CN203218236U - Fixture structure of rotary drying machine - Google Patents
Fixture structure of rotary drying machine Download PDFInfo
- Publication number
- CN203218236U CN203218236U CN 201220748308 CN201220748308U CN203218236U CN 203218236 U CN203218236 U CN 203218236U CN 201220748308 CN201220748308 CN 201220748308 CN 201220748308 U CN201220748308 U CN 201220748308U CN 203218236 U CN203218236 U CN 203218236U
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- spinner
- connector
- jig structure
- tool
- top board
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Abstract
The utility model provides a fixture structure of a rotary drying machine. The fixture structure comprises a fixture substrate with a plurality of connection pieces thereon, each connection piece comprises at least one groove, a plurality of notches are formed on a fixture top plate, the fixture top plate is connected with the connection pieces, the grooves of the adjacent four connection pieces and the corresponding notches form a plurality of housing cavities used for housing wafer carriers and the housing cavities are cooperated with a plurality of para nozzles and annularly arranged on the periphery of the fixture structure of the rotary drying machine, so as to spray gas to the wafer, and simultaneously the para nozzles are cooperated with the connection pieces, so as to solve the problem that the gas flow can not flow through the wafer carriers and furthermore increase the yield of the wafer.
Description
Technical field
The jig structure of the relevant a kind of spinner of the utility model, particularly relevant a kind of jig structure with spinner of a plurality of ccontaining cavitys.
Background technology
In the middle of the wafer manufacturing technology, after wafer carried out Wet-type etching and flushing, crystal column surface still can residually have chemical agent and impurity, if with artificial use air gun wafer is carried out jet drying, its speed is too slow, and cost is high again, the easier wafer fragmentation that causes because stress is excessive.Therefore can change the mode of utilizing Rotary drying, drop to the impurity of crystal column surface and the amount of chemical substance minimum.Therefore, spinner is the common equipment in the semiconductor factory building.
Spinner is to be spin-dried for wafer in rotary manner, the center of circle of wafer can can't screw out washmarking, at this moment, spinner can carry out jet again to opening by nozzle, again owing to the present employed wafer carrier of spinner, it is configured to Yu Ding and each the tool one opening end of in, then respectively has bracing frame in dual side-edge, therefore when spinner during by rotor storing wafer carrier, carry out jetly again to opening with air nozzle, can solve the problem of center of circle washmarking.
Yet, normally only can be spin-dried for single wafer carrier according to present spinner, thereby production capacity is restricted, if put in the middle of the tool but want to change with a plurality of wafer carriers, wafer carrier can't be arranged at the axle center of tool totally, only can be placed in the peripheral place of tool, yet wafer carrier is positioned at rotor periphery when being spin-dried for, the gas that air nozzle sprays must be stopped by the bracing frame of wafer carrier.Learn that thus the spinner relevant for using a plurality of ccontaining cavitys has many problems to wait to overcome.
In view of this, the design people carries out research and discussion at the problem of above-mentioned generation, by macromethod, develops a kind of jig structure of spinner finally, will be improved above-described disappearance in the lump.
Summary of the invention
Main purpose of the present utility model, be to provide a kind of jig structure of spinner, it utilizes connector, groove fluting corresponding with it, constitute a plurality of ccontaining cavitys, a plurality of contraposition nozzles of arranging in pairs or groups again, and be located on around the jig structure of spinner, carry out to wafer jet, and then the output made of the wafer that is increased.
Another purpose of the present utility model is to provide a kind of jig structure of spinner, can be provided with a plurality of loss of weight holes on connector, but with the weight of the jig structure of loss of weight spinner, to lower the spinner power dissipation.
A purpose more of the present utility model, be to provide a kind of jig structure of spinner, in the middle position near tool substrate and tool top board, adopt and share connector, to constitute ccontaining cavity, therefore according to sharing connector, the utility model only need use 12 connectors, namely can form four ccontaining cavitys, can save the cost of manufacture of connector thus.
