CN203371169U

CN203371169U - Highly dynamic device that can be moved in a translatory manner, for bringing together an energy beam effect and an auxiliary medium at a working point

Info

Publication number: CN203371169U
Application number: CN201190000830.4U
Authority: CN
Inventors: A·埃勒丁
Original assignee: Trumpf Werkzeugmaschinen SE and Co KG
Current assignee: Trumpf Werkzeugmaschinen SE and Co KG
Priority date: 2010-10-23
Filing date: 2011-10-20
Publication date: 2014-01-01
Anticipated expiration: 2021-10-20
Also published as: WO2012052523A1; DE102010049453A1

Abstract

The utility model relates to a highly dynamic device that can be moved in a translatory manner, for bringing together an energy beam effect and an auxiliary medium at a working point by means of a beam-influencing element (35) positioned last in the direction of the beam, and a device (41) for supplying an auxiliary medium to the working point (40), that can be moved together in the working point (40) along at least one axis, transversely to the direction of the beam. The utility model is characterized in that the last beam-influencing element (35) is designed to divert the beam by means of reflection, and the beam is focused by means of the reflecting element (35) or other beam-influencing elements positioned upstream of the last element.

Description

For the beam effect that makes energy and assist medium, on operating point, assemble can high dynamic translational motion device

The sustainable development of new material processing method, material method of attachment or material structure method as laser cutting and laser weld, high-speed milling, rapid prototyping, processing method perhaps, the sustainable development of for example sclerosis, coating or grinding has caused increasing following machine, these machines have they carrying the high movement velocity of element of instrument or workpiece.

All types of instruments are hereinafter referred to as end effector.Following telecontrol equipment, for example toolroom machine are hereinafter referred to as axle, and these telecontrol equipments have allowed respectively the translation with respect to the workpiece in an axis of the reference frame at the machine working chamber of an end effector or rotatablely moved.

What be called as machine shaft is so sub-telecontrol equipment, they have allowed the translation of a machine element higher machine element with respect to the grade middle grade of the total at machine or have rotatablely moved, wherein, grade in the machine frame situation starts as highest level, and the grade in the machine shaft situation for the first motion end effector finishes as minimum rank.Axle can be consistent with machine shaft, and still, the motion of the axle of the reference frame that reference has been mentioned also can be combined by the motion of a plurality of machine shafts.

In order also can, in the situation that the workpiece of somewhat complex design is used high, speed that make every effort to, to need the high acceleration of motor element.

In a lot of application, need by end effector otherwise continuously and with high as far as possible constant relative velocity on the complicated profile be shaped at least in part along guiding, with high as far as possible clock frequency, by a plurality of discrete positions, on a workpiece, guide, this workpiece has significantly larger physical dimension and usually also has much higher quality with respect to the end effector of having mentioned.This has supposed relatively long path and huge guide structure.Motor element is huger, and power is just larger, needs these power for obtaining the high acceleration of hope on the one hand, and these power cause corresponding reaction on the structural portion of being carried or guide on the other hand.

The reaction of having mentioned causes undesirable, most flexible distortion of these structural portion, and this often causes again the vibration on the resonant frequency of the machine element of all participations.All these distortion and vibration cause that end effector is with respect to the nominal position of workpiece and the skew between physical location.

Be known to various solution routes, in order to reduce this problem.Differentiable on principle is two predominating paths, and still, they can fully jointly use in concrete application.

One path be devoted to can be precalculated or definite motion excursion, wrong compensate carry out as far as possible in advance or reaction equation correction fast.Another path that the present patent application here mainly is devoted to, attempt keeping tinily from the beginning motion excursion, and mistake is avoided.

Described mistake is avoided and three different paths of solution are known in the principle Shangdi.1. stability; 2. the minimizing of moving-mass; With 3. pulse balances.

Avoid causing huge machine by the tetanic property of structure and the mistake of damping vibration, they need high driving force, and this means high acquisition cost and installation cost thus, high energy consumption, also have under many circumstances high wearing and tearing, cause high acquisition cost and operating cost.These costs are in the situation that pursued acceleration often exceeds obtainable production capacity advantage.Avoid for the mistake by reducing moving-mass, be known to equally a series of solution routes.Except the application novel material, carbon fibre composite for example, also used axle configuration, for example stamp identification device replaced, and as example, be so-called six leg parallel institutions there.At this, basic ideas are: the various required frees degree be not axle by can corresponding sports be one another in series obtain, this means on its result, utilize the axle of some, the machine quality that required stability can only disproportionately improve by correspondence fast obtains, but the mode that mostly the kinematics device by the connecting rod by changing on length (these connecting rods most of can freely-movable on gimbal suspension or ball-joint) formation comes jointly side by side (i.e. parallel connection) to carry end effector or workpiece, and these end effectors or workpiece can change by the corresponding coordinated length of described connecting rod or position changes, with the relatively large free degree, in working chamber, move.

Applied stamp identification device machine working chamber but relatively very little, if itself and the conventional machines of similar physical dimension are compared, especially with the words of the machine comparison at the gantry with motion.In addition, the combination in the very complicated dynamic characteristic of the extension bar that can change and this characteristic and joint through strong load, be provided with boundary to high that accelerate and motion very accurately simultaneously.

