CN105186277B - A kind of spectrum control device - Google Patents
A kind of spectrum control device Download PDFInfo
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- CN105186277B CN105186277B CN201510419813.9A CN201510419813A CN105186277B CN 105186277 B CN105186277 B CN 105186277B CN 201510419813 A CN201510419813 A CN 201510419813A CN 105186277 B CN105186277 B CN 105186277B
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Abstract
The present invention relates to a kind of spectrum control devices applied to master oscillation power amplification double cavity structure excimer laser, it includes two-stage linewidth narrowing module, wherein first order linewidth narrowing module is respectively arranged at the both ends of discharge chamber with output coupling device as two end mirrors, and the main oscillations resonator of excimer laser is formed with output coupling device and discharge chamber, form the laser output with certain output energy and first order linewidth narrowing；Second level linewidth narrowing module is arranged in the transmission light path between the main oscillations resonator of excimer laser and energy enlarged cavity, and carrying out line width to the laser with certain output energy and first order linewidth narrowing of main oscillations resonator output modulates the laser output to be formed with second level linewidth narrowing.The present invention can effectively solve the problems such as existing single spectrum control device spectrum control freedom degree is low, spectral tuning difficulty is big, spectral tuning very flexible, higher optic element damage probability.
Description
Technical field
The present invention relates to a kind of spectrum control device, more particularly to a kind of spectrum control device of excimer laser.
Background technology
In the R＆D process of laser technology, it can often be related to the problem of spectrum controls, for optical maser wavelength, laser linewidth
Effective control can obtain laser source system characteristic index output towards different application demand.
By taking excimer laser system as an example, for lithography application, to ensure that it is fine that semi-conductor silicon chip chip design is portrayed
The integrated level of degree and design considers the correlative factor that lithography node is realized, it is often necessary to which photolithography light source has relatively narrow laser rays
Width output.
In related photoetching quasi-molecule laser source system structure system laser line is completed frequently with linewidth narrowing module
The wide control that narrows.Linewidth narrowing module generally use chromatic dispersion structure is carried out for quasi-molecule gas high pressure discharging light radiative process
Optical electivity then establishes the oscillation mechanism of special spectrum under resonator restrict, gradual by the reciprocating vibration of laser
Form the laser output of narrow band.Chromatic dispersion structure is usually realized by including beam system combination dispersion system, by means of dispersions such as gratings
The angle of divergence that the light beams such as the high-precision dispersive power of element and prism include the introducing of beam element reduces characteristic completion for laser spectrum
Cut out and narrow.The formation of laser spectrum is the correspondence energy supposition of particle energy levels transition process different wave length radiation, thus
The narrowing of spectrum controls will necessarily be using other spectral coverage dissipation of energies as cost.
It please refers to Fig.1 shown in A, is that existing single-pass master oscillation power amplification (MOPA) double cavity structure narrow linewidth quasi-molecule swashs
The schematic diagram of radiant structure, existing master oscillation power amplification (MOPA) double cavity structure narrow linewidth quasi-molecule laser source are main
By discharge chamber 1, discharge chamber 2, linewidth narrowing module 3, output coupling device 4, light path transposition module 5 and light path transposition
Module 6 forms.Discharge chamber 1 is the place of gas high pressure electric discharge light radiation, and linewidth narrowing module 3 is responsible for realizing laser spectrum
Control, the function that laser linewidth narrows, output coupling device 4 are used to implement Best Coupling output.Wherein, discharge chamber 1, line
Wide resonance place --- main oscillations (MO) resonator for narrowing module 3 and the composition laser reciprocating vibration of output coupling device 4, forms
Narrow-linewidth laser output with certain output energy, discharge chamber 1 are the places that main oscillations resonator laser gain generates,
Linewidth narrowing module 3 participates in laser resonance as the terminal reflector of main oscillations resonator simultaneously, with 4 common structure of output coupling device
Into two end mirrors of main oscillations resonator, the restrict spatial modulation that light radiation amplification laser exports is formed.Light beam transposition mould
Block 5 and light beam transposition module 6 are mainly responsible for the light path transposed transform between main oscillations resonator and energy enlarged cavity.Laser discharge
Chamber 2 is the place of gas high pressure electric discharge light radiation, and the main energy amplification for completing to come via the transmission of main oscillations resonator laser is made
With the output of realization machine system narrow linewidth, intensity laser 7.
