CN203193117U - A laser coherence length continuously-adjusting device - Google Patents
A laser coherence length continuously-adjusting device Download PDFInfo
- Publication number
- CN203193117U CN203193117U CN 201220706267 CN201220706267U CN203193117U CN 203193117 U CN203193117 U CN 203193117U CN 201220706267 CN201220706267 CN 201220706267 CN 201220706267 U CN201220706267 U CN 201220706267U CN 203193117 U CN203193117 U CN 203193117U
- Authority
- CN
- China
- Prior art keywords
- laser
- grating
- prism
- laser beam
- beam expanding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 48
- 238000013519 translation Methods 0.000 claims description 44
- 230000001105 regulatory effect Effects 0.000 claims description 37
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000008859 change Effects 0.000 claims description 12
- 239000006185 dispersion Substances 0.000 claims description 11
- 241000931526 Acer campestre Species 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 24
- 238000005086 pumping Methods 0.000 description 13
- 230000003667 anti-reflective effect Effects 0.000 description 6
- 238000009738 saturating Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Landscapes
- Lasers (AREA)
Abstract
The utility model relates to a laser coherence length continuously-adjusting device. The laser coherence length continuously-adjusting device comprises a laser resonant cavity. Suffering from multiple reciprocating oscillations in the laser resonant cavity, a laser is outputted. The device comprises a laser beam expanding/shrinking apparatus and a grating. Before outputted, the laser passes the laser beam expanding/shrinking apparatus and the grating. The laser beam expanding/shrinking apparatus expands or shrinks the laser and enables the laser passing the laser beam expanding/shrinking apparatus to be radiated on the grating. The expanding/shrinking magnification of the laser beam expanding/shrinking apparatus is continuously adjustable. The grating is used for selecting the wavelength of the laser by using the diffraction characteristic of the grating. The position and the angel of the grating are also continuously adjustable in order that an incidence surface and an incidence angle of the laser on the grating are guaranteed not to be changed. The laser coherence length continuously-adjusting device has advantages of compact structure, stable performance, and simpleness and practicality, and can be well used in application fields of interference measurement or the like.
Description
Technical field
The utility model belongs to laser technology field, and being specifically related to is a kind of laser coherence length continuous regulating mechanism.
Background technology
Coherence length is to weigh the physical quantity of light source coherence property, is defined as light source light and can realizes the maximum optical path difference that is concerned with.Laser is widely used in the various optical measuring techniques with its good coherence, as fields such as coherent optical-fiber communication, laser ranging, laser radars, but to some Technologies of Precision Measurement, as application such as high speed, ultrahigh resolution imaging, accurate detections, high-coherence light source can produce various optical noises because of the reflection of multilist face or transmission on the contrary, reduces certainty of measurement.For example, when utilizing it to detect the transparent parallel flat face shape of two polishings, three surperficial interference will occur, cause measure error bigger.Therefore the low-coherence light source that has good beam characteristics becomes the best light source of these measuring systems.
Low-coherent light can be by adding the bandpass filter of specific bandwidth at the super-radiance light emitting diode output, thereby the white light source that obtains quasi-monochromatic light realizes that but their brightness remains further to be improved.Though femto-second laser can produce the pulse laser of high brightness, short-phase dry length, its build is huge, and expensive.
On the other hand, in order to measure the micro-object surface topography of different size, then need to have the higher source luminance of different coherence lengths.
In relevant and incoherent measurement is used, require the coherence length of light source laser is effectively regulated and control.Though can change the coherence length of exporting laser to a certain extent by regulating laser cavity chamber length, because the long adjustable range in chamber is limited, so the adjustable range of coherence length is also very little.
In the prior art, grating and prism combination once were used to compress laser linewidth, for example application number is to have mentioned a kind of line width compression device that contains beam shaping and wavelength rotation tuning in 200910052119.2 the Chinese utility model patent, with last prism the angle that light beam incides on the grating is changed by regulating first, thereby grating is selected different diffraction wavelength output, but this device target is to regulate optical maser wavelength, and laser linewidth and coherence length after the compression are changeless.
The utility model content
(1) technical problem that will solve
Technical problem to be solved in the utility model is to propose a kind of laser coherence length continuous regulating mechanism, to overcome little, the stable shortcoming inadequately of existing coherence length adjusting device adjustable range.