Developed mixed form, these mixed forms not only arrange traditional axle but also linkage mechanics device is combined, and for example, with following form, traditional gantry plane carrying one substitutes the linkage mechanics device of Multi-axle oscillating head.Example to this is known by US7357049B2.Such combination is pointed out with respect to linkage mechanics device contrary development trend just in time almost simultaneously, therefore even point out also to want the stacked on top of each other stacking of more axle, this development trend for example by International Patent Application WO 93/01021A1 known long time.

WO93/01021A1 has instructed (redundancy) motion of the parallel connection stack of long basic axle and shorter additional shaft, wherein, described additional shaft by they less path and span much smaller build and then lighter, can accelerate with very little power.This is according to the difference of considering, in the situation that identical power more causes higher acceleration, or in the situation that identical acceleration more causes less reaction, thereby make not only accuracy, and speed can benefit thus.

As time goes on, developed other a large amount of additional shaft configurations, identical target is pursued in these additional shaft configurations in a similar fashion.

This also is applicable to EP927596A2 and EP2177299A1, just not being two or three here has high-quality machine shaft, as additional shaft, with less and lighter form, be replicated, but the combination that the stack that the redundance type of the motion of longer machine shaft works can form by a plurality of additional shafts that worked by rotary and parallel-moving type realizes.Also can obtain the motion through relatively high acceleration of end effector with respect to workpiece at this point, and needn't correspondingly accelerate very large quality for this reason.

EP1724054A1 is as the 3rd method of having mentioned of avoiding for mistake, the use of the additional shaft with pulse balance is disclosed with the dynamic (dynamical) additional shaft configuration of the parallel connection of special quadrature, in the situation that these additional shaft configurations, give each additional shaft direction (U, the V of there) configure one with the balance mass of the quality adverse effect of motion, this balance mass is utilized the drive unit of oneself, accurate synchronization and being moved in contrast to service property (quality) (end effector).Reaction on the structural portion that this part quality through accelerating that has additionally reduced additional shaft is carried to correspondence, this can realize the accuracy and/or the speed that improve again.

On the application's time point, in the situation that the current prior art of the pulse balance of additional shaft, by the known ground of applicant, by International Patent Application PCT/DE2010/001037 with in conjunction with the flexible program of the pulse balance by the so-called pulse coupling of International Patent Application PCT/DE2010/001038, obtain, these two international patent applications are all from applicant of the present invention.

All these examples by prior art are in the situation that most application is common: the corresponding operating point of very close its function of end effector to be moved.This is applicable to such application in all cases voluntarily, and the effect of these application is not to be undertaken by contact mechanically, but for example by means of streamer, carries out.To this reason can be not only processing obtainable accuracy (this processing between operating point and end effector than the short distance situation under mostly better), and can, by pressure, provide the relation of accurate restriction on operating point.

Fully in particular, this for example in the situation that laser cutting relate to, there according to the difference of laser power, material type and the strength of materials, the result of optimizing on quality and economically only can in the situation that the so-called cutting gas of input under the pressure dependence that can well control and flowing relation, on operating point, obtain.This utilizes near gas output operating point to realize with more economical better, is apparent for those skilled in the art.

In any case, because the output of gas nozzle and laser beam should be basically in identical place thus, so be generally used for the focus optical of laser beam, unify and be integrated in common housing, be so-called cutting head for the device of inputting cutting gas.

Cutting head fully can have about 5KG or more quality like this, and therefore requires the additional shaft configuration expended very much, especially made every effort to until 100m/s ²acceleration and surpass 50000m/s ³the situation of acceleration value under.

In order to reduce this problem, in WO2009/146697A1, advise, separately cutting nozzles bidimensional formula ground be parallel to surface of the work motion and the mirrors that the corresponding subsequent boots of laser beam is swung by means of a plurality of energy or realize by means of a mirror that can swing on a plurality of axis, wherein, preferably the laser beam of collimation is after by the last-mentioned reflection that can swing mirror accordingly, and the Focused Optical system worked by means of core type far away is orientated perpendicular to surface of the work.

Although significantly reduced thus the quality to be moved in the additional shaft unit, about price is not only about optical stability but also about can expect maintenance needs, that expend and be in operation especially and have high beam power, the problematic Focused Optical system in kilowatt scope.Have in the situation that the additional shaft unit of the movement clearance more than 10cm on two main shafts, it is manufactured economically that this class lens optical system has required optical characteristics ground hardly, and if some words, only in the situation that the huge interval between optical system and revolvable deflection mirror, this preferably causes the disadvantageous physical dimension of such additional shaft unit.

WO2009/079760A1 discloses the probe for the operated from a distance laser weld, this probe can be applied as the additional shaft unit on the meaning of prior art before equally, be similar to enumerated, there is EP927596A2 and EP2177299A1 can rotate-stationary mode the laser cutting head of axle.

