CN203360568U - Inclined type vacuum magnetic control continuous production line and vacuum film coating machine - Google Patents
Inclined type vacuum magnetic control continuous production line and vacuum film coating machine Download PDFInfo
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- CN203360568U CN203360568U CN 201320243235 CN201320243235U CN203360568U CN 203360568 U CN203360568 U CN 203360568U CN 201320243235 CN201320243235 CN 201320243235 CN 201320243235 U CN201320243235 U CN 201320243235U CN 203360568 U CN203360568 U CN 203360568U
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Abstract
The utility model discloses an inclined type vacuum magnetic control continuous production line which comprises a rack and a vacuum chamber body mounted on the rack, wherein the vacuum chamber body comprises two front buffer chambers, a film coating chamber and two rear buffer chambers, wherein the two front buffer chambers, the film coating chamber and the two rear buffer chambers are sequentially connected; a transmission belt penetrating through the vacuum chamber body is also mounted on the rack; the transmission belt feeds a metal frame carried with substrates into the front buffer chambers for front buffer processing, then feeds the metal frame into the film coating chamber for film coating, and finally feeds the metal frame into the rear buffer chambers for rear buffer processing; the metal frame is sent out from the vacuum chamber; and an inclined angle formed between a frame body of the metal frame and a horizontal direction ranges from 4 degrees to 150 degrees. According to the inclined type vacuum magnetic control continuous production line, in a substrate film coating process, the inclined angle between the metal frame with the substrates and the horizontal direction is always kept to be 4-150 degrees; the substrates placed on the metal frame directly lean against a side wall of the metal frame, and no clamp is required; all the substrates are assembled conveniently and rapidly, and no clamp imprint is produced during production; and fully-automatic substrate loading and unloading of a manipulator can be realized easily.
Description
Technical field
The utility model relates to automatic production control techniques field, relates in particular to a kind of tilting vacuum magnetic control tinuous production and vacuum plating unit.
Background technology
Current existing plated film tinuous production equipment is divided into vertical type or horizontal two kinds.
The production line of vertical type is usually in hundred grades of Clean rooms, one or more pieces raw material substrates are placed on a metal matrix horse, then use clamp, substrate frame is passed through the feed chamber of vacuum apparatus successively with substrate, surge chamber, coating chamber, rear surge chamber, the slice chamber, in coating chamber, utilize magnetron sputtering target to complete the plated film to substrate, when the substrate frame that is loaded with substrate moves to that slice is outdoor enters thousand grades of Clean rooms, utilize the substrate of manually opening on fixture taking-up substrate frame, substrate frame translation one segment distance is with after outer transmission system is alignd, return to the front end of feed chamber along outside transmission system, utilize and manually to clamp after base the production process that restarts next plated film.
Horizontal production line is adapted to area greatly and certain thickness substrate is arranged, during production, usually directly will directly be placed on the live roll of equipment, live roll enters vacuum apparatus with substrate, substrate through feed chamber, surge chamber, coating chamber, after surge chamber, slice chamber finally complete plated film, just can complete the plated film whole process without other metal frame in whole production, upper subtegulum can adopt mechanical manipulator to realize.
But the upper and lower material piece inconvenience of the production line of above-mentioned vertical type, due to needs clamp clamps substrate, can produce at the coated surface of product corresponding fixture and print in production process; There will be the substrate bending when thinner raw material chip area is larger, thereby directly affects quality of forming film.
Horizontal production line is only large to chip area and have certain thickness substrate to have superiority, and adaptability is poor, because structural limitations is difficult to realize to the product that the heating process requirement is arranged.The dust that in production process, sputtering target produces can fall on substrate, produces the product significant deficiency.
Prior, above-mentioned two kinds of production lines, because for the condition restriction of plated film itself, the loading and unloading of coating film production line require manually in thousand grades of dust-free workshops, to complete, but thousand grades of workshop costs are high, and operation convenience is poor.
The utility model content
Main purpose of the present utility model is to provide a kind of tilting vacuum magnetic control tinuous production, be intended to avoid deficiency of the prior art and provide a kind of and can not need artificial automatic loading/unloading and not need thousand grades of workshops, convenient and swiftly not producing the production line that folder prints.