Another purpose of the present utility model, be to provide a kind of jig structure of spinner, its according to the connector of sheet material shape with the reflexed air-flow, make the contraposition nozzle to the jet while of wafer also via connector reflexed air-flow, upper shed or under shed to enter wafer carrier are shortened washmarking and are spin-dried for required time.
In order to achieve the above object, the utility model provides a kind of jig structure of spinner, include the tool substrate in being provided with a plurality of connectors, and each connector has at least one groove, the tool top board is in being provided with a plurality of flutings, and the tool top board connects connector, and by the groove of adjacent four connectors fluting corresponding with it, constitute a plurality of ccontaining cavitys, the containing cavity body and function is to put wafer carrier.
A kind of jig structure of spinner, in order to put a plurality of wafer carriers, this wafer carrier respectively has an opening in the top and in the bottom, and each this wafer carrier can be in order to put a plurality of wafers, the jig structure of this spinner comprises: a tool substrate, which is provided with a plurality of connectors, and each this connector has at least one groove; And a tool top board, which is provided with a plurality of flutings, this tool top board connects described connector, and by this groove of adjacent four these connectors is corresponding with it should fluting, constitute a plurality of ccontaining cavitys, this containing cavity body and function is to put this wafer carrier.
More comprise: a plurality of contraposition nozzles are located on around the jig structure of this spinner, to carry out jet to described wafer.
Described contraposition nozzle provides gas by a compression drying air assembly.
This connector is provided with a plurality of loss of weight holes.
Each this connector has this groove, and should slot by per four these connectors are corresponding with it, constitutes this ccontaining cavity, forms four these ccontaining cavitys thus.
Four these connectors of the middle position of close this tool substrate and this tool top board all have two these grooves, share connector to constitute four, and should share connector by per two these connector collocation two, and be somebody's turn to do fluting corresponding with it, constitute this ccontaining cavity, form four these ccontaining cavitys thus.
More comprise: a plurality of stop parts, each this stop part connect the upper surface of this tool substrate and the lower surface of this tool top board, and corresponding each this wafer carrier of each this stop part, with this wafer that deducts.
This tool top board is provided with a plurality of grooves, and this groove of the corresponding engaging of each this stop part.
This tool substrate and this tool top board are provided with a plurality of perforation, to connect described connector.
The two ends of each this connector respectively are provided with a projection, and this projection engages this perforation.
More comprise: a plurality of fasteners, pass through this perforation, with affixed this tool substrate, this tool top board and each this connector.
This tool substrate, this tool top board, this connector, this stop part and this fastener are metal material.
This fastener is screw, rivet or blind rivet.
This tool substrate and this tool top board be shaped as circle.
This connector is sheet material.
The useful technique effect that the utility model reaches is, promotes to be spin-dried for the effect output that wafer makes that is increased thus.
Beneath by the appended graphic explanation in detail of specific embodiment cooperation, when the effect that is easier to understand the purpose of this utility model, technology contents, characteristics and reaches.
Description of drawings
Fig. 1 is the stereogram of the jig structure of spinner of the present utility model.
Fig. 2 is the jig structure exploded view of the spinner of first embodiment of the present utility model.
Fig. 3 is the jig structure exploded view of the spinner of second embodiment of the present utility model.
Fig. 4 is the jig structure front view of spinner of the present utility model.
Fig. 5 is the jig structure exploded view of the spinner of the 3rd embodiment of the present utility model.
Fig. 6 is the connector structure chart of the newly-increased loss of weight hole of the utility model.
Fig. 7 is spinner stereogram of the present utility model.
Fig. 8 a is the illustrative view of the miter angle of spinner of the present utility model.
Fig. 8 b is another illustrative view of the miter angle of spinner of the present utility model.
Fig. 9 is the illustrative view of an angle of 90 degrees of spinner of the present utility model.