For the linear axes that will carry out high dynamic equilibrium along the motion excursion of the operating point of the parallel-moving type motion on a flat work pieces surface (or the specified profile of an Arbitrary 3 D), here but by the suitable mirror in Focused Optical system, realize, this mirror is determined focal length and the interval of operating point and scanning mirror thus.On principle, this class additional shaft unit also is applicable to laser cutting, but is not similar to and has quality and speed, and it utilizes the cutting gas input of relatively little circumscribed spatially and the beam angle of circumscribed on operating point is feasible.

Especially, be applicable to the additional shaft unit of energy redundance type motion for the described problem of prior art, the machined surface of several square metres is crossed in these additional shaft unit, side by side with the basic axle stack ground in long path, moved on time, and even there is the typically machined surface between 10 to 1000 square centimeters.

The principle Shangdi, this class problem but also in the situation that have this class machined surface only can be independently moving or fixing machining cell occur.

According to prior art, concentrating element with mentioned for example, for can move on machined surface as unit together with the device of inputting assist medium (laser cutting head), the physical dimension of concentrating element is such, this concentrating element covers the machined surface of the machining cell of having mentioned basically, and this causes problem and the restriction described.

Described problem not only appears in the situation of laser cutting, and occur in other processing technology, at these in other processing technology, side by side, the beam that energy is arranged in the electromagnetic wavelength scope of about 5O γ m to 100nm utilizes assist medium gas, liquid or the powder type input in operating point, cause desirable result under the condition only limited in the accuracy with enough, and the beam of having mentioned can be not by means of near operating point, lightweight and produce accelerating insensitive device.

The result of the hope of having mentioned can be along the perforation of the pointwise of the level and smooth as far as possible separation of a profile or material boring, and similarly, as the evening out of the circumscribed of material, Shi Bu or melting, and smoothing is sliding or the structuring on order ground arranged.The assist medium of the input of having mentioned not only can obtain or support the result of wishing by heat absorption or heat release, chemistry or the reaction of catalysis, and can be by means of the physical action as pressed, flow, cooling or scraped finish.According to the difference of application, the result that can also jointly mention, reaction and active not of the same race.

All these classes according to the common ground of the application of prior art are: for the device of the input of having mentioned of material, cross the motion that accelerate on the special highland of energy of larger machined surface, at the same time on the orientation of all major parameters of the constant and simultaneously high as far as possible energy by the beam mentioned and on uniformity, especially in the situation that the laser beam that application focuses on, if any, by means of the lens optical system that could manufacture and safeguard with expending, be only feasible.

Therefore, task of the present invention is, in the situation that compared with prior art efficiency and flexibility raising, make described operating point and described medium introduction part realize the motion that accelerate on highland especially on large machined surface, simultaneously, all basic parameters, constant and simultaneously high as far as possible beam energy effect calibration is also even.

According to the present invention, the solution of this task is, arranging one makes the element of described beam deflection as the element that affects beam last on beam direction by reflection, and for described reflecting element is defined at least one axle, substantially parallel and is synchronized with the translational motion of the motion of described medium introduction part, and, by means of described reflecting element or other, be arranged in element before this reflecting element, that affect beam about beam direction and carry out beam focusing.

This causes such possibility: respectively suitably according to operating point, be the distance of pursuing between described medium introduction part and described reflecting element, the unit of one relative compact perhaps is set, it comprises described reflecting element and described medium introduction part, perhaps these elements are assigned to separately but on the unit be synchronized with the movement, this under any circumstance with little relevant surcharge allow the acceleration of described unit with in the prior art in the situation that appropriate litigation fees can only arrange the medium introduction part the same with the acceleration of realization.According to the present invention, can avoid, perhaps need large tracts of land and bothersome unit to make beam deflection and gathering, perhaps must make large quality focusing unit height motion together post separately, they are all relatively difficult that safeguard and usually in producing wearing and tearing, make to maintain difficult installation site in both cases.Simultaneously, according to the present invention, reach thus, distance between the operating point of the described beam that is rich in energy and the last element that affects beam maximizes with the ratio of the overall size of related device, can further reduce thus possible disadvantageous, the especially reaction on calorifics on the last element that affects beam.

Preferably when according to application, specifically wishing that the beam effect causes by the beam bunchy that has relatively short focal length to operating point, can stipulate, the essential focusing moulding that makes the beam bunchy on the surface of the reflex by described reflecting element separately realizes.

Preferably when according to application, specifically wishing that the beam effect causes by the beam bunchy that has relatively long focal length to operating point, can stipulate, essential focusing realizes by the corresponding beam shaping element before described reflecting element on light path separately or at least mainly.

For example for a kind of laser beam, application can realize latter event like this: make to move on support that a collimation unit is less at the acceleration of additional shaft unit, input side in this collimation unit carries out the input coupling from the laser beam of glass fibre, carry out for example, expansion by means of the speculum group known from prior art (seeing WO2009/079760A1) of beam at outlet side, focus on and deflection, according to the present invention, change like this, make laser beam by last plane deflecting mirror deflect into operating point and described mirror according to the present invention basic translation ground parallel and be synchronized with medium introduction part according to the present invention equally and move.

By according to prior art, adaptive mirror collimation back, unit, but the relative position that can be adapted to the deflecting mirror of translational motion comes on adaptive operating point, as the beam diameter of the hope of the outlet below of the cutting gas nozzle of medium introduction part device of the present invention.

