CN203241563U - Polarization component unit and polarized light irradiation device - Google Patents
Polarization component unit and polarized light irradiation device Download PDFInfo
- Publication number
- CN203241563U CN203241563U CN2013201630926U CN201320163092U CN203241563U CN 203241563 U CN203241563 U CN 203241563U CN 2013201630926 U CN2013201630926 U CN 2013201630926U CN 201320163092 U CN201320163092 U CN 201320163092U CN 203241563 U CN203241563 U CN 203241563U
- Authority
- CN
- China
- Prior art keywords
- framework
- mentioned
- wire grid
- polarization element
- grid polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Polarising Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The utility model provides a polarization component unit and a polarized light irradiation device. The polarization component unit is provided with a wire grating polarization component, a first frame for keeping the wire grating polarization component, and a second frame for keeping the first frame, wherein an adjustment mechanism is arranged on the second frame, and the adjustment mechanism is used for adjusting the orientation of the wire grating polarization component by changing the posture of the first frame. The polarized light irradiation device comprises the polarization component unit aforementioned, and a light source for irradiating a polarized light to a workpiece via the wire grating polarization component of the polarization component unit.
Description
Technical field
The application's utility model relates to for the polarizer unit of irradiation polarized light and the polarized light illumination device that shines polarized light with the polarizer unit.
Background technology
At the oriented film that obtains liquid crystal board or use in the used directional process of the oriented layer etc. of compensation film for angular field of view of UV cured type liquid crystal, adopt by the polarized light to workpiece irradiation ultraviolet radiation zone and carry out directed light directional technology.Below, in this manual, will use up and carry out orientation and be generically and collectively referred to as the light orientation, carry out film or layer that directional process crosses and be generically and collectively referred to as the light oriented film using up.In addition, " orientation " refers to give directivity for some character of object.
Employed smooth oriented film maximizes along with the maximization of liquid crystal board in the liquid crystal board, follows in this, and the polarized light illumination device of irradiation polarized light also maximizes.For example the workpiece used of compensation film for angular field of view is banded and long workpiece, and the length that is cut off into expectation after the light directional process is used.Recently, corresponding to the size of liquid crystal board, workpiece also becomes greatly, and its width is about 2000mm～3000mm.In order to carry out the light orientation for such wide cut and banded machining long workpieces, proposed such as No. the 4506412nd, patent documentation 1(Jap.P. for example) shown in like that, with the polarized light illumination device of bar-shaped lamp and wire grid polarization element.
The wire grid polarization element has following structure: the glass substrate of light (polarized light) transmission in interest concessions usefulness is formed with grid.Grid has following pattern (line and space; Line-And-Space): when the space is set, form abreast many at the line of the upwardly extending electric conductivity in certain side or semiconduction.In the middle of the light of injecting, the major part of the polarized component parallel with the length direction of grid is reflected or is absorbed, and with the polarized component transmission of the length direction quadrature of grid.Therefore, the light behind the transmission wiregrating polarizer becomes the polarized light that has polarization axle in the direction with the length direction quadrature of grid.At for example patent documentation 2(TOHKEMY 2002-328234 communique), patent documentation 3(Japanese Unexamined Patent Application Publication 2003-508813 communique) in illustrated such wire grid polarization element in detail.
As also putting down in writing in the patent documentation 1, it is difficult making large-scale wire grid polarization element.Therefore, as the method that the reply workpiece maximizes, developed the technology with a plurality of wire grid polarization cells.The polarizer unit has following structure: arrange in framework and keep a plurality of wire grid polarization elements.
When having adopted aforesaid structure of having arranged a plurality of wire grid polarization elements, the direction of the grid of each wire grid polarization element needs regularly alignment (certain に CIRCUIT-DIAGRAM っ て い Ru).When not aliging regularly, the polarization axle of the polarized light that penetrates from each wire grid polarization element will become messy, and the light directional process of workpiece is also produced deviation.Therefore, shown in patent documentation 1, arrange adjust each wire grid polarization element towards mechanism.
Prior art document (patent documentation)
Patent documentation 1: No. 4506412 communique of Jap.P.
Patent documentation 2: TOHKEMY 2002-328234 communique
Patent documentation 3: Japanese Unexamined Patent Application Publication 2003-508813 communique
When shown in patent documentation 1, adopt like that adjust each wire grid polarization element towards mechanism the time, can adopt to make the mechanism of spring touching on each wire grid polarization element that adjusts usefulness.That is, make each spring touching near the two ends on a limit of square tabular wire grid polarization element.And, make and bear the pin touching in the centre on the limit of opposition side.Rotate by a side who makes the spring of adjusting usefulness and it to be advanced and the opposing party is retreated, thus make thus the front end that bears pin become centered by the wire grid polarization element rotate slightly, and the wire grid polarization element towards changing.For each wire grid polarization element such adjusting mechanism is set, and adjust respectively each wire grid polarization element towards.