Figure 10 is the illustrative view at 135 degree angles of spinner of the present utility model.
Figure 11 is the illustrative view at 180 degree angles of spinner of the present utility model.
Description of reference numerals
The jig structure of 10-spinner; The 12-wafer carrier; The 12a-wafer carrier; The 12b-wafer carrier; The 12c-wafer carrier; The 12d-wafer carrier; The 14a-upper shed; The 14b-under shed; The 16-wafer; 18-tool substrate; The 202-connector; 204-shares connector; The 22-groove; 24-tool top board; The 26-fluting; The ccontaining cavity of 28-; The 30-stop part; The 32-groove; The 34-perforation; The 36-fastener; The 38-projection; 40-loss of weight hole; The 42-manufacture process cavity; 44-contraposition nozzle; 46-compression drying air assembly.
Embodiment
The utility model is enumerated an embodiment in this, sees also Fig. 1 and Fig. 2, with the jig structure exploded view of the spinner of the stereogram of jig structure that spinner of the present utility model is described and first embodiment.
As shown in the figure, the utility model discloses a kind of jig structure 10 of spinner, in order to put a plurality of wafer carriers 12, wafer carrier 12 respectively has an opening in the top and in the bottom, respectively be upper shed 14a and under shed 14b, wafer carrier 12 then is bracing frame in dual-side, and each wafer carrier 12 can be in order to put a plurality of wafers 16.
The jig structure 10 of spinner includes tool substrate 18 and which is provided with a plurality of connectors, connector is divided into connector 202 and shared connector 204, and each connector 202 has at least one groove 22, share 204 of connectors and have two grooves 22, tool top board 24 which is provided with a plurality of flutings 26, tool top board 24 connects connector 202 and shares connector 204, and groove 22 flutings 26 corresponding with it by adjacent connector 202 and shared connector 204, constitute a plurality of ccontaining cavitys 28, therefore wafer carrier 12 can slip into ccontaining cavity 28 along groove 22, and ccontaining cavity 28 can be used for putting wafer carrier 12 thus.By on the jig structure 10 of the spinner that discloses, it has a plurality of ccontaining cavitys 28, the production capacity that the wafer 16 that is increased is thus made.
The jig structure 10 of foregoing spinner more includes a plurality of stop parts 30, each stop part 30 connects the upper surface of tool substrate 18 and the lower surface of tool top board 24, and each stop part 30 corresponding each wafer carrier 12, with deduction wafer 16, in addition, tool top board 24 is provided with a plurality of grooves 32, and each stop part 30 can correspondingly engage groove 32, and stop part 30 can be avoided screwing out wafer 16 because of the spinner start.
In addition, the utility model makes specification and graphic clear and definite and fully disclose invention for asking in graphic, thus in Fig. 2 only with two fasteners 36 with illustrative, all the other all omit.
The jig structure 10 of the spinner that the utility model discloses in the middle of first embodiment, technical characterictic at connector 202 and shared connector 204 passes through perforation 34 for utilizing a plurality of fasteners 36, with affixed tool substrate 18, tool top board 24 and each connector 202 and shared connector 204, yet, this technical characterictic partly only is the utility model embodiment wherein, the utility model is not certainly as limit, continue and see also Fig. 3, jig structure exploded view with spinner that second embodiment is described, as shown in the figure, the utility model is in previous described tool substrate 18, connector 202 and shared connector 204, tool top board 24, fluting 26, ccontaining cavity 28, stop part 30, groove 32 and bore a hole 34, its structure and connection relationship are all identical with second embodiment, so repeat no more, only the second embodiment difference is that the two ends of each connector 202 and shared connector 204 respectively are provided with projection 38 with engaging perforation 34, can reach affixed tool substrate 18 equally, the effect of tool top board 24 and each connector 202 and shared connector 204.