Be noted that at this distance between focus and motion deflecting mirror can not be so little with focus and the last interelement ratio of distances constant of beam shaping, so that can have produced the beam that problem ground is high concentrate on deflecting mirror.Therefore should stipulate according to the structure height of cutting head of the present invention too not little, even but, so that the deflecting mirror translational motion still can realize as far as possible little focal length relative changes simultaneously, this can grasp on technology trends not too bothersomely.

But at this, pursue according to application and specific optimization, because come adaptive focal length also for example due to mechanically unstable or lag behind and cause precision problem by means of the very little change of the adjustment of described adaptive mirror on relatively large distance range on the other hand.Also can carry out adaptive focus by adjustable lens combination (but about beam direction before the deflecting mirror of last translational motion) in principle, but these lens combinations in the situation that beam power high Iimaging Stability and maintainable aspect defectiveness, as explained for prior art.

This shows, of the present inventionly thisly on control technology, also require high embodiment preferably only to arrange when focal length greatly.

Therefore, no matter when can by respective design on beam direction in the end the deflecting mirror of use optimize required focusing, mostly also in the situation that these the time: but or when this point required focusing is relatively large while causing the translational motion unit to construct relatively highly in light path (this unit not only comprises described deflecting mirror but also comprises described medium introduction part), but or when needing thus two separately but during the unit of parallel and synchronous translational motion.

In the situation that two unit are separately driven, especially when the assist medium that will import on operating point is inert gas or air, can stipulate, these two unit still abreast one common surround they, move in by the chamber of described medium on-load pressure (" housing "), this makes Tou Guoed beam between unit and unit but to the minimum number of the transition part (" window ") of medium-tight.

But the unit that translational motion is set under most of applicable cases on beam direction with respect to the adjustable of surface of the work.Also can be arranged between described deflecting mirror and described cutting nozzles or in general manner between described reflecting element and described medium introduction part apart from aspect adjustable.

Depending on application, necessary movement clearance and dynamic characteristic, multiple different from prior art, known driving possibility can be for the technical staff.Linear direct driver for example, plunger-type coil actuator or piezoelectric actuator.

Feasible and structurally and economically meaningfully at this, the principle of the additional shaft of redundancy stack also is used in this adjustment, this cause on the one hand height in little stroke dynamically, motion possibility that especially structurally can favourable realization for the position of described reflecting element is adaptive, allow on the other hand the element taken up space of larger quality to be displaced to for the larger motion possibility on beam direction in general axis configuration more senior, there, they do not occur aspect dynamic at machine or at least disturb much less ground to occur as basic axle.

The described more favourable possibility that realizes preferably obtains like this: for the little feed motion on beam direction, other element that the position adjustment ground that is parallel to described deflecting mirror also makes to participate in beam shaping and deflection synchronously together with motion.This is particularly advantageous, if by this way in motion synchronous number of elements few, for example, when only needing a collimation unit is moved together, to avoid too this motion, cause undesirable focus offset or position skew.

Alternatively or additionally, according to the present invention, can stipulate, at least one network beam deflection in these elements or shaping and a swingable low-angle amount or translational motion on a little highway section, make with described medium introduction part and compare, from the beam of each counter element can be higher on operating point post can translational motion on a little highway section.

Must construct so described medium introduction part thus: make corresponding beam deflection not cause the obvious processing quality variation on operating point.

This many according to the present invention can with application in be fully possible, as also by known in the prior art in DE102005027836A1, also propose to widen the cutting nozzles of several mm in the document, the high acceleration beam deflection for stack to main motion, widen several.

But the dynamic translational motion of the height that deflecting mirror both is not set in the prior art, the optical element that can move abreast with the medium introduction part that speculum neither be unique, because express there or impliedly arrange and follow the focusing in the speculum back.

With the additional shaft synergy of stipulating the high acceleration translational motion of the redundancy in the decimetre scope of the prior art, produce special high efficiency and flexibly according to the present invention, the motion possibility of three grades of redundancy stacks, this possibility is except the advantage of having mentioned and the better adaptive capacity to different application that the prior art with in WO2009/146697A1 is compared, also allow higher precision and/or the speed in processing, because be easy to cooling in the situation of deflecting mirror according to the present invention by the motion of the dynamic actuator execution of height shorted segment, thereby optically under the high beam power situation, can stablize better.

This characteristic and the structure produced cause the maintenance period of growing and cause touching more easily part simultaneously.Find out on amount from the prior art, especially can be used for the laser cutting field according to machines configurations of the present invention, because most of object lesson is studied this application.

Therefore, that explains here also should study this field for applying object lesson of the present invention, but this does not mean that certainly, the change that described exemplary scenario can not easily be expected through the professional and be suitable for many other application, these applying portion ground are explained for prior art or are described.

Preferably the present invention can be advantageously utilised in here: the profile that motion process is shaped along longer complexity with high constant speed carries out or carries out under the high acceleration of frequent intermittent on longer highway section because other reasons requires total movement.

The raw material that the most general a kind of application of laser cutting is cutting plate shape on so-called plane laser cutting machine.Most this laser cutting machines are divided into two kinds of basic structures.