(2) technical scheme
For solving the problems of the technologies described above, the present invention proposes a kind of laser coherence length continuous regulating mechanism, comprise laserresonator, laser repeatedly comes and goes the output of vibration back in this laserresonator, it is characterized in that, this device also comprises laser beam expanding/contracting bundle device and grating, and laser passed through this laser beam expanding/contracting bundle device and grating before output, wherein:
Described laser beam expanding/contracting bundle device expands laser or the bundle that contracts, and the laser by this laser beam expanding/contracting bundle device is incided on the described grating, this laser beam expanding/contracting bundle device expand/contract the bundle multiple be continuously adjustable;
Described grating is used for utilizing its diffraction characteristic to carry out optical maser wavelength selecting, and its position and angle also be continuously adjustable, to guarantee that laser is at the invariable incident angle of the plane of incidence of grating.
According to a kind of preferred implementation of the present utility model, effective chromatic dispersion of described laser beam expanding/contracting bundle device is zero.
According to a kind of preferred implementation of the present utility model, the prism group that described laser beam expanding/contracting bundle device is made up of three prisms, prism modes of emplacement in the prism group is " on-on-down " or " down-down-on ", wherein, " on " expression prism drift angle up, the drift angle that D score is represented prism down, described drift angle refers to minimum angle in three angles of prism.
According to a kind of preferred implementation of the present utility model, the prism of forming described prism group is right angle prism.
According to a kind of preferred implementation of the present utility model, each prism in the described prism group all is installed on the prism rotational translation platform, this prism rotational translation platform can rotate and translation in being parallel to the plane of laser optical path, by rotating prism rotational translation platform, can change expanding/contract and restrainting multiple of laser beam;
Described grating is installed on the grating rotational translation platform, this grating rotational translation platform can rotate or translation in being parallel to the plane of laser optical path, by rotating and translation grating rotational translation platform, can correspondingly adjust the laser incident angle of grating, incide on this grating with identical incidence angle all the time through prism group emitting laser bundle with assurance.
According to a kind of preferred implementation of the present utility model, described laser beam expanding/contracting bundle device and grating are arranged in the described laserresonator.
According to a kind of preferred implementation of the present utility model, described laser beam expanding/contracting bundle device and grating are arranged at outside the described laserresonator, export after by described laser beam expanding/contracting bundle device and grating from the laserresonator emitting laser.
According to a kind of preferred implementation of the present utility model, described grating is the balzed grating, that Littrow auto-collimation structure is placed, or the balzed grating, of Li Teman Metcalfe glancing incidence structure placement.
According to a kind of preferred implementation of the present utility model, described grating is the balzed grating, that its angle that departs from Littrow auto-collimation structure is not more than 10 degree.
(3) beneficial effect
The device that the utility model adopts the prism group to be combined with grating, change expanding/contract and restrainting multiple of laser by the angle of rotating each prism, and corresponding adjustment stop position and angle thereof, regulate laser coherence length thus continuously, therefore the utlity model has compact conformation, stable performance, simple and practical characteristics, can be advantageously applied to applications such as interferometry.
Description of drawings
Fig. 1 is the structural representation of first embodiment of laser coherence length continuous regulating mechanism of the present utility model;
Fig. 2 is the structural representation of second embodiment of laser coherence length continuous regulating mechanism of the present utility model;
Fig. 3 is the structural representation of the 3rd embodiment of laser coherence length continuous regulating mechanism of the present utility model;
Fig. 4 is the structural representation of the 4th embodiment of laser coherence length continuous regulating mechanism of the present utility model.
Embodiment
Device of the present utility model provides a laserresonator, and pumping laser is incided in this laserresonator, and laser repeatedly comes and goes the output of vibration back in this laserresonator.
According to a kind of execution mode of the present utility model, laser beam expanding/contracting bundle device and grating is set in described laserresonator, laser by laser beam expanding/contracting bundle device is incided on the grating, wherein, this laser beam expanding/contracting bundle device to expand/contract the bundle multiple be continuously adjustable, and the position of grating and angle also are continuously adjustable; Multiple is restrainted in expanding/contracting of continuous adjusting this laser beam expanding/contracting bundle device, and position and the angle of correspondingly regulating grating simultaneously are to guarantee that laser is in the invariable incident angle of the plane of incidence of grating, the coherence length of regulating described output laser thus.