For achieving the above object, the utility model provides a kind of tilting vacuum magnetic control tinuous production, comprise frame and be arranged on the vacuum chamber body on this frame, described vacuum chamber body comprises successively surge chamber after two front surge chambers that order is connected, coating chamber and two, the travelling belt that runs through above-mentioned vacuum chamber body also is installed on described frame, this travelling belt is provided with the metal frame of delivery substrate
After the metal frame that described travelling belt will carry substrate is sent into described front surge chamber and carried out front buffered, deliver to coating film treatment in described coating chamber again, finally deliver in described rear surge chamber and carry out sending in described vacuum chamber body after rear buffered;
It is 4-15 that the framework of described metal frame and horizontal direction are a ，Qie Gai angle of inclination, angle of inclination
0.
Preferably, in described metal frame, also be provided with many orthogonal every beam, should be separated into every beam the grid structure that a plurality of square shapes form in by described metal frame.
Preferably, to be a ，Qie Gai angle of inclination, angle of inclination be 4-15 for described vacuum chamber body and horizontal direction
0.
Preferably, described vacuum chamber body also comprises being positioned at and enters the sheet chamber before described two front surge chambers, and is positioned at the slice chamber after surge chamber after described two.
Preferably, described travelling belt is endless belt conveyer, comprises through indoor section in described vacuum chamber body and at described vacuum chamber external outdoor section; Described indoor section and described outdoor section forms complete annular.
Preferably, describedly advance between sheet chamber and described front surge chamber, between described front surge chamber and described front surge chamber, between described rear surge chamber and rear surge chamber, between described rear surge chamber and described slice chamber, be equipped with the family of power and influence.
The utility model also proposes a kind of vacuum plating unit, comprise above-mentioned tilting vacuum magnetic control tinuous production, this tilting vacuum magnetic control tinuous production comprises frame and is arranged on the vacuum chamber body on this frame, described vacuum chamber body comprises successively surge chamber after two front surge chambers that order is connected, coating chamber and two, the travelling belt that runs through above-mentioned vacuum chamber body also is installed on described frame, this travelling belt is provided with the metal frame of delivery substrate
After the metal frame that described travelling belt will carry substrate is sent into described front surge chamber and carried out front buffered, deliver to coating film treatment in described coating chamber again, finally deliver in described rear surge chamber and carry out sending in described vacuum chamber body after rear buffered;
It is 4-15 that the framework of described metal frame and horizontal direction are a ，Qie Gai angle of inclination, angle of inclination
0.
Adopt tilting vacuum magnetic control tinuous production of the present utility model, in the process that substrate coating is processed, because be loaded with the metal frame of substrate, remain with horizontal direction and be 4-15
0angle of inclination, so in the coating film treatment process, the substrate be placed on metal frame can be without fixture directly by being placed in the metal frame sidewall, because feeding process is directly by putting, rather than clamp with fixture, saved clamp assembly, also there is no the process of contraposition and clamping, all loads are convenient fast, and without fixture, print in producing; Even, so also can not produce flexural deformation at the heating process hypocoxa, adopt the inclination production line, for the substrate of any size, all be easy to realize the full-automatic fluctuating plate of mechanical manipulator.
The accompanying drawing explanation
The structural representation that Fig. 1 is the utility model tilting vacuum magnetic control tinuous production;
The structural representation that Fig. 2 is vacuum chamber body in Fig. 1;
The structural representation that Fig. 3 is metal frame in Fig. 2.
The realization of the utility model purpose, functional characteristics and advantage, in connection with embodiment, are described further with reference to accompanying drawing.
Embodiment
Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
The utility model proposes a kind of tilting vacuum magnetic control tinuous production.
See figures.1.and.2, the structural representation that Fig. 1 is the utility model tilting vacuum magnetic control tinuous production; The structural representation that Fig. 2 is vacuum chamber body in Fig. 1.