But, if for making as described above when adjusting with spring or bearing pin and directly touch the structure of wire grid polarization element, owing to applying direct force to the wire grid polarization element, easily produce distortion.Especially, the substrate of wire grid polarization element is glass, easily produces distortion when applying power as described above.When the wiregrating polarizer is out of shape, the polarization axle of the polarized light of ejaculation towards according to the place and difference, the polarization axle of the polarized light in photoirradiated surface produces deviation.
The utility model content
This part utility model is made in order to solve above-mentioned problem, its purpose be adjust the wire grid polarization element towards the time, prevent the distortion of wire grid polarization element, and avoid in photoirradiated surface, producing the deviation of polarization axle.
In order to solve above-mentioned problem, the application's technical scheme 1 described utility model has following structure: have: the wire grid polarization element;
The first framework keeps the wiregrating polarizer; And
The second framework keeps the first framework,
Be provided with adjusting mechanism at the second framework, this adjusting mechanism by the posture that makes the first framework change to adjust the wire grid polarization element towards.
In addition, in order to solve above-mentioned problem, technical scheme 2 described utility models have following structure: in the structure of technique scheme 1, above-mentioned the first framework has side wall surface, this side wall surface forms than the large space of above-mentioned wire grid polarization element, have the bolster that is made of elastic body between this side wall surface and above-mentioned wire grid polarization element, by this bolster, the position of the above-mentioned wire grid polarization element in above-mentioned the first framework is kept.
In addition, in order to solve above-mentioned problem, technical scheme 3 described utility models have following structure: in the structure of technique scheme 1 or 2, above-mentioned wire grid polarization element is the shape with bight, above-mentioned the first framework has side wall surface, this side wall surface has and forms the therewith bight of the same angle in bight, the bight by making above-mentioned wire grid polarization element and the bight butt of above-mentioned the first framework keep above-mentioned wire grid polarization elements relative in above-mentioned the first framework towards.
In addition, in order to solve above-mentioned problem, technical scheme 4 described utility models have following structure: in the arbitrary structure in technique scheme 1 to 3, above-mentioned the second framework keeps a plurality of the first frameworks, each first framework only keeps an above-mentioned wire grid polarization element, for each first framework above-mentioned adjusting mechanism is set, above-mentioned adjusting mechanism can adjust independently each wire grid polarization element towards.
In addition, in order to solve above-mentioned problem, technical scheme 5 described utility models have following structure: in the arbitrary structure in technique scheme 1 to 4, above-mentioned adjusting mechanism is connected at above-mentioned the first framework under the state of above-mentioned the second framework the posture of above-mentioned the first framework is changed.
In addition, in order to solve above-mentioned problem, technical scheme 6 described utility models have following structure: in the arbitrary structure in technique scheme 1 to 5, above-mentioned adjusting mechanism has: pivot pin, the face that prolongs with respect to the grid of above-mentioned wire grid polarization element and vertical; And adjusting pin, push above-mentioned the first framework, in order to centered by pivot pin, rotate above-mentioned the first framework.
In addition, in order to solve above-mentioned problem, technical scheme 7 described utility models have following structure: comprising: the described polarizer of each in the technique scheme 1 to 6 unit; And light source, the wire grid polarization element that has by the polarizer unit shines polarized light to workpiece.
The effect of utility model
As described below, technical scheme 1 described utility model by the application, since have by the posture that makes the first framework that keeps the wiregrating polarizer change to adjust the wire grid polarization element towards structure, so the distortion that when adjusting, can not produce the wire grid polarization element.Therefore, the polarization axle of the polarized light in the shadow surface does not produce deviation, can carry out the high light directional process of inner evenness.
In addition, by technical scheme 2 described utility models, except above-mentioned effect, owing between the side wall surface of the first framework and wire grid polarization element, be provided with the bolster that is consisted of by elastic body, so the position of wire grid polarization element is stably kept.Therefore, can stablize and carry out with having good uniformity the light directional process.
In addition, by technical scheme 3 described utility models, except above-mentioned effect, the bight that the bight of wire grid polarization element becomes with respect to the side wall surface of the first framework and butt, so the wire grid polarization element towards maintaining stable state.Therefore, improved by the first framework indirectly towards the validity of adjusting.
In addition, by technical scheme 4 described utility models, except above-mentioned effect, because each first framework only keeps a wire grid polarization element, and can for each wire grid polarization element adjust independently towards, so can revise meticulously each wire grid polarization element towards deviation.Therefore, can easily carry out the deviation polarizing light irradiation still less of polarization axle.