According to another kind of execution mode of the present utility model, laser beam expanding/contracting bundle device and grating is set outside described laserresonator, make from the laserresonator emitting laser and export after by described laser beam expanding/contracting bundle device and grating, wherein, this laser beam expanding/contracting bundle device to expand/contract the bundle multiple be continuously adjustable, and the position of grating and angle also are continuously adjustable; Multiple is restrainted in expanding/contracting of continuous adjusting this laser beam expanding/contracting bundle device, and position and the angle of correspondingly regulating grating simultaneously are to guarantee that laser is in the invariable incident angle of the plane of incidence of grating, the coherence length of regulating described output laser thus.
Furthermore, according to preferred implementation of the present utility model, the prism group that described laser beam expanding/contracting bundle device is made up of three prisms.And each prism in the described prism group all is installed on the prism rotational translation platform, and this prism rotational translation platform can rotate and translation in being parallel to the plane of laser optical path.By rotating prism rotational translation platform, can change expanding/contract and restrainting multiple of laser beam.Simultaneously, described grating is installed on the grating rotational translation platform, and same, this grating rotational translation platform both can rotate in being parallel to the plane of laser optical path, also can translation in being parallel to the plane of laser optical path.By rotating and translation grating rotational translation platform, can correspondingly adjust the laser incident angle of grating, guarantee to incide on the grating with identical incidence angle all the time through prism group emitting laser bundle.
Below principle of the present utility model is described.Utilize own characteristic and the analysis of basic optical principle knowledge of optical element, laser beam expanding/contracting bundle device is mainly used in laser is expanded or the bundle that contracts, and simultaneously the angle of divergence of the laser by this laser beam expanding/contracting bundle device is regulated continuously.Grating utilizes its diffraction characteristic can realize effective wavelength selection as typical diffraction optical element.After the output light path of laser added prism group and grating, the general expression formula of laser coherence length was:
Wherein, l
cBe coherence length, Δ θ is the angle of divergence of laser beam, M be laser beam expanding/contracting bundle device to laser expand/contract the bundle multiple,
Be the chromatic dispersion of grating,
Chromatic dispersion for laser beam expanding/contracting bundle device.
By formula (1) as can be known, if can make
Be 0 and
Be constant, and make output Wavelength of Laser λ and angle of divergence Δ θ constant that then laser coherence length and laser beam expanding/contracting bundle device expands/contract and restraint multiple and be directly proportional.So, just can regulate the coherence length of exporting laser continuously by the bundle multiple that expands/contract of continuous adjusting laser beam expanding/contracting bundle device.
According to a kind of preferred implementation of the present utility model, the prism group that laser beam expanding/contracting bundle device is made up of three prisms, and the prism modes of emplacement in the prism group is " on-on-down " or " down-down-on ", wherein, " on " drift angle of expression prism up, the drift angle that D score is represented prism down, described drift angle refers to the minimum angle in three angles of prism, for right-angle prism, refer to short in two right-angle sides with a prism angle that the limit is relative.According to F.J.Duarte, people such as J.A.Piper are at document " Dispersion theory of multiple-prism beam expanders for pulsed dye lasers " (Optics Communication, 1982) theory that proposes in is derived as can be known, by three prisms being placed as " on-on-down " or " down-down-on " structure, then effective chromatic dispersion of the prism group of these three prisms compositions can be close to zero, that is:
Thus, when the angle of each prism of this prism group of continuous rotation, just can change this prism group to the total expanding/bundle multiple M that contracts of laser (M for each prism to expand/contract the bundle multiple long-pending), the effective chromatic dispersion that guarantees the prism group simultaneously is zero.
In this laser beam expanding/contracting bundle device, the prism number in the prism group is more many, and then the M excursion is more big, thereby the adjustable range of coherence length is more wide.Therefore can choose the prism number according to the actual requirements.Be to eliminate chromatic dispersion, the polygon prism modes of emplacement should be " on-on ... on-down " or " down-down ... down-on " structure.
Owing to the space availability ratio height of right-angle prism, be convenient to adjust advantage such as angle, the prism in the prism group is preferably right-angle prism.
According to another preferred implementation of the present utility model, described grating is balzed grating.So-called balzed grating, refers to a kind of plane reflection grating.It is to carve the equidistant zigzag groove face of series of parallel and make at the metallic plate of polishing or the glass slab that plates metal film by splitting shape diamond cutter head, and wherein the angle between groove face and the grating integral planar is called blaze angle.
