CN203317224U - Grinding device - Google Patents

Grinding device Download PDF

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Publication number
CN203317224U
CN203317224U CN2011900009171U CN201190000917U CN203317224U CN 203317224 U CN203317224 U CN 203317224U CN 2011900009171 U CN2011900009171 U CN 2011900009171U CN 201190000917 U CN201190000917 U CN 201190000917U CN 203317224 U CN203317224 U CN 203317224U
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China
Prior art keywords
grinding
emery wheel
face
glass substrate
workpiece
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CN2011900009171U
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Chinese (zh)
Inventor
大川润
宫本干大
鸟井秀晴
今里祐介
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AGC Inc
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Asahi Glass Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

Abstract

The utility model relates to a grinding device, which is used for grinding an end face of a glass substrate. The grinding device comprises a grinding wheel with the diameter of d, a first spray nozzle and a second spray nozzle, wherein the grinding wheel is under rotation drive, and can be used for grinding the end face of the glass substrate, and the thickness of the end face is 1.2 mm below; the first spray nozzle and the second spray nozzle are equipped on the two sides of the glass substrate with the incident angles of Theta 1 and Theta 2 respectively relative to main panels of the glass substrate and in the advancing direction of the glass substrate relative to the grinding wheel, and are used for supplying coolants for the position x from the grinding position of the grinding wheel; the Theta 1, Theta 2 and the ratio of x to d is 15-60 degrees, 15-60 degrees and 0.04-0.05 respectively.

Description

Grinding attachment
Technical field
The utility model relates to a kind of method for grinding and grinding attachment of end face of glass substrate.
Background technology
The glass substrate such as glass sheet or liquid crystal panel carries out grinding and chamfering (below, grinding and chamfering are called to grinding altogether) by grinding attachment to the end face on four limits.In this grinding, make the emery wheel of rotation and end contact as the glass substrate of grinding object, emery wheel or glass substrate are moved and the end face of glass substrate periphery is carried out to grinding.And, in grinding, for cooling and from nozzle, cooling medium (cooling agent) is supplied with to (for example,, with reference to patent documentation 1) to processing department.
Technical literature formerly
Patent documentation
Patent documentation 1: the JP 2007-30051 of Japan communique
The utility model content
In recent years, the attenuation gradually of the thickness of glass substrate, so the end face of glass substrate easily shambles surely, therefore becomes the situation of the unfavorable condition (for example face upward incline (fine crack), shortcoming, grinding sintering or break) of the end face of easy generation glass substrate.Remarkable especially in the glass substrate of the thickness of this tendency below 1.2mm.Yet, in method for grinding in the past, the applicable grinding condition (for example, supplying with position, the incident angle of cooling medium) of regulation and the grinding of the glass substrate of such thin thickness, and the generation of the unfavorable condition of the end face of the glass substrate while being difficult to prevent above-mentioned grinding.
The utility model is tackled above-mentioned situation and is made, even provide a kind of in the situation that thin as the glass substrate of grinding object, the unfavorable condition that also suppresses the end face of glass substrate occurs, the stable and method for grinding and the grinding attachment that carry out grinding of the end face that can make glass substrate.
Method for grinding of the present utility model is used grinding attachment, the end face that this grinding attachment possesses glass substrate carries out the emery wheel of grinding and supplies with the nozzle that the grinding section of described glass substrate is carried out to cooling cooling agent, described method for grinding possesses: the emery wheel rotation of driving diameter d, and the end face that is the described glass substrate below 1.2mm to thickness carries out the operation of grinding; In described grinding, across described glass substrate, for each interarea of described glass substrate with θ 1, θ 2Incident angle and towards described glass substrate with respect to the direct of travel of described emery wheel and to apart from grinding position based on described emery wheel be operation apart from the position supply cooling agent of x, described θ 1, θ 2, x/d value respectively in 15~60 °, 15~60 °, 0.04~0.05 scope.
In method for grinding of the present utility model, preferably, the internal diameter of the supply port of described nozzle
Figure DEST_PATH_GDA00003283624600021
The flow R of the described cooling agent of supplying with respectively from the supply port of described nozzle, and the ratio V/v of the grinding speed V of described glass substrate and the circular velocity v of described emery wheel respectively in 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope.
In method for grinding of the present utility model, preferably, also possess the wear extent according to described emery wheel, the mode in 0.04~0.05 scope of becoming with the value of described x/d is adjusted the operation of the position of supplying with described cooling agent.
In method for grinding of the present utility model, preferably, also possess the wear extent according to described emery wheel, become the operation that the mode in 0.0012~0.01 scope is adjusted with described V/v.
Grinding attachment of the present utility model carries out grinding to the end face of glass substrate, and it possesses: rotarily actuate and the end face that is the described glass substrate below 1.2mm to thickness carries out the emery wheel of the diameter d of grinding; And across described glass substrate, configure, for each interarea of described glass substrate with θ 1, θ 2Incident angle and towards described glass substrate with respect to the direct of travel of described emery wheel and to apart from grinding position based on described emery wheel be first, second nozzle apart from the position supply cooling agent of x, described θ 1, θ 2, x/d value respectively in 15~60 °, 15~60 °, 0.04~0.05 scope.