Both common ground are, material mostly on pallet changer between processing period position be positioned in Processing Room regularly.

Slightly more traditional part is positioned at portal frame on the side, operating room above material by the stand assembly consisted of two drivers and respective track, along the large-size of Processing Room, Processing Room comprises the horizontal processing district of 3x2 rice 5x3 rice and mostly only has the height of several centimetres in most of machines mostly.Because the guide rail exposed of the structure that can move on portal frame also must be slightly longer than the material that will process, thereby portal frame has the free arm length of 2.5 to 3.5 meters, and this is 3 to 4 meters long movable structure of overall expression usually correspondingly.

In order in this machine, to touch well operating room, wish that portal frame can move with column, make guide rail to be arranged under operating room.But this due to additional moving-mass and elasticity and with the dynamic contradiction of high machine, make the guiding of portal frame mainly directly carry out on processing plane.Therefore along with the time is developed the second frame mode, wherein, the guide rail of portal frame is displaced to top or the back of Processing Room.The carriage maintained by upper and lower stacked guide rail from the Processing Room dorsal part through the top, operating room design relatively wide center rail until the respective combination consisted of the single guide rail of back, operating room and top is diversified.Especially these two first groups only are applicable to have the very long transverse axis of high acceleration conditionally, because along with executing agency perturbed force and unstable occurs to the increase of the distance at the place of suspending.

This also is applicable to the flexible program of other describe, in general terms certainly, just just applicable with identical degree when span is larger.As described in detail in the prior art, a solution of this problem is to use the additional shaft worked redundantly, makes the portal frame of relatively unsettled length only must bear the component motion with relative low acceleration with carriage in the situation that total motion has high acceleration.

Also mention in the prior art, additional shaft now occurs again to the reaction of the basic axle of what is called and and this solution developed on the meaning of balance pulsation.

Reaching 60m/min in the plan cutting speed is that the acceleration of 1m/s and basic axle is at 10m/s ²during left and right, for the necessary movement clearance of additional shaft, according to the formula of slightly simplifying the prior art from for redundancy additional shaft exercise question (seeing in detail WO2008/148558A1), obtain S=4xV ²/ A, i.e. 4x(1m/s) ²/ 0m/s ²=40cm.For example, known from other document (WO2008/151810A1 or WO2009/027006A1) of prior art, this requirement can reduce by the control technology measure mostly, this means effectively, in fact usually the theory " worst case " of maximum demand 50% value, make the practical value that can be based on about 20cm.According to prior art so far, there is the operating room of this size for thering is 100m/s on bidimensional ²below the additional shaft unit of high acceleration can not be realized economically.

But this slightly restrictedly also is applicable to have the telecontrol equipment of the axle of redundancy stack motion, because the structure of the large quality of large volume is less there, cause interference.

Finally, the solution about the present invention to this problem, describe and explain particularly preferred embodiment of the present invention by accompanying drawing.

Fig. 1 illustrates total view of laser cutting machine, comprise lathe bed 1, this lathe bed has fixed gap bridge 2, be provided with guider 3 on directions X on relatively wide center rail above Processing Room along this gap bridge, this guider will move according to the improved additional shaft unit 10 with the de-coupling of pulsation of the present invention for making on Y-direction.Fig. 2 illustrates the details of the described unit 10 of equipment according to the present invention.Fig. 3 illustrates the details of the laser cutting head 21 of equipment according to the present invention.

Laser cutting machine in Fig. 1 comprises an instrument cabinet (4), comprises control device (5) and some unshowned unit in this instrument cabinet, as driving amplifier, and other electric parts, lasing light emitter and reserve of gas device.In operating room (6), a pallet changer is arranged, it is with the material that will process.For the driving that guider (3) is moved on directions X, by means of the linear direct driver that is arranged in two centers between guide rail in pass a bridge (2), carry out, it is about 10m/s that this linearity direct driver allows the peak acceleration of device (3) ², before reaching this acceleration, device (3) in fact moves on friction ground, even moves to the terminal location of Y-axis.

Unit (10) also carries out by means of linear direct driver along device (3) motion on Y-direction, but, respectively in both sides and closely to abut in the guide rail be shown in dotted line (11) of unit (10) upper, make the adverse effect of the space of having avoided inner to unit (10).Described driver makes along described device (3) can realize 15m/s ²peak acceleration, and with the driver along described gap bridge (2) of device (3) together as basic axle can be relative the driver of lowland acceleration.

That Fig. 2 illustrates is improved according to the present invention, with the particularly preferred embodiment of the additional shaft unit (10) of the de-coupling of pulsation.The upper motion of the guide rail (11) that this unit (10) can illustrate by means of director element (12) in Fig. 1.

The relatively low driving of accelerating of unit (10) is carried out by means of the active drive element (3) on unit (10) and the passive matrix element (14) arranged along guide rail (11).For making laser head (21) but the additional shaft (20) that high acceleration ground moves comprises guide rail (22) and the driver (23) for laser cutting head (21) is moved on directions X.Fig. 3 illustrates the details of the laser cutting head (21) of preparing according to the present invention.