It please refers to Fig.1 shown in B, is the typical structure schematic diagram of linewidth narrowing module in Figure 1A, meet photoetching to ensure
Light source line width demand (<0.5pm), linewidth narrowing module forms prism frequently with 4 prisms and includes Shu Danyuan a, cooperation dispersed light grid b
Complete the function of linewidth narrowing.Since laser linewidth includes beam multiplying power and grating dispersion is related, the acquisition of narrower line width to prism
The light beam of bigger is needed to include beam multiplying power and the selection of higher dispersion grating, this will necessarily bring the need for more large scale grating
It asks.
Due to narrow (~the 0.5pm) of photoetching demand spectrum, there are nearly thousand times with laser free oscillation spectrum (~500pm)
Difference, therefore in the case of single linewidth narrowing module, laser energy can be caused for hyperfine narrow of laser linewidth
A large amount of losses, so as to which relatively low main oscillations resonator laser be brought to export, make spectrum narrowing output laser efficiency low so that main
The energy of oscillating tank chamber synchronism output under conditions of output target narrow linewidth is ensured is relatively low, is considering that integrated light source energy is defeated
This also proposed higher requirement for the design realization of energy machine amplification in the case of going out index.
Due to existing spectrum control mode, single linewidth narrowing module is fully located in main oscillations resonator, spectrum tune
Humorous very flexible, corresponding spectral tuning can cause main oscillations resonator, energy enlarged cavity and its be related to energy-light each other
The mutual coupling linkage of the Multiple factors such as spectrum-pulsewidth-beam quality, can be to the reasonable of main oscillations resonator energy-automatic sizing output
Tuning brings very big difficulty, and for the optimal output tuning of the synchronization of whole laser system features index parameter, there are larger
It influences, so as to the stability and reliability of strong influence machine system operation.Meanwhile when the line width pressure of multiple optical elements composition
In the case where serving as main oscillations resonator end mirrors, the multiple degrees of freedom tuning of multiple element can swash main oscillations resonator narrow module
Light generation model selection output causes large effect.In addition, deep ultraviolet band high energy laser transmits in main oscillations resonator
Can cause high-concentrated ozone, also can strong influence main oscillations resonator laser energy and laser linewidth output level.
Since main oscillations intra resonant cavity laser energy density is higher, the linewidth narrowing module that is integrated by multiple element (for
Ensure target line width) it is fully located in main oscillations resonator, localized high energy laser irradiation hot spot is will also result in, increases optics member
The damage probability of part.
The content of the invention
It is an object of the present invention to overcome existing technology there are the defects of, and provide a kind of spectrum control of new structure
Device processed, the technical problem to be solved is that be passed to, using discrete spectrum controlling mechanism, pass through the line width of discrete setting
The interactive common spectrum control for completing target laser line width of module-cascade coupling is narrowed, can effectively improve linewidth narrowing module makes
With efficiency, the tuning manner for making laser linewidth is more flexible, and the indexs of correlation synchronism output such as balance optimizing energy and line width is asked
Topic, is greatly lowered the usage quantity of optical element and scale demand in every level-one linewidth narrowing module, while makes to cause part
The damage probability of high energy laser irradiation is also greatly lowered.
The object of the invention to solve the technical problems is realized using following technical scheme.It is proposed according to the present invention
A kind of spectrum control device, applied to master oscillation power amplification double cavity structure excimer laser, including：First order line width
Narrow module, be respectively arranged at the both ends of first laser discharge cavity as two end mirrors with output coupling device, and with it is described
Output coupling device and the first laser discharge cavity form the master oscillation power amplification double cavity structure excimer laser
Main oscillations resonator forms the laser output with certain output energy and first order linewidth narrowing；And second level line width pressure
Narrow module is arranged at the energy of the main oscillations resonator and the master oscillation power amplification double cavity structure excimer laser
In transmission light path between enlarged cavity, there is certain output energy and first order line width pressure to main oscillations resonator output
Narrow laser carries out line width and modulates the laser output to be formed with second level linewidth narrowing.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Foregoing spectrum control device, wherein the transmission light between the main oscillations resonator and the energy enlarged cavity
Light beam transposition module is equipped in road, the second level linewidth narrowing module is disposed between two light beam transposition modules.