The utility model effect
According to the utility model, can provide a kind of following method for grinding and grinding attachment: in grinding, across glass substrate, with respect to each interarea of glass substrate respectively with the incident angle of 15~60 ° and towards glass substrate the direct of travel with respect to emery wheel, the grinding position of carrying out from emery wheel is to the 0.04(4% of the diameter of emery wheel)~0.05(5%) scope in position supply with cooling agent, even therefore in the situation that thin as the glass substrate of grinding object, the unfavorable condition that also can suppress the end face of glass substrate occurs, thereby the end face of grinding glass substrate stably.
The accompanying drawing explanation
In Fig. 1, Fig. 1 (a), Fig. 1 (b) are the structure charts of the grinding attachment of embodiment.
In Fig. 2, Fig. 2 (a), Fig. 2 (b) are the detailed structure view of grinding mechanism.
Fig. 3 is the enlarged side view of emery wheel.
Fig. 4 is the stereogram of casing.
Fig. 5 is the side view of casing.
Fig. 6 is the side view of end face wiper mechanism.
The specific embodiment
(embodiment)
Below, with reference to accompanying drawing, describe present embodiment in detail.
(grinding attachment 1)
Fig. 1 is the structure chart of the grinding attachment 1 of embodiment, and Fig. 1 (a) is side view, and Fig. 1 (b) is top view.Fig. 2 is the detailed structure view of grinding mechanism 100 and cooling medium feed mechanism 200, and Fig. 2 (a) is top view, and Fig. 2 (b) is side view.Fig. 3 is the enlarged side view of emery wheel 101.Fig. 4 is the stereogram of the casing 104 that possesses of grinding mechanism 100.Fig. 5 is the side view of casing 104.Fig. 6 is the side view of end face wiper mechanism 500.
In Fig. 2, for the structure of visuognosis casing 104 inside easily and utilize single-point to rule to mean casing 104.And, in Fig. 5, utilize single-point to rule to mean emery wheel 101.Below, with reference to Fig. 1~Fig. 6, each structure of grinding attachment 1 is described.It should be noted that, in Fig. 1~Fig. 5, omitted the diagram of the pillar of grinding mechanism 100 and controller 600.
Flat-panel monitor) etc. as shown in Fig. 1 (a) and Fig. 1 (b), grinding attachment 1 possesses: to FPD(Flat Panel Display: the grinding mechanism 100 that carries out grinding and chamfering towards the end face of the glass substrate of electronic equipment (below, be called workpiece W); Supply with the cooling medium feed mechanism 200 of cooling medium (cooling agent) near the grinding part of the emery wheel 101 possessed to grinding mechanism 100; Holding workpiece W the carrying mechanism 300 that the end face of workpiece W is moved along grinding mechanism 100; The attraction mechanism 400 that the cooling medium that is connected with grinding mechanism 100 via passage L and will uses in grinding mechanism 100 is introduced; The end face wiper mechanism 500 that the end face of workpiece W by after grinding mechanism 100 grindings and chamfering is cleaned; And the controller 600 that grinding attachment 1 integral body is controlled.
When the thin thickness of workpiece W (especially below 1.2mm), the unfavorable condition of the end face of workpiece W (for example face upward incline (fine crack), shortcoming, grinding sintering or break) easily occurs, therefore in this embodiment, to thickness, be that workpiece W below 1.2mm is processed.And, in the following description, grinding and chamfering are combined and are called grinding.
(grinding mechanism 100)
As shown in Fig. 2 (a) and Fig. 2 (b), grinding mechanism 100 possesses: the emery wheel 101 that the end face of workpiece W is carried out to grinding; Drive the motor 102 of these emery wheel 101 rotations; To from cooling medium feed mechanism 200 to emery wheel, 101 used cooling mediums supplying with carry out rectification and attract to induce the cowling panel 103 of used cooling medium to passage L; The casing 104 that emery wheel 101 and cowling panel 103 etc. is accommodated.
Emery wheel 101 is arranged on the motor 102 that is rotated driving, with the center P of emery wheel 101 1Centered by and driven and to direction (counterclockwise) rotation of the arrow α of Fig. 2 (a).And as shown in Figure 3, in the side of emery wheel 101, central authorities are formed with groove 101a, the end face that makes workpiece W moves along this groove 101a to the direction (right-to-left) of the arrow β of Fig. 2 (a), carries out the grinding of the end face of workpiece W.
The control of motor 102 based on carrying out self-controller 600, drive the counterclockwise direction rotation of emery wheel 101 to Fig. 2 (a).Now, the feed speed of the rotating speed of emery wheel 101 based on workpiece W (below, be called process velocity V) control.Particularly, the mode that becomes (0.0012≤V/v≤0.01) in 0.0012~0.01 scope with the ratio V/v of the circular velocity v of process velocity V and emery wheel 101 is controlled the rotating speed of emery wheel 101.It should be noted that the position P that the face that circular velocity v is emery wheel 101 is 1/2 with the thickness of slab of workpiece W contacts 2(below, be called grinding position P 2) circular velocity of the emery wheel 101 located.