More preferably, grating is the grating (namely on the basis of balzed grating,, make its first-order diffraction angle β for incident light equal its incidence angle α, return along the former road of incident direction to guarantee diffracted ray) that Littrow (Littrow) auto-collimation structure is placed, at this moment, the grating dispersion item can be reduced to:
Wherein, α is incidence angle, and β is the angle of emergence.
According to another preferred implementation of the present utility model, described grating is the balzed grating, that Li Teman Metcalfe (Littman-Metcalf) glancing incidence structure is placed, this moment, this grating can satisfy the big chromatic dispersion of acquisition and lower material surface reflectivity simultaneously, and the grating dispersion item can be reduced to:
For above-mentioned execution mode,, can guarantee the expanding/contract when restrainting the multiple change of laser beam expanding/contracting bundle device that laser is for the invariable incident angle (angle of emergence is corresponding also constant) of grating by regulating the rotational translation device of grating, namely in formula (3), (4)
Be constant, so formula (1) can be reduced to:
Wherein,
C ' is constant.
Like this, by the size that expands/contract bundle multiple M of continuous adjusting laser beam expanding/contracting bundle device, and guarantee the invariable incident angle of grating, just can reach and continuously change coherence length l
cPurpose.
The utility model can be applicable to various lasers, for example semiconductor laser and solid state laser, and the optical maser wavelength of pumping laser can be 808nm, 976nm, 915nm etc., pump mode can be end pump or side pump.
In addition, laserresonator of the present utility model can be realized by multiple structure, can comprise various optical element according to the difference of its structure.Usually, include gain medium in the laserresonator, as solid laser crystal or doped fiber, comprise Nd:YVO
4, Nd:YAG, Nd:YLF, Yb:YAG, Tm:YAG, Er:YAG, mix Yb optical fiber, mix Er optical fiber, mix Tm optical fiber etc.Except gain medium, in device of the present utility model, also can comprise resonance and other optical elements of output, for example optical mirror slip of specific plated film and frequency-doubling crystal etc. in order to realize laser.
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
First embodiment
Fig. 1 is the structural representation of first embodiment of laser coherence length continuous regulating mechanism of the present utility model.As shown in Figure 1, this device is with the laser pumping source 000 of 808nm semiconductor laser as the device of this embodiment.
The device of this embodiment comprises laserresonator, comprises first optical mirror slip 101, gain medium 200, first, second, third right angle prism 301,302,303 prism group and the balzed grating,s of forming 400 of cascade successively in the laserresonator.
First optical mirror slip 101 adopts the flat mirror near the laser part reflection 1064nm, as laser output.
First, second, third right angle prism 301,302,303 modes of emplacements are " on-on-down " structure, form a prism group, as laser beam expanding/contracting bundle device.Three prisms are arranged at respectively on the independent rotation translation stage 501,502,503, by computer control 501,502,503, rotate successively and translation right angle prism 301,302,303 angle and position, continuously change the prism group laser expanded/contract the purpose of restrainting multiple to reach.
Near near antireflective film high-reflecting film and the 1064nm hypotenuse face plating 808nm of described first right angle prism 301, near the antireflective film right-angle side face plating 1064nm.Described second, third right angle prism 302,303 logical light face (hypotenuse face and a right-angle side face) all plate near the antireflective film 1064nm.
The blaze wavelength of balzed grating, 400 is near 1064nm, and it is installed on the rotational translation control desk 504.Utilize computer control rotational translation platform 504, by rotating the placement angle of regulating grating 400, guarantee that its first-order diffraction angle β to incident beam equals its incidence angle α, namely adopts Littrow (Littrow) arrangement works; By the placement location of translational adjustment grating 400, make grating cutting face can receive whole light beam.
When work, laser pumping source 000 adopts the end pump mode, incides on first right angle prism 301, and the end from gain medium 200 after these first right angle prism, 301 reflections incides the gain medium 200.In having determined the prism group each prism 301,302,303 and the angle of grating 400 after, obtain near the laser of the certain live width of wavelength 1064nm from the other end outgoing of gain medium 200, and incide on described first optical mirror slip 101.Near the laser-transmitting rate of 1064nm that 101 pairs of first optical mirror slips incide on it is 2%.