Foregoing spectrum control device, wherein the first order linewidth narrowing module including first order prism include Shu Danyuan and
First order dispersion grating, the first order prism include Shu Danyuan and are arranged at the first laser discharge cavity and the first order dispersion
Between grating, and the first order prism, which includes Shu Danyuan and the first order dispersion grating, to be set in a manner of Li Teluo auto-collimations
It puts.
Foregoing spectrum control device, wherein the first order prism, which includes Shu Danyuan, includes 1 to 2 prism.
Foregoing spectrum control device, wherein the prism is triangular prism.
Foregoing spectrum control device, wherein the second level linewidth narrowing module including second level prism include Shu Danyuan and
Second level dispersion grating, the second level prism include Shu Danyuan and are arranged at the main oscillations resonator and the second level dispersed light
Between grid, and the second level prism includes Shu Danyuan and is disposed on the incident light transmission path of the second level dispersion grating,
The prism beam-expanded unit in the second level is set with the second level dispersion grating in a manner of Fei Liteluo auto-collimations, via described
The laser of two level dispersion optical grating diffraction output enters the energy enlarged cavity through transposition light path..
Foregoing spectrum control device, wherein the second level prism, which includes Shu Danyuan, includes 2 to 3 prisms.
Foregoing spectrum control device, wherein the prism is triangular prism.
Foregoing spectrum control device, wherein the energy enlarged cavity is equipped with second laser discharge cavity, by the second level
The laser with second level linewidth narrowing of linewidth narrowing module output is admitted to the energy enlarged cavity, through the second laser
Discharge cavity exports after carrying out energy amplification.
Foregoing spectrum control device enters the laser exported after the energy enlarged cavity via two-stage linewidth narrowing module
It can realize the laser linewidth less than 0.5pm.The present invention has clear advantage and advantageous effect compared with prior art.By
Above-mentioned technical proposal, a kind of spectrum control device of the present invention at least have following advantages and advantageous effect：
The present invention is put using discrete spectrum controlling mechanism in main oscillations resonator and main oscillations resonator with energy respectively
The two-stage linewidth narrowing module with linewidth narrowing is set in transmission light path between big chamber, is present in master by originally single
Linewidth narrowing function in oscillating tank chamber realizes having for spectral characteristic by the discrete adjusting of two-stage linewidth narrowing mechanism
Effect control.Compared with existing spectrum control device, the present invention can be organic by using discrete two-stage linewidth narrowing mechanism
Linewidth narrowing ratio is selected, is directed to double cavity structure excimer laser, it can be by effectively adjusting in main oscillations resonator
First order linewidth narrowing module establishes initial laser quality characteristic (indexs such as energy-spectrum), by main oscillations resonator realize compared with
High-energy but laser with certain line width index (level-one coarse adjustment) exports, then by second level linewidth narrowing module into traveling
Laser linewidth, the tuning operation of optical maser wavelength are realized in the spectrum control (two level accurate adjustment) of one step, finally real via energy enlarged cavity
The laser output of existing narrow linewidth, big energy, it is relatively low not so as to be effectively improved linewidth narrowing module effective utilization under existing way
Foot；It meanwhile can be by transmitting second level linewidth narrowing module in light path between main oscillations resonator and energy enlarged cavity
Organic design and effectively adjusting, make up under existing single linewidth narrowing modular structure caused by dynamic characteristics difference of discharging
Main oscillations resonator and energy enlarged cavity wave length shift and line width difference, for ensureing that the laser that system is stablized is exported with important
Effect；Further, since linewidth narrowing function is set using by discrete, therefore the scale demand of optical element is greatly lowered, pin
For the single linewidth narrowing module of every level-one, the usage quantity of optical element is reduced, and the probability of optic element damage also can phase
It should reduce.
Above description is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow the above and other objects, features and advantages of the present invention can
It is clearer and more comprehensible, it is special below to lift preferred embodiment, and coordinate attached drawing, detailed description are as follows.
Description of the drawings
Figure 1A is existing single-pass master oscillation power amplification (MOPA) double cavity structure narrow linewidth quasi-molecule laser source structure
Schematic diagram.
Figure 1B is the typical structure schematic diagram of linewidth narrowing module in Figure 1A.
Fig. 2A is that the present invention is applied to single-pass master oscillation power amplification (MOPA) double cavity structure narrow linewidth excimer laser light
The schematic diagram of source structure.