When the ratio V/v of process velocity V and circular velocity v is less than 0.0012, the air layer that cooling medium can't produce by the rotation because of emery wheel 101 arrives workpiece W, can't cooling milled portion.Consequently, the unfavorable conditions such as sintering occurring, possibly can't carry out grinding.And, when the ratio V/v of process velocity V and circular velocity v surpasses 0.01, due to the limit velocity of the grinding that approaches workpiece W, the situation self of grinding of end face of therefore carrying out workpiece W is more difficult.
Cowling panel 103 is configured in the right side (with reference to Fig. 2 (a)) of emery wheel 101 along emery wheel 101, used cooling medium is carried out rectification and attracts to induce to passage L.Owing to possessing this cowling panel 103, used cooling medium is carried out rectification and can attract expeditiously to be induced to the intake of passage L.Therefore, can effectively prevent that cooling medium is to the situation of dispersing in casing 104.In Fig. 2 (a), passage L is arranged on to the upside of casing 104, but also passage L can be arranged on to the right side of casing 104.
The introducing air quantity of passage L is preferably in the scope of 40~60m/ minute.When the introducing air quantity is less than 40m/ minute, possibly can't introduce fully cooling medium.And, when introducing air quantity and surpass 60m/ minute, the negative pressure (state that the pressure ratio atmosphere forces down) in casing 104 increases and may affect the intensity of casing 104.And due to the attraction power of the needs raising pump that attracts mechanism 400 to possess described later, so equipment cost increases.It should be noted that, also can arrange and introduce the adjustment plate that air quantity is regulated use at passage L.
As shown in Figure 4, be provided with at casing 104 the opening 104a that workpiece W is imported.In addition, preventing under the purpose that cooling medium disperses outside casing 104, at two blades of a sword (bead) 104b, the 104c extended toward the outer side from casing 104 setting up and down of this opening 104a.When from passage L, introducing cooling medium, the air in casing 104 also is introduced into, so becomes negative pressure in casing 104.Therefore, as shown in Figure 5, can make air flow from the interior direction along arrow of the export-oriented casing 104 of casing 104.The cooling medium that will disperse outside casing 104 is flowed and is pushed back by this, therefore by this blade of a sword 104b, 104c are set, can effectively prevent the situation that cooling medium disperses outside casing 104.
(cooling medium feed mechanism 200)
Cooling medium feed mechanism 200 possesses: make to utilize the not shown cooling medium the pumped out menifold 201 of branch equably; The advance and retreat mobile unit 202 that this menifold 201 is advanced and retreat and driven along the direction (above-below direction) of the arrow γ of Fig. 2 (a); Across workpiece W and with respect to each interarea S of workpiece W 1, S 2With θ 1, θ 2Incident angle configuration, and will be by the cooling medium of menifold 201 branches to the nozzle 203a, the 203b that supply with near grinding part.
Nozzle 203a, 203b supply with by the cooling medium pumped out via menifold 201.As shown in Fig. 2 (a) and Fig. 2 (b), the grinding position P from nozzle 203a, 203b to the workpiece W based on emery wheel 101 2, towards the paper of Fig. 2 (a) and to the left, that is, and to from grinding position P 2Position P towards the direct of travel of workpiece W apart from x 3(below, be called and supply with position P 3) the supply cooling medium.
This supplies with position P 3Diameter d and grinding position P with emery wheel 101 2With supply position P 3The x/d of the ratio apart from x become 0.04(4%)~0.05(5%) scope in (0.04(4%)≤x/d≤0.05(5%)) mode adjust.
Emery wheel 101 is rotated, and therefore can form the air layer rotated around emery wheel 101 together with emery wheel 101.Owing to being subject to stopping of this air layer and workpiece, though by cooling medium to grinding position P 2Supply can not make cooling medium and grinding position P 2Contact.Therefore, process velocity V and the ratio V/v of circular velocity v are more than 0.0012, and by not being that cooling medium is supplied to grinding position P 2But to supplying with position P 3Supply with, can supply with cooling medium to grinding section thus.
Therefore, in this embodiment, to diameter d and the grinding position P of emery wheel 101 2With supply position P 3The x/d of the ratio apart from x become 0.04(4%)~0.05(5%) scope in (0.04(4%)≤x/d≤0.05(5%)) supply position P 3Supply with cooling medium.If the value of x/d is less than 0.04(4%), the position that in fact cooling medium contacts is from grinding position P 2To the rightabout changing of the relative positions of workpiece direct of travel, can't carry out cooling to grinding part.And, when the value of x/d surpasses 0.05mm(5%) time, the position of cooling medium contact is from grinding position P 2To the changing of the relative positions of workpiece direct of travel, can't carry out cooling to grinding part.