End relative with gain medium 200 at first optical mirror slip 101 also has frequency-doubling crystal 201 and second optical mirror slip 102.Outwards export by this frequency-doubling crystal 201 and second optical mirror slip, 102 backs successively from first optical mirror slip, 101 emitting lasers.Frequency-doubling crystal 201 adopts ktp crystal, is used for laser is carried out frequency multiplication; Second optical mirror slip 102 adopt near the laser 1064nm be all-trans, near the high saturating flat mirror of the laser 532nm, with near the laser reflection 1064nm, near the laser the 532nm of output frequency multiplication.
Thus, by regulating expanding/contract and restrainting multiple of laser beam expanding/contracting bundle device in the laserresonator, just can regulate near the coherence length of the laser 1064nm of first optical mirror slip 101 output, so can be after obtaining frequency multiplication behind second optical mirror slip 102 near the laser output variable 532nm of coherence length.
Second embodiment
Fig. 2 is the structural representation of second embodiment of laser coherence length continuous regulating mechanism of the present utility model.As shown in Figure 2, this device also with the 808nm semiconductor laser equally as the laser pumping source 000 of the device of this second embodiment.
The device of this embodiment comprises laserresonator, comprises the 3rd optical mirror slip 103, gain medium 200, frequency-doubling crystal 201 and the 4th optical mirror slip 104 of cascade successively in the laserresonator.
The 3rd optical mirror slip 103 is as the incident end of pumping laser, simultaneously as the speculum of laserresonator, adopt near the laser 808nm high saturating, near near the high anti-flat mirror of the laser 1064nm and the 532nm.
Frequency-doubling crystal 201 adopts ktp crystal, is used for laser is carried out frequency multiplication.
The 4th optical mirror slip 104 adopt near the laser 1064nm be all-trans, near the high saturating flat mirror of the laser 532nm, as the output of laserresonator.
In the outside of described laserresonator successively cascade first, second, third right angle prism 301,302,303 and 400, three right angle prisms of grating form a prism group, incided on the grating 400 after by the prism group by the laser of laserresonator output.
First, second, third right angle prism 301,302,303 modes of emplacements are " on-on-down " structure, as laser beam expanding/contracting bundle device; Described three right angle prisms 301,302,303 logical light face (hypotenuse face and a right-angle side face) all are coated with near the antireflective film 532nm.Three prisms are arranged at respectively on the independent rotation translation control desk 501,502,503, by computer control translation control desk 501,502,503, rotate successively and translational adjustment first, second, third right angle prism 301,302,303 placement angle and position, with reach continuously change laser expand/contract the purpose of restrainting multiple.
Grating 400 is balzed grating,, and its blaze wavelength is used for realizing near the selection of the frequency doubled light effective wavelength of 532nm near 532nm.Grating 400 is installed on the rotational translation control desk 504.Utilize computer control rotational translation platform 504, by rotating the placement angle of regulating grating 400, make it depart from Littrow (Littrow) arrangement works, but its deviation angle is unsuitable excessive, need to satisfy | β-α |≤10 °, make near the first-order diffraction light of 532nm as output laser; By the placement location of translational adjustment grating 400, make grating cutting face can receive whole light beam.
When work, laser pumping source 000 adopts the end pump mode, incides the laserresonator from the 3rd optical mirror slip 103.After carrying out intracavity frequency doubling by laserresonator, laser again successively by prism group 301,302,303 and grating 400, obtains near the laser output of the certain live width of wavelength 532nm near the 532nm after 104 outputs of the 4th optical mirror slip.Expand/contract the bundle multiple by what outside laserresonator, regulate laser beam expanding/contracting bundle device thus, can regulate near the coherence length of the laser the 532nm of output.
The 3rd embodiment
Fig. 3 is the structural representation of the 3rd embodiment of laser coherence length continuous regulating mechanism of the present utility model.As shown in Figure 3, this device also with the 808nm semiconductor laser equally as the laser pumping source 000 of the device of the 3rd embodiment.
The device of this embodiment comprises laserresonator, comprises the 5th optical mirror slip 105, gain medium 200, first, second, third right angle prism 301,302,303 prism group, balzed grating, 400 and the 6th optical mirror slips of forming 106 of cascade successively in the laserresonator.
The 5th optical mirror slip 105 is as the incident end of pumping laser, simultaneously as the speculum of laserresonator, adopt to 808nm laser high saturating, near near the high anti-flat mirror of the laser 1064nm and the 532nm.