In addition, by technical scheme 5 described utility models, except above-mentioned effect, owing under the state that is connected to the second framework at the first framework the posture of the first framework being changed, become easy so prevent the completion status that objectionable impurities enters or keeps towards adjustment.
In addition, by technical scheme 6 described utility models, not only obtain the effect of each the described utility model in the technique scheme 1 to 5, can also shine polarized light to workpiece.
Description of drawings
Fig. 1 is the three-dimensional skeleton diagram of the polarized light illumination device that relates to of the embodiment of this part utility model.
Fig. 2 is that skeleton diagram is analysed and observe in the side of the structure of the illumination part that carries of the device of presentation graphs 1.
Fig. 3 is the skeleton diagram of overlooking of polarizer unit shown in Figure 1.
Fig. 4 is the three-dimensional skeleton diagram of the assembling of expression polarizer unit shown in Figure 1.
Fig. 5 be each the wire grid polarization element in the expression polarizer unit shown in Figure 1 the maintenance structure overlook skeleton diagram.
Fig. 6 is the vertical view that schematically represents to utilize the adjustment of Fig. 3 and adjusting mechanism shown in Figure 4.
Fig. 7 be each pin of expression configuration other examples overlook skeleton diagram.
Symbol description
11 lamps
12 catoptrons
20 heating radiators
60 lampshades
70 illumination loopholes
80 polarizer unit
81 wire grid polarization elements
811 bolsters
82 first frameworks
821 pins are used the hole
83 second frameworks
84 shadow shields
91 adjusting pins
92 bear pin
93 pivot pins
Embodiment
Next, mode that be used for to implement this part utility model (below, embodiment) is described.
Fig. 1 is the three-dimensional skeleton diagram of the polarized light illumination device that relates to of the embodiment of this part utility model.Polarized light illumination device shown in Figure 1 has the polarizer unit that the embodiment of this part utility model relates to.This device constitutes to have: conveying mechanism, conveying workpieces W; And illumination part 10 etc., this illumination part 10 is for the workpiece W irradiation polarized light of carrying.In Fig. 1, workpiece W is the workpiece of the length of the band shape used of compensation film for angular field of view for example, sent from outlet roller R1, on one side in the figure direction of arrow carry on one side and carry out the light directional process by polarizing light irradiation, and reel by take up roll R2.
Fig. 2 is that skeleton diagram is analysed and observe in the side of the structure of the illumination part 10 that carries of the device of presentation graphs 1.Fig. 2 is the skeleton diagram of analysing and observe on the throughput direction of workpiece W.As shown in Figure 2, device has: light source; And polarizer unit 80, having wire grid polarization element 81, this wire grid polarization element 81 makes the since then light polarization of light source.
The light of the wavelength that the light source radiation bright dipping is directed required.For to the long patterned illumination light of the Width of workpiece W, use bar-shaped lamp 11 as light source.In the present embodiment, owing to carrying out the light orientation with the light of ultraviolet region, so use high-pressure mercury-vapor lamp or the metal halide lamp etc. of other metal of adding in mercury.The LED that also can arrange the light of a plurality of required wavelength that radiate the ultraviolet region obtains long irradiation pattern.In addition, bar-shaped lamp 11 is that the mode of the Width of workpiece W configures with its length direction.Conveying workpieces W on the horizontal direction vertical with respect to Width.
Be provided with the catoptron 12 of chute shape (Gutter shape) in order to cover lamp 11.Catoptron 12 is turned back and is made it to improve towards workpiece W the utilization ratio of light by making from the light of lamp 11.As shown in Figure 1, from the light of lamp 11 have directly towards workpiece W, have by catoptron 12 reflections towards workpiece W.In the present embodiment, use the cross-sectional shape of reflecting surface to form paraboloidal structure (chute shape paraboloidal mirror) as the catoptron 12 of chute shape.In addition, sometimes also use the structure (chute shape elliptical condenser mirror) of the cross-sectional shape formation elliptical area of reflecting surface.
In addition, in order to solve the problem of the heat that produces owing to the light from lamp 11, adopt following structure to cooling off in the shell of having accommodated lamp 11 grades (below, be called lampshade) 60.As shown in Figure 1, catoptron 12 is pair of right and left.Left and right sides catoptron 12 separates on top, and forms the slit of ventilation usefulness at the upside of lamp 11.Heating radiator 20 is set above the slit, and pressure fan 30 is set thereon.When pressure fan 30 action, such shown in Fig. 1 dotted arrow, wind flows by heating radiator 20, and in the cooling lampshade 60.