It should be noted that, in Fig. 2 (b), the supply position of the cooling medium of nozzle 203a, 203b is made as to same position, but also can make the supply position of the cooling medium of nozzle 203a, 203b mutually stagger.So, staggering in the supply position of the cooling medium by making nozzle 203a, 203b, thereby can suppress the cooling medium of supplying with from nozzle 203a and the cooling medium of supplying with from nozzle 203b mutually to be interfered and situation about cooling medium can't be supplied with to grinding section.But, in this case, also it should be noted that the supply position with the cooling medium of nozzle 203a, 203b meets 0.04(4%)≤x/d≤0.05(5%) the point adjusted of mode.
In addition, also should be noted that the incident angle θ of the nozzle 203a, the 203b that supply with cooling medium 1, θ 2.According to the incident angle of cooling medium, possibly can't be to the grinding position P of 101 couples of workpiece W of emery wheel 2Supply with cooling medium.There is the incident angle θ of horizontal direction (with reference to Fig. 2 (b)) in the incident angle of this cooling medium 1, θ 2The incident angle θ of the direction (with reference to Fig. 2 (a)) vertical with end face (grinding face) with workpiece W 3, but for the side of emery wheel 101, the incident angle θ of horizontal direction 1, θ 2Be even more important.
Particularly, the incident angle θ of nozzle 203a, 203b 1, θ 2(with reference to Fig. 2 (b)) is preferably in the scope of 15 °~60 ° (15 °≤θ 1, θ 2≤ 60 °).Incident angle θ 1The boost line L shown in Fig. 2 (b) 1With respect to boost line L 3Angle, incident angle θ 2The boost line L shown in Fig. 2 (b) 2With respect to boost line L 3Angle.It should be noted that, with boost line L 3For any one in benchmark upside, downside just is being (plus).At this, boost line L 3Grinding position P 2The tangent line of the emery wheel 101 at place, boost line L 2The line at the center of the supply port by nozzle 203b, boost line L 1It is the line at the center of the supply port by nozzle 203a.
Incident angle θ at nozzle 203a, 203b 1, θ 2While being less than 15 °, cooling medium flows on workpiece W, the grinding position P that can't successfully contact with workpiece W to emery wheel 101 2Supply with cooling medium, the unfavorable conditions such as sintering may occur.And, at the incident angle θ of nozzle 203a, 203b 1, θ 2While surpassing 60 °, cooling medium becomes the state that beats workpiece W, the end face vibration of workpiece W and unstable (pushing way by shoving or bumping), the unfavorable condition such as therefore may face upward incline (fine crack), lack, break.
In addition, the common incident angle θ of nozzle 203a, 203b 3Preferably be made as in the scope of 15 °~30 ° (15 °≤θ 3≤ 30 °).Incident angle θ 3The boost line L shown in Fig. 2 (a) 4With boost line L 5Angle.At this, boost line L 5The line at the center of the supply port by nozzle 203a, boost line L 4The grinding position P of emery wheel 101 2The tangent line at place.
The flow R of the cooling medium of supplying with from nozzle 203a, 203b in addition, preferably is made as respectively 10~20L(liter)/minute (10L/ minute≤R≤20L/ minute).Because emery wheel 101 is rotated, therefore can form around emery wheel 101 air layer of rotation together with emery wheel 101.Therefore, when cooling medium consumption R is less than 10L/ minute, cooling medium can't destroy this air layer, cooling medium can't be swimmingly with supply with position P 3Contact.Consequently, can't carry out grinding part coolingly, the unfavorable conditions such as sintering can occur.And, when cooling medium consumption R surpasses 20L/ minute, although can destroy above-mentioned air layer, the flow velocity of cooling medium becomes too fast, may be to supplying with position P 3The cooling medium of supplying with can't arrive grinding position P 2.
In addition, the internal diameter of the supply port of nozzle 203a, 203b
Figure DEST_PATH_GDA00003283624600081
Preferably be made as respectively in the scope of 2.5mm~3.2mm (
Figure DEST_PATH_GDA00003283624600082
).When the internal diameter of the supply port of nozzle 203a, 203b is less than 2.5mm, the cooling medium variation in diameter of supplying with, be difficult to guarantee to supplying with position P 3Cooling medium supply with.And, when the internal diameter of the supply port of nozzle 203a, 203b surpasses 3.2mm, therefore the cooling medium diameter chap of supplying with, although guarantee cooling medium and supply with position P 3The state of contact is not so difficult, but, because flow velocity reduces, therefore is difficult to destroy the air layer produced around emery wheel 101.
It should be noted that, the inside of nozzle 203a, 203b is processed to helical form, to avoid the cooling medium of supplying with, spreads.And, the internal diameter of the supply port of nozzle 203a, 203b More preferably take the thickness of workpiece W for example during as 0.7mm by internal diameter
Figure DEST_PATH_GDA00003283624600092
Be made as 3.0mm, when the thickness of workpiece W is 0.4mm by internal diameter
Figure DEST_PATH_GDA00003283624600093
The mode that is made as 2.8mm is changed corresponding to the thickness of workpiece W.
