CN203117537U - Laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms - Google Patents
Laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms Download PDFInfo
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- CN203117537U CN203117537U CN 201220704438 CN201220704438U CN203117537U CN 203117537 U CN203117537 U CN 203117537U CN 201220704438 CN201220704438 CN 201220704438 CN 201220704438 U CN201220704438 U CN 201220704438U CN 203117537 U CN203117537 U CN 203117537U
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Abstract
The utility model discloses a laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms. The laser-linewidth-reducing and beam-expanding device based on the isosceles right triangular prisms includes a light beam expanding device. The light beam expanding device is used for one-dimensional beam expansion of laser and is composed of a single prism or a prism group. The single prism and prisms forming the prism group are all isosceles right triangular prisms. The laser-linewidth-reducing and beam-expanding device based on the isosceles right triangular prisms provided by the utility model has advantages of simple structure, high processing precision and small light beam transmission wave-front influence. Different laser beam expanding magnifications are realized through the selection of incident angles of the prisms and the quantity of the elements of the prism group, so that a required narrow-band laser linewidth is obtained.
Description
Technical field
The utility model belongs to laser technology field, is specifically related to a kind of laser linewidth based on isosceles right angle trigonometry prism and presses narrow parallel beam expand device.
Background technology
Narrow bandwidth laser output in the certain wave strong point has very big application.To have in order satisfying that spectrum control requires and the application demand of laser of narrowband output, need to press narrow spectrum control measure to come the natural spectrum that the laser instrument free oscillation produces is pressed narrow by special live width, to carry out high-precision wavelength selection simultaneously.
The spectrum control method that the prism group expands in conjunction with grating beam splitting is to use wider live width to press narrow structure at present.Prism beam-expanded group serves as that the one dimension broadening is carried out to beam sizes in the basis with the prism dispersion characteristics.The prism group has advantages such as optical element is easy to process, simple in structure, the light path calibration is simple, and beam-expanding elements such as same spherical mirror, cylindrical mirror, catoptron are compared simultaneously, and it is less that prism group structure is influenced by interelement interval variation.Beam Propagation after the prism group expands to grating carries out the high precision light splitting, utilizes the chromatic dispersion dichroism of high-resolution gration to form at wavelength selection and the bandwidth pressure of incident laser spectrum narrow in conjunction with light path control.
The prism group is the method that laser linewidth is pressed the most normal use that is used in the narrow module expanding, and the prism beam expander group is pressed the critical component of narrow module as live width, is the critical elements that obtains the laser of narrowband live width.The prism group plays carries out the effect of one dimension broadening to being incident to grating light beam before, and the dispersion characteristics of prism also have certain function of dispersing to the spectrum of incident simultaneously, thereby provide prerequisite to prepare for follow-up grating carries out light splitting.Live width presses the narrow bandwidth expression formula to be:
In the formula, Δ θ is laser beam divergent angle, and N is the round number of oscillation of monopulse laser in resonator cavity, and K is that (enlargement ratio is during polygon prism for the beam broadening multiple of prism beam expander group
N is prism set of pieces quantity),
Be the angular dispersion of prism group,
Angular dispersion for Littrow mode light grid element.By formula as can be known, expand multiplying power K and the angular dispersion of prism group are the key elements that the final laser spectrum width of influence narrows.
Live width is pressed the common right-angle prism with particular corner that adopts after optimal design of the prism beam expander in the narrow module, by the selection of prism array mode, eliminates prism group dispersive influence to greatest extent.This kind design realizes laser linewidth is accurately controlled by the control to the prism incident angle, and repdocutbility is outstanding.This kind design light beam can obtain the set enlargement ratio that expands according to specific incident angle incident, and then selects to obtain required line width values through the accurate light splitting of grating.Therefore this kind design requires prism vertex angle to have very high machining precision, in use need accurately control incident angle usually, can guarantee that incident ray is according to the optic path of set design.
Fig. 1 is the principle schematic of prism transmitting beam.As shown in the figure, a limit of prism is parallel to the ground, is called the base at this, and two limits are side in addition.Light beam after the side incident from another side outgoing.The angle relative with the base of this prism is that drift angle is α, and the prism refractive index is n, and a branch of have a width D
1Light beam incide prism with certain incident angle θ i via a side of prism, this light beam is at prism incidence surface generation deviation, deflection angle is
Light beam is followed fresnel formula when medium interface generation deviation, have
Then, when this light beam another side from prism is back to the air dielectric, have equally according to fresnel formula
In the formula
Be the incident angle of light beam at the prism exit facet, θ
eBe the emergence angle of light beam at exit facet.Light beam through the enlargement ratio K behind single prism mainly by prism incidence surface and the exit surface acting in conjunction gained to light beam, be single prism enlargement ratio K=K ' * K "; the enlargement ratio that produces at incidence surface generation deflection of light when K ' incides prism for light beam from air; K " the enlargement ratio that produces at exit surface generation deflection of light when shining air for light beam from prism, when prism material refractive index n during greater than the surrounding medium refractive index, according to angle formula K "≤1 as can be known.Width of light beam after the outgoing is D
3, this moment, light beam can be expressed as through the multiplying power that expands behind the prism:
The K that the light beam that namely has a certain width will increase to former width through width of light beam behind the prism doubly, this light beam generation one dimension broadening phenomenon.