Additional shaft (20) is directed on unit (10) by means of director element (15) and is driven by the exterior section with respect to described unit (10) by means of driver (16) (as can the high drive system of accelerating), and this exterior section also is used as balance mass for the de-coupling of pulsing in this preferred version of the present invention.

By laser cutting head (21), along guide rail (22), by driver (23), in the caused acceleration reaction of additional shaft (20) internal motion, in this special embodiment, by described director element (15), be delivered on the described exterior section of unit (10), be balanced quality (24) compensation, these balance masses can be moved along guide rail (25) by means of driver (26).In order to see more clearly, additionally in unit, the outside of (10) illustrates the preferred initiatively part at this of driver (16) and (26).

To other preferred substitute mode of the more deep explanation of details and these and the configuration of similar additional shaft, can from International Patent Application PCT/DE2010/00037 of before having enumerated in the prior art and PCT/DE2010/001038, learn.Point out in detail there, how can realize high efficiency additional shaft configuration by means of pulsation balance and/or the de-coupling of pulsation, so these additional shaft configurations are particularly suitable as the basis according to device of the present invention.

Select a kind of modification in current example, in this modification, according to laser cutting head of the present invention (21) low quality, work especially, its mode is, save (20) internal pulsations balance of additional shaft unit, and therefore reach extra high acceleration corresponding to PCT/DE2010/001038 and utilized additional shaft unit (20) in unit (10) inner along Y-axis and the movement clearance de-coupling of pulsation.Then according to PCT/DE2010/001037 at the enterprising hand-manipulating of needle in unit (10) of carrying additional shaft (20) to the pulsation balance of the acceleration of laser cutting head (21).

Can the high movement clearance of driver on Y-direction of accelerating be about 27cm, but, due to the counter motion (being about 3 times at this hypothesis live load) of live load and balance mass, this movement clearance be limited in about 20cm with respect to the fixed coordinate system of machine.

Additional shaft (20) has the movement clearance of about 24cm on directions X, this movement clearance is in the situation that can effectively utilize without cutting down, thus in the situation that use the Known designs rule, two axles can utilize the cutting speed of constant, maximum 100m/min to a great extent, preferably in the situation that use the efficient linear direct driver, combine with substrate amount laser cutting head according to the present invention, on two axles, all can reach the most about 150m/s ²acceleration.By strong especially on the driving side of each motion thereby also on relatively costly permanent magnet, active drive side without iron coil and additional shaft (20) with according to the carbon fibre composite construction mode to a great extent of laser cutting head of the present invention (21), also can reach 200m/s ²above acceleration.

In this embodiment, by flat deflecting mirror (29), import laser beam to laser cutting head (21), this laser beam is at first by collimation unit (28) expansion parallel orientation.This laser beam imports to described collimation unit (28) by optical cable, and this optical cable is by lasing light emitter, the pumping of for example fibre laser, and this lasing light emitter is arranged in described instrument cabinet (4).Obtain obvious advantage by such division optical element:

A. according to the present invention, the cutting head (21) of equipment is low-quality, thereby can reach high acceleration with little driving force.

B. optical cable does not bear the limit acceleration of cutting head (21) and additional shaft (20) to the importing of collimation unit (28).

C. by all beam deflection members are integrated in described unit (10) and still can realize the high accuracy of relative orientation.

In order to make focus can adapt to the material to be processed on the pallet changer in operating room (6), parallel arrangement for adjusting height is set in this embodiment, not only for regulating the inner speculum of laser cutting head (21), and, for regulating collimation unit (28), this arrangement for adjusting height means with two-wire in Fig. 2 on the lower limb of these elements.For this details, in Fig. 3, for laser cutting head (21), explain and its meaning also is applicable to collimate unit (28).Flat deflecting mirror (29) is preferably not movable, but adaptive available mirror surface in height.

Finally, with the schematic cross section in the X/Z plane, the particularly preferred modification according to laser cutting head of the present invention (21) is shown in Fig. 3.

Some for explain the present invention nonsensical or almost nonsensical element at this, do not illustrate intentionally, but it is the basis of the free space in figure, thereby can cause the shown element of corresponding adaptation.

This laser cutting head comprises three unit that can move relative to each other, on X-axis directed and on Z axis not movable master unit (31), movable speculum housing (33) is installed on top on Z axis on this master unit and is equipped with in bottom and can be independent of the cutting nozzles (41) that speculum housing (33) moves on Z axis.These unit mutually are shaped and adaptedly for example by means of the unshowned seal convexity sealing on the transition seamed edge, make they form a common housing by this housing can air or other is nonreactive, for the respective wavelength of laser beam (30) optically enough the gas of neutrality guide to cutting nozzles (41) under the pressure of several bar.

As with represented for Fig. 2, speculum housing (33) can be with respect to master unit (31) motion ± 5mm on Z axis.The tubulose lengthening part (39) of speculum housing (33) and the bearing between master unit (31) and guide rail (32) are for this purpose.One drive unit is set for this reason, or is integrated at least in part in these elements, for example, as the Linear actuator with relatively high holding torque, or preferably be applied to dividually on the tubulose lengthening part (39) of speculum housing (39).Can be little to the response of these drivers aspect dynamically, because different from the motion of high acceleration in the X/Y plane, only require relatively little acceleration in nearly all application of expecting on Z axis.