Advance and retreat mobile unit 202 possesses: two guide rail 204a arranged side by side, 204b of laying; Four slide blocks (not shown) that are arranged on the lower surface of menifold 201 and engage with guide rail 204a, 204b sliding freely; The external screw thread 205 of ground axle suspension is set and freely rotates at the place, fixed position along guide rail 204a, 204b; The motor 206 that this external screw thread 205 is carried out to reversible driving; The internal thread (not shown) that is arranged on the lower surface of menifold 201 and screws togather with external screw thread 205.By making motor 206 carry out reversible operation, and drive external screw thread 205 forwards, reversion, thereby the nozzle 203a, the 203b that make menifold 201 and be located at menifold 201 are along guide rail 204a, the 204b movement of advance and retreat.
The motor 206 of advance and retreat mobile unit 202 is controlled by controller 600, and the menifold 201 that the state of wear based on emery wheel 101 and making is provided with nozzle 203a, 203b moves along the above-below direction of Fig. 2 (a).That is, for by cooling medium to grinding position P 2Supply with, and need to be by cooling medium to supplying with position P 3Supply with, but, when emery wheel 101 weares and teares because of use, the diameter d of emery wheel 101 changes, so the amount of variation (minimizing) has occurred to the top movement of Fig. 2 (a) because of the diameter d of the wearing and tearing emery wheel 101 of emery wheel 101 in the position that also needs to make menifold 201.
Therefore, in this embodiment, as described above, utilize advance and retreat mobile unit 202, the state of wear based on emery wheel 101 and make menifold 201 position, be the change in location of nozzle 203a, 203b.According to this embodiment, for example, when the diameter d of emery wheel 101 shortens 0.1mm because of wearing and tearing, the mode that controller 600 CD-ROM drive motors 206 and the position that makes menifold 201 become with the value of x/d to the top of Fig. 2 (a) in 0.04~0.05 scope moves.
It should be noted that, the degree of depth of the state of wear of emery wheel 101 such as groove 101a that can be by mensuration emery wheels 101 such as slide measures is obtained wear extent, also can according to before grinding with grinding after the difference of width of workpiece W obtain.
(carrying mechanism 300)
Carrying mechanism 300 comprises advance and retreat mobile unit 301 and the moving body S that is located at this advance and retreat mobile unit 301 and moves to the left and right directions of Fig. 1 (a).Advance and retreat mobile unit 301 comprise laying two guide rail 302a arranged side by side, 302b, be arranged on the lower surface of moving body S and four slide block 303a~303d that engages with guide rail 302a, 302b sliding freely, along guide rail 302a, 302b setting and in fixed position, freely rotate ground axle suspension external screw thread 304, to this external screw thread 304 carry out reversible driving motor 305, be arranged on the lower surface of moving body S and the internal thread 306 screwed togather with external screw thread 304, reversible operation by motor 305 drives external screw thread 304 forwards, reversion, makes thus moving body S advance and retreat mobile.
It should be noted that, as long as moving body S can advance and retreat mobile, for example, the pinion that motor can be set on moving body S and carry out reversible driving by this motor, make this pinion make moving body S advance and retreat mobile with the tooth bar engagement arranged along guide rail 302a, 302b.
Be provided with the holding unit 307 for holding workpiece W on moving body S, by these holding unit 307 dismounting holding workpiece W freely.Holding unit 307 is for example the suction box of hollow, utilizes a plurality of aperture 307a that are located at roof to carry out attracting holding to the workpiece W on the roof that is positioned in this suction box.It should be noted that, also can replace aperture 307a and a plurality of suckers are set, carry out attracting holding.
(attracting mechanism 400)
Attract mechanism 400 to possess the pump used cooling medium attracted via passage L, the gas-liquid separator that is configured in the front of this pump.The cooling medium of introducing from passage L, by gas-liquid separator and air separation, recycles or goes out of use.
(end face wiper mechanism 500)
End face wiper mechanism 500 is supplied with rinse water to the end face of the workpiece W that has been carried out grinding by grinding mechanism 100, to comprise thus because grinding produces and be attached to the end face of workpiece W and near the cooling medium of cullet end face is removed, the end face of workpiece W will be cleaned.As shown in Figure 6, end face wiper mechanism 500 possesses nozzle 501a, the 501b that supplies with rinse water, the casing dispersed 502 that prevents rinse water.Nozzle 501a, 501b are configured in respectively the upper and lower of workpiece W, towards the end face of workpiece W, supply with rinse water.Now, remain in each interarea S of workpiece W for the cullet that prevented from removing 1, S 2Upper, and rinse water is supplied with toward the outer side from the inboard of workpiece W.It should be noted that, on casing 502, with the casing 104 of grinding mechanism 100 similarly, be provided with the opening 502a that workpiece W is imported.
(controller 600)
600 pairs of grinding attachment 1 integral body of controller are controlled.Particularly, control to the external screw thread 304 of advance and retreat mobile unit 301 carry out reversible driving motor 305, drive the motor 102 of emery wheel 101 rotations, motor 206, and the holding unit 307 etc. that the external screw thread 205 of advance and retreat mobile unit 202 is carried out to reversible driving.