Fig. 2 be have special drift angle right angle prism expand principle schematic.As shown in the figure, when prism is right angle prism, make the short right-angle side of this right angle prism as the base, light beam after the hypotenuse incident from long right-angle side outgoing.Equally, when the refractive index n of this prism material greater than surrounding medium refractive index and incident angle θ
iDuring for definite value, according to formula
As can be known, when light beam during perpendicular to the right-angle side outgoing of prism,
(this moment D
3=D
2, K "=1), the prism exit facet produces contracting Shu Zuoyong to light beam, the enlargement ratio of prism only by the prism plane of incidence expand the contribution gained, can obtain the maximum prism enlargement ratio when this incident angle at this moment.Under this kind condition, according to fresnel formula
Apex angle value in the time of can determining to satisfy vertical outgoing condition.Under this kind condition, the right angle prism with special drift angle uses towards specific incident angle usually, and can realize that light beam expands multiplying power perpendicular to the prism outgoing to obtain maximum this moment.
The utility model content
(1) technical matters that will solve
Technical problem to be solved in the utility model is that traditional live width that is used for presses the narrow right angle prism that expands need carry out high precision processing usually to the drift angle of particular design, the prism process-cycle is long, processing cost is high, simultaneously in use to the strict problem of prism bearing accuracy and single prism incident angle.
(2) technical scheme
At this problem, the utility model proposes a kind of laser linewidth and press narrow parallel beam expand device, this device adopts isosceles right-angle prism to replace routine to have the right-angle prism of special drift angle as beam-expanding element, utilize the combination of several isosceles right angle prisms to obtain effective light beam enlargement ratio, precision in conjunction with high resolution diffraction gratings is divided light action, realizes that effective spectrum presses narrow function.
Described laser linewidth presses narrow parallel beam expand device to comprise beam expander device and grating, the beam expander device is used for laser is expanded, grating is used for laser is carried out the selection of centre wavelength, thereby realize that the live width pressure is narrow, described beam expander device is become by single prism or prism fabric, and the prism of described single prism and composition prism group is the isosceles right angle prism.
According to this bright a kind of embodiment, described beam expander device is become by the prism fabric, and the prism group is made of a plurality of isosceles right angle prisms of cascade successively, and laser beam successively a plurality of isosceles right angle prisms by described cascade to expand.
According to this bright a kind of embodiment, described laser beam is after the hypotenuse place face incident of each prism of described prism group, from an one right-angle side outgoing.
According to this bright a kind of embodiment, described prism group is made up of the prism of N cascade, N is natural number and more than or equal to 2, its array mode is: along the drift angle of preceding M prism of light beam incident direction towards unanimity, and this M prism is put successively according to identical light beam deviation direction, and wherein M is natural number and is less than or equal to N-1; Towards opposite with a preceding M prism, and this N-M prism is put successively according to the light beam deviation direction opposite with a preceding M prism along the drift angle of back N-M prism of light beam incident direction.
According to this bright a kind of embodiment, form the drift angle of all prisms of described prism group all towards unanimity, light beam is through the deviation direction unanimity of all prisms.
(3) beneficial effect
The utility model adopts isosceles right-angle prism to press the beam-expanding element of narrow parallel beam expand device as laser linewidth, the right-angle prism element that has particular corner with routine is compared, can satisfy expand application on an equal basis in, that isosceles right-angle prism has is simple in structure, be easy to obtain relatively low advantage of higher machining precision, processing cost and cycle.Simultaneously, for live width was pressed narrow device prism beam expander crystalline material commonly used, cubic crystal reduced the inherent vice damage of crystalline material in the process greatly along 45 ° of diagonal angle cutting modes, has reduced the influence of material to the beam propagation wavefront to a certain extent.
The utility model is realized difference narrow bandwidth required enlargement ratio and chromatic dispersion requirement by the control to selection, interelement disposing way and the incident angle of the isosceles right-angle prism quantity of forming parallel beam expand device, for the accurate light splitting of follow-up specific light grid element provides prerequisite and guarantee.