Fig. 2 B are the typical structure schematic diagrames of first order linewidth narrowing module in Fig. 2A.
Fig. 2 C are the typical structure schematic diagrames of linewidth narrowing module in the second level in Fig. 2A.
1:Discharge chamber 2:Discharge chamber
3:Linewidth narrowing module 3-1:First order linewidth narrowing module
3-2:Second level linewidth narrowing module 4:Output coupling device
5:Light path transposition module 6:Light path transposition module
7:System laser exports a:Prism includes Shu Danyuan
b:Dispersion grating a-1:First order prism includes Shu Danyuan
b-1:Second level dispersion grating a-2:Second level prism includes Shu Danyuan
b-2:Second level dispersion grating
Specific embodiment
Further to illustrate the present invention to reach the technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Attached drawing and preferred embodiment, to according to a kind of its specific embodiment of spectrum control device proposed by the present invention, structure, feature and
Its effect is described in detail as after.
Discrete spectrum control device proposed by the present invention applied to photoetching excimer laser, using humorous in main oscillations
It is discrete in the transmission light path between chamber and main oscillations resonator and energy enlarged cavity of shaking that the two-stage with linewidth narrowing is set
Original single linewidth narrowing function being present in main oscillations resonator is suppressed mechanism by linewidth narrowing module by two-stage line width
Discrete adjusting realize for spectral characteristic effective control.
It refers to shown in Fig. 2A, is that the present invention is applied to single-pass master oscillation power amplification (MOPA) double cavity structure narrow linewidth standard
The schematic diagram of molecular laser light-source structure.The spectrum control device of the present invention is applied to accurate point of master oscillation power amplification double cavity structure
Sub- laser, including first order linewidth narrowing module 3-1 and second level linewidth narrowing module 3-2.Wherein,
First order linewidth narrowing module 3-1 be responsible for realize laser spectrum control, the function that laser linewidth narrows, and with output
Coupling device 4 is respectively arranged at the both ends of discharge chamber 1 as two end mirrors, and laser resonance, shape are participated in as terminal reflector
Into the restrict spatial modulation of light radiation amplification laser output.First order linewidth narrowing module 3-1 and output coupling device 4 and
Discharge chamber 1 collectively forms main oscillations (MO) resonator of master oscillation power amplification double cavity structure excimer laser, is formed
Laser output with certain output energy and first order linewidth narrowing.Wherein, discharge chamber 1 is gas high pressure discharging light spoke
The place that the place penetrated and main oscillations resonator laser gain generate, it is defeated that output coupling device 4 is used to implement Best Coupling
Go out.Second level linewidth narrowing module 3-2 is arranged at the main oscillations resonance of master oscillation power amplification double cavity structure excimer laser
In transmission light path between chamber and energy enlarged cavity, there is certain output energy and first order line to the output of main oscillations resonator
The laser that width narrows carries out line width and modulates the laser output to be formed with second level linewidth narrowing.
The two-stage linewidth narrowing mechanism of the present invention can have due to the discrete different position being present in transmission light path
The degree of freedom for improving spectrum and adjusting of effect, reducing the output of the coupling on other laser parameters such as energy influences；Structure adaptation simultaneously
Property it is strong, can towards different line width application demands it is flexile design two-stage spectrum control module structure, effectively adjust swash
The spectrum parameters such as optical linewidth, optical maser wavelength.
As shown in Figure 2 A, light beam transposition module is equipped in the transmission light path between main oscillations resonator and energy enlarged cavity
5th, 6, second level linewidth narrowing module 3-2 is disposed between two light beam transposition modules 5,6.Light beam transposition module 5,6 is main
The light path transposed transform being responsible between main oscillations resonator and energy enlarged cavity, while isolate between two-stage linewidth narrowing module
Crosstalk.Energy enlarged cavity is admitted to by the second level linewidth narrowing module 3-2 laser with second level linewidth narrowing exported,
Energy enlarged cavity is equipped with discharge chamber 2, and discharge chamber 2 is the place of gas high pressure electric discharge light radiation, main to complete to warp
By two-stage linewidth narrowing module transfer Lai laser carry out energy amplification, so as to fulfill machine system narrow linewidth, big energy
System laser output 7.Such as enter the laser exported after energy enlarged cavity via two-stage linewidth narrowing module and can realize and be less than
The laser linewidth of 0.5pm.