(method for grinding)
Then, the method for grinding about the grinding attachment 1 that used this embodiment, describe with reference to Fig. 1~Fig. 6.It should be noted that, below the action of explanation is controlled by controller 600.
At first, utilize not shown transfer machine that workpiece W is positioned on holding unit 307.When mounting, carry out the aligning of workpiece W.When mounting workpiece W, utilize aperture 307a to carry out attracting holding workpiece W.
When attracting holding workpiece W, by the motor 305 of advance and retreat mobile unit 301, with the speed of stipulating, from the right side of Fig. 1 (a) and Fig. 1 (b), drive moving body S towards left side.It should be noted that, can be also, not necessarily, at first raising speed be driven the speed of this moving body S, and underspeeds in the front of grinding mechanism 100.
Be accompanied by advancing of moving body S, the end face of workpiece W is carried out to grinding.In this grinding, the mode in 0.0012~0.01 scope of becoming with the ratio V/v of process velocity V and circular velocity v is controlled the rotating speed of emery wheel 101.And, from the incident angle θ shown in Fig. 2 (a) and Fig. 2 (b) 1~θ 3Be adjusted to respectively in the scope of 15 °~60 °, nozzle 203a, 203b in the scope of 15 °~60 °, in the scope of 15 °~30 ° by cooling medium with the flow in the scope of 10L/ minute~20L/ minute to supplying with position P 3Supply with.
To supplying with position P 3The cooling medium of supplying with is at the grinding position P that emery wheel 101 is contacted with workpiece W 2Carried out cooling after, by cowling panel 103 rectifications, from passage L, introduce.In the scope that the introducing air quantity of passage L now is 40~60m/ minute.
Add man-hour when the end face of workpiece W is ground, by end face wiper mechanism 500, to the end face of workpiece W, supply with rinse water, the end face of workpiece W is cleaned.Clean by this, produce when being included in grinding and be attached to the end face of workpiece W and near the cooling medium of cullet end face is removed.
When the grinding of the whole end face of workpiece W and clean while finishing, by above-mentioned transfer machine, the workpiece W after grinding is removed from holding unit 307, the workpiece W before new grinding is positioned on holding unit 307.Then, implement the grinding of the end face of this new workpiece W.
As described above, according to the grinding attachment 1 of this embodiment, the position that will not supply with cooling medium is made as grinding position P 2, and be made as from grinding position P 2Towards the direct of travel of workpiece W in the supply position of distance x P 3, with diameter d and the grinding position P of emery wheel 101 2With supply position P 3The x/d of the ratio apart from x become 0.04(4%)~0.05(5%) scope in (0.04(4%)≤x/d≤0.05(5%)) mode adjust this supply position P 3.
In addition, due to the incident angle θ by nozzle 203a, 203b 1, θ 2Be made as in the scope of 15 °~60 ° (15 °≤θ 1≤ 60 °), therefore can be expeditiously by cooling medium to grinding position P 2Supply with.Therefore, even the thickness of workpiece W is below 1.2mm, also can effectively suppress the generation of the unfavorable condition (for example face upward incline (fine crack), shortcoming, grinding sintering or break) of the end face of workpiece W.And, can stably to workpiece W, carry out grinding, therefore the speed of grinding can be improved, thereby the processing number of time per unit can be improved.
In addition, the mode that becomes (0.0012≤V/v≤0.01) in 0.0012~0.01 scope with the ratio V/v of the process velocity V in grinding and circular velocity v is controlled the rotating speed of emery wheel 101, and the flow R of the cooling medium that will supply with from nozzle 203a, 203b is made as respectively 10~20L(liter)/minute (10L/ minute≤R≤20L/ minute).In addition, due to the internal diameter of the supply port by nozzle 203a, 203b
Figure DEST_PATH_GDA00003283624600131
Be made as respectively in the scope of 2.5mm~3.2mm (
Figure DEST_PATH_GDA00003283624600132
Figure DEST_PATH_GDA00003283624600133
), therefore can further suppress the generation of unfavorable condition of the end face of workpiece W.
In addition, by 103 pairs of used cooling mediums of cowling panel, carry out the position that rectification attracts to be induced to passage L, and blade of a sword 104b and blade of a sword 104c are set on casing 104, therefore can effectively prevent the situation that cooling medium disperses outside casing 104.
(other embodiment)
It should be noted that, in above-mentioned embodiment (with reference to Fig. 1 (a) and Fig. 1 (b)), utilize advance and retreat mobile unit 301 that workpiece W is moved and the end face of workpiece W is carried out to grinding, but also can possess advance and retreat mobile unit 301 at grinding mechanism 100, make grinding mechanism 100 move and the end face of workpiece W is carried out to grinding along the end face of workpiece W.