First, second, third right angle prism 301,302,303 modes of emplacements are " on-on-down " structure, form a prism group, as laser beam expanding/contracting bundle device.Three prisms are arranged at respectively on the independent rotation translation control desk 501,502,503, by computer control translation control desk 501,502,503, rotate successively and translational adjustment first, second, third right angle prism 301,302,303 placement angle and position, with reach continuously change laser expand/contract the purpose of restrainting multiple.Described three prisms 301,302,303 logical light face (hypotenuse face and a right-angle side face) all plate near the laser antireflective film 1064nm.
Grating 400 is balzed grating,, and its blaze wavelength is used for realizing near the selection of the laser effective wavelength of 1064nm near 1064nm.Grating 400 is installed on the rotational translation control desk 504.Utilize computer control rotational translation platform 504, by rotate regulating the placement angle of grating 400, make it to the angle of diffraction β of incident beam less than its incidence angle α, namely adopt Li Teman Metcalfe (Littman-Metcalf) arrangement works; By the placement location of translational adjustment grating 400, make grating cutting face can receive whole light beam.
In order to form laser generation, also comprise the 6th optical mirror slip 106 that has high reflectance near the laser 1064nm in the laserresonator of the device of this embodiment.First-order diffraction light projects earlier on the 6th optical mirror slip 106 near the 1064nm through producing behind the optical grating diffraction, by the 6th optical mirror slip 106 former road reflected back gratings 400, the first-order diffraction light of diffraction feeds back to laserresonator again, and zero order light incides on the frequency-doubling crystal 201 as output light.
Frequency-doubling crystal 201 adopts ktp crystal, is used for receiving by near the Zero-order diffractive laser the 1064nm of grating 400 diffraction, and this laser is carried out frequency multiplication.The inboard of frequency-doubling crystal 201 is coated with near the laser anti-reflection film 1064nm, the 532nm, and the outside is coated with near the laser total reflection 1064nm, near the anti-reflection film of the laser 532nm.
When work, laser pumping source 000 adopts the end pump mode, incides the laserresonator from the 5th optical mirror slip 105.Carry out frequency multiplication by laserresonator output by frequency-doubling crystal 201, near the frequency doubled light output 532nm.By regulating the angle of prism group 301,302,303 and grating 400, obtain near the laser of the adjustable 1064nm of coherence length, again by after frequency-doubling crystal 201 frequencys multiplication, obtain near the laser of the variable 532nm of coherence length after the outgoing.
The 4th embodiment
Fig. 4 is the structural representation of the 4th embodiment of laser coherence length continuous regulating mechanism of the present utility model.As shown in Figure 4, this device also with the 808nm semiconductor laser equally as the laser pumping source 000 of the device of the 4th embodiment.
The device of this embodiment comprises laserresonator, comprises the 7th optical mirror slip 107, gain medium 200, first, second, third right angle prism 301 of cascade successively, the frequency-doubling crystal 201 of 302,303 prism group, balzed grating, 400 and the plated films of forming in the laserresonator.
The 7th optical mirror slip 107 is as the incident end of pumping laser, simultaneously as the speculum of laserresonator, adopt to 808nm laser high saturating, near the high anti-flat mirror of laser 1064nm and the 532nm.
First, second, third right angle prism 301,302,303 modes of emplacements are " on-on-down " structure, form a prism group, as laser beam expanding/contracting bundle device.Three prisms are arranged at respectively on the independent rotation translation control desk 501,502,503, by computer control translation control desk 501,502,503, rotate successively and translational adjustment first, second, third right angle prism 301,302,303 placement angle and position, with reach continuously change laser expand/contract the purpose of restrainting multiple.Described three prisms 301,302,303 logical light face (hypotenuse face and a right-angle side face) all plate near the laser antireflective film 1064nm.
Grating 400 is balzed grating,, and its blaze wavelength is used for realizing near the selection of the laser effective wavelength of 1064nm near 1064nm.Grating 400 is installed on the rotational translation control desk 503.Utilize computer control rotational translation platform 503, by rotating the placement angle of regulating grating 400, make it depart from Littrow (Littrow) arrangement works, but its deviation angle is unsuitable excessive, should satisfy | β-α |≤10 °, make near the first-order diffraction light of 1064nm as output laser.Placement location by two-dimension translational adjusting grating 400 makes grating 400 cutting faces can receive whole light beam.