Refer to shown in Fig. 2 B, be first order linewidth narrowing module in Fig. 2A typical structure schematic diagram.First order line width
It narrows " coarse adjustment " that module 3-1 mainly completes laser linewidth, line width realization need be not excessively harshness.As shown in Figure 2 B, lead
Shu Danyuan a-1 are included by first order prism and first order dispersion grating b-1 is formed, wherein first order prism includes Shu Danyuan a-1 and sets
It is placed between discharge chamber 1 and first order dispersion grating b-1, and first order prism includes Shu Danyuan a-1 and first order dispersed light
Grid b-1 is set in a manner of Li Teluo auto-collimations, and first order prism, which includes Shu Danyuan a-1, can include 1 to 2 prism, be, for example,
Triangular prism can so make the output of main oscillations resonator obtain higher laser energy, improve energy ecology, while big
The big tuning difficulty for reducing first order linewidth narrowing module 3-1.Due in first order linewidth narrowing module 3-1 only by 1 to 2
A prism includes beam, and the demand scale of first order dispersion grating b-1 substantially reduces, and the cost of component can be also greatly reduced.
Refer to shown in Fig. 2 C, be linewidth narrowing module in the second level in Fig. 2A typical structure schematic diagram.It is humorous by main oscillations
The laser of the chamber that shakes output enters second level linewidth narrowing module 3-2 via light path transposition module 5, carries out the further of laser linewidth
It narrows.As shown in Figure 2 C, second level linewidth narrowing module 3-2 mainly includes Shu Danyuan a-2 and second level dispersion by second level prism
Grating b-2 is formed, wherein second level prism include Shu Danyuan a-2 be arranged at main oscillations resonator and second level dispersion grating b-2 it
Between, more specifically, second level prism include Shu Danyuan a-2 be disposed on light path transposition module 5 and second level dispersion grating b-2 it
Between, and second level prism includes Shu Danyuan a-2 and is disposed on the incident light transmission path of second level dispersion grating b-2, with second
Grade dispersion grating b-2 is set in a manner of Fei Liteluo auto-collimations, via the laser of second level dispersion grating b-2 diffraction output through turning
It puts light path and enters energy enlarged cavity, second level prism, which includes Shu Danyuan a-2, includes 2 to 3 prisms, is, for example, triangular prism, mainly
" thin tuning " is carried out for the laser of first order linewidth narrowing module 3-1 outputs, the coupling by two-stage linewidth narrowing module is mutual
The dynamic common spectrum control for completing target laser line width.
The present invention can effectively improve the service efficiency of system linewidth narrowing by using discrete spectrum controlling mechanism,
The problem of indexs of correlation synchronism output such as balance optimizing energy, line width, the tuning manner of laser linewidth are also more flexible.Existing
Spectrum control mode under energy enlarged cavity laser transmission process there may be spectral variation, can only be by fine-tuning master
Linewidth narrowing module in oscillating tank chamber balances control, since the output of the correlative factors such as laser linewidth and laser energy is mutual
Coupling characteristic, main oscillations resonator output energy will necessarily generate certain variation, so as to influence system output so that system index
Synchronism output optimization there are bottlenecks.The present invention can pass through first order linewidth narrowing module using two-stage linewidth narrowing module
The line width output of main oscillations chamber basis is established, second level linewidth narrowing module is in cooperation first order linewidth narrowing module spectrum control
On the basis of can also do not influence main oscillations resonator laser energy output on the premise of realize for system export laser spectrum
Effective adjusting.Further, since the design feature of discrete linewidth narrowing module, laser linewidth is controlled by two-stage spectrum and cascaded
It realizes, (polygon prism cascade is also all greatly lowered per level-one linewidth narrowing mould optical element usage quantity in the block and scale demand
Large effect can be caused using effective transmission for laser energy；The acquisition cost of large scale grating is high, far more than two
The cost of the small scale grating of block, and based on current raster preparative capacibility, it is impossible to match somebody with somebody for the laser linewidth demand of continuous improvement
Close the corresponding more large scale grating of manufacture), for all kinds of components such as optics purchase supply and cost control both provides more
Big degree of freedom and use space；Simultaneously as main oscillations intra resonant cavity laser energy density is higher, first order linewidth narrowing
Optical element integrated level is low in module, therefore the damage probability that localized high energy laser is caused to irradiate also is greatly lowered.