Embodiment
Then, record specific embodiment and comparative example and the check result thereof of the grinding attachment of embodiment.In following embodiment and comparative example, the alkali-free glass that used thickness is 0.7mm (Asahi Glass company system, AN100) as workpiece W, as emery wheel 101, used the mixed-powder to diamond dust and adhesive structure metal dust to carry out the metal adhesive skive (#450~#600) that pressure sintering forms.And, after utilizing the metal adhesive skive to carry out grinding, utilize resinoid bond emery wheel (#200~#1000) to carry out milled processed.
In addition, in this embodiment and comparative example, six parameters that change is following and carried out the grinding of above-mentioned workpiece W.It should be noted that, the meaning of each parameter as described below.
X/d: the diameter d of emery wheel 101 and grinding position P 2With supply position P 3The ratio apart from x.
θ 1: the incident angle of nozzle 203a.
θ 2: the incident angle of nozzle 203b.
V/v: the ratio of process velocity V and circular velocity v.
R: the flow of the cooling medium of supplying with from each nozzle 203a, 203b.
Figure DEST_PATH_GDA00003283624600141
: the internal diameter of the supply port of each nozzle 203a, 203b.
(embodiment 1)
In embodiment 1, establishing x/d is 0.05(5%), θ 1Be 22.5 °, θ 2Be that 22.5 °, V/v are 0.005, R be 15L/ minute,
Figure DEST_PATH_GDA00003283624600142
For 2.8mm, use above-mentioned metal adhesive skive to carry out grinding to the end face of workpiece W.Then, with identical conditions, utilize the resinoid bond emery wheel to carry out accurately machined attrition process.
(embodiment 2)
In embodiment 2, establishing x/d is 0.04(4%), θ 1Be 45 °, θ 2Be that 22.5 °, V/v are 0.005, R be 25L/ minute,
Figure DEST_PATH_GDA00003283624600143
For 2.0mm, use above-mentioned metal adhesive skive to carry out grinding to the end face of workpiece W.Then, with identical conditions, utilize the resinoid bond emery wheel to carry out accurately machined attrition process.
(comparative example 1)
In comparative example 1, establishing x/d is 0.04(4%), θ 1Be 70 °, θ 2Be that 45 °, V/v are 0.005, R be 15L/ minute,
Figure DEST_PATH_GDA00003283624600144
For 3.2mm, use above-mentioned metal adhesive skive to carry out grinding to the end face of workpiece W.Then, with the condition identical with grinding, utilize the resinoid bond emery wheel to carry out accurately machined attrition process.
(comparative example 2)
In comparative example 2, establishing x/d is 0.02(2%), θ 1Be 22.5 °, θ 2Be that 22.5 °, V/v are 0.011, R be 9.5L/ minute,
Figure DEST_PATH_GDA00003283624600152
For 3.3mm, use above-mentioned metal adhesive skive to carry out grinding to the end face of workpiece W.Then, with identical conditions, utilize the resinoid bond emery wheel to carry out accurately machined attrition process.
(check result)
Table 1 means grinding condition (x/d, the θ of embodiment 1,2 and comparative example 1,2 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600153
) and the grinding result.Visual Confirmation utilize the image of the end face of the workpiece W that the CCD camera takes to amplify the approximately image of 20 times.Check result is, on the end face of the complete cycle of workpiece W, by the average evaluation to unfavorable condition (face upward incline (fine crack), shortcoming, grinding sintering, break) unconfirmed for " 1(is very good) ", can confirm be less than facing upward of 0.2mm incline the average evaluation of (fine crack) for " 2(is good) ", will confirm the above average evaluation of facing upward incline (fine crack) or other unfavorable condition (shortcoming, grinding sintering or break) of 0.2mm for " 3(is poor) ".
[table 1]
Figure DEST_PATH_GDA00003283624600151
(result of embodiment 1)
About grinding condition x/d, θ 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600154
Value become respectively 0.04(4%)~0.05(5%), the embodiment 1 in 15 °~60 °, 15 °~60 °, 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope, the result of the image after having confirmed to amplify is to confirm unfavorable condition (face upward incline (fine crack), shortcoming, grinding sintering, break) (result " 1 ").
(result of embodiment 2)
About grinding condition x/d, θ 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600161
In x/d, θ 1, θ 2Value be respectively 0.04(4%)~0.05(5%), in the scope of 15 °~60 °, 15 °~60 °, V/v, R,
Figure DEST_PATH_GDA00003283624600162
Value at least one embodiment 2 in 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope not, the result of the image after having confirmed to amplify is, can confirm and be less than facing upward of 0.2mm and incline (fine crack), but fail to confirm 0.2mm above face upward incline (fine crack) and other unfavorable condition (result " 2 ").
(result of comparative example 1)
About grinding condition x/d, θ 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600163
In x/d, θ 1, θ 2Value at least one do not have respectively at 0.04(4%)~0.05(5%), in the scope of 15 °~60 °, 15 °~60 °, V/v, R, Value be the comparative example 1 in 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope, the result of the image after having confirmed to enlarge is, can confirm 0.2mm above face upward incline (fine crack) or other unfavorable condition (shortcoming, grinding sintering or break) (result " 3 ").