In the utility model embodiment, this tilting vacuum magnetic control tinuous production comprises frame 1 and is arranged on the vacuum chamber body 2 on frame 1, and vacuum chamber body 2 comprises surge chamber 23 after order is connected successively 21,1 coating chamber 22 of 2 front surge chambers and 2; The travelling belt 25 that runs through above-mentioned vacuum chamber body 2 also is installed on described frame 1, travelling belt 25 is provided with the metal frame 24 of delivery substrate, the metal frame 24 that described travelling belt 25 will carry substrate send into above-mentioned front surge chamber 21 carry out front buffered, again through the interior plated film of coating chamber 22 and after send vacuum chamber body 2 after buffered after carrying out in surge chamber 23.
With further reference to Fig. 3, the structural representation that Fig. 3 is metal frame in Fig. 2.The framework of above-mentioned metal frame 24 and horizontal direction are an angle of inclination B, and angle of inclination B is 4-15
0.
In the above-described embodiment, at first substrate is placed in metal frame 24, transporting mechanism 25 is sent into 24 the past of metal frame surge chamber 21, carries out front buffered; Afterwards, then send in vacuum film coating chamber 22 and carry out plated film, send into again rear surge chamber 23 after plated film completes and carry out rear buffered, finally send vacuum chamber body 2.
Adopt tilting vacuum magnetic control tinuous production of the present utility model, in the process that substrate coating is processed, because be loaded with the metal frame 24 of substrate, remain with horizontal direction and be 4-15
0angle of inclination, so in the coating film treatment process, the substrate be placed on metal frame 24 can be without fixture directly by being placed in metal frame 24 sidewalls, because feeding process is directly by putting, rather than clamp with fixture, saved clamp assembly, also there is no the process of contraposition and clamping, all loads are convenient fast, and without fixture, print in producing; Even so can not produce flexural deformation at the heating process hypocoxa yet; Adopt the inclination production line, for the substrate of any size, all be easy to realize the full-automatic fluctuating plate of mechanical manipulator.
In above-mentioned embodiment, make the substrate product obtain the plated film in conjunction with firm light, densification, no pin-hole defect, must make film deposition on the substrate that cleans, has certain temperature or even activation.Above-mentioned front buffered to achieve these goals, adopts that mechanical cleaning, cold and hot air knife blow off, baking, glow plasma bombardment process processed substrate successively.The purpose of mechanical cleaning is to remove the clear foreign matters such as oil stain that may be residual of dust of substrate surface, and, containing active ion, also can adopt ultrasonic cleaning in case of necessity, as polishing, hairbrush washing, deionized water rinsing etc.The purpose of baking is thoroughly to remove the moisture content of substrate surface remnants, and makes substrate heating arrive certain temperature, and a lot of materials can strengthen the compactness of the clear rete of bonding force under higher substrate temperature.The glow plasma Bombardment and cleaning can further be removed the residual composition that is unfavorable for film deposition of substrate surface, can improve the activity of substrate surface atom simultaneously, more is conducive to the combination that the material atom of substrate and deposition produces firm light.
And after coated substrate is transported to atmosphere in vacuum chamber, also will be through buffered later, rear buffered is generally to be cleaned and detects.The requirement of cleaning does not have pre-treatment so strict.Purpose is that the defect of rete is more easily come out, in order to be found in follow-up detection.The most simply detecting is exactly range estimation, and for ease of observing, the bottom of substrate is distributed with light source, can find the clear quantity of existence of pin hole, and the vestige of discharge off is arranged.The transmitance detector of leading-out terminal can be pointed out the transmitance that rete is final.Also can in the substrate scope, arrange multichannel probe, image data is processed assess the vertically clear horizontal homogeneity of rete and have or not abnormal by computer.
In metal frame 24 of the present utility model, also be provided with many orthogonal every beam 241, this is orthogonal is separated into the grid structure that a plurality of square shapes form in by metal frame 24 every beam 241; When substrate shape hour, each square just can be placed a substrate; When substrate shape is larger, the above-mentioned effect that can serve as support bar every beam 241, supported substrate metal frame 24 is interior, even also can not produce flexural deformation at the heating process subtegulum.