Frequency-doubling crystal 201 adopts ktp crystal, is used for receiving near the first-order diffraction laser of 1064nm of grating 400 outputs, and this laser is carried out frequency multiplication.Frequency-doubling crystal 201 adopts ktp crystals, and its inboard is coated with the anti-reflection film near laser 1064nm, the 532nm, and the outside is coated with near the laser total reflection 1064nm, near the high transmittance film of the laser 532nm.
When work, laser pumping source 000 adopts the end pump mode, incides the laserresonator from the 7th optical mirror slip 107.Laserresonator is directly exported near the frequency doubled light of 532nm.By regulating set of lenses 301,302,303 and the angle of grating 400, obtain near the laser adjustable 532nm of coherence length.
Described four specific embodiments of the present utility model above, the device of above-described embodiment all is to be applied in the solid state laser, yet, but the utility model also may extend to and is applied in other lasers.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.
Claims (9)
1. laser coherence length continuous regulating mechanism, comprise laserresonator, laser repeatedly comes and goes the output of vibration back in this laserresonator, it is characterized in that, this device also comprises laser beam expanding/contracting bundle device and grating, laser passed through this laser beam expanding/contracting bundle device and grating before output, wherein:
Described laser beam expanding/contracting bundle device expands laser or the bundle that contracts, and the laser by this laser beam expanding/contracting bundle device is incided on the described grating, this laser beam expanding/contracting bundle device expand/contract the bundle multiple be continuously adjustable;
Described grating is used for utilizing its diffraction characteristic to carry out optical maser wavelength selecting, and its position and angle also be continuously adjustable, to guarantee that laser is at the invariable incident angle of the plane of incidence of grating.
2. laser coherence length continuous regulating mechanism as claimed in claim 1 is characterized in that, effective chromatic dispersion of described laser beam expanding/contracting bundle device is zero.
3. laser coherence length continuous regulating mechanism as claimed in claim 2, it is characterized in that, the prism group that described laser beam expanding/contracting bundle device is made up of three prisms, prism modes of emplacement in the prism group is " on-on-down " or " down-down-on ", wherein, " on " drift angle of expression prism up, the drift angle that D score is represented prism down, described drift angle refers to minimum angle in three angles of prism.
4. laser coherence length continuous regulating mechanism as claimed in claim 3 is characterized in that the prism of forming described prism group is right angle prism.
5. laser coherence length continuous regulating mechanism as claimed in claim 3 is characterized in that,
Each prism in the described prism group all is installed on the prism rotational translation platform, and this prism rotational translation platform can rotate and translation in being parallel to the plane of laser optical path, by rotating prism rotational translation platform, can change expanding/contract and restrainting multiple of laser beam;
Described grating is installed on the grating rotational translation platform, this grating rotational translation platform can rotate or translation in being parallel to the plane of laser optical path, by rotating and translation grating rotational translation platform, can correspondingly adjust the laser incident angle of grating, incide on this grating with identical incidence angle all the time through prism group emitting laser bundle with assurance.
6. as each described laser coherence length continuous regulating mechanism among the claim 1-5, it is characterized in that described laser beam expanding/contracting bundle device and grating are arranged in the described laserresonator.
7. as each described laser coherence length continuous regulating mechanism among the claim 1-5, it is characterized in that, described laser beam expanding/contracting bundle device and grating are arranged at outside the described laserresonator, export after by described laser beam expanding/contracting bundle device and grating from the laserresonator emitting laser.
8. as each described laser coherence length continuous regulating mechanism among the claim 1-5, it is characterized in that described grating is the balzed grating, that Littrow auto-collimation structure is placed, or the balzed grating, of Li Teman Metcalfe glancing incidence structure placement.