Description of drawings
Fig. 1 is the principle schematic of prism transmitting beam;
Fig. 2 be have special drift angle right angle prism expand principle schematic;
Fig. 3 is the principle schematic that expands of the isosceles right angle prism that adopts in the utility model;
Fig. 4 presses the synoptic diagram of an embodiment of narrow parallel beam expand device for the laser linewidth based on isosceles right angle trigonometry prism of the present utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
The utility model is intended to press application demand in narrow at laser linewidth, proposes to adopt the isosceles right angle prism to make up live width and presses narrow parallel beam expand device.By to the incident angle of isosceles right angle prism, the comprehensive selection of factors such as number of prisms, array mode in the prism group, realize satisfying the spectrum one dimension broadening function with specific enlargement ratio requirement and high beam transmitance.
Fig. 3 is the principle schematic that expands of the isosceles right angle prism that adopts in the utility model.As shown in the figure, when light beam through the hypotenuse place of this isosceles right angle prism face (plane of incidence) effect that expands of light beam will take place when air dielectric transmits prism into, width of light beam is by D
1Become D
2Restraint when light beam can produce contracting to light beam when prism right-angle side place face (exit facet) makes the return trip empty gas medium from the prism transmission, width of light beam is by D
2Become D
3
Press in the narrow parallel beam expand device in laser linewidth, when prism material refractive index n during greater than the surrounding medium refractive index, expand application for satisfying, need light beam to carry out incident at prism surface according to wide-angle within the specific limits usually.
When light beam from the hypotenuse plane of incidence of isosceles right angle prism with big incident angle
During incident, according to formula
As can be known, when refractive index n one timing, refraction angle
With θ
iBe directly proportional, can obtain bigger refraction angle during wide-angle incident
Have according to the angle reduction formula
Determine
After can try to achieve the incident angle of prism exit facet
And then according to formula
Can try to achieve single prism output face refraction angle θ
eThis shows, when refractive index n and apex angle one regularly, when light beam during with wide-angle incident, namely
When having bigger numerical, θ
iIncrease thereupon, and
And θ
eBe worth corresponding reduction.
That is to say that above-mentioned feelings subordinate, light beam is in the incident angle of the exit surface of this isosceles right angle prism
With refraction angle θ
eAll very little, thus K made " very near 1.At this moment, the prism exit facet was very faint to the contracting Shu Zuoyong that light beam produces when light beam returned air dielectric from prism, can not produce a very large impact the prism enlargement ratio.
For instance, when the operation wavelength of laser is 193.37nm, the isosceles right angle prism adopts the fused quartz material to make, its refractive index n=1.56022, when light beam from the hypotenuse plane of incidence of single isosceles right angle prism during with＜67 ° incident angle incident, this isosceles right angle prism can produce contracting Shu Zuoyong (K＜1) or expand multiplying power less (K is between 1～2) light beam, and to expand the multiplying power increase slower along with the increase of incident angle, can't satisfy expanding needs; When light beam during with＞68 ° incident angle wide-angle incident, along with the increase of incident angle, enlargement ratio K can sharply increase, and the laser linewidth effect that narrows is remarkable, can satisfy live width and press the narrow application that expands, therefore under this kind situation,＞68 ° incident can be called wide-angle incident.Wide-angle incident in parallel beam expand device is selected the certain angle scope usually for use.For the fused quartz isosceles right angle prism of 193.37nm wave band, in＞68 ° big incident angle scope, the enlargement ratio K of single prism exit facet is " between 0.98～1, very little to the influence of the whole contracting bundle of light beam.
The right-angle prism of more conventional special drift angle adopts the isosceles right angle prism to press can satisfy in the narrow device in the laser linewidth with spectrum demand for control and expands application demand on an equal basis.Simultaneously, isosceles right-angle prism have little, simple in structure to beam Propagation wavefront influence, be easy to obtain relatively low advantage of higher machining precision, processing cost and cycle.
In actual applications, by to the number of the incident angle of prism, the prism selected for use, the comprehensive selection of factors such as array mode between the prism, can realize required light beam enlargement ratio and the requirement of high energy transmissivity.In embodiment, constitute the beam expander device by single isosceles right angle prism or the prism group be made up of a plurality of isosceles right angle prisms, the hypotenuse place face of isosceles right angle prism can receive more light beam as the disposing way of beam incident surface and enter prism.