The jig structure 10 of foregoing spinner, wherein tool substrate 12, connector 202 and shared connector 204, tool top board 24, stop part 30 and fastener 36 are metal material, and fastener 36 is screw, rivet or blind rivet.
Continue and consult Fig. 4, so that the jig structure front view of spinner of the present utility model to be described, consult and be aided with Fig. 1 and Fig. 2 simultaneously, as shown in the figure, the jig structure 10 of spinner of the present utility model is in the middle of first embodiment or second embodiment in aforementioned, wherein the shared connector 204 of the middle position of close tool substrate 18 and tool top board 24 all has two grooves 22, to constitute four shared connectors 204, and share connector 204 by 202 collocation two of per two connectors again, and fluting 26 corresponding with it, constitute ccontaining cavity 28, according to the number of connecting pieces that discloses in the middle of Fig. 4, only need have 8 connectors 202 and 4 shared connectors 204, namely can form four ccontaining cavitys 28.
The jig structure 10 of the spinner in the middle of described first embodiment of brought forward and second embodiment, reach the technical characterictic of shared connector 204 for utilizing four shared connectors 204 in connector 202, and share connector 204 by 202 collocation two of per two connectors again, and fluting 26 corresponding with it, constitute ccontaining cavity 28, yet this technical characterictic partly also only is the utility model embodiment wherein, the utility model is not certainly as limit, continue and see also Fig. 5, jig structure exploded view with spinner that the 3rd embodiment is described, consult and be aided with Fig. 1 and Fig. 2 simultaneously, as shown in the figure, the jig structure 10 of spinner of the present utility model, in the middle of the 3rd embodiment, in previous described tool substrate 18, connector 202, tool top board 24, fluting 26, ccontaining cavity 28, stop part 30, groove 32, perforation 34 and fastener 36, its structure and connection relationship are all described identical with the 3rd embodiment, only the 3rd embodiment difference is in changing use 16 connectors 202 totally, and each connector 202 all has a groove 22, again by per four connectors, 202 flutings 26 corresponding with it, constitute ccontaining cavity 28, can form four ccontaining cavitys 28 thus equally.
Continue, consult Fig. 6, so that the connector structure chart of newly-increased loss of weight hole of the present utility model to be described, the utility model is in the jig structure 10 of the spinner of previous described first embodiment, second embodiment and the 3rd embodiment, wherein can be on these connectors 202, be chosen in section connecting element 202 and be provided with a plurality of loss of weight holes 40, reduce the weight of the jig structure 10 of spinner thus, and then can lower the power loss that spinner uses.
Consult Fig. 7, so that spinner stereogram of the present utility model to be described, consult and be aided with Fig. 1 simultaneously, as shown in the figure, the jig structure 10 of spinner of the present utility model, wherein tool substrate 18 and tool top board 24 be shaped as circle, carry out circular motion in order to the jig structure 10 of spinner, also can make things convenient for the jig structure 10 of spinner to be seated in manufacture process cavity 42 simultaneously.
In addition, the utility model makes specification and graphic clear and definite and fully exposure invention for asking in graphic, in the middle of Fig. 7, explain to enumerate two manufacture process cavities 42, yet according to technological thought of the present utility model, can be according to the quantity of practical situations demand increase and decrease manufacture process cavity 42, for example be refinement letter cost of manufacture, change with single manufacture process cavity 42 as execution mode, certainly also can be because considering to increase the processing procedure production capacity, change with three manufacture process cavities 42 or above quantity, manufacture process cavity 42 quantitative differences do not influence technical characterictic of the present utility model.
Continue and consult Fig. 8 a, Fig. 8 b, Fig. 9, Figure 10 and Figure 11, with another illustrative view, the illustrative view of an angle of 90 degrees, the illustrative view at 135 degree angles and the illustrative view at 180 degree angles of the miter angle of the illustrative view of miter angle that spinner of the present utility model is described in regular turn, spinner, consult and be aided with Fig. 1 simultaneously.
