CN203233291U - High-speed permanent magnet motor for molecular pump - Google Patents
High-speed permanent magnet motor for molecular pump Download PDFInfo
- Publication number
- CN203233291U CN203233291U CN 201320296395 CN201320296395U CN203233291U CN 203233291 U CN203233291 U CN 203233291U CN 201320296395 CN201320296395 CN 201320296395 CN 201320296395 U CN201320296395 U CN 201320296395U CN 203233291 U CN203233291 U CN 203233291U
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- Prior art keywords
- magnetic bearing
- permanent magnet
- rotor
- radial direction
- stator
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- Withdrawn - After Issue
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Abstract
Disclosed in the utility model is a high-speed permanent magnet motor for molecular pump, which belongs to the permanent magnet motor field. A gullet-free stator structure and a novel winding material are employed, thereby realizing reduction on the stator loss and the rotator temperature rising and thus improving the motor efficiency; and moreover, phenomena of permanent magnet demagnetization and rotor structure changing due to high temperatures can be effectively prevented. Meanwhile, because a magnetic suspension bearing is used, mechanical loss and mechanical wearing due to utilization of a mechanical bearing during a high-speed running process can be effectively reduced; furthermore, the efficiency is improved and the service life of equipment is prolonged.
Description
Technical field
The utility model relates to a kind of magneto, and a kind of molecular pump high-speed permanent magnet motor particularly is applicable to the driving occasion of magnetic suspension molecular pump.
Background technology
Along with the develop rapidly of IT technology, more and more higher to the requirement of ultra-high vacuum system in fields such as semiconductor manufacturings, molecular pump is as the important component part that obtains vacuum, and can its performance play conclusive effect to obtaining ultra high vacuum.The magnetic suspension molecular pump is should country's one of 16 great special problems---the requirement of refreshing light III and the high vacuum that produces, high clean environment, high accuracy, the low noise no oil molecule pump of low vibration, just because of the magnetic suspension molecular pump have that bearing need not to lubricate, service free, bearing be contactless, low vibration, low noise and control parameter are easy to advantages such as adjusting, are widely used in fields such as semi-conductive manufacturing.But the magnetic suspension molecular pump is a kind of vacuum pump, cooperatively interact work with high speed rotor rotated and stator, the speed of pump rotor is more high, the pumping speed of molecular pump and compression ratio are more big, be that operating efficiency is more high, therefore require the Revolution Per Minute of molecular pump adjustable up to several ten thousand commentaries on classics and rotating speed usually, still, the rotor of existing motor adopts mechanical bearing, loss is big under the situation of rotation at a high speed, and can produce a large amount of heat and bearing wear, can only pass through heat loss through radiation under vacuum condition, radiating rate is slow, the reliability that runs up is low, this not only influences efficiency of motor, and fragile bearing, shortens the useful life of equipment.These shortcomings have seriously hindered popularizing and promoting of molecular pump.
The utility model content
The technical assignment of the technical problems to be solved in the utility model and proposition is that the rotor that overcomes existing motor adopts mechanical bearing, loss is big under the situation of rotation at a high speed, and can produce a large amount of heat and bearing wear, under vacuum condition, can only pass through heat loss through radiation, radiating rate is slow, the reliability that runs up is low, this not only influences efficiency of motor, and fragile bearing, the defectives such as useful life of shortening equipment, a kind of no teeth groove stator structure is provided, novel winding material and connected mode and employing magnetic bearing substitute the conventional mechanical bearing, realize stator iron loss, the winding supplementary load loss, the reduction of rotor mechanical loss and rotor temperature rise, prevented that effectively high temperature from bringing phenomenons such as permanent magnet demagnetization and rotor structure change, prolongs the molecular pump high-speed permanent magnet motor in useful life of equipment.