The purpose of cooling also is to cool off each interior member of lampshade 60, or makes the surface of lampshade 60 not hot to more than the limit except the temperature that suppresses lamp 11 self rises.In addition, except preventing from preventing in addition because wire grid polarization element 81 becomes high temperature so that the purpose that workpiece W is heated unusually by its radiation heat the purpose of hot damage by cooling wire grid polarization element 81.
In order to make wire grid polarization element 81 between lamp 11 and workpiece W and polarizer unit 80 is set.Fig. 3 is the skeleton diagram of overlooking of polarizer unit 80 shown in Figure 1.In addition, Fig. 4 represents the three-dimensional skeleton diagram of the assembling of polarizer unit 80 shown in Figure 1.
Such as Fig. 3 and shown in Figure 4, polarizer unit 80 has: wire grid polarization element 81; The first framework 82 keeps wiregrating polarizer 81; And second framework 83, keep the first framework 82.In the present embodiment, corresponding to the maximization of workpiece W, adopted the structure of having arranged a plurality of wire grid polarization elements 81.The direction of arranging wiregrating polarizer 81 is Widths of workpiece W.
In addition, such as Fig. 3 and shown in Figure 4, be provided with shadow shield 84 for the gap of the adjoiner of blocking each first framework 82.Shadow shield 84 is to avoid shining and the structure of shading to workpiece W without the light (nonpolarized light) of wire grid polarization element 81.
Fig. 5 be each the wire grid polarization element 81 in the expression polarizer unit 80 the maintenance structure overlook skeleton diagram.As shown in Figure 5, keep a wire grid polarization element 81 with first framework 82.
As shown in Figure 5, wire grid polarization element 81 is square tabular.The first framework 82 is square frame shapes (picture frame shape).The cross-sectional shape on each limit of the first framework 82 is L fonts, and has step.Wire grid polarization element 81 is held dropping under the state of this step.Wire grid polarization element 81 to the first frameworks 82 formed square openings are large, and keep under the state of sealing opening.The polarized light that penetrates from wire grid polarization element 81 passes this opening and shines workpiece W.
In addition, the first framework 82 is that square frame shape does not have certainty, but need at least be make the polarized light that penetrates from wire grid polarization element 81 by and arrive the shape of workpiece W.
In addition and since the first framework 82 be avoid for wire grid polarization element 81 directly acting force carry out structure towards the problem of adjusting, so be the high material of rigidity in order not produce when adjusting that distortion waits and wish.For example, form the first framework 82 with metals such as stainless steel or aluminium.
In the first framework 82, the side wall surface that forms step form than wire grid polarization element 81 slightly large analyse and observe square space.Wire grid polarization element 81 is held under the state of the bight butt that the side wall surface on two the adjacent limits that make bight and the first framework 82 consists of.
And, as shown in Figure 5, in order stably not keep loosely wiregrating polarizer 81 in the gap that between the side wall surface on other two limits of the first framework 82 and wire grid polarization element 81, forms, and there is bolster 811.Adopt elastic body as bolster 811, use in the present embodiment leaf spring.As shown in Figure 5, leaf spring is the crooked shape in shape ground of crawling, with the space-filling of the end face of wire grid polarization element 81 and each side wall surface and make the stable posture of wire grid polarization element 81.When using the metal springs such as aluminium or stainless steel as leaf spring, thus since can not produce by UV-induced deteriorated be preferred.
Keep the first framework 82 of each wire grid polarization element 81 in the 83 interior arrangements of the second framework, and keep with the second framework 83.The second framework 83 also is square frame shape as a whole.But, because a row ground arranges and keep a plurality of wire grid polarization elements 81, so as shown in Figure 3, be elongated square.The length direction of the second framework 83 is length directions of lamp 11, and is the Width of workpiece W.The Width of the second framework 83 is throughput directions of workpiece W.
As shown in Figure 2, the cross-sectional shape on one side of the frame of the second framework 83 also is the L font.In the second framework 83, less than the width of the first framework 82 at the separation spacing of the inner edge of the frame of the both sides that Width is observed.The separation spacing of the side wall surface of the step of observing at the Width of the second framework 83 is larger than the width of the first framework 82.The first framework 82 is arranged under the state of the step that drops into the second framework 83, and is kept by the second framework 83.In addition, the second framework 83 also is the metal-mades such as stainless steel or aluminium.
The polarized light that penetrates at each wire grid polarization element 81 is at the rectangular opening 830(of 83 one-tenth of the second frameworks as described in Figure 3) pass and shine workpiece W.In addition, the opening 830 of the second framework 83 seals by the first framework 82 and the shadow shield 84 that keeps wire grid polarization element 82.About the second framework 83, for square frame shape does not have certainty yet, but similarly need at least be make the polarized light that penetrates from each wire grid polarization element 81 by and arrive the shape of workpiece W.