(result of comparative example 2)
About grinding condition x/d, θ 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600165
In x/d, θ 1, θ 2Value at least one be not respectively at 0.04(4%)~0.05(5%), in the scope of 15 °~60 °, 15 °~60 °, and V/v, R,
Figure DEST_PATH_GDA00003283624600166
The value comparative example 2 in 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope not, the result of the image after having confirmed to amplify is, can confirm 0.2mm above face upward incline (fine crack) or other unfavorable condition (shortcoming, grinding sintering or break) (result " 3 ").
As described above, known according to the result shown in table 1, grinding condition x/d, θ 1, θ 2, V/v, R,
Figure DEST_PATH_GDA00003283624600167
Value become respectively 0.04(4%)~0.05(5%), in 15 °~60 °, 15 °~60 °, 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope the time, there is unfavorable condition (face upward incline (fine crack), shortcoming, grinding sintering, break) in the workpiece W that fails to confirm after grinding, even in the situation that the thin thickness of workpiece W to 0.7mm, also can suppress the generation of unfavorable condition of the end face of workpiece W effectively.
In addition, though grinding condition V/v, R,
Figure DEST_PATH_GDA00003283624600171
Value at least one not in the situation that in 2.5~3.2mm, 10~20L/ minute, 0.0012~0.01 scope, as long as grinding condition x/d, θ 1, θ 2Value be respectively 0.04(4%)~0.05(5%), in the scope of 15 °~60 °, 15 °~60 °, although just can confirm on the workpiece W after grinding, can confirm to be less than facing upward of 0.2mm (fine crack) the no problem situation on product of inclining.
At length and with reference to specific embodiment the utility model has been described, but has not broken away from scope of the present utility model and purport, the situation that can apply various corrections, change is self-evident to those skilled in the art.
The Japanese patent application 2010-268055 that the application filed an application based on December 1st, 2010, and be incorporated herein its content as reference.
The industry practicality property used
Method for grinding of the present utility model and grinding attachment can use in the grinding of the end face of glass substrate, especially are suitable for FPD(Flat Panel Display) with the grinding of the end face of glass.The thickness that is suitable for the glass substrate of method for grinding of the present utility model and grinding attachment is preferably the 3mm left and right, and then the size of glass substrate to be preferably 650mm(vertical) * the 750mm(horizontal stroke) more than, more preferably 1500mm(is vertical) * the 1800mm(horizontal stroke) more than, be particularly preferably 2200mm(vertical) * the 3500mm(horizontal stroke) more than.
Label declaration
1 ... grinding attachment, 100 ... grinding mechanism, 101 ... emery wheel, 101a ... groove, 102 ... motor, 103 ... cowling panel, 104 ... casing, 104a ... opening, 104b, 104c ... the blade of a sword, 200 ... the cooling medium feed mechanism, 201 ... menifold, 202 ... the advance and retreat mobile unit, 203a, 203b ... nozzle (supply port), 204a, 204b ... guide rail, 205 ... external screw thread, 206 ... motor, 300 ... carrying mechanism, 301 ... the advance and retreat mobile unit, 302a, 302b ... guide rail, 303a~303d ... slide block, 304 ... external screw thread, 305 ... motor, 306 ... internal thread, 307 ... holding unit, 307a ... aperture, 400 ... attract mechanism, 500 ... the end face wiper mechanism, 501a, 501b ... nozzle, 502 ... casing, 502a ... opening, 600 ... controller

Claims (4)

1. a grinding attachment, carry out grinding to the end face of glass substrate, and described grinding attachment possesses:
The end face that rotarilys actuate and be the described glass substrate below 1.2mm to thickness carries out the emery wheel of the diameter d of grinding; And
Across described glass substrate, configure, for each interarea of described glass substrate with θ 1, θ 2Incident angle and towards described glass substrate with respect to the direct of travel of described emery wheel and to apart from grinding position based on described emery wheel be first, second nozzle apart from the position supply cooling agent of x,
Described θ 1, θ 2, x/d value respectively in 15~60 °, 15~60 °, 0.04~0.05 scope.
2. grinding attachment according to claim 1, wherein,
The internal diameter of the supply port of described nozzle
Figure DEST_PATH_FDA00003283624500011
The flow R of the described cooling agent of supplying with respectively from the supply port of described nozzle, and the ratio V/v of the grinding speed V of described glass substrate and the circular velocity v of described emery wheel is adjusted into respectively 2.5~3.2mm, 10~20L/ minute, in 0.0012~0.01 scope.
3. grinding attachment according to claim 1 and 2, wherein,
Can be according to the wear extent of described emery wheel so that the mode that the value of described x/d becomes in 0.04~0.05 scope is adjusted the position of supplying with described cooling agent.
4. grinding attachment according to claim 2, wherein,
Can described V/v be adjusted into according to the wear extent of described emery wheel in 0.0012~0.01 scope.
CN2011900009171U 2010-12-01 2011-10-27 Grinding device Expired - Fee Related CN203317224U (en)

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