For this reason, molecular pump high-speed permanent magnet motor of the present utility model comprises stationary part and the rotor portion that is positioned at the stationary part inboard, it is characterized in that:
Described stationary part comprises casing, stator core, winding coil, radial direction magnetic bearing stator, axial magnetic bearing stator;
Described stator core is fixed on described casing inboard, pastes described winding coil on the inwall of described stator core;
Described radial direction magnetic bearing stator is the both sides that are fixed on two of described casing inboard and lay respectively at described stator core and winding coil;
Described axial magnetic bearing stator is to be fixed on adjacent two of described casing inboard, maintains end play between these two axial magnetic bearing stators;
Described rotor portion comprises permanent magnet, rotor jacket, radial direction magnetic bearing rotor pack, axial magnetic bearing thrust collar, axle;
Described rotor jacket is fixed on the described axle, and described permanent magnet is positioned at the centre of sheath;
Described radial direction magnetic bearing rotor pack is the both sides that are fixed on two groups on the described axle and lay respectively at described rotor jacket, and these two groups of radial direction magnetic bearing rotor packs are radially corresponding one by one with described two radial direction magnetic bearing stators respectively;
Described axial magnetic bearing thrust collar is fixed on described axle upward and is positioned at described end play and overlaps axial with described two axial magnetic bearing stators;
Between described winding coil and the rotor jacket, all leave radial clearance between described radial direction magnetic bearing stator and the radial direction magnetic bearing rotor pack, form air-gap.
As the optimization technique means: described sheath is welded and fused with axle.Described stator core is solid construction, and its inwall is periphery.Described rotor jacket is made by conduction, non-magnetic high-strength alloy material.It is that the square litz lead coiling of pounding forms more that described winding coil adopts the cross section, and sticks on by being connected in parallel on the inwall of described stator core.Described radial direction magnetic bearing and axial magnetic bearing all adopt magnetic suspension bearing.
The utility model advantage compared with prior art is: high-speed electric expreess locomotive adopts a kind of do not have teeth groove stator structure and novel winding material, realize the reduction of stator loss and rotor temperature rise, improved efficiency of motor, and prevented that effectively high temperature from bringing permanent magnet demagnetization and rotor structure to change.Adopt magnetic suspension bearing simultaneously, effectively reduce mechanical loss and the bearing wear of adopting mechanical bearing when high-speed cruising, to bring, further raise the efficiency and prolong the useful life of equipment.
Description of drawings
Fig. 1 partly cuts open structural representation for molecular pump of the present utility model with high-speed permanent magnet motor;
Fig. 2 is that the A-A of Fig. 1 is to schematic cross-section;
Number in the figure explanation: 1-casing, 2-permanent magnet, 3-stator core, 4-rotor jacket, 5-winding coil, 6-radial direction magnetic bearing rotor pack, 7-radial direction magnetic bearing stator, 8-axial magnetic bearing thrust collar, 9-axial magnetic bearing stator, 10-axle, 11-air-gap.
Embodiment
Below in conjunction with Figure of description the utility model is described further.
Molecular pump high-speed permanent magnet motor of the present utility model, as shown in Figure 1, the rotor portion that it comprises stationary part and is positioned at the stationary part inboard:
Stationary part comprises casing 1, stator core 3, winding coil 5, radial direction magnetic bearing stator 7, axial magnetic bearing stator 9;
Stator core 3 is fixed on casing 1 inboard, pastes described winding coil 5 on the inwall of stator core 3;
Radial direction magnetic bearing stator 7 is the both sides that are fixed on two of casing 1 inboard and lay respectively at described stator core 3 and winding coil 5;
Axial magnetic bearing stator 9 maintains end play for being fixed on adjacent two of casing 1 inboard between these two axial magnetic bearing stators 9;
Rotor portion comprises permanent magnet 2, rotor jacket 4, radial direction magnetic bearing rotor pack 6, axial magnetic bearing thrust collar 8, axle 10;
Radial direction magnetic bearing rotor pack 6 is the both sides that are fixed on two groups on the axle 10 and lay respectively at rotor jacket 4, and these two groups of radial direction magnetic bearing rotor packs 6 are radially corresponding one by one with two radial direction magnetic bearing stators 7 respectively;
Axial magnetic bearing thrust collar 8 is fixed on the axle 10 and is positioned at end play and overlaps axial with two axial magnetic bearing stators 9;
Between winding coil 5 and the rotor jacket 4, all leave radial clearance between radial direction magnetic bearing stator 7 and the radial direction magnetic bearing rotor pack 6, form air-gap 11.