Further in the above-described embodiment, above-mentioned vacuum chamber body 2 equally also is an angle of inclination A with horizontal direction, and this angle of inclination A is 4-15
0.This whole production line integral body all forms inclination, coordinates better the substrate of above-mentioned inclination to place.
Particularly, in order to guarantee the complete of coating process, vacuum chamber body 2 also comprises being positioned at and enters sheet chamber 26 before two front surge chambers 21, and is positioned at the slice chamber 27 after surge chamber 23 after two.The metal frame 24 that carries substrate enters the vacuum chamber body 2 of production line through entering sheet chamber 6, finally by slice chamber 27, in the vacuum chamber body 2 of production line, see off.
Above-mentionedly enter sheet chamber 26 and also become 4-15 with 27 chamber, slice chamber body with horizontal direction
0angle.
In the above-described embodiments, this tilting vacuum magnetic control tinuous production also comprises that is positioned at hundred grades of Clean rooms 28 before 26 into the sheet chamber.Carry out the substrate load of metal frame 24 in these hundred grades of Clean rooms 28, because substrate coating keeps substrate totally and does not contain other dusts, impurity etc., so complete substrate load work in above-mentioned hundred grades of Clean rooms 28, guarantee that substrate is clean and do not contain other dusts.
Above-mentioned travelling belt 25 comprises indoor section 251 that navigates within above-mentioned vacuum chamber body 2, and outside vacuum chamber body 2 outdoor section 252; Indoor section 251 and outdoor section 252 forms complete endless belt conveyer 25.Before plated film, the metal frame 24 on travelling belt 25 completes substrate load in these hundred grades of Clean rooms 28, and after plated film, metal frame 24 is returned in these hundred grades of Clean rooms 28 and carried out unloading piece by annular travelling belt 25.
An existing unidirectional travelling belt 25 completes the transmission of metal frame 24 plated films, need to, before entering sheet chamber 26 and after slice chamber 27, the work that two hundred grades of Clean rooms 28 of head and the tail complete respectively substrate load and unloading piece be set simultaneously.The travelling belt 25 of the above-mentioned annular of the utility model will complete metal frame 24 after plated film and return to the hundred grades of Clean rooms 28 that load substrate and carry out unloading piece, compare existing unidirectional travelling belt 25, save space and the cost of hundred grades of Clean rooms 28.
In order to guarantee to complete in above-mentioned vacuum chamber body 2 condition of every coating process, advancing between sheet chamber 26 and front surge chamber 22, between front surge chamber 22 and front surge chamber 22, between rear surge chamber 23 and rear surge chamber 23, between rear surge chamber 23 and slice chamber 27, be equipped with the family of power and influence 29.Completely cut off by each working spaces between 29 pairs of vacuum chamber bodies 2 of the family of power and influence, with the condition that maintains every processing, reached the suitableeest.
The utility model also proposes a kind of vacuum plating unit, and this vacuum plating unit adopts above-mentioned tilting vacuum magnetic control tinuous production.
This tilting vacuum magnetic control tinuous production comprises frame and is arranged on the vacuum chamber body on this frame, the vacuum chamber body comprises successively surge chamber after two front surge chambers that order is connected, coating chamber and two, the travelling belt that runs through above-mentioned vacuum chamber body also is installed on frame, this travelling belt is provided with the metal frame of delivery substrate
After the metal frame that travelling belt will carry substrate is sent into front surge chamber and carried out front buffered, deliver to coating film treatment in coating chamber again, finally deliver in rear surge chamber and carry out sending in described vacuum chamber body after rear buffered;
It is 4-15 that the framework of metal frame and horizontal direction are a ，Qie Gai angle of inclination, angle of inclination
0.
Vacuum plating unit of the present utility model, adopt above-mentioned tilting vacuum magnetic control tinuous production, production line is obliquely installed, substrate is in the coating film treatment process, can be without fixture directly by being placed in metal frame 24 sidewalls, saved clamp assembly, also there is no the process of contraposition and clamping, all loads are convenient fast, and without fixture, print in producing; Even so can not produce flexural deformation at the heating process hypocoxa yet; Adopt the inclination production line, for the substrate of any size, all be easy to realize the full-automatic fluctuating plate of mechanical manipulator.