Laser beam (30) vertically incides in described housing through window (34), preferred quartz glass, makes that expect, the quality reduction that cause due to the medium transition of laser beam minimize.

For extra high aggregate quality and the minimum deflection when the deflection, concave surface deflecting mirror (35) is spheric preferably.

Described deflection in this embodiment by totally can be offset approximately 1 and accurate, can produce by the high plunger-type coil actuator (37) of dynamically controlling, described plunger-type coil actuator only illustrates for operating point (40) motion in operating room (48) on directions X in Fig. 3.

Described driver (37) on the one hand with mirror support (36), preferably aim at like this ground elasticity with speculum housing (33) on the other hand and be connected and controlled like this, make universal the suspending of standard that obtains deflecting mirror (35) under little drift condition.

Therefore, the application example for the present invention described herein on main movement shaft X and Y, totally obtain the motion of the three times redundancy stacks of laser beam on operating point (40), wherein

Basic axle by unit (3) and (10) in whole operating room the most about 10 to 15m/s ²the motion of low acceleration realize,

2. additional shaft is by the highest about 150m/s ²higher accelerations motion, in the movable rectangle of an about 20x20cm, in unit, (10) are inner realizes, and

Beam deflection by means of deflecting mirror (35) by the most about 1000m/s that can reach on operating point (40) ²high acceleration in the rectangle of an about 12x12mm, realize.

Pass through rock-steady structure, especially whole unit (10), and use the laser interference quick mensuration between speculum housing (33) or master unit (31) and mirror support (36), can reach laser focusing beam (30) in operating point (40) in extremely dynamic and accurate guiding.

By speculum (35) top can be slightly away from cladding system (38), this speculum can easily take off from mirror support (36).The cooling of speculum (35) also undertaken by mirror support.

Cutting gas to operating room the importing of (48) by cutting nozzles (41), undertaken, this cutting nozzles and speculum housing (33) can move with respect to master unit (31) similarly.Bearing between cutting nozzles (41) and master unit (31) and guide rail (42) are for this purpose.But also have obviously difference, aspect required precision, relatively low at this on the one hand, because the following motion almost not effect in great majority should have of millimeter scope, the much bigger movement clearance of several centimetres is also significant but then.Thereby suitable be (also due to high holding torque), a simple linear step motor driver is set, or at least in part in the element of integrated bearing and guide rail (42), or is arranged on dividually between cutting nozzles (41) and master unit (31).

Be provided with in this embodiment the movement clearance of 30mm on Z axis, so that under lasing light emitter is closed situation, for example, for conversion materials more, can reach enough distances at cutting nozzles (41) and pallet changer.

Cutting nozzles shown in Fig. 3 (41) is become by two other removable elements combinations except its hard-wired master unit.One adapter (44) directly is installed on master unit, this adapter carrying nozzle-end (45).Adapter (44) is for the mobile trend of the cutting gas of impact, to adapt to the required cross section for this reason on current application and nozzle-end (45), simultaneously for set up reliable as far as possible but still can be quick operating, with being connected of nozzle-end (45), this nozzle-end preferable configuration is for changing cheaply part, to reduce near the cost because mainly the wearing and tearing of appearance and infringement cause operating point (40).Certainly, described nozzle-end (45) must be constructed to obtain the current adapter (44) of cooperation.

Requirement for the different spray nozzles cross section above operating room (48) for example can produce like this: make depending on purposes, motion by speculum (35) can be in operating room (48) reach maximum workspace and needn't be utilized fully, thereby can reduce gas consumption by narrower deflection cross section.

Can reach by the further configuration of adapter (44) in addition, the assist medium that at least can add in order to cut use can not cause that fault or infringement ground flow through the housing of laser cutting head (21).

This also is applicable to nozzle-end (45) similarly, herein, this configuration can be preferably significant or necessary assist medium must or very large possibility ground also cause will be more bothersome height wearing and tearing on the adapter (44) making and/or change or arrange while damaging.Sensing element also can be integrated in all parts of cutting nozzles (41).

The high acceleration beam deflection realized with speculum by means of swingable just (wherein, beam deflects into operating point and focuses on by bothersome light tool) compare, advantage of the present invention is noticeable especially due to the modification in this exemplary progressively description, because this according to prior art, the driver that still needs oneself for the beam deflection of cutting nozzles, this driver or do not allow cutting nozzles to adapt to especially neatly current application, perhaps, in the situation that also do not have described optical element just bothersome similarly with the present invention program, thereby, the use of the bothersome and responsive optical element that there is required is because the present invention seems very uneconomical, especially the expense that these optical elements increase along with size due to exponential form ground almost and the movement clearance of strong restrictions corresponding axis.

But but the invention enables in the situation that the flexibility aspect the suitability that should require about difference much higher can realize analogy, by introduce the even much higher power of triple redundance level in the motion of beam.

Even do not need this flexibility in certain application, also can obtain advantage economically by the present invention, in use, due to firm and safeguard friendly structure, aspect the production of this machine or partial devices, because machine of the same type and device can be used in multiple different use and thereby can be with larger number of components production to a great extent.