In this, in the middle of Fig. 8 a, Fig. 8 b, Fig. 9, Figure 10 and Figure 11, the utility model is clearly being put down in writing the jig structure 10 continuous rotating process of working as spinner as can be known, wherein, shown in Fig. 8 a, the jig structure 10 of spinner of the present utility model utilizes continuous rotating process will be spin-dried for residual washmarking on the wafer 16.
Yet, because the bracing frame on the side of wafer carrier 12a, air-flow also can't pass through, air-flow only can be from upper shed 14a and the under shed 14b circulation of wafer carrier 12b, so residual washmarking on the wafer 16 on the wafer carrier 12a, so need the long period to carry out drying, the utility model can adopt a plurality of contraposition nozzles 44 in this, and be located on around the jig structure 10 of spinner, to carry out jet to wafer 16, and a plurality of contraposition nozzle 44 collocation connectors 202 will be solved air-flow can't be by the problem of bracing frame, therefore, shown in Fig. 8 b, the angle of contraposition nozzle 44 contrapositions is except carrying out jet toward tool substrate 18 and tool top board 24 centers, also jet toward the position of connector 202 simultaneously, and connector 202 of the present utility model is to design with sheet material, so, when contraposition nozzle 44 carries out when jet to connector 202, air-flow will be from connector 202 reflexeds of sheet material shape, enter upper shed 14a or the under shed 14b of wafer carrier 12a and wafer carrier 12c, the last contained wafer 16 of wafer carrier 12a and wafer carrier 12c can shorten washmarking and be spin-dried for required time.
Continue, as shown in Figure 9, when the jig structure 10 of spinner rotated to an angle of 90 degrees, the upper shed 14a of wafer carrier 12a, 12b, 12c, 12d was simultaneously towards contraposition nozzle 44 at this moment, and therefore, air-flow can pass through wafer carrier 12a, 12b, 12c, 12d in the lump; As shown in figure 10, when jig structure 10 rotation of spinner to 135 degree angles, contraposition this moment nozzle 44 can make air-flow pass through upper shed 14a and the under shed 14b of wafer carrier 12a, 12c, 12d via connector 202 reflexed air-flows; At last as shown in figure 11, when the jig structure 10 of spinner rotated to an angle of 90 degrees, the under shed 14b of wafer carrier 12a, 12b, 12c, 12d was simultaneously towards contraposition nozzle 44 at this moment, and therefore, air-flow can pass through wafer carrier 12a, 12b, 12c, 12d in the lump.Wherein foregoing contraposition nozzle 44 provides gas by compression drying air assembly 46.
In sum, the utility model discloses a kind of jig structure of spinner in this, and it utilizes connector, groove fluting corresponding with it, constitutes a plurality of ccontaining cavitys, a plurality of contraposition nozzles of arranging in pairs or groups again simultaneously are spin-dried for the effect output that wafer makes that is increased thus with lifting.
More than be illustrative to description of the present utility model; and it is nonrestrictive; those skilled in the art is understood, and can carry out many modifications, variation or equivalence to it in spirit that claim limits and scope, but they will fall in the protection range of the present utility model all.
Claims (15)
1. the jig structure of a spinner, in order to put a plurality of wafer carriers, this wafer carrier respectively has an opening in the top and in the bottom, and each this wafer carrier can is characterized in that in order to put a plurality of wafers the jig structure of this spinner comprises:
One tool substrate which is provided with a plurality of connectors, and each this connector has at least one groove; And
One tool top board which is provided with a plurality of flutings, and this tool top board connects described connector, and should slot by this groove of adjacent four these connectors is corresponding with it, constitutes a plurality of ccontaining cavitys, and this containing cavity body and function is to put this wafer carrier.
2. the jig structure of spinner as claimed in claim 1 is characterized in that, more comprises:
A plurality of contraposition nozzles are located on around the jig structure of this spinner, to carry out jet to described wafer.