Each wire grid polarization element 81 be provided with adjust each wire grid polarization element 81 towards adjusting mechanism.Each polarizer towards adjustment except the adjustment that the grid that makes as described above each wire grid polarization element 81 is arranged aligns in one direction, also have adopt with respect to workpiece W relative towards and make it the adjustment of aliging in the direction of regulation.In the present embodiment, adjusting mechanism does not make member directly touch each wire grid polarization element 81, but by the posture that changes the first framework 82 indirectly adjust each wire grid polarization element 81 towards mechanism.
For the first framework 82 adjusting mechanism is set respectively.That is, the first framework 82 is set as and can changes independently of one another posture by each governor motion.Each governor motion corresponding to the allocation position of each the first framework 82 on the second framework 83 with the predetermined distance setting.
Such as Fig. 3 and shown in Figure 4, each adjusting mechanism main composition is for having: adjusting pin 91; Bear pin 92; And pivot pin 93.Adjusting pin 91 is assemblied on the limit of length direction of the second framework 83.Bearing pin 92 is assemblied on another limit of length direction.Adjusting pin 91 is relative state with bearing the Width of pin 92 at the second framework 83.Adjusting pin 91 and bear pin 92 and be fixed on the pedestal 911,921, each pedestal 911,921 is fixed on the second framework 83.
As shown in Figure 4, the first framework 82 that keeps wiregrating polarizer 81 is embedded into pin at pivot pin 93 and places on the second framework 83 with the state download in hole 821.At this moment, as shown in Figure 3, adjusting pin 91 is opposed states in limit (with being provided with the limit of pin with the opposite side in limit in hole 821) along the Width of the first framework 82 with bearing pin 92.In order to become such state, set adjusting pin 91, born pin 92, each rigging position of pivot pin 93.
Fig. 6 is the vertical view that schematically represents to utilize the adjustment of Fig. 3 and adjusting mechanism shown in Figure 4.In the present embodiment, adjusting pin 91 is precision screws, and bearing pin 92 is plungers.When adjusting pin 91 rotations were advanced, the front end of adjusting pin 91 was released the first framework 82 slightly.Thus, shown in the arrow A 1 of Fig. 6, the first framework 82 is deasil slightly rotation centered by pivot pin 93.When making it to retreat at reverse rotation adjusting pin 91, shown in the arrow A 2 of Fig. 6, by bearing the effect of the spring in the pin 92, the first framework 82 is slightly rotation widdershins.By the rotation of such minute angle, change the posture of the first framework 82, and the wire grid polarization element 81 that adjust to keep towards.Each adjusting mechanism is same structure, by each adjusting pin 91 is operated, adjust independently each wire grid polarization element 81 towards.
In addition, during above-mentioned adjustment, the upper surface butt of the lower surface of the first framework 82 and the second framework 83 changes posture Yi Bian the first framework 82 slides at the second framework 83 on one side.Under the state that the first framework 82 is floated from the second framework 83, adjust the position, thus the easy one side that becomes do not adjusted owing to there being friction to have, but when carrying out the light directional process, wish the first framework 82 butts the second framework 83.This be because, in the liquid crystal manufacturing processing of carrying out the light directional process etc., it is known having the such harmful material of silicone compounds in the toilet, when such material entered in the lampshade, the gonorrhoea etc. that produces catoptron was stained.In order to prevent entering of objectionable impurities, wish the first framework 82 butts the second framework 83.The first framework 82 is descended and the method for butt, but when when descending when departing from, do not had the meaning of adjustment.Therefore, wish the first framework 82 butts the second framework 83 is adjusted on one side, and directly former state after the maintenance adjustment towards.
As mentioned above, the adjustment of wire grid polarization element 81 is for the adjustment towards the direction of expectation of the direction that makes grid.At this moment, also considered while use the microscopic examination grid towards adjusting, but as TOHKEMY 2007-127567 communique is disclosed, to the polarization axle of the polarized light that transmits at wiregrating polarizer 81 towards observe and so that this direction be expectation towards mode adjustment be practical.Because the final purpose of adjusting be the polarization axle that makes the polarized light on the shadow surface expectation towards alignment.
Above-mentioned polarizer unit 80 is by pre-assembled and carry on polarized light illumination device.When assembling, carry out above-mentioned adjustment for each wire grid polarization element 81.In order to adjust, need to become the direction of a certain benchmark.For this, can select for example length direction of the side 831 of the second framework 83.Linearity is made side 831 well in advance, and carry out take the length direction of this side 831 as benchmark each wire grid polarization element 81 towards adjustment.That is, carry out each wire grid polarization element 81 towards adjustment so that the polarization axle of the polarized light of each point observation of shadow surface with respect to the length direction of side 831 for regulation towards.