The above described is only a preferred embodiment of the present invention, not make limitation in any form to the present invention, though
So the present invention is disclosed above with preferred embodiment, however is not limited to the present invention, any to be familiar with this professional technology people
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above make a little change or modification
For the equivalent embodiment of equivalent variations, as long as being without departing from technical solution of the present invention content, technical spirit pair according to the invention
Any simple modification, equivalent change and modification that above example is made, in the range of still falling within technical solution of the present invention.
Claims (10)
1. a kind of spectrum control device, applied to master oscillation power amplification double cavity structure excimer laser, it is characterised in that its
Including：
First order linewidth narrowing module is respectively arranged at first laser discharge cavity with output coupling device as two end mirrors
Both ends, and form the master oscillation power amplification double cavity structure standard with the output coupling device and the first laser discharge cavity
The main oscillations resonator of molecular laser forms the laser output with certain output energy and first order linewidth narrowing；And
It is accurate with the master oscillation power amplification double cavity structure to be arranged at the main oscillations resonator for second level linewidth narrowing module
In transmission light path between the energy enlarged cavity of molecular laser, there is certain output energy to main oscillations resonator output
The laser of amount and first order linewidth narrowing carries out line width and modulates the laser output to be formed with second level linewidth narrowing.
2. spectrum control device according to claim 1, it is characterised in that wherein the main oscillations resonator with it is described
Light beam transposition module is equipped in transmission light path between energy enlarged cavity, the second level linewidth narrowing module is disposed on two
Between the light beam transposition module.
3. spectrum control device according to claim 1, it is characterised in that wherein described first order linewidth narrowing module bag
It includes first order prism and includes Shu Danyuan and first order dispersion grating, the first order prism includes Shu Danyuan and is arranged at the first laser
Between discharge cavity and the first order dispersion grating, and the first order prism includes Shu Danyuan and the first order dispersion grating and is
It is set in a manner of Li Teluo auto-collimations.
4. spectrum control device according to claim 3, it is characterised in that wherein described first order prism includes Shu Danyuan bags
Include 1 to 2 prism.
5. spectrum control device according to claim 4, it is characterised in that wherein described prism is triangular prism.
6. spectrum control device according to claim 1, it is characterised in that wherein described second level linewidth narrowing module bag
It includes second level prism and includes Shu Danyuan and second level dispersion grating, the second level prism includes Shu Danyuan, and to be arranged at the main oscillations humorous
It shakes between chamber and the second level dispersion grating, and the second level prism includes Shu Danyuan and is disposed on the second level dispersed light
On the incident light transmission path of grid, the prism beam-expanded unit in the second level is with the second level dispersion grating with Fei Liteluo autocollimatics
Nogata formula is set, and the laser via second level dispersion optical grating diffraction output enters the energy enlarged cavity through transposition light path.
7. spectrum control device according to claim 6, it is characterised in that wherein described second level prism includes Shu Danyuan bags
Include 2 to 3 prisms.
8. spectrum control device according to claim 7, it is characterised in that wherein described prism is triangular prism.
9. the spectrum control device according to any claim in claim 1 to 8, it is characterised in that wherein described energy
Enlarged cavity is equipped with second laser discharge cavity, the laser quilt with second level line width exported by the second level linewidth narrowing module
The energy enlarged cavity is sent into, is exported after the second laser discharge cavity carries out energy amplification.
10. spectrum control device according to claim 9, it is characterised in that wherein described via two-stage linewidth narrowing module
The laser exported after into the energy enlarged cavity can realize the laser linewidth less than 0.5pm.
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| CN104242030A (en) * | 2013-06-08 | 2014-12-24 | 中国科学院光电研究院 | Gas laser amplifying system with MOPA structure |
| CN104577684A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院光电研究院 | Dual-cavity excimer laser adopting dual-pass structure |
| CN204927797U (en) * | 2015-07-16 | 2015-12-30 | 中国科学院光电研究院 | Excimer laser's spectrum controlling means |
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| US6904073B2 (en) * | 2001-01-29 | 2005-06-07 | Cymer, Inc. | High power deep ultraviolet laser with long life optics |
| US7366219B2 (en) * | 2004-11-30 | 2008-04-29 | Cymer, Inc. | Line narrowing module |
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| CN105186277A (en) | 2015-12-23 |
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