Embodiment
Fig. 4 is the synoptic diagram that the laser linewidth based on isosceles right angle trigonometry prism of the present utility model is pressed an embodiment of narrow parallel beam expand device.As shown in Figure 4, this device comprises outgoing mirror 1, laser discharge chamber 3, prism group 3 and grating 4.
In this embodiment, prism group 3 is made of the isosceles right angle prism of N cascade of cascade successively, and N is that natural number and N are more than or equal to 2.Namely first prism 31, second prism 32 ..., N-1 prism 33 and N prism 34.Each prism based on last-... on-down ...-following array mode is arranged, and namely on the incident direction of light beam, a preceding M prism vertex angle is towards unanimity, and a back N-M prism vertex angle is towards opposite with a preceding M prism, and wherein M is natural number and smaller or equal to N-1.Described drift angle refers to a miter angle of isosceles right triangle at this.And, incide the light beam of all prisms successively all from the face incident of hypotenuse place, and from a right-angle side (non-base) place face outgoing.Total enlargement ratio after light beam expands through this prism group 3
N is prism set of pieces number, K
iEnlargement ratio for each prism.To obtain K beam broadening doubly behind the parallel beam expand device of light beam through a plurality of prisms compositions.
Described prism group 3 is used for light beam is expanded, and grating 4 is used for the centre wavelength of laser is selected, and thus, includes laser that the resonator cavity of prism group 3 and grating 4 sends laser discharge chamber 2 and carries out that centre wavelength is selected and the live width pressure is narrow.Grating 4 can be used as laserresonator one side chamber mirror and outgoing mirror 1 is exported in conjunction with forming effective laser generation.The prism beam-expanded device of chromatic dispersion even zero chromatic dispersion can be realized hanging down by the beam expander device that prism group 3 constitutes, temperature variation can be reduced at work to the influence of wave length shift.
In other embodiments of the present utility model, prism group 3 also can adopt-on-...-on array mode, namely the drift angle of all prisms is all towards unanimity, light beam is through the deviation direction unanimity of all prisms.In this embodiment, based on the dispersion characteristics of prismatic spectrum, press the angular dispersion of introducing prism in the narrow module in live width, can realize further narrowing of laser linewidth.
Among this embodiment, light beam incides the desirable identical value of incident angle of each prism in the prism group, and also desirable different value is chosen in conjunction with practical application.Having identical incident angle with each prism in the prism group 3 is the example explanation, optical maser wavelength is 193.37nm, on adopting four-on-down-the fused quartz material isosceles right angle prism of following disposing way forms live width and presses narrow parallel beam expand device, each prism incident angle is got identical value, as 68 °, it is the incident angle that light beam incides first prism 32, incide the incident angle of second prism 32, and incide prism 33, the incident angle of the 4th prism 34 is 68 °, the shooting angle that can try to achieve each prism exit facet according to the angle formula is 13.40 °, this moment each prism the plane of incidence to expand multiplying power consistent, exit facet to expand multiplying power also consistent, be K '=2.147, K "=0.984, continue to try to achieve K
i"=2.115, namely single prism is 2.115 to the multiplying power that expands of light beam to=K ' * K.The multiplying power K that expands of four prism groups is that four prism beam-expanded multiplying powers are contributed gained jointly, namely
Realized the even amplification of each prism to light beam thus, among this embodiment the prism group can realize 20.001 times always expand multiplying power.
Light beam is through the emergence angle behind single prism
Along with the incident angle (θ of light beam on prism
i) increase and reduce, the prism exit facet is also more faint to the contracting Shu Zuoyong of light beam simultaneously.Be example with 193.37nm wave band, fused quartz isosceles right-angle prism still, when the incident angle of light beam on prism was 68 °, the emergence angle of process prism was 13.40 °, and K "=0.984; When incident angle was 75 °, the prism emergence angle was 10.57 °, and K "=0.990; When incident angle was 80 °, the prism emergence angle was 9.17 °, and K "=0.992; This shows that in big ranges of incidence angles, the exit facet of isosceles right-angle prism is less to the contracting bundle influence of light beam, incident angle is more big, and the influence of contracting bundle is more little.
Press narrow expanding in the application in live width, each element of prism group can be selected identical beam incident angle degree, this moment each prism to expand multiplying power identical, light beam is realized evenly amplifying through each prism; Each element of prism group also can be selected different incident angles, expands the multiplying power requirement according to actual, and indivedual prism incident angles are adjusted.Improving the prism incident angle or adopting a plurality of prism combinations all is the main method that improve prism beam-expanded multiplying power, but all can follow energy loss to a certain extent simultaneously, therefore in actual applications, the realization that effectively expands multiplying power, efficient energy output need be carried out analysis-by-synthesis to the selection of prism incident angle, prism element number.When the utility model was used at the deep ultraviolet wave band, the prism in the prism group 3 can be selected UV level fused quartz, the UV level CaF of high permeability for use
2Deng materials processing.Fused quartz has advantages such as machining precision height, easy volume production, has certain application advantage in the live width pressure of low-repetition-frequency, low laser power density is narrow.CaF
2Because of the high thermoconductivity of its material itself, be difficult for producing advantage broader applications such as colour center under high laser power density application conditions.
