908U (en) Flow measurement device
CN208333627U (en) A kind of fluid flowmeter on-line checking self-calibrating device
CN213397283U (en) Gas ultrasonic flowmeter with calibration function
CN201964907U (en) Flow measuring device
JP3637988B2 (en) Flow meter testing device
CN110479130B (en) Automatic gas-liquid control fluid proportioning device and fluid mixing system
CN102879062A (en) Multi-plunger parallel type liquid micro flow rate standard device
CN204854900U (en) Wide range piston liquid flow standard device
CN114252119A (en) High-precision ultralow-flow bubble flow instrument and flow calibration method
CN209212229U (en) Oil well three-phase metering integrated apparatus
CN208937459U (en) At the uniform velocity capillary viscometer
CN208075914U (en) A kind of gas-liquid two-phase real time measure device of normal pressure state
CN214748325U (en) Oil liquid flow measuring test bed based on high-precision piston oil cylinder

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination