CN208998899U - A kind of minute gas flowmeter calibrating installation - Google Patents
A kind of minute gas flowmeter calibrating installation Download PDFInfo
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- CN208998899U CN208998899U CN201821494531.0U CN201821494531U CN208998899U CN 208998899 U CN208998899 U CN 208998899U CN 201821494531 U CN201821494531 U CN 201821494531U CN 208998899 U CN208998899 U CN 208998899U
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Abstract
The utility model embodiment discloses a kind of minute gas flowmeter calibrating installation, including driving mechanism, transmission mechanism, grating scale, pedestal, symmetric plunger, first cylinder body and the second cylinder body, the connection of one end of the driving mechanism and transmission mechanism, the transmission mechanism includes T-type drive block, one end of T-type drive block is connected by the gauge head of grating link block and grating scale, grating scale is arranged in the pedestal side, pedestal one end is provided with the first cylinder body, the other end is provided with the second cylinder body, T-type drive block is connect with symmetric plunger, the symmetric plunger both ends are coaxially connected with the first cylinder body and the second cylinder body respectively, first cylinder body is connected to by connecting pipe with the second cylinder body, one-way flow indicator and bidirectional traffics indicator have been arranged in parallel in the connecting pipe.The utility model can be used for mesohigh gasmetry, have many advantages, such as that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.
Description
Technical field
The utility model relates to a kind of gas flowmeter calibrating installations, more particularly, to a kind of school of minute gas flowmeter
Standard apparatus.
Background technique
In recent years, gas small amount of flow measuring and control are in semiconductor manufacturing industry, medicine chemical industry, food hygiene, biological work
The fields such as journey, new and high technology using more and more common, the assay calibration of tiny flow quantity correlation utensil becomes flow measurement instantly
One of the important branch in field.By consulting minute gas flow measurement and standard set-up pertinent literature it is found that gas in pipelines
Flow of the flow less than 10mL/min is tiny flow quantity.
Currently, minute gas flow measurement technology is mainly include the following types: soap film type installation method, pressure volume temperature time
(PVTt) method, quality time (mt) method, constant pressure type, transfiguration area method etc., with the development of mechanical & electrical technology, the development of transfiguration area method is fast
Speed, wherein the most typical with piston type.
The piston-type gas flow standard device that has come into operation in the world is divided into active and two kinds of passive type at present.Its
In active piston standard set-up be to pass through servo motor or stepper motor etc. using precision machined piston piece as mete-wand
Driving equipment pushes piston piece movement, stable, adjustable gas flow will be persistently generated during piston smooth motion, finally
Gas passes through test pipeline and the discharge of tested flowmeter.In addition living by feedback systems real-time measurements such as grating scales in checking procedure
Fill in move distance.The gas volume value that standard set-up can be obtained and be discharged within a certain period of time is calculated according to simple formula, in turn
Realize the metering of flowmeter.And passive type piston standard set-up and the main distinction of active piston standard set-up are, device
Structure has lacked power drive device, and piston can only be moved by the pressure between fluid media (medium) and pipeline.
Traditional active piston standard set-up is to directly drive piston or plunger by power mechanism steadily to move, by space
It squeezes and generates stable flow.When carrying out tiny flow quantity metering, the extruding in one side space can change the state of gas, so that
Measuring accuracy reduces, and on the other hand, if measurement instrument under condition of high voltage, power mechanism has huge load, it is difficult to realize.
Utility model content
In order to solve the above-mentioned technical problem, the utility model embodiment provides a kind of minute gas flowmeter calibration cartridge
It sets, including driving mechanism, transmission mechanism, grating scale, pedestal, symmetric plunger, the first cylinder body and the second cylinder body, the driving mechanism
It being connect with one end of transmission mechanism, the transmission mechanism includes T-type drive block, and the grating scale is arranged in the pedestal side,
One end of the T-type drive block is connected by the gauge head of grating link block and grating scale, T-type drive block vertical portion and symmetrical
Plunger connection, the pedestal both ends are respectively arranged with the first cylinder body and the second cylinder body, and the symmetric plunger both ends are respectively with first
Cylinder body and the second cylinder body are coaxially connected, and first cylinder body is connected to by connecting pipe with the second cylinder body, in the connecting pipe
It has been arranged in parallel one-way flow indicator and bidirectional traffics indicator.
Further, first cylinder body is provided with the first cavity far from one end of pedestal, and second cylinder body is far from base
One end of seat is provided with the second cavity, is equipped with temperature sensor and pressure sensor on first cavity and the second cavity,
The outlet side of second cavity is connected to the inlet end of tested flowmeter, and the outlet side of the tested flowmeter and regulating valve connect
It is logical.
Further, the driving mechanism includes motor, retarder, speed reducer base and shaft coupling, the motor and fixation
Retarder connection on the speed reducer base, the retarder are connected through one end of shaft coupling and screw rod.
Further, the transmission mechanism includes screw rod, guide rail slide block group and T-type drive block, and the screw rod passes through screw rod
Fixing seat is mounted on the pedestal, and the screw rod is connect by nut with T-type drive block, and the T-type drive block passes through guide rail
Sliding block group is slidably connected with pedestal.
Further, the guide rail slide block group, screw rod and symmetric plunger are arranged in parallel in below the T-type drive block, and
It is vertical with the holding of T-type drive block.
Further, the vertical portion of the T-type drive block is provided with the through-hole that symmetric plunger passes through, and the symmetric plunger is logical
Plunger fixed block is crossed to connect with T-type drive block.
Further, first cylinder body and the second cylinder body are equipped with side through hole, the side through hole close to one end of pedestal
It is connected to the connecting pipe.
Further, two groups of valves have also been arranged in parallel in the connecting pipe, one-way flow indicator two sides are equal
It is provided with a valve, bidirectional traffics indicator two sides are also provided with a valve.
Further, the inlet end of first cavity is provided with air inlet, for being tested passing through for gas.
Further, the diameter of first cavity and the second cavity be greater than first cylinder body and the second cylinder body, and with
First cylinder body and the connection of the second cylinder body, first cavity and the second cavity enter cylinder body for buffering mesohigh gas
The mobile generated gas pulsation of symmetric plunger, guarantees detection accuracy when gas pressure and measurement.
Implement the utility model embodiment, has the following beneficial effects:
1, utility model device can access mesohigh gas, symmetric plunger movement does the calibration used time, the first cylinder body and
Second cylinder body is interconnected by interface channel, so that symmetric plunger both sides gas pressure is of substantially equal, in mesohigh gas stream
When amount calibration, substantially reduce the load of motor.
2, utility model device is respectively arranged with the first cavity and the second cavity in the first cylinder body and the second cylinder body both ends,
The gas pulsation that symmetric plunger movement generates can be effectively reduced by the buffering of two cavitys, can guarantee the calibration of minute gas
Precision.
3, utility model device has been arranged in parallel one-way flow calibrator and bidirectional traffics calibrator, flows greatly in conjunction with having
The use of the one-way flow indicator of measurement range and the bidirectional traffics indicator with minimum flow measurement range can be significantly
Improve the calibration accuracy of minute gas.
4, the utility model can be used for mass flowmenter, laminar flow flowmeter, the heat type flow quantity of quick mesohigh tiny flow quantity
Meter, soap film flowmeter etc..
5, the utility model has the characteristics that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.
Detailed description of the invention
It, below will be to institute in embodiment or description of the prior art in order to illustrate more clearly of the technical solution of the utility model
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some of the utility model
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is a kind of structural schematic diagram of minute gas flowmeter calibrating installation of the utility model；
Wherein, appended drawing reference is corresponding in figure are as follows: 1- motor, 2- retarder, and 3- retarder fixing seat, 4- shaft coupling, 5-
Bar fixing seat, 6- guide rail slide block group, 7-T type drive block, 8- screw rod, 9- pedestal, the second cylinder body of 10-, the second cavity of 11-, 12- temperature
Sensor, 13- connecting pipe are spent, 14- is detected flowmeter, 15- regulating valve, 16- pressure sensor, 17- symmetric plunger, 18- column
Plug fixed block, 19- grating link block, 20- one-way flow indicator, 21- bidirectional traffics indicator, 22- valve, 23- grating scale,
24- bottom plate, the first cylinder body of 25-, the second cavity of 26-, 27- driving mechanism, 28- transmission mechanism.
Specific embodiment
It is practical new to this below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer
Type is described in further detail.
Embodiment 1:
As shown in Figure 1, a kind of minute gas flowmeter calibrating installation, including driving mechanism 27, transmission mechanism 28, grating scale
23, pedestal 9, symmetric plunger 17, the first cylinder body 25 and the second cylinder body 10, the driving mechanism 27 include motor 1, retarder 2, subtract
Fast device seat 3 and shaft coupling 4, the transmission mechanism 28 include guide rail slide block group 6, T-type drive block 7 and screw rod 8, and the motor 1 subtracts
Fast device seat 3, pedestal 9 and grating scale 23 are mounted on bottom plate 24, and motor 1 is connect with the retarder 2 being fixed on speed reducer base 3,
Retarder 2 is connect through shaft coupling 4 with screw rod 8, and screw rod 8 is mounted on the pedestal 9 by screw rod fixing seat 5, and screw rod 8 passes through spiral shell
Mother connect with T-type drive block 7.It is accurately and steady for guarantee transmission, the axis guarantor of motor 1, retarder 2, shaft coupling 4 and screw rod 8
It holds point-blank.Screw rod 8 is mounted on the both ends of pedestal 9 by screw rod fixing seat 5, and feed screw nut and screw rod 8 cooperate, screw rod
Nut is located at 7 lower section of T-type drive block and T-type drive block 7 is fixed.For the precision for guaranteeing calibrating installation, screw rod 8, guide rail slide block group 6
It is arranged in parallel in 7 lower section of T-type drive block with symmetric plunger 17, and keeps vertical with T-type drive block 7.
As shown in Figure 1, be slidably connected on the downside of 7 liang of shoulders of T-type drive block through guide rail slide block group 6 and pedestal 9, T-type drive block 7
It is connect by plunger fixed block 18 with symmetric plunger 17, symmetric plunger 17 passes through the through-hole in T-type drive block vertical portion, symmetrically
The middle part of plunger 17 is provided with the groove connecting with plunger fixed block 18, and symmetric plunger 17 and T-type drive block 7 are connected to one
It rises, 7 two sides plunger equal length of T-type drive block, T-type drive block 7 drives 17 translational motion of symmetric plunger.
As shown in Figure 1,9 both ends of pedestal are symmetrically arranged with the first cylinder body 25 and the second cylinder body 10,25 He of the first cylinder body
Second cylinder body 10 and the symmetric plunger 17 are coaxially connected, and the symmetric plunger 17 is moved close with the first cylinder body 25 and the second cylinder body 10
Envelope, 9 both ends of pedestal are additionally provided with through-hole be connected to the first cylinder body 25 and the second cylinder body 10, and symmetric plunger 17 passes through the through-hole and the
One cylinder body 25 and the second cylinder body 10 are coaxially connected, and form two confined spaces.
The grating scale 23 is parallel to the side that guide rail slide block group 6 is set to pedestal 9, and one end of T-type drive block 7 is through grating
Link block 19 is connect with the gauge head of grating scale 23, can be fed back by moving distance of the measurement grating link block 19 on grating scale 23
The moving distance of symmetric plunger 17 is obtained to programmable logic controller (PLC), calculates plunger mark according to parameters such as known diameters of plunger
Quasi- flow.
First cylinder body 25 and the second cylinder body 10 are equipped with side outlet, the side outlet and company close to the one end side of pedestal 9
Adapter tube road 13 is connected to.First cylinder body is connected to by connecting pipe 13 with the second cylinder body 10, and connecting pipe 13 is divided to for two branches, and
Connection is provided with one-way flow indicator 20 and bidirectional traffics indicator 21, and two groups of valves have also been arranged in parallel in connecting pipe 13
22,20 two sides of one-way flow indicator are provided with a valve, and bidirectional traffics indicator two sides are also provided with
One valve.Gas can control to indicate in connecting pipe 13 through one-way flow by the valve in parallel 22 in control connecting pipe
The branch of device 20 flows through or the branch through bidirectional traffics indicator 21 flows through.
One end of first cylinder body 25 and the second cylinder body 10 is respectively arranged with the first cavity 26 and the second cavity 11, and first
Cavity 26 and the second cavity 11 are connected to the first cylinder body 25 and the second cylinder body 10 respectively, the first cavity 26 and the second cavity 11 it is straight
Diameter is greater than first cylinder body 25 and the second cylinder body 10.12 He of temperature sensor is respectively arranged on first cavity 26 and the second cavity 11
Pressure sensor 16, the inlet end of the first cavity 26 are provided with the air inlet being passed through for gas, the outlet side of the second cavity 11
It is connected to the inlet end of tested flowmeter 14, the outlet side of the tested flowmeter 14 is connected to regulating valve 15.First cavity 26,
First cylinder body 25, symmetric plunger 17, the second cylinder body 10, the second cavity 11, tested flowmeter 14 and regulating valve 15 are mounted on one
On straight line.When the setting of first cavity 26 and the second cavity 11 can buffer the pressure and measurement that mesohigh gas enters in cylinder body because
The mobile gas pulsation generated of symmetric plunger 17, improves detection accuracy.
Temperature sensor 12 and pressure sensor 16 can in the cavity of real-time monitoring symmetric plunger two sides the temperature of gas and
Pressure keeps two sides temperature and pressure to stablize.Work cavity pressure can be adjusted by regulating valve 15, complete different pressures item
The calibration of gas flowmeter under part.
The working principle of the utility model is as follows:
The air-flow of mesohigh flows into inside the first cylinder body 25 from the air inlet of the first cavity 26, goes out from the side of the first cylinder body 25
Mouth enters the second cylinder body 10 and the second cavity 11 through one-way flow indicator 20, and gas flows through tested flowmeter 14, by regulating valve
15 are arranged calibrated fluxes point, if being detected flowmeter 14 indicating value at this time is Q1, symmetric plunger 17 is not displaced at this time, has big stream
The valve 22 of 20 two sides of one-way flow indicator of measurement range is opened, and channel gating has minimum flow measurement range
Bidirectional traffics indicator 21 closedown of pipeline；
According to Q1Value setting symmetric plunger 17 kinematic parameter, motor driven screw rod 8 rotate, with screw rod 8 cooperate spiral shell
Master tape moves T-type drive block 7 and symmetric plunger 17 and does translational motion to the second cylinder body 10, feeds back to and can compile by 23 signal of grating scale
Plunger normal flow Q can be obtained in journey logic controller2, the registration on one-way flow indicator 20, that is, plunger normal flow at this time
Q2；
The valve with 20 two sides of one-way flow indicator of big flow measurement range is closed, opening, there is minimum flow to survey
The valve for measuring 21 two sides of bidirectional traffics indicator of range, makes the pipeline flow, records the indicating value of the bidirectional traffics indicator 21
For Q3, Q3For actual flow Q0With plunger normal flow Q2Differential flow, actual flow: Q0=Q2+Q3。
When calibration, programmable logic controller (PLC) issues specified pulse to motor driver, and motor speed is patrolled with programmable
The pulse frequency of volume controller is proportional, the umber of pulse of the distance (circle number) of motor rotation and programmable logic controller (PLC) transmission at
Ratio, motor, which receives a pulse, will rotate a fixed angle, by screw rod by rotation be changed into drive symmetric plunger into
Row linear movement is to generate plunger normal flow, and wherein bidirectional traffics indicator for displaying is actual flow and plunger normal stream
The differential flow of amount takes the sum of plunger normal flow and differential flow as the standard value of calibration.
Tested flowmeter can be calibrated as the following formula:
Δ=(Q1-Q0)/Q0
To reduce measurement error, flow detection point should be set, to flow test point according to the vertification regulation of tested flowmeter
It takes multiple measurements and averages.
Utility model device can access the gas of mesohigh, and symmetric plunger movement is done the calibration used time, the first cylinder body and the
Two cylinder bodies are interconnected by interface channel, so that symmetric plunger both sides gas pressure is of substantially equal, in mesohigh gas flow
When calibration, substantially reduce the load of motor, the first cylinder body and the second cylinder body both ends are respectively arranged with the first cavity and the second chamber
Body can effectively reduce the gas pulsation that symmetric plunger movement generates by the buffering of two cavitys, can guarantee minute gas
Calibration accuracy.Utility model device has been arranged in parallel one-way flow calibrator and bidirectional traffics calibrator, flows greatly in conjunction with having
The use of the one-way flow indicator of measurement range and the bidirectional traffics indicator with minimum flow measurement range can be significantly
Improve the calibration accuracy of minute gas.It can be used for the mass flowmenter, laminar flow flowmeter, hot type stream of quick mesohigh tiny flow quantity
Meter, soap film flowmeter etc. have the characteristics that precision height, pressure adjustable, reliable operation, easy to operate, the calibrating time is short.
The above is preferred embodiments of the present invention, it is noted that for the ordinary skill of the art
For personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these are improved and profit
Decorations are also considered as the protection scope of the utility model.
Claims (10)
1. a kind of minute gas flowmeter calibrating installation, it is characterised in that: including driving mechanism (27), transmission mechanism (28), light
Grid ruler (23), pedestal (9), symmetric plunger (17), the first cylinder body (25) and the second cylinder body (10), the driving mechanism (27) and biography
One end of motivation structure (28) connects, and the transmission mechanism (28) includes T-type drive block (7), one end of the T-type drive block (7)
It is connect by grating link block (19) with the gauge head of grating scale (23), the grating scale (23) is arranged in the pedestal side, institute
It states pedestal (9) one end to be provided with the first cylinder body (25), the other end is provided with the second cylinder body (10), and the T-type drive block (7) is vertical
Portion is connect with symmetric plunger (17), and symmetric plunger (17) both ends are coaxial with the first cylinder body (25) and the second cylinder body (10) respectively
Connection, first cylinder body (25) are connected to by connecting pipe (13) with the second cylinder body (10), on the connecting pipe (13) simultaneously
Connection is provided with one-way flow indicator (20) and bidirectional traffics indicator (21).
2. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cylinder body (25)
It is provided with the first cavity (26) far from the one end of pedestal (9), second cylinder body (10) is provided with the far from the one end of pedestal (9)
Two cavitys (11) are equipped with temperature sensor (12) and pressure sensor on first cavity (26) and the second cavity (11)
(16), the outlet side of second cavity (11) is connected to the inlet end of tested flowmeter (14), the tested flowmeter (14)
Outlet side be connected to regulating valve (15).
3. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the driving mechanism (27)
Including motor (1), retarder (2), speed reducer base (3) and shaft coupling (4), the motor (1) and it is fixed on the speed reducer base
(3) retarder (2) connection on, the retarder (2) connect through shaft coupling (4) with one end of screw rod (8).
4. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the transmission mechanism (28)
It further include screw rod (8) and guide rail slide block group (6), the screw rod (8) is mounted on the pedestal (9) by screw rod fixing seat (5),
The screw rod (8) is connect by nut with T-type drive block (7), and the T-type drive block (7) passes through guide rail slide block group (6) and pedestal
(9) it is slidably connected.
5. a kind of minute gas flowmeter calibrating installation according to claim 4, it is characterised in that: the guide rail slide block group
(6), screw rod (8) and symmetric plunger (17) are arranged in parallel in below the T-type drive block (7), and are kept with T-type drive block (7)
Vertically.
6. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the T-type drive block (7)
Vertical portion be provided with the through-hole that symmetric plunger (17) passes through, the symmetric plunger is driven by plunger fixed block (18) and T-type
Block (7) connection.
7. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: first cylinder body (25)
It is equipped with side through hole close to the one end of pedestal (9) with the second cylinder body (10), the side through hole is connected to the connecting pipe (13).
8. a kind of minute gas flowmeter calibrating installation according to claim 1, it is characterised in that: the connecting pipe (13)
On be also arranged in parallel two groups of valves (22), one-way flow indicator (20) two sides are provided with a valve, described double
A valve is also provided with to flow indicator two sides.
9. a kind of minute gas flowmeter calibrating installation according to claim 2, it is characterised in that: first cavity (26)
Inlet end be provided with air inlet.
10. a kind of minute gas flowmeter calibrating installation according to claim 2, it is characterised in that: first cavity
(26) and the diameter of the second cavity (11) be greater than first cylinder body (25) and the second cylinder body (10), and with first cylinder body
(25) it is connected to the second cylinder body (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821494531.0U CN208998899U (en) | 2018-09-13 | 2018-09-13 | A kind of minute gas flowmeter calibrating installation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821494531.0U CN208998899U (en) | 2018-09-13 | 2018-09-13 | A kind of minute gas flowmeter calibrating installation |
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| Publication Number | Publication Date |
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| CN208998899U true CN208998899U (en) | 2019-06-18 |
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ID=66800285
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821494531.0U Active CN208998899U (en) | 2018-09-13 | 2018-09-13 | A kind of minute gas flowmeter calibrating installation |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109099996A (en) * | 2018-09-13 | 2018-12-28 | 苏州市计量测试院 | A kind of minute gas flowmeter calibrating installation |
-
2018
- 2018-09-13 CN CN201821494531.0U patent/CN208998899U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109099996A (en) * | 2018-09-13 | 2018-12-28 | 苏州市计量测试院 | A kind of minute gas flowmeter calibrating installation |
| CN109099996B (en) * | 2018-09-13 | 2024-05-28 | 苏州市计量测试院 | Calibrating device for micro gas flowmeter |
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Effective date of registration: 20190730 Address after: Wuzhong District Wenqu 215128 Suzhou Road, Jiangsu province No. 69 Co-patentee after: China National Accreditation Center Patentee after: Suzhou metrology and Testing Institute Address before: Wuzhong District Wenqu 215128 Suzhou Road, Jiangsu province No. 69 Patentee before: Suzhou metrology and Testing Institute |
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| TR01 | Transfer of patent right |