Like this, by with respect to the polarizer unit 80 towards configuration finish the adjustment of each wire grid polarization element 81 after of workpiece W in regulation, the polarizing light irradiation of deviation that can be by there not being polarization axle carries out the high light directional process of inner evenness.For example, in the time will carrying out the light directional process at the Width of workpiece W, can as described above for the polarization axle that makes polarized light be the second framework 83 side 831 length direction and adjust in advance each wire grid polarization element 81 towards, and for the length direction of the side 831 that makes the second framework 83 is consistent with the Width of workpiece W precision is carried polarizer unit 80 at device well.
As mentioned above, it is carried by the below of lampshade 60 in order to make workpiece W, at this moment, for workpiece W irradiation polarized light, and implement the light directional process.According to circumstances, after sometimes arriving extension position in the way workpiece W having been carried out processing, change each polarizer 81 towards, and different towards carrying out the light directional process.At this moment, after device dismounting polarizer unit 80,, change towards and reset for each first framework, 82 each wire grid polarization element 81 of dismounting from the second framework 83.Self-evident, at this moment, carry out once more aforesaid adjustment.
Polarizer unit 80 by embodiment, since have by the posture that makes the first framework 82 that keeps wiregrating polarizer 81 change to adjust wire grid polarization element 81 towards adjusting mechanism, so the distortion that when adjusting, does not produce wire grid polarization element 81.Therefore, the polarization axle of the polarized light in the shadow surface does not produce deviation, can carry out the high light directional process of inner evenness.
In addition, owing between the side wall surface of the first framework 82 and wire grid polarization element 81, be provided with the bolster 811 that is consisted of by elastic body, so the position of wire grid polarization element 81 is stably kept.Therefore, can stably carry out the light directional process with having good uniformity.
In addition, with wire grid polarization element 81 similarly, the shape that the side wall surface of the first framework 82 becomes be square and the bight that becomes with respect to side wall surface, the bight of wire grid polarization element 81 and the structure of butt have with wire grid polarization element 81 towards the meaning that maintains stable state.Even as described above by adjusting mechanism adjust the first framework 82 towards, wiregrating polarizer 81 with respect to the first framework 82 towards when each constantly all changes, adjust and also become nonsensical.The structure that makes the bight of wire grid polarization element 81 be connected to the bight of the first framework 82 makes wire grid polarization element 81 constant with respect to the relative orientation of the first framework 82, can make thus indirectly higher towards the validity of adjusting by the first framework 82.In addition, because wire grid polarization element 81 is square, so side wall surface forms 90 degree, but when wire grid polarization element 81 are other shapes when for example being equilateral triangle, side wall surface becomes 60 to spend.
In addition, in the present embodiment because first framework 82 only keeps a wire grid polarization element 81, and can for each adjust independently towards, so can revise meticulously each wire grid polarization element 81 towards deviation.Therefore, can easily carry out the deviation polarizing light irradiation still less of polarization axle.
Can also adopt following structure: first framework 82 keeps two or more wire grid polarization element 81, and carries out posture changing for this first framework 82.At this moment, can for a plurality of wire grid polarization elements 81 carry out together towards adjustment, so have advantages of the time that can save adjustment.But, for these a plurality of wire grid polarization elements 81, need to pass through in advance the direction of some means alignment grid.When not lining up, owing to be directly connected to the deviation of the polarization axle in the shadow surface, so can not revise this deviation with above-mentioned adjusting mechanism.Under this meaning, first framework 82 only keep a wire grid polarization element 81 and can for each adjust independently towards the advantage of structure be significant.
In addition, to rotate this centered by vertical pivot pin 93 be preferred for the deviation that suppresses fully polarization axle to wire grid polarization element 81.The purpose of adjusting be the grid in the wire grid polarization element 81 length direction towards adjustment.Therefore, need to be formed with the face (below, grid face) of grid to be positioned at the state on the same face on one side, Yi Bian change wiregrating polarizer 81 towards.Therefore, wish to set with respect to the vertical turning axle of grid face and make wire grid polarization element 81 around this axle rotation.
As described in patent documentation 1, even make pin touching in three positions of end face and one of them position carried out the push-and-pull (prominent I draws I) of pin as fulcrum post in two residual positions, also can carry out towards adjustment.But, at this moment, when the touch position of three pins is not in the face parallel with the grid face, when adjusting, becoming the state that the wire grid polarization element is pushed, the grid face is than the inclination that becomes before adjusting.At this moment, because the grid face becomes state with respect to inclined light shaft, so for the adjustment difficult of the deviation that suppresses fully polarization axle.On the other hand, owing to winding the structure of adjusting with respect to 93 rotations of the vertical pivot pin of grid face because the grid face can not be pushed, thus for the adjustment of the deviation that suppresses fully polarization axle be easy.