The present invention also can be advantageously utilised in such device, in these devices, while reaching high speed in will the vibrational excitation minimum in machine construction, for example in the situation that the accurate especially point-like processing of the large enforcement of inventory or point measurement, operating point with respect to workpiece is not preferably continuously but moves from point to points.

This shows, the present invention can with the professional can think easily to form be advantageously utilised in application a large amount of, almost can not be exhaustive.

The machine shaft that can realize according to the present invention or basic axle can several multiple types.Not only there is portal frame movably, removable or swingable column, there is system fixing or movable material, and various telecontrol equipment based on rotary gemel for example six-shaft industrial robot or the configuration of parallel motion arbitrarily can form described basic axle.

So can be advantageously carry by the workpiece fixed frame with respect to motion or by any other basis that is suitable for moving with respect to the long stroke of workpiece ground with the additional shaft of end effector motion.

Main shaft and basic axle be the direct drive unit by being linear actuating device, hollow shaft motor, rack gearing form or drive by means of the ball threaded screw rod usually.Depending on specific requiring according to application, the movement clearance that this machine is required and the quality that will move, also can be used according to the invention other electricity ground, hydraulically or the drive unit worked with starting.

For example, lathe can advantageously be used for processing great member with high details complexity for steamer manufacture or aircraft manufacturing according to the present invention, perhaps for daily size, the size that for example there is body of a motor car, washing machine, the wiring board that perhaps circuit is used, the always little size to several centimetres, the size for the workpiece that will process of microsystems technology or electronic technology, for example be used in the manufacture of solar cell.

The trend that the size of the operating room do not divided is as far as possible compared and growth is arranged in the problem of more and more higher measuring speed of high-precision while or process velocity with the part that will consider, thereby require high as far as possible acceleration simultaneously.With the prior art for having or do not have additional shaft, compare, the present invention can realize this requirement to a greater degree.

The processing method of machine particularly suitable of the present invention is welding, cutting, plating, mark, at material, applies complex outline on as sheet material, plastics, glass, pottery, wood and yarn fabric.

Rapid prototyping (Rapid Prototyping) is also a kind of suitable application, will cut especially therein layer, applies material in little space or must apply with the energy that is basically perpendicular to the material orientation due to other reasons or those methods that material applies to process.

In addition, the precision of the fine finishining of the minimum structure of at full speed carrying out or utmost point small detail apply or remove be also of the present invention may purposes, wherein, they only are interpreted as example, and do not mean exhaustive to any mode of application possibility of the present invention.

Claims

1. can the high dynamically device of translational motion, for beam effect and assist medium that energy will be arranged, on operating point, assemble, at least comprise:

1). about beam direction be arranged in the last element that affects beam (35) and

2). for import the device (41) of assist medium to described operating point (40), for this device arranges substantially parallel and synchronous described translational motion transverse to the beam direction in operating point (40) at least one axle, wherein, described motion can either be by means of for two parts (35,41) the driver separated is realized, also can be by means of the common driver (16 that carries the part-structure (31) of two parts for whole device according to the present invention (21), 23) realize, it is characterized in that

The described last element that affects beam (35) is constructed for making described beam by means of reflecting deflection, and, beam focuses on by means of described reflecting element (35) or other, before this reflecting element about beam direction, element (28,29) that affect beam and carries out.

2. device according to claim 1, it is characterized in that, described at least one axle only can be realized the motion of a short stroke transverse to the beam direction in operating point (40) with respect to the extension size of whole operating room (6), this moves to small part is redundancy, at least about one, make the device (1 of described device (21) with respect to described whole operating room (6) motion, 2,3) orientation, wherein, described whole operating room (6) can be both static, also can move by means of described device (1,2,3).

3. device according to claim 1 and 2, is characterized in that, required focusing only realizes by the structure that makes described beam bunchy of described reflecting element (35).

4. device according to claim 1 and 2, is characterized in that, required focusing is only passed through or realized by beam shaping element (28,29) at least in part, and described beam shaping element is seen in described reflecting element (35) before about beam direction.

5. device according to claim 1 and 2, it is characterized in that, even arranged in the situation that two described parts separately drive also, two partial parallel ground one common surround they, can, by the motion like this in housing in other words of the chamber of gaseous medium on-load pressure, make described gaseous medium substantially only can discharge for the device (41) that imports assist medium by described.

6. device according to claim 1 and 2, it is characterized in that, be provided with other driver (37), the motion for described reflecting element (35) at least one translation or axle rotation, for operating point (40) than short stroke and motion that can higher acceleration.

7. device according to claim 1 and 2, it is characterized in that, about beam direction, see, by described reflecting element (35) and other reflecting element (29) in case of necessity, formed, allow the unit of beam deflection in operating room before, be provided with the beam deflection element (28 of at least one driver with at least one phorogenesis or turning effort, 29), for operating point than the motion of short stroke and higher acceleration.

8. the device for laser cutting, this device construction is according to the described device of one of claim 1 to 7, have a cutting nozzle (41), this cutting nozzles is implemented for the device that imports assist medium like this as described: make laser beam in operating point (40) have adaptive movement clearance as operating room (48) for the described motion than short stroke and higher acceleration.