The foregoing is only preferred embodiment of the present utility model; not thereby limit the scope of the claims of the present utility model; every equivalent structure or conversion of equivalent flow process that utilizes the utility model specification sheets and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in scope of patent protection of the present utility model.
Claims (6)
1. a tilting vacuum magnetic control tinuous production, comprise frame and be arranged on the vacuum chamber body on this frame, described vacuum chamber body comprises successively surge chamber after two front surge chambers that order is connected, coating chamber and two, the travelling belt that runs through above-mentioned vacuum chamber body also is installed on described frame, this travelling belt is provided with the metal frame of delivery substrate, it is characterized in that
It is 4-15 ° that the framework of described metal frame and horizontal direction are a ，Qie Gai angle of inclination, angle of inclination; In described metal frame, also be provided with many orthogonal every beam, should be separated into every beam the grid structure that a plurality of square shapes form in by described metal frame.
2. tilting vacuum magnetic control tinuous production as claimed in claim 1, is characterized in that, it is 4-15 ° that described vacuum chamber body and horizontal direction are a ，Qie Gai angle of inclination, angle of inclination.
3. tilting vacuum magnetic control tinuous production as claimed in claim 2, is characterized in that, described vacuum chamber body also comprises being positioned at and enters the sheet chamber before described two front surge chambers, and is positioned at the slice chamber after surge chamber after described two.
4. tilting vacuum magnetic control tinuous production as claimed in claim 1, is characterized in that, described travelling belt is endless belt conveyer, comprises through indoor section in described vacuum chamber body and at described vacuum chamber external outdoor section; Described indoor section and described outdoor section forms complete annular.
5. tilting vacuum magnetic control tinuous production as claimed in claim 3, it is characterized in that, describedly advance between sheet chamber and described front surge chamber, between described front surge chamber and described front surge chamber, between described rear surge chamber and rear surge chamber, between described rear surge chamber and described slice chamber, be equipped with the family of power and influence.
6. a vacuum plating unit, is characterized in that, comprises tilting vacuum magnetic control tinuous production as described as any one in claim 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320243235 CN203360568U (en) | 2013-05-07 | 2013-05-07 | Inclined type vacuum magnetic control continuous production line and vacuum film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320243235 CN203360568U (en) | 2013-05-07 | 2013-05-07 | Inclined type vacuum magnetic control continuous production line and vacuum film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203360568U true CN203360568U (en) | 2013-12-25 |
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ID=49808360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320243235 Expired - Fee Related CN203360568U (en) | 2013-05-07 | 2013-05-07 | Inclined type vacuum magnetic control continuous production line and vacuum film coating machine |
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|---|---|
| CN (1) | CN203360568U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108085654A (en) * | 2017-12-21 | 2018-05-29 | 深圳市三鑫精美特玻璃有限公司 | A kind of tilting continuous vacuum magnetic control sputtering film plating device and coating film production line |
-
2013
- 2013-05-07 CN CN 201320243235 patent/CN203360568U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108085654A (en) * | 2017-12-21 | 2018-05-29 | 深圳市三鑫精美特玻璃有限公司 | A kind of tilting continuous vacuum magnetic control sputtering film plating device and coating film production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHENZHEN SMEE OPTOELECTRONIC TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SHENZHEN SHENGBOER MECHANICAL AND ELECTRICAL EQUIPMENT CO., LTD. Effective date: 20140324 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140324 Address after: 518000 Guangdong province Shenzhen City Pingshan Kengzi Longtian community Yingzhan Industrial Park B5 building, South Building Patentee after: Shenzhen Boer Photoelectric Technology Co., Ltd. Address before: 518000 Guangdong Province, Shenzhen Pingshan, Shenzhen Export Processing Zone No. 2 Lu Daxin District A building, first floor West Patentee before: Shenzhen SMEE Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131225 Termination date: 20180507 |