In the above-described embodiment, adjusting pin 91 is precision screws and to bear pin 92 are plungers, but sometimes also adopts following structure: carry out rotation around pivot pin 93 with a pair of screw.At this moment, make a side screw rotation and make it to advance and make simultaneously the reverse rotation of the opposing party's screw and make it to retreat, the posture of the first framework 82 is changed.
In addition, also can be following structure: at the first framework 82 pivot pin 93 is set, and at the second framework 83 pin usefulness hole 821 is set.For example, the lower surface in the bight of the first framework 82 arranges pivot pin and makes it vertically outstanding downwards, and at the second framework 83 pin that embeds this pivot pin is set and uses the hole.
In addition, the configuration of each pin is not limited to above-mentioned position.Use Fig. 7 that other examples of the configuration of each pin are described.Fig. 7 be each pin of expression configuration other examples overlook skeleton diagram.As shown in Figure 7, can also be following structure: in the middle of each limit of the first framework 82, form pin with the hole and embed pivot pin 93 along the central authorities on a side's of the length direction of the second framework 83 limit, near and adjusting pin 91 and bear pin 92 and stabbing on the first framework 82 two ends on the opposing party's limit.
Claims (7)
1. polarizer unit is characterized in that having:
The wire grid polarization element;
The first framework keeps the wiregrating polarizer; And
The second framework keeps the first framework,
Be provided with adjusting mechanism at the second framework, this adjusting mechanism by the posture that makes the first framework change to adjust the wire grid polarization element towards.
2. polarizer as claimed in claim 1 unit is characterized in that,
Above-mentioned the first framework has side wall surface, this side wall surface forms than the large space of above-mentioned wire grid polarization element, between this side wall surface and above-mentioned wire grid polarization element, there is the bolster that is consisted of by elastic body, by this bolster, the position of the above-mentioned wire grid polarization element in above-mentioned the first framework is kept.
3. polarizer as claimed in claim 1 unit is characterized in that,
Above-mentioned wire grid polarization element is the shape with bight, above-mentioned the first framework has side wall surface, this side wall surface has the bight that bight therewith forms same angle, the bight by making above-mentioned wire grid polarization element and the bight butt of above-mentioned the first framework keep above-mentioned wire grid polarization elements relative in above-mentioned the first framework towards.
4. polarizer as claimed in claim 1 unit is characterized in that,
Above-mentioned the second framework keeps a plurality of the first frameworks, and each first framework only keeps an above-mentioned wire grid polarization element, for each first framework above-mentioned adjusting mechanism is set, above-mentioned adjusting mechanism can adjust independently each wire grid polarization element towards.
5. polarizer as claimed in claim 1 unit is characterized in that,
Above-mentioned adjusting mechanism is connected at above-mentioned the first framework under the state of above-mentioned the second framework the posture of above-mentioned the first framework is changed.
6. polarizer as claimed in claim 1 unit is characterized in that,
Above-mentioned adjusting mechanism has: pivot pin, the face that extends with respect to the grid of above-mentioned wire grid polarization element and vertical; And adjusting pin, push above-mentioned the first framework, so that above-mentioned the first framework rotates centered by pivot pin.