9. as each described laser coherence length continuous regulating mechanism among the claim 1-5, it is characterized in that described grating is the balzed grating, that its angle that departs from Littrow auto-collimation structure is not more than 10 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220706267 CN203193117U (en) | 2012-12-19 | 2012-12-19 | A laser coherence length continuously-adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220706267 CN203193117U (en) | 2012-12-19 | 2012-12-19 | A laser coherence length continuously-adjusting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203193117U true CN203193117U (en) | 2013-09-11 |
Family
ID=49109947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220706267 Expired - Lifetime CN203193117U (en) | 2012-12-19 | 2012-12-19 | A laser coherence length continuously-adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203193117U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103036143A (en) * | 2012-12-18 | 2013-04-10 | 中国科学院光电研究院 | Method and device for laser coherence length continuous adjustment |
| CN104019910A (en) * | 2014-06-23 | 2014-09-03 | 山东科技大学 | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof |
| CN104752947A (en) * | 2015-04-13 | 2015-07-01 | 中国科学院光电研究院 | Spectral dispersion principle-based method and device for adjusting laser coherence length |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
| CN106602397A (en) * | 2016-12-27 | 2017-04-26 | 中国科学院光电研究院 | Regulating device of laser coherent length and laser |
| TWI655455B (en) * | 2017-05-22 | 2019-04-01 | 國立中央大學 | Tunable excitation waveband temporal focusing multiphoton excitation fluorescence microscope system and excitation waveband selective module thereof |
| CN109844612A (en) * | 2016-10-17 | 2019-06-04 | 西默有限公司 | Spectral signature control device |
-
2012
- 2012-12-19 CN CN 201220706267 patent/CN203193117U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103036143A (en) * | 2012-12-18 | 2013-04-10 | 中国科学院光电研究院 | Method and device for laser coherence length continuous adjustment |
| CN104019910A (en) * | 2014-06-23 | 2014-09-03 | 山东科技大学 | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof |
| CN104019910B (en) * | 2014-06-23 | 2017-05-10 | 山东科技大学 | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof |
| CN104752947A (en) * | 2015-04-13 | 2015-07-01 | 中国科学院光电研究院 | Spectral dispersion principle-based method and device for adjusting laser coherence length |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
| CN109844612A (en) * | 2016-10-17 | 2019-06-04 | 西默有限公司 | Spectral signature control device |
| CN109844612B (en) * | 2016-10-17 | 2022-09-27 | 西默有限公司 | Spectral characteristic control device |
| US11561407B2 (en) | 2016-10-17 | 2023-01-24 | Cymer, Llc | Spectral feature control apparatus |
| CN106602397A (en) * | 2016-12-27 | 2017-04-26 | 中国科学院光电研究院 | Regulating device of laser coherent length and laser |
| TWI655455B (en) * | 2017-05-22 | 2019-04-01 | 國立中央大學 | Tunable excitation waveband temporal focusing multiphoton excitation fluorescence microscope system and excitation waveband selective module thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203193117U (en) | A laser coherence length continuously-adjusting device | |
| CN103036143B (en) | Method and device for laser coherence length continuous adjustment | |
| Duarte et al. | A double-prism beam expander for pulsed dye lasers | |
| CN103762487B (en) | A kind of tunable laser with dual output light beam | |
| Littman et al. | Spectrally narrow pulsed dye laser without beam expander | |
| US9176319B2 (en) | Methods, arrangements and apparatus for utilizing a wavelength-swept laser using angular scanning and dispersion procedures | |
| US4016504A (en) | Optical beam expander for dye laser | |
| US6061382A (en) | Laser system and method for narrow spectral linewidth through wavefront curvature compensation | |
| CN201984180U (en) | Fiber Fabry-Perot tunable filter | |
| CN101859975B (en) | Dual-wavelength tunable thulium-doped fiber laser | |
| CN104730868B (en) | Large-aperture diffraction grating exposure device and preparation method of large-aperture diffraction grating | |
| CN104019910A (en) | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof | |
| CN201774136U (en) | Mode-hop-free continuously-tuned semiconductor laser | |
| CN102981278A (en) | Laser line-width reduction and beam expanding method and system based on isosceles right angle triangular prism | |
| CN105119142B (en) | A kind of External cavity tunable lasers | |
| CN101369015B (en) | Light splitting apparatus of wind detection laser radar based on dual-edge detection | |
| CN102013622B (en) | A kind of single longitudinal mode laser in microchip of frequency-adjustable | |
| CN203117537U (en) | Laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms | |
| CN108832481A (en) | A kind of outside cavity gas laser and its tuning methods | |
| CN107453206A (en) | A kind of semiconductor laser spectrum beam combination system | |
| CN114122882A (en) | Wavelength wide tuning single longitudinal mode laser based on single ring cavity | |
| CN104882786B (en) | Prism and balzed grating, Combined external cavity semiconductor laser | |
| CN108551078A (en) | A kind of semiconductor laser beam merging apparatus | |
| CN103762488A (en) | High power narrow linewidth tunable laser | |
| CN219874441U (en) | Laser coherence length adjustable device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200911 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200911 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130911 |
|
| CX01 | Expiry of patent term |