Simultaneously, for live width is pressed narrow device prism beam expander crystalline material commonly used, cubic crystal is along 45 ° of diagonal angle cutting modes, can reduce the inherent vice damage of crystalline material in the process when making the isosceles right angle prism greatly, reduce the influence of material to the beam propagation wavefront to a certain extent.
Though above-described embodiment has been described the situation that constitutes the beam expander device that consists of a prism, but, the embodiment that is made of the beam expander device single isosceles right angle prism also can reach identical technique effect, its concrete scheme can be realized according to foregoing description easily by those skilled in the art, so do not repeat them here.Thus, the technical scheme that constitutes the beam expander device by single isosceles right angle prism also is encompassed in the protection domain of the present utility model.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (8)
1. a laser linewidth is pressed narrow parallel beam expand device, comprises the beam expander device, and described beam expander device is used for laser is expanded, it is characterized in that,
Described beam expander device is become by single prism or prism fabric, and the prism of described single prism and composition prism group is the isosceles right angle prism.
2. laser linewidth as claimed in claim 1 is pressed narrow parallel beam expand device, it is characterized in that, described beam expander device is become by the prism fabric, and the prism group is made of a plurality of isosceles right angle prisms of cascade successively, and laser beam successively a plurality of isosceles right angle prisms by described cascade to expand.
3. laser linewidth as claimed in claim 2 is pressed narrow parallel beam expand device, it is characterized in that, described laser beam is after the hypotenuse place face incident of each prism of described prism group, from one of them right-angle side outgoing.
4. laser linewidth as claimed in claim 3 is pressed narrow parallel beam expand device, it is characterized in that, described prism group is made up of the prism of N cascade, and N is natural number and more than or equal to 2, its array mode is:
Towards unanimity, and this M prism puts successively according to identical light beam deviation direction along the drift angle of preceding M prism of light beam incident direction, and wherein M is natural number and is less than or equal to N-1;
Towards opposite with a preceding M prism, and this N-M prism is put successively according to the light beam deviation direction opposite with a preceding M prism along the drift angle of back N-M prism of light beam incident direction.
5. laser linewidth as claimed in claim 4 is pressed narrow parallel beam expand device, it is characterized in that, forms the drift angle of all prisms of described prism group all towards unanimity, and light beam is through the deviation direction unanimity of all prisms.
6. press narrow parallel beam expand device as each described laser linewidth in the claim 1 to 5, it is characterized in that, described isosceles right angle prism adopts UV level fused quartz or UV level CaF
2Make.
7. press narrow parallel beam expand device as each described laser linewidth in the claim 2 to 5, it is characterized in that, laser is identical for the incident angle of each prism that comprises in the described prism group.
8. laser linewidth as claimed in claim 7 is pressed narrow parallel beam expand device, it is characterized in that, described incident angle is 68 °～80 °.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220704438 CN203117537U (en) | 2012-12-19 | 2012-12-19 | Laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms |
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| CN 201220704438 CN203117537U (en) | 2012-12-19 | 2012-12-19 | Laser-linewidth-reducing and beam-expanding device based on isosceles right triangular prisms |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105186277A (en) * | 2015-07-16 | 2015-12-23 | 中国科学院光电研究院 | Spectral control device |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
| CN108139554A (en) * | 2015-10-20 | 2018-06-08 | 索尼公司 | Light path converting element, optic interface device and optical transmission system |
-
2012
- 2012-12-19 CN CN 201220704438 patent/CN203117537U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105186277A (en) * | 2015-07-16 | 2015-12-23 | 中国科学院光电研究院 | Spectral control device |
| CN105186277B (en) * | 2015-07-16 | 2018-05-22 | 中国科学院光电研究院 | A kind of spectrum control device |
| CN108139554A (en) * | 2015-10-20 | 2018-06-08 | 索尼公司 | Light path converting element, optic interface device and optical transmission system |
| CN105655870A (en) * | 2015-12-11 | 2016-06-08 | 中国人民解放军国防科学技术大学 | Tunable-grating external cavity semiconductor laser based on prism beam expanding |
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Effective date of registration: 20200903 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200903 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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Granted publication date: 20130807 |