7. polarized light illumination device is characterized in that having:
Polarizer unit described in the claim 1; And
Light source, the wire grid polarization element that has by the polarizer unit shines polarized light to workpiece.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012084959A JP5652424B2 (en) | 2012-04-03 | 2012-04-03 | Polarizing element unit and polarized light irradiation device |
| JP2012-084959 | 2012-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203241563U true CN203241563U (en) | 2013-10-16 |
Family
ID=49318845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013201630926U Expired - Fee Related CN203241563U (en) | 2012-04-03 | 2013-04-03 | Polarization component unit and polarized light irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5652424B2 (en) |
| KR (1) | KR20130112757A (en) |
| CN (1) | CN203241563U (en) |
| TW (1) | TWI554793B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950520A (en) * | 2014-03-25 | 2015-09-30 | 东芝照明技术株式会社 | Polarized light irradiation device |
| CN106773337A (en) * | 2017-01-11 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of smooth orientation equipment and light alignment method |
| CN107430305A (en) * | 2015-04-14 | 2017-12-01 | 株式会社 V 技术 | Polarized light illumination device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5554849B1 (en) * | 2013-01-23 | 2014-07-23 | 岩崎電気株式会社 | Light irradiation device |
| CN108121101B (en) * | 2016-11-29 | 2020-11-20 | 上海微电子装备（集团）股份有限公司 | Wire grid unit and protection device thereof |
| WO2019171760A1 (en) * | 2018-03-09 | 2019-09-12 | 富士フイルム株式会社 | Method for forming photo-alignment film and method for manufacturing laminate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4506412B2 (en) * | 2004-10-28 | 2010-07-21 | ウシオ電機株式会社 | Polarizing element unit and polarized light irradiation device |
| JP4600013B2 (en) * | 2004-11-30 | 2010-12-15 | 住友化学株式会社 | Color filter having polarization separation function and display device including the same |
| WO2007138813A1 (en) * | 2006-05-31 | 2007-12-06 | Murata Manufacturing Co., Ltd. | Metal plate for wire grid, wire grid, and method of producing metal plate for wire grid |
| JP2008275798A (en) * | 2007-04-26 | 2008-11-13 | Victor Co Of Japan Ltd | Projection-type display apparatus |
| JP5141320B2 (en) * | 2008-03-17 | 2013-02-13 | 株式会社村田製作所 | Metal plate for wire grid, self-supporting wire grid, and method for manufacturing metal plate for wire grid |
| JP2010072539A (en) * | 2008-09-22 | 2010-04-02 | Seiko Epson Corp | Optical device and projector |
-
2012
- 2012-04-03 JP JP2012084959A patent/JP5652424B2/en active Active
-
2013
- 2013-03-08 TW TW102108229A patent/TWI554793B/en active
- 2013-03-28 KR KR1020130033581A patent/KR20130112757A/en not_active Application Discontinuation
- 2013-04-03 CN CN2013201630926U patent/CN203241563U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104950520A (en) * | 2014-03-25 | 2015-09-30 | 东芝照明技术株式会社 | Polarized light irradiation device |
| TWI617867B (en) * | 2014-03-25 | 2018-03-11 | 東芝照明技術股份有限公司 | Polarized light illuminating device |
| CN104950520B (en) * | 2014-03-25 | 2019-08-06 | 东芝照明技术株式会社 | Polarized light illumination device |
| CN107430305A (en) * | 2015-04-14 | 2017-12-01 | 株式会社 V 技术 | Polarized light illumination device |
| TWI728970B (en) * | 2015-04-14 | 2021-06-01 | 日商Ｖ科技股份有限公司 | Polarized light irradiation device |
| CN106773337A (en) * | 2017-01-11 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of smooth orientation equipment and light alignment method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130112757A (en) | 2013-10-14 |
| TW201350932A (en) | 2013-12-16 |
| JP5652424B2 (en) | 2015-01-14 |
| TWI554793B (en) | 2016-10-21 |
| JP2013213987A (en) | 2013-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203241563U (en) | Polarization component unit and polarized light irradiation device | |
| CN103235448B (en) | Polarized light illuminating device | |
| CN107155365B (en) | Conductive metal network including metal nanometer line and metal nanoparticle and the method for manufacturing it | |
| CN103592821B (en) | Novel LED (light-emitting diode) light source system for ultraviolet exposure machine | |
| CN103226264B (en) | Polarized light illumination device | |
| CN102402069A (en) | Method of preparing alignment film for LCD (liquid crystal display) panel | |
| CN103246113B (en) | Polarized light illumination device | |
| CN107664877A (en) | Light irradiation device and light illuminating method | |
| CN106886069B (en) | Lamp changing table | |
| Chen et al. | Scalable inkjet printing of electrochromic smart windows for building energy modulation | |
| TW200628998A (en) | Lithographic apparatus and device manufacturing method | |
| CN103207529B (en) | Exposure method and exposure apparatus | |
| WO2012117363A1 (en) | System and methods for producing homogeneous light intensity distribution | |
| CN204129435U (en) | The ultraviolet LED photohead of high evenness | |
| CN107450236A (en) | Polarized light illumination device and light orientation device | |
| Gu et al. | Boosting near-infrared absorption properties enabled by oxygen vacancy engineering within tungsten trioxide | |
| US8871410B2 (en) | Method for producing pattern phase difference film | |
| JP5810735B2 (en) | Method for producing pattern retardation film and method for producing optical film | |
| CN203480210U (en) | Novel LED ultraviolet exposure machine light source system | |
| CN203528094U (en) | A laser marking machine | |
| CN107085273A (en) | Polarizer unit and polarized light illumination device | |
| KR20160086256A (en) | Polarized light illuminating apparatus and light orientation apparatus | |
| CN203385887U (en) | Bidirectional light guide plate, and bidirectional light guide plate structure | |
| CN201828680U (en) | Light-guide plate air curtain cooling device | |
| TWI658255B (en) | Wire grid unit and wire grid splicing protection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131016 |