Concrete, sheath 4 is welded and fused with axle 10.Stator core 3 is solid construction, and its inwall is periphery.Rotor jacket 4 is made by conduction, non-magnetic high-strength alloy material.It is that the square litz lead coiling of pounding forms more that winding coil 5 adopts the cross section, and sticks on by being connected in parallel on the inwall of stator core 3.Radial direction magnetic bearing 7 and axial magnetic bearing 9 all adopt magnetic suspension bearing.
The alternation iron loss that the high order harmonic component that the utility model brings for the slot effect of eliminating motor and high speed rotating magnetic field cause at stator teeth, slotless configuration is adopted in stator core, thereby reduces rotor temperature rise and stator iron loss.
The utility model is in order to reduce the winding eddy current loss that produces owing to the permanent magnet rotation, to be sticked on the inwall of stator core by the winding coil that the coiling of multiply litz lead forms, the winding coil of the two poles of the earth three-phase is connected in parallel and sticks on the demand that also can satisfy low-voltage on the stator inner wall.
Under superfast situation, traditional mechanical bearing is big owing to the mechanical friction noise, and loss is big, serious wear, and the life-span is short.In order to address this problem, establish two magnetic suspension bearings on the utility model axle.
The inboard of winding coil is rotor jacket, for magneto, can the challenge of rotor maximum be overcome the intensity that centrifugal force guarantees permanent magnet under the ultrahigh speed situation, in order to address the above problem, the permanent magnet that the utility model adopts is solid construction, puts into rotor jacket.Simultaneously that sheath is coaxial by being welded and fused.
Principle of the present utility model is: permanent magnetic circuit is: magnetic flux is got back to the permanent magnet S utmost point from the permanent magnet N utmost point by rotor jacket, air gap, winding coil, stator core, winding coil, air gap, rotor jacket, shown in Fig. 2 solid line.
The principle that the utility model produces torque is: permanent magnet provides magnetizing flux for motor, magnetizing flux exist all the time and direction constant, but the variation along with rotor-position, its path of magnetizing flux conversion, make the magnetic linkage in the stator winding change, thereby in the concentrated winding of motor, produce back-emf, by control the stator winding break-make according to rotor-position in good time, thereby produce the torque of constant direction, drive motors rotates at a high speed.
The used casing 1 of the utility model scheme is to make with non-magnet material aluminium; Axle is made with the good material of mechanical strength, as materials such as high strength alloy steel, 1Cr18Ni9Ti etc.; The material of permanent magnet is the good neodymium-iron of magnetic property-boron permanent magnet, and permanent magnet 2 is solid construction, radially magnetizes; The material of rotor jacket is conduction, non-magnetic high-strength alloy material, as 1Cr18Ni9Ti etc.