3. the jig structure of spinner as claimed in claim 2 is characterized in that, described contraposition nozzle provides gas by a compression drying air assembly.
4. the jig structure of spinner as claimed in claim 1 is characterized in that, this connector is provided with a plurality of loss of weight holes.
5. the jig structure of spinner as claimed in claim 1 is characterized in that, each this connector has this groove, and should slot by per four these connectors are corresponding with it, constitutes this ccontaining cavity, forms four these ccontaining cavitys thus.
6. the jig structure of spinner as claimed in claim 1, it is characterized in that, four these connectors of the middle position of close this tool substrate and this tool top board all have two these grooves, share connector to constitute four, and should share connector by per two these connector collocation two, and should slot corresponding with it, constitute this ccontaining cavity, form four these ccontaining cavitys thus.
7. the jig structure of spinner as claimed in claim 1 is characterized in that, more comprises:
A plurality of stop parts, each this stop part connect the upper surface of this tool substrate and the lower surface of this tool top board, and corresponding each this wafer carrier of each this stop part, with this wafer that deducts.
8. the jig structure of spinner as claimed in claim 7 is characterized in that, this tool top board is provided with a plurality of grooves, and this groove of the corresponding engaging of each this stop part.
9. the jig structure of spinner as claimed in claim 7 is characterized in that, this tool substrate and this tool top board are provided with a plurality of perforation, to connect described connector.
10. the jig structure of spinner as claimed in claim 9 is characterized in that, the two ends of each this connector respectively are provided with a projection, and this projection engages this perforation.
11. the jig structure of spinner as claimed in claim 9 is characterized in that, more comprises:
A plurality of fasteners pass through this perforation, with affixed this tool substrate, this tool top board and each this connector.
12. the jig structure of spinner as claimed in claim 11 is characterized in that, this tool substrate, this tool top board, this connector, this stop part and this fastener are metal material.
13. the jig structure of spinner as claimed in claim 11 is characterized in that, this fastener is screw, rivet or blind rivet.
14. the jig structure of spinner as claimed in claim 1 is characterized in that, this tool substrate and this tool top board be shaped as circle.
15. the jig structure of spinner as claimed in claim 1 is characterized in that, this connector is sheet material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220748308 CN203218236U (en) | 2012-12-28 | 2012-12-28 | Fixture structure of rotary drying machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220748308 CN203218236U (en) | 2012-12-28 | 2012-12-28 | Fixture structure of rotary drying machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203218236U true CN203218236U (en) | 2013-09-25 |
Family
ID=49207749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220748308 Expired - Fee Related CN203218236U (en) | 2012-12-28 | 2012-12-28 | Fixture structure of rotary drying machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203218236U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389814A (en) * | 2018-03-02 | 2018-08-10 | 爱佩克斯（北京）科技有限公司 | A kind of jig of the spinner with guide bracket |
| CN109087880A (en) * | 2018-09-14 | 2018-12-25 | 吉林华微电子股份有限公司 | A kind of spin-drying device and drying method |
-
2012
- 2012-12-28 CN CN 201220748308 patent/CN203218236U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389814A (en) * | 2018-03-02 | 2018-08-10 | 爱佩克斯（北京）科技有限公司 | A kind of jig of the spinner with guide bracket |
| CN108389814B (en) * | 2018-03-02 | 2020-06-12 | 爱佩克斯（北京）科技有限公司 | Spin-drying machine is with tool that has guide frame |
| CN109087880A (en) * | 2018-09-14 | 2018-12-25 | 吉林华微电子股份有限公司 | A kind of spin-drying device and drying method |
| CN109087880B (en) * | 2018-09-14 | 2021-04-06 | 吉林华微电子股份有限公司 | Spin-drying device and spin-drying method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130925 Termination date: 20141228 |
|
| EXPY | Termination of patent right or utility model |