Claims (6)
1. the molecular pump high-speed permanent magnet motor comprises stationary part and the rotor portion that is positioned at the stationary part inboard, it is characterized in that:
Described stationary part comprises casing (1), stator core (3), winding coil (5), radial direction magnetic bearing stator (7), axial magnetic bearing stator (9);
Described stator core (3) is fixed on described casing (1) inboard, pastes described winding coil (5) on the inwall of described stator core (3);
Described radial direction magnetic bearing stator (7) is for being fixed on two of described casing (1) inboard and laying respectively at described stator core (3) and the both sides of winding coil (5);
Described axial magnetic bearing stator (9) maintains end play for being fixed on inboard adjacent two of described casing (1) between these two axial magnetic bearing stators (9);
Described rotor portion comprises permanent magnet (2), rotor jacket (4), radial direction magnetic bearing rotor pack (6), axial magnetic bearing thrust collar (8), axle (10);
Described rotor jacket (4) is fixed on the described axle (10), and described permanent magnet (2) is positioned at the centre of sheath (4);
Described radial direction magnetic bearing rotor pack (6) is the both sides that are fixed on two groups on the described axle (10) and lay respectively at described rotor jacket (4), and these two groups of radial direction magnetic bearing rotor packs (6) are radially corresponding one by one with described two radial direction magnetic bearing stators (7) respectively;
Described axial magnetic bearing thrust collar (8) is fixed on described axle (10) upward and is positioned at described end play and overlaps axial with described two axial magnetic bearing stators (9);
Between described winding coil (5) and the rotor jacket (4), all leave radial clearance between described radial direction magnetic bearing stator (7) and the radial direction magnetic bearing rotor pack (6), form air-gap (11).
2. molecular pump high-speed permanent magnet motor according to claim 1 is characterized in that: described sheath (4) is welded and fused with axle (10).
3. molecular pump high-speed permanent magnet motor according to claim 1 is characterized in that: described stator core (3) is solid construction, and its inwall is periphery.
4. molecular pump high-speed permanent magnet motor according to claim 1 is characterized in that: described rotor jacket (4) is made by conduction, non-magnetic high-strength alloy material.
5. molecular pump high-speed permanent magnet motor according to claim 1 is characterized in that: it is that the square litz lead coiling of pounding forms more that described winding coil (5) adopts the cross section, and sticks on by being connected in parallel on the inwall of described stator core (3).
6. molecular pump high-speed permanent magnet motor according to claim 1, it is characterized in that: described radial direction magnetic bearing (7) and axial magnetic bearing (9) all adopt magnetic suspension bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320296395 CN203233291U (en) | 2013-05-27 | 2013-05-27 | High-speed permanent magnet motor for molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320296395 CN203233291U (en) | 2013-05-27 | 2013-05-27 | High-speed permanent magnet motor for molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203233291U true CN203233291U (en) | 2013-10-09 |
Family
ID=49289394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320296395 Withdrawn - After Issue CN203233291U (en) | 2013-05-27 | 2013-05-27 | High-speed permanent magnet motor for molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203233291U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103269142A (en) * | 2013-05-27 | 2013-08-28 | 浙江建达电器有限公司 | High-speed permanent magnet motor for molecular pump |
| CN103633804A (en) * | 2013-12-10 | 2014-03-12 | 天津市陆航电机技术有限公司 | High-specific-gravity permanent magnet brushless direct-current gyro motor |
| CN110691912A (en) * | 2017-05-19 | 2020-01-14 | 埃地沃兹日本有限公司 | Vacuum pump, magnetic bearing device used in vacuum pump, and annular electromagnet |
-
2013
- 2013-05-27 CN CN 201320296395 patent/CN203233291U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103269142A (en) * | 2013-05-27 | 2013-08-28 | 浙江建达电器有限公司 | High-speed permanent magnet motor for molecular pump |
| CN103269142B (en) * | 2013-05-27 | 2015-08-05 | 浙江建达电器有限公司 | Molecular pump high-speed permanent magnet motor |
| CN103633804A (en) * | 2013-12-10 | 2014-03-12 | 天津市陆航电机技术有限公司 | High-specific-gravity permanent magnet brushless direct-current gyro motor |
| CN110691912A (en) * | 2017-05-19 | 2020-01-14 | 埃地沃兹日本有限公司 | Vacuum pump, magnetic bearing device used in vacuum pump, and annular electromagnet |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131009 Effective date of abandoning: 20150805 |
|
| RGAV | Abandon patent